WO2013002013A1 - Guide d'ondes optiques et son procédé de fabrication - Google Patents

Guide d'ondes optiques et son procédé de fabrication Download PDF

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Publication number
WO2013002013A1
WO2013002013A1 PCT/JP2012/064839 JP2012064839W WO2013002013A1 WO 2013002013 A1 WO2013002013 A1 WO 2013002013A1 JP 2012064839 W JP2012064839 W JP 2012064839W WO 2013002013 A1 WO2013002013 A1 WO 2013002013A1
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WO
WIPO (PCT)
Prior art keywords
core
optical waveguide
cladding
clad
portions
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Application number
PCT/JP2012/064839
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English (en)
Japanese (ja)
Inventor
石榑　崇明
一友 相馬
Original Assignee
学校法人 慶應義塾
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by 学校法人 慶應義塾 filed Critical 学校法人 慶應義塾
Priority to JP2013522566A priority Critical patent/JP6038787B2/ja
Publication of WO2013002013A1 publication Critical patent/WO2013002013A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation

Definitions

  • the present invention relates to an optical waveguide having a core portion and a cladding portion covering the periphery of the core portion, and a method of manufacturing the same.
  • optical interconnection method can perform signal transmission in a much wider band as compared with the electrical transmission method, and can also be expected to have the effect of suppressing the generation of crosstalk noise and EMI (electromagnetic interference) noise.
  • an optical waveguide is an optical waveguide in which a plurality of cladding layers and a plurality of core layers are stacked in a predetermined order, and core portions are three-dimensionally arranged.
  • the core portion is made of, for example, a resin composition containing a norbornene resin as a main material, and a core layer made of a material whose refractive index is changed by irradiation with actinic radiation or further heating. By selectively irradiating actinic radiation, it is formed into a desired shape (see, for example, Patent Document 1).
  • an optical waveguide including a plurality of waveguide layers including a cladding layer and a core layer, and in which a plurality of waveguide layers are laminated at least in part may be mentioned.
  • this optical waveguide after coating of the lower cladding layer, a mold having a concavo-convex pattern formed on the coated lower cladding layer is pressed, and the concavo-convex pattern is transferred to the surface of the lower cladding layer to transfer to the lower cladding layer.
  • a groove is formed, a core layer is coated in the groove, and an upper clad layer is further coated on the lower clad layer (see, for example, Patent Document 2).
  • the conventional optical waveguide includes a manufacturing process in which the core portion is stacked on the first cladding portion, and the second cladding portion is further stacked to cover the core portion. Therefore, there is a problem that the manufacturing process is complicated, and it is difficult to freely and continuously form the core portion in each of the X, Y and Z directions, and the degree of freedom in the layout design of the core portion is low.
  • the present invention has been made in view of the above-described problems, and an object of the present invention is to provide an optical waveguide which has a high degree of freedom in layout design of core parts and which can be manufactured by a simple method and a method of manufacturing the same.
  • the present optical waveguide is an optical waveguide formed on a substrate, and has a core portion through which light propagates and a cladding portion covering the periphery of the core portion, and the cladding portion is a portion of the cladding portion. It is required that they are integrally formed without producing an interface inside.
  • the method for manufacturing an optical waveguide comprises the first step of inserting the needle-like portion at the tip of the discharge portion into the uncured clad portion, and discharging the uncured material from the needle-like portion.
  • a second step of moving within the uncured cladding portion to form an uncured core portion coated around the periphery of the uncured cladding portion; and third removing the needle-like portion from the uncured cladding portion It is required to have a step and a fourth step of curing the uncured clad portion and the uncured core portion.
  • an optical waveguide which has a high degree of freedom in the layout design of the core portion and can be manufactured by a simple method, and a method of manufacturing the same.
  • FIG. 2 is a cross-sectional view taken along the line AA of FIG.
  • FIG. 2 is a cross-sectional view taken along the line BB of FIG. 1;
  • It is a schematic diagram for demonstrating propagation of the light of the optical waveguide which concerns on 1st Embodiment.
  • It is a schematic diagram for demonstrating propagation of the light of the optical waveguide which concerns on a comparative example.
  • FIG. 7 is a first view of an example of manufacturing steps of the optical waveguide according to the first embodiment;
  • FIG. 16 is a second view of the example of the manufacturing steps of the optical waveguide of the first embodiment of the present invention;
  • FIG. 16 is a third view of the example of the manufacturing steps of the optical waveguide of the first embodiment of the present invention.
