DE69205813D1 - Einrichtung zur Messung einer Verschiebung. - Google Patents

Einrichtung zur Messung einer Verschiebung.

Info

Publication number
DE69205813D1
DE69205813D1 DE69205813T DE69205813T DE69205813D1 DE 69205813 D1 DE69205813 D1 DE 69205813D1 DE 69205813 T DE69205813 T DE 69205813T DE 69205813 T DE69205813 T DE 69205813T DE 69205813 D1 DE69205813 D1 DE 69205813D1
Authority
DE
Germany
Prior art keywords
displacement
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69205813T
Other languages
English (en)
Other versions
DE69205813T2 (de
Inventor
Koh Ishizuka
Tetsuharu Nishimura
Yasushi Kaneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=18319664&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69205813(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69205813D1 publication Critical patent/DE69205813D1/de
Application granted granted Critical
Publication of DE69205813T2 publication Critical patent/DE69205813T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Optical Transform (AREA)
DE69205813T 1991-12-20 1992-12-18 Einrichtung zur Messung einer Verschiebung. Revoked DE69205813T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33859691 1991-12-20

Publications (2)

Publication Number Publication Date
DE69205813D1 true DE69205813D1 (de) 1995-12-07
DE69205813T2 DE69205813T2 (de) 1996-04-11

Family

ID=18319664

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69205813T Revoked DE69205813T2 (de) 1991-12-20 1992-12-18 Einrichtung zur Messung einer Verschiebung.

Country Status (3)

Country Link
US (1) US5283434A (de)
EP (1) EP0548848B1 (de)
DE (1) DE69205813T2 (de)

Families Citing this family (71)

