FR2838835B1 - Dispositif pour modifier un trajet optique et procede pour sa fabrication - Google Patents

Dispositif pour modifier un trajet optique et procede pour sa fabrication

Info

Publication number
FR2838835B1
FR2838835B1 FR0304933A FR0304933A FR2838835B1 FR 2838835 B1 FR2838835 B1 FR 2838835B1 FR 0304933 A FR0304933 A FR 0304933A FR 0304933 A FR0304933 A FR 0304933A FR 2838835 B1 FR2838835 B1 FR 2838835B1
Authority
FR
France
Prior art keywords
altering
manufacturing
same
optical path
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0304933A
Other languages
English (en)
Other versions
FR2838835A1 (fr
Inventor
Seiki Hiramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of FR2838835A1 publication Critical patent/FR2838835A1/fr
Application granted granted Critical
Publication of FR2838835B1 publication Critical patent/FR2838835B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4249Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/1221Basic optical elements, e.g. light-guiding paths made from organic materials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/132Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/136Integrated optical circuits characterised by the manufacturing method by etching
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/43Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083Constructional arrangements
    • G02B2006/12104Mirror; Reflectors or the like
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166Manufacturing methods
    • G02B2006/12173Masking
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/4232Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Elements Other Than Lenses (AREA)
FR0304933A 2002-04-23 2003-04-22 Dispositif pour modifier un trajet optique et procede pour sa fabrication Expired - Lifetime FR2838835B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002120612A JP3883901B2 (ja) 2002-04-23 2002-04-23 光路変換デバイスおよびその製造方法

Publications (2)

Publication Number Publication Date
FR2838835A1 FR2838835A1 (fr) 2003-10-24
FR2838835B1 true FR2838835B1 (fr) 2007-01-19

Family

ID=28786764

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0304933A Expired - Lifetime FR2838835B1 (fr) 2002-04-23 2003-04-22 Dispositif pour modifier un trajet optique et procede pour sa fabrication

Country Status (3)