  • FIG. 16 is a fourth view of the example of the manufacturing steps of the optical waveguide of the first embodiment of the present invention;
  • FIG. 16 is a fifth view of the example of the manufacturing steps of the optical waveguide of the first embodiment;
  • It is a figure (the 1) which illustrates the manufacturing process of the optical waveguide by a dispenser method.
  • the 2 which illustrates the manufacturing process of the optical waveguide by a dispenser method.
  • the 3) which illustrates the manufacturing process of the optical waveguide by a dispenser method.
  • It is a figure (the 1) which illustrates the manufacturing process of the optical waveguide by the imprint method.
  • FIG. 17 is a third view of the example of the manufacturing steps of the optical waveguide by the imprint method; It is a top view which illustrates the optical waveguide concerning a 2nd embodiment.
  • FIG. 18 is a cross-sectional view taken along the line EE of FIG.
  • FIG. 18 is a cross-sectional view taken along the line FF of FIG.
  • 21 is a cross-sectional view taken along the line GG of FIG. 20.
  • FIG. FIG. 21 is a cross-sectional view taken along the line HH of FIG. 20.
  • FIG. 7 is a first view of an example of a manufacturing process of the optical waveguide according to the first embodiment;
  • FIG. 7 is a second view of the example of the manufacturing process of the optical waveguide according to the first embodiment; It is a cross-sectional photograph of each optical waveguide produced in Example 1.
  • FIG. 6 is a diagram illustrating the relationship between the diameter of each core portion and the discharge condition in Example 1; It is a cross-sectional photograph of each optical waveguide produced in Example 2. It is the radiation
  • FIG. It is an interference-fringe measurement photograph of the optical waveguide produced in Example 2.
  • FIG. It is a figure (the 1) which illustrates the refractive index distribution computed from the interference fringe of FIG.
  • FIG. 7 is a photo of measuring interference fringes of the optical waveguide manufactured in Example 3. It is a figure which illustrates the refractive index distribution calculated from the interference fringe of FIG. 7 is a cross-sectional photograph of the optical waveguide manufactured in Example 4. It is an emission near field pattern (NFP) image of the optical waveguide produced in Example 4.
  • FIG. 7 is a photo of measuring interference fringes of the optical waveguide manufactured in Example 3. It is a figure which illustrates the refractive index distribution calculated from the interference fringe of FIG. 7 is a cross-sectional photograph of the optical waveguide manufactured in Example 4. It is an emission near field pattern (NFP) image of the optical waveguide produced in Example 4.
  • FIG. 18 is a cross-sectional view illustrating a slope type optical waveguide according to Example 5; It is a cross-sectional photograph of the incident end of the optical waveguide produced in Example 5, and an output end.
  • FIG. 18 is a cross-sectional view illustrating a three-dimensional crossed optical waveguide according to a sixth embodiment; 21 is a cross-sectional photograph of the three-dimensional crossed optical waveguide manufactured in Example 6.
  • FIG. It is the microscope picture which image
  • FIG. 1 is a plan view illustrating an optical waveguide according to the first embodiment.
  • FIG. 2 is a cross-sectional view taken along the line AA of FIG.
  • FIG. 3 is a cross-sectional view taken along the line BB of FIG.
  • the optical waveguide 10 is an optical waveguide having a GI (graded-index) type refractive index distribution (hereinafter referred to as GI type) in which core portions 11 to 14 of four channels are juxtaposed in a clad portion 19.
  • GI type graded-index type refractive index distribution
  • the shape of the cladding portion 19 is a cube or a cuboid as an example, and a direction parallel to one side of the bottom of the cube or cuboid is the X direction or a direction perpendicular to the X direction in the bottom of the cube or cuboid.
  • a direction perpendicular to the Y direction, the X direction, and the Y direction is the Z direction (the same applies to the subsequent drawings).
  • Each of the core portions 11 to 14 is a portion through which light propagates, and is formed of, for example, a material having a silicone resin as a main component.
  • the core portions 11 to 14 may be formed of materials mainly composed of acrylic resin, epoxy resin, polyimide resin, polyolefin resin, polynorbornene resin, and the like.
  • each of the core portions 11 to 14 may be formed of a material in which these resins are mixed.
  • each of the core portions 11 to 14 has a higher refractive index toward the central portion and a lower refractive index toward the peripheral portion.
  • the refractive index of each of the central portions of the core portions 11 to 14 can be, for example, about 1.52.