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EP0577088B2 (de) * 1992-06-30 2010-10-20 Canon Kabushiki Kaisha Gerät zur Detektion von Verschiebungsinformation
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JP3210111B2 (ja) * 1992-12-24 2001-09-17 キヤノン株式会社 変位検出装置
JPH06194123A (ja) * 1992-12-24 1994-07-15 Canon Inc 変位検出装置
JP3173208B2 (ja) * 1993-01-29 2001-06-04 キヤノン株式会社 変位測定装置
JP3083019B2 (ja) * 1993-03-05 2000-09-04 キヤノン株式会社 光学装置及び速度情報検出装置
US5652426A (en) * 1993-04-19 1997-07-29 Ricoh Company, Ltd. Optical encoder having high resolution
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EP0628791B1 (de) * 1993-06-10 1999-09-08 Canon Kabushiki Kaisha Rotationserfassungsvorrichtung und zugehörige Skala
JPH0727543A (ja) * 1993-07-12 1995-01-27 Canon Inc 光学式変位センサー
JP3028716B2 (ja) * 1993-09-29 2000-04-04 キヤノン株式会社 光学式変位センサ
JP3196459B2 (ja) * 1993-10-29 2001-08-06 キヤノン株式会社 ロータリーエンコーダ
JP3513251B2 (ja) * 1994-03-14 2004-03-31 キヤノン株式会社 光学式変位センサ
JP3530573B2 (ja) * 1994-04-27 2004-05-24 キヤノン株式会社 光学式変位センサ
JP3158878B2 (ja) * 1994-07-28 2001-04-23 松下電器産業株式会社 光学式エンコーダ
US5742136A (en) * 1994-09-20 1998-04-21 Yokogawa Electric Corporation Linear motor drive system
JPH08210814A (ja) * 1994-10-12 1996-08-20 Canon Inc 光学式変位測定装置
JPH08178702A (ja) * 1994-12-27 1996-07-12 Canon Inc 光学式センサ
JPH08210824A (ja) * 1995-02-07 1996-08-20 Canon Inc 回転検出装置及び回転制御装置
JP2746178B2 (ja) * 1995-02-15 1998-04-28 双葉電子工業株式会社 測定装置の内挿回路
JPH08219812A (ja) * 1995-02-15 1996-08-30 Canon Inc 変位情報検出装置、変位情報検出用スケール及びこれを用いたドライブ制御装置
DE69622297T2 (de) * 1995-02-21 2002-11-21 Canon Kk Vorrichtung zur Bestimmung einer Verschiebung und deren Verwendung in einer Einrichtung zur Antriebsregelung
US6229140B1 (en) 1995-10-27 2001-05-08 Canon Kabushiki Kaisha Displacement information detection apparatus
DE19614466B4 (de) * 1996-04-12 2012-02-02 Dr. Johannes Heidenhain Gmbh Signalverarbeitungsanordnung für eine Positionsmeßeinrichtung
US6151185A (en) * 1996-09-05 2000-11-21 Canon Kabushiki Kaisha Position detecting apparatus, positioning apparatus, and information recording apparatus using the same
US8153957B2 (en) * 1996-09-27 2012-04-10 Digitaloptics Corporation East Integrated optical imaging systems including an interior space between opposing substrates and associated methods
JP3999274B2 (ja) * 1996-10-16 2007-10-31 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング 光学位置測定装置
JPH10132612A (ja) * 1996-10-28 1998-05-22 Mitsutoyo Corp 光学式変位検出装置
US6631047B2 (en) 1997-09-22 2003-10-07 Canon Kabushiki Kaisha Interference device, position detecting device, positioning device and information recording apparatus using the same
US6424407B1 (en) 1998-03-09 2002-07-23 Otm Technologies Ltd. Optical translation measurement
JPH11351813A (ja) 1998-06-08 1999-12-24 Canon Inc 干渉装置及びそれを用いた位置検出装置
DE19855828A1 (de) * 1998-12-03 2000-06-08 Heidenhain Gmbh Dr Johannes Dreidimensionales Meßmodul
DE19859670A1 (de) * 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Abtastkopf und Verfahren zu dessen Herstellung
DE19859669A1 (de) * 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Integrierter optoelektronischer Sensor und Verfahren zu dessen Herstellung
JP4365927B2 (ja) * 1999-03-12 2009-11-18 キヤノン株式会社 干渉計測装置及び格子干渉式エンコーダ
EP1045227B2 (de) 1999-04-16 2012-04-18 Canon Kabushiki Kaisha Kodierer
JP2000321021A (ja) 1999-05-10 2000-11-24 Canon Inc 干渉装置、変位測定装置、及びそれを用いた情報記録又は／及び再生装置
CN1367754A (zh) 1999-08-26 2002-09-04 Otm技术有限公司 边缘检测器
JP4846909B2 (ja) * 2000-02-15 2011-12-28 キヤノン株式会社 光学式エンコーダ及び回折格子の変位測定方法
JP2001336952A (ja) 2000-05-26 2001-12-07 Canon Inc 測定装置
DE10033263A1 (de) * 2000-07-10 2002-02-28 Heidenhain Gmbh Dr Johannes Optische Positionsmesseinrichtung
FR2825150B1 (fr) * 2001-05-28 2003-09-26 Univ Jean Monnet Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefinie
EP1345082A1 (de) * 2002-03-15 2003-09-17 ASML Netherlands BV Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
DE10320991B4 (de) * 2002-08-03 2017-10-19 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
KR100480623B1 (ko) * 2002-10-18 2005-03-31 삼성전자주식회사 광 노이즈를 차단한 광픽업 장치 및 이를 채용한 광기록및/또는 재생장치
DE10329374A1 (de) * 2003-06-30 2005-01-20 Dr. Johannes Heidenhain Gmbh Abtastbaueinheit einer Positionsmesseinrichtung
DE10352285A1 (de) * 2003-11-08 2005-06-09 Dr. Johannes Heidenhain Gmbh Optoelektronische Bauelementanordnung
JP4418278B2 (ja) * 2004-03-30 2010-02-17 オリンパス株式会社 光学式エンコーダ及びその製造方法
JP4535794B2 (ja) * 2004-07-09 2010-09-01 オリンパス株式会社 反射型光学式エンコーダーのセンサーヘッド
DE102005004419A1 (de) * 2005-01-31 2006-08-03 Sick Ag Optoelektronischer Sensor
DE102005036161A1 (de) * 2005-08-02 2007-02-08 Dr. Johannes Heidenhain Gmbh Feldmodulierende Winkelmesseinrichtung und Verfahren zu deren Betrieb
US7596880B2 (en) * 2005-09-13 2009-10-06 Dr. Johannes Heidenhain Gmbh Scanning unit of an optical position measuring device and optical position measuring device
DE102005053787B4 (de) * 2005-11-09 2019-11-28 Dr. Johannes Heidenhain Gmbh Optische Abtasteinheit sowie Verfahren zur Montage
US7465917B2 (en) * 2006-02-16 2008-12-16 Avago Technologies General Ip (Singapore) Pte. Ltd. Absolute encoder utilizing light of different wavelengths to reduce cross-talk
US7545507B2 (en) * 2007-03-15 2009-06-09 Agilent Technologies, Inc. Displacement measurement system
DE102008008873A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102007053137A1 (de) * 2007-11-08 2009-05-14 Dr. Johannes Heidenhain Gmbh Abtasteinheit einer optischen Positionsmesseinrichtung und Positionsmesseinrichtung mit dieser Abtasteinheit
TWI437373B (zh) * 2008-04-30 2014-05-11 尼康股份有限公司 A mounting apparatus, a pattern forming apparatus, an exposure apparatus, a stage driving method, an exposure method, and an element manufacturing method
JP5460352B2 (ja) * 2010-01-22 2014-04-02 キヤノン株式会社 変位測定装置および速度測定装置
TWI414756B (zh) * 2010-05-27 2013-11-11 Univ Nat Formosa Dual grating signal measurement system
JP5734091B2 (ja) * 2010-06-04 2015-06-10 富士フイルム株式会社 生体分子検出装置および生体分子検出方法
US9383229B2 (en) * 2010-10-31 2016-07-05 Avego Technologies General Ip (Singapore) Pte. Ltd. Optical reflective encoder with multi-faceted flat-faced lens
DE102010050203A1 (de) * 2010-11-04 2012-05-10 Paul-Wilhelm Braun Encorderscheibe und Verfahren zu ihrer Herstellung
DE102010063253A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
US20130001412A1 (en) * 2011-07-01 2013-01-03 Mitutoyo Corporation Optical encoder including passive readhead with remote contactless excitation and signal sensing
NL2009870A (en) * 2011-12-23 2013-06-26 Asml Netherlands Bv Lithographic apparatus and method.
US9634051B2 (en) 2012-07-17 2017-04-25 Heptagon Micro Optics Pte. Ltd. Optical devices, in particular computational cameras, and methods for manufacturing the same
FR3030724A1 (fr) 2014-12-17 2016-06-24 Thales Sa Codeur optique robuste
CN111380464B (zh) * 2018-12-28 2021-05-07 上海微电子装备（集团）股份有限公司 一种光栅尺的安装装置、安装方法、光栅测量系统及光刻机

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Also Published As

Publication number Publication date
US5283434A (en) 1994-02-01
EP0548848A1 (de) 1993-06-30
DE69205813T2 (de) 1996-04-11
EP0548848B1 (de) 1995-11-02

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation