FR2825150B1 - Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefinie - Google Patents
Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefinieInfo
- Publication number
- FR2825150B1 FR2825150B1 FR0106917A FR0106917A FR2825150B1 FR 2825150 B1 FR2825150 B1 FR 2825150B1 FR 0106917 A FR0106917 A FR 0106917A FR 0106917 A FR0106917 A FR 0106917A FR 2825150 B1 FR2825150 B1 FR 2825150B1
- Authority
- FR
- France
- Prior art keywords
- optical networks
- spatial frequency
- characterizing
- preset spatial
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0106917A FR2825150B1 (fr) | 2001-05-28 | 2001-05-28 | Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefinie |
US10/479,045 US20040174536A1 (en) | 2001-05-28 | 2002-05-22 | Device for characterising optical gratings and method for making optical gratings with predefined spatial frequency |
PCT/EP2002/005712 WO2002097375A1 (fr) | 2001-05-28 | 2002-05-22 | Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefine |
EP02750974A EP1395794A1 (fr) | 2001-05-28 | 2002-05-22 | Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefine |
CA002448823A CA2448823A1 (fr) | 2001-05-28 | 2002-05-22 | Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0106917A FR2825150B1 (fr) | 2001-05-28 | 2001-05-28 | Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefinie |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2825150A1 FR2825150A1 (fr) | 2002-11-29 |
FR2825150B1 true FR2825150B1 (fr) | 2003-09-26 |
Family
ID=8863673
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0106917A Expired - Fee Related FR2825150B1 (fr) | 2001-05-28 | 2001-05-28 | Dispositif de caracterisation de reseaux optiques et procede de fabrication de reseaux optiques avec une frequence spatiale predefinie |
Country Status (5)
Country | Link |
---|---|
US (1) | US20040174536A1 (fr) |
EP (1) | EP1395794A1 (fr) |
CA (1) | CA2448823A1 (fr) |
FR (1) | FR2825150B1 (fr) |
WO (1) | WO2002097375A1 (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004042670B4 (de) | 2003-09-02 | 2018-07-12 | CiS Forschungsinstitut für Mikrosensorik GmbH | Mikrooptisches Strahler- und Empfängersystem |
EP1966636A2 (fr) * | 2005-12-22 | 2008-09-10 | Université Jean-Monnet | Structure miroir et dispositif laser comprenant une telle structure miroir |
US7636165B2 (en) * | 2006-03-21 | 2009-12-22 | Asml Netherlands B.V. | Displacement measurement systems lithographic apparatus and device manufacturing method |
DE102012221566A1 (de) * | 2012-11-26 | 2014-05-28 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
JP6696748B2 (ja) * | 2014-10-21 | 2020-05-20 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung | 光学式エンコーダ |
US10444635B2 (en) * | 2016-05-04 | 2019-10-15 | Asml Netherlands B.V. | Lithographic method and apparatus |
WO2018156702A1 (fr) * | 2017-02-23 | 2018-08-30 | Nikon Corporation | Mesure d'un changement de caractéristique géométrique et/ou de position d'une pièce |
CN108918433B (zh) * | 2018-07-26 | 2021-01-26 | 京东方科技集团股份有限公司 | 一种微流体检测装置 |
US11344882B2 (en) | 2018-07-26 | 2022-05-31 | Boe Technology Group Co., Ltd. | Microfluidic apparatus, and method of detecting substance in microfluidic apparatus |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62172203A (ja) * | 1986-01-27 | 1987-07-29 | Agency Of Ind Science & Technol | 相対変位測定方法 |
US5283434A (en) * | 1991-12-20 | 1994-02-01 | Canon Kabushiki Kaisha | Displacement detecting device with integral optics |
EP0590163B1 (fr) * | 1992-09-21 | 1996-01-03 | Dr. Johannes Heidenhain GmbH | Dispositif de mesure de longueurs ou d'angles |
EP0741282A3 (fr) * | 1995-05-04 | 1998-06-17 | CSEM Centre Suisse d'Electronique et de Microtechnique S.A. - Recherche et Développement | Dispositif optique de mesure d'un déplacement relatif entre deux éléments |
US5912999A (en) * | 1997-10-02 | 1999-06-15 | Minnesota Mining And Manufacturing Company | Method for fabrication of in-line optical waveguide index grating of any length |
-
2001
- 2001-05-28 FR FR0106917A patent/FR2825150B1/fr not_active Expired - Fee Related
-
2002
- 2002-05-22 CA CA002448823A patent/CA2448823A1/fr not_active Abandoned
- 2002-05-22 WO PCT/EP2002/005712 patent/WO2002097375A1/fr not_active Application Discontinuation
- 2002-05-22 US US10/479,045 patent/US20040174536A1/en not_active Abandoned
- 2002-05-22 EP EP02750974A patent/EP1395794A1/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP1395794A1 (fr) | 2004-03-10 |
CA2448823A1 (fr) | 2002-12-05 |
WO2002097375A1 (fr) | 2002-12-05 |
FR2825150A1 (fr) | 2002-11-29 |
US20040174536A1 (en) | 2004-09-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20070131 |