  • the core portions 11 to 14 are continuously and integrally formed without an interface in the core portions 11 to 14, respectively.
  • the interface means an interface formed between two layers when the two layers are in contact with each other (the same applies to a cladding part described later).
  • the cross-sectional shape of each of the core portions 11 to 14 can be, for example, a circle.
  • the diameter when the cross-sectional shape of each of the core portions 11 to 14 is circular can be, for example, about 10 to 200 ⁇ m.
  • the pitch of the adjacent core portions can be, for example, about 20 to 300 ⁇ m.
  • the height from the bottom surface of the cladding portion 19 is substantially constant. That is, the core portions 11 to 14 are formed substantially parallel to the XY plane, respectively.
  • the term "circular” means approximately circular, and does not mean that it is strictly true circle. Therefore, it may be deviated from a perfect circle in the range which does not substantially impair the predetermined effect as a GI type optical waveguide.
  • the cladding portion 19 is formed to cover the periphery of the core portions 11 to 14.
  • the cladding portion 19 is formed of, for example, a material having a silicone resin as a main component.
  • the cladding portion 19 may be formed of a material having an acrylic resin, an epoxy resin, a polyimide resin, a polyolefin resin, a polynorbornene resin, or the like as a main component.
  • the cladding portion 19 may be formed of a material in which these resins are mixed.
  • these resins forming the cladding portion 19 or a material obtained by mixing these resins may contain a material that absorbs light, such as carbon black.
  • a material that absorbs light such as carbon black
  • the cladding portion 19 needs to be formed of a material having a refractive index lower than that of the central portions of the core portions 11 to 14. If the refractive index of the central portion of each of the core portions 11 to 14 is, for example, about 1.52, the refractive index of the cladding portion 19 can be made lower than that, for example, about 1.51.
  • the cross-sectional shape of the cladding portion 19 can be, for example, a rectangular shape.
  • the thickness of the cladding part 19 can be arbitrarily determined according to the diameter of the core parts 11 to 14 and the manufacturing conditions, but it is preferably about several mm, more preferably about 50 to 1000 ⁇ m. As apparent from the manufacturing process of the optical waveguide 10 described later, the cladding portion 19 is integrally formed, and no interface exists in the cladding portion 19.
  • FIG. 4 is a schematic view for explaining propagation of light of the optical waveguide according to the first embodiment.
  • FIG. 5 is a schematic view for explaining propagation of light of the optical waveguide according to the comparative example. 4 and 5, (A) is a cross-sectional view schematically illustrating the refractive index distribution in the cross section of the core portion, and (B) is a plan view schematically illustrating light propagating in the core portion. .
  • the refractive index distribution in each of the cross sections of the core portions 11 to 14 of the GI type optical waveguide 10 is parabolic. That is, the refractive index in each of the cross sections of the core portions 11 to 14 changes continuously, and the refractive index is higher toward the central portion, and the refractive index is lower toward the peripheral portion.
  • FIG. 4B for example, the light 81 incident on the core portion 12 from the portion of the arrow I 1 propagates in the core portion 12 without reaching the side surface of the core portion 12 and a portion of the arrow O 1 Emit from.
  • the refractive index distribution in the cross section of the core portion 12 produces an effect of strongly confining the electric field distribution of the light 81 in the center of the core portion 11 (optical electric field confinement effect). Since the light 81 does not reach the side surface of the core 12, the light 81 propagates in the incident core 12 regardless of the state of the interface between the core 12 and the cladding 19, and the adjacent core 11 or core 11 There is no transition to 13. The same applies to the other core portions.
  • the cross-sectional shape of each of the core portions 110 to 140 in the clad portion 190 is a square shape.
  • the refractive index distribution in the cross section is rectangular. That is, the refractive index in each of the cross sections of the core portions 110 to 140 changes discontinuously only at the interface with the cladding portion 190.
  • FIG. 5B the light 82 incident on the core portion 120 from the portion of the arrow I 2 propagates in the core portion 120 while being repeatedly reflected by the side surface of the core portion 120.
  • the light 82 is totally reflected and propagated at the interface between the core portion 120 and the cladding portion 190.
  • the light 82 reaches the side surface of the core portion 120, if there is an interface misalignment at the interface between the core portion 120 and the cladding portion 190, the light 82 splits into the light 83 and the light 84 at the interface misalignment portion.
  • the light 83 propagates in the core portion 120 as it is and exits from the portion of the arrow O 2
  • the light 84 transits from the core portion 120 to the adjacent core portion 110 and propagates in the core portion 110 and the arrow O Emit from part 3 .