Country Link
US (1) US6907173B2 (fr)
JP (1) JP3883901B2 (fr)
FR (1) FR2838835B1 (fr)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10238741A1 (de) * 2002-08-19 2004-03-04 Infineon Technologies Ag Planare optische Komponente und Kopplungsvorrichtung zur Kopplung von Licht zwischen einer planaren optischen Komponente und einem optischen Bauteil
JP2004191564A (ja) * 2002-12-10 2004-07-08 Mitsubishi Electric Corp 光路変換コネクタ
JP2004198579A (ja) * 2002-12-17 2004-07-15 Sony Corp 光導波路アレイおよび光素子表面実装装置
US20040114875A1 (en) * 2002-12-17 2004-06-17 Randy Mattsen 90 Degree fiber optic board connector
JP2004280009A (ja) * 2003-03-19 2004-10-07 Toppan Printing Co Ltd 光導波路およびその製造方法
DE10314495B3 (de) * 2003-03-27 2004-12-16 Infineon Technologies Ag Optische Koppeleinheit
US7125176B1 (en) * 2003-09-30 2006-10-24 Stafford John W PCB with embedded optical fiber
JP4675241B2 (ja) * 2003-12-01 2011-04-20 オリンパス株式会社 内視鏡システム
US7308167B2 (en) * 2004-09-01 2007-12-11 Agilent Technologies, Inc. Optical assembly with optoelectronic device alignment
JP4511291B2 (ja) * 2004-09-07 2010-07-28 学校法人東海大学 光接続装置の製造法及びその光接続装置
JP2006251046A (ja) * 2005-03-08 2006-09-21 Central Glass Co Ltd 光導波路基板、光表面実装導波路素子およびそれらの製造方法
JP2006251184A (ja) * 2005-03-09 2006-09-21 Fuji Xerox Co Ltd 三次元光導波路および光通信システム
EP1712942A1 (fr) * 2005-04-13 2006-10-18 Infineon Technologies Fiber Optics GmbH Elément de couplage optique pour le couplage optique frontal des guides d'ondes d'un premier groupement bidimensionnel de guides d'ondes aux guides d'ondes d'un deuxième groupement bidimensionnel de guides d'ondes
EP1712941A1 (fr) * 2005-04-13 2006-10-18 Infineon Technologies Fiber Optics GmbH Elément de couplage optique pour le couplage optique frontal des guides d'ondes d'un premier groupement bidimensionnel de guides d'ondes aux guides d'ondes d'un deuxième groupement bidimensionnel de guides d'ondes
JP4720374B2 (ja) * 2005-05-24 2011-07-13 パナソニック電工株式会社 光モジュール
US7783140B2 (en) * 2005-06-09 2010-08-24 Hewlett-Packard Development Company, L.P. Optically coupled integrated circuit layers
JP4277840B2 (ja) * 2005-09-30 2009-06-10 ミツミ電機株式会社 光導波路デバイスの製造方法
TWI272880B (en) * 2005-10-24 2007-02-01 Ind Tech Res Inst Photoelectric conversion substrate
JP4969840B2 (ja) * 2005-12-05 2012-07-04 浜松ホトニクス株式会社 光ファイバ構造体および光学装置
JP2008298934A (ja) * 2007-05-30 2008-12-11 Central Glass Co Ltd 光軸変換素子およびその作製方法
WO2008146385A1 (fr) 2007-05-31 2008-12-04 Fujikura Ltd. Elément de conversion de chemin optique, connecteur optique et appareil optique
JP5156502B2 (ja) * 2007-06-26 2013-03-06 パナソニック株式会社 光モジュール
JP2009300562A (ja) * 2008-06-11 2009-12-24 Central Glass Co Ltd 多チャンネル直角光路変換素子
JP5652719B2 (ja) * 2011-05-02 2015-01-14 スズキ株式会社 燃料電池車両
WO2013002013A1 (fr) * 2011-06-27 2013-01-03 学校法人 慶應義塾 Guide d'ondes optiques et son procédé de fabrication
US8636426B2 (en) * 2011-07-11 2014-01-28 Hon Hai Precision Industry Co., Ltd. Photoelectric conversion system with optical transceive module
US8867870B2 (en) 2012-02-05 2014-10-21 Mellanox Technologies Ltd. Optical module fabricated on folded printed circuit board
US8871570B2 (en) 2012-03-14 2014-10-28 Mellanox Technologies Ltd. Method of fabricating integrated optoelectronic interconnects with side mounted transducer
US8870467B2 (en) 2012-05-06 2014-10-28 Mellanox Technologies Ltd. Optical interface and splitter with micro-lens array
US9323014B2 (en) 2012-05-28 2016-04-26 Mellanox Technologies Ltd. High-speed optical module with flexible printed circuit board
US20140161385A1 (en) * 2012-12-07 2014-06-12 Telefonaktiebolaget Lm Ericsson (Publ) Method and Apparatus for Coupling to an Optical Waveguide in a Silicon Photonics Die
US20140294339A1 (en) * 2013-03-27 2014-10-02 Mellanox Technologies Ltd. Compact optical fiber splitters
US20160238789A1 (en) * 2013-03-27 2016-08-18 Mellanox Technologies Ltd. Compact optical fiber splitters
JP6379090B2 (ja) * 2013-06-11 2018-08-22 日本碍子株式会社 光実装デバイス
JP6274783B2 (ja) * 2013-08-23 2018-02-07 株式会社フジクラ 光ファイバの調心装置、接続装置、調心方法、接続方法
US9594220B1 (en) * 2015-09-22 2017-03-14 Corning Optical Communications LLC Optical interface device having a curved waveguide using laser writing and methods of forming
JP2017134348A (ja) * 2016-01-29 2017-08-03 ソニー株式会社 光導波シート、光伝送モジュール及び光導波シートの製造方法
US10641953B1 (en) * 2018-10-26 2020-05-05 Arm Limited Optical waveguide connecting device
US10939546B2 (en) * 2019-01-28 2021-03-02 Eagle Technology, Llc Interconnect device
WO2021038643A1 (fr) * 2019-08-23 2021-03-04 日本電信電話株式会社 Circuit optique

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2824314B2 (ja) 1990-04-25 1998-11-11 沖電気工業株式会社 反射型光曲げ導波路の製造方法
WO1992000185A1 (fr) * 1990-06-22 1992-01-09 Martin Russell Harris Guides d'ondes optiques
JPH09243841A (ja) 1996-03-14 1997-09-19 Yazaki Corp 光ジャンクションブロック
KR100236432B1 (ko) * 1996-07-31 1999-12-15 미야즈 쥰이치로 광학 편광기, 이의 제조 방법 및 광학 편광기 제조용 블레이드
JP3715425B2 (ja) * 1998-03-06 2005-11-09 ブラザー工業株式会社 光導波路付基板の製造方法
JP4306011B2 (ja) 1999-04-20 2009-07-29 凸版印刷株式会社 光配線層及びその製造方法並びに光・電気配線基板及びその製造方法並びに実装基板
TW451084B (en) * 1999-06-25 2001-08-21 Toppan Printing Co Ltd Optical-electro wiring board, mounted board, and manufacturing method of optical-electro wiring board
JP3762208B2 (ja) * 2000-09-29 2006-04-05 株式会社東芝 光配線基板の製造方法
JP2004191564A (ja) * 2002-12-10 2004-07-08 Mitsubishi Electric Corp 光路変換コネクタ

Also Published As

Publication number Publication date
FR2838835A1 (fr) 2003-10-24
US20030198439A1 (en) 2003-10-23
JP3883901B2 (ja) 2007-02-21
JP2003315578A (ja) 2003-11-06
US6907173B2 (en) 2005-06-14

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