  • the other core portions the same applies to the other core portions.
  • the transmission loss due to the interface irregularity is large, and the crosstalk between the adjacent core portions becomes a problem.
  • the GI type optical waveguide 10 is not affected by the interface irregularity, so that the transmission loss is small, and the crosstalk between the adjacent core portions can be significantly reduced. This feature is particularly advantageous when the core portion has a narrow pitch.
  • the GI type optical waveguide 10 has various features.
  • the cross-sectional shape of the core portion is circular, it is possible to reduce connection loss when connecting to an optical fiber having a similar circular core portion.
  • the parabolic refractive index distribution in the cross section of the core portion makes it possible to reduce the mode dispersion, and can realize, for example, high-speed transmission of an ultra-wide band of 80 Gb / s ⁇ m or more.
  • the support 91 is a member in which an outer frame 93 having a substantially frame shape in a plan view is detachably attachable to a peripheral edge portion of a bottom plate 92 having a substantially rectangular shape in a plan view.
  • resin acrylic or the like
  • glass silicon, ceramics, metal or the like
  • the bottom plate 92 and the outer frame 93 may not use the same material. It is preferable that the upper surface of the bottom plate 92 has high flatness.
  • a predetermined material is applied to the upper surface of the bottom plate 92 exposed in the outer frame 93 of the support 91, and it is spread uniformly to produce a clad portion 19A of substantially constant layer thickness.
  • the cladding portion 19A is a portion mainly composed of a paste-like resin precursor having viscosity (moderate flowability and shapeability), and is a portion which is polymerized and cured in a later step and finally becomes the cladding portion 19.
  • the resin precursor is a precursor compound that can be polymerized and cured to form a resin.
  • a material containing as a main component a resin precursor which can be polymerized and cured to form a silicone resin can be used.
  • a material containing as a main component a resin precursor which can be polymerized and cured to form an acrylic resin, an epoxy resin, a polyimide resin, a polyolefin resin, a polynorbornene resin or the like may be used.
  • a material containing as a main component a plurality of resin precursors that can be polymerized and cured to form these resins may be used.
  • the material of the cladding portion 19A may contain a material that absorbs light, such as carbon black, for example.
  • the material of the cladding portion 19A can be selected appropriately from light curing property, thermosetting property, thermoplasticity and the like.
  • the viscosity of the cladding portion 19A can be, for example, about 10,300 cPs.
  • the thickness of the cladding portion 19A can be arbitrarily determined according to the diameter of the core portions 11 to 14, the manufacturing conditions, and the like, but it is preferably about several mm, more preferably about 50 to 1000 ⁇ m.
  • the cladding portion 19A can be manufactured, for example, using a coating device (dispenser or the like), a printing device, or the like.
  • a coating device (not shown) having the discharge portion 94 (having the discharge portion main body 95 and the needle portion 96) is prepared, and the prepared coating device (not shown) is operated. Then, a part of the needle-like portion 96 at the tip of the discharge portion 94 is inserted into the cladding portion 19A.
  • the upper surface of the bottom plate 92 of the support 91 the height H 1 to the tip portion of the needle-like portion 96 can be appropriately selected, for example, it may be about 100 ⁇ 1000 .mu.m (layer thickness of the cladding portion 19A is approximately several mm in the case of).
  • the coating apparatus includes a CPU, a memory, and the like, and the discharge unit 94 is moved in the X direction, the Y direction, and the Z direction with respect to the cladding unit 19A by programming. It has a function to move with speed accurately.
  • the needle portion 96 has, for example, an annular cross-sectional shape, and the coating device (not shown) has a function of discharging a predetermined material from the inside of the ring of the needle portion 96 at a predetermined discharge pressure. .
  • the inner diameter of the circular ring of the needle-like portion 96 can be appropriately selected, but can be, for example, about 100 to 200 ⁇ m.
  • the coating device (not shown) can be configured to include, for example, a desktop coating robot, a dispenser, and the like.
  • the coating device (not shown) is operated to discharge the predetermined material from the needle portion 96 inserted into the cladding portion 19A, and the needle portion 96 is placed in the cladding portion 19A.
  • FIG. 9 (A) is a plan view and (B) is a cross-sectional view taken along the line CC of (A).
  • illustration of the discharge part 94 is abbreviate
  • the moving direction of the needle-like part 96 can be selected suitably, it is made to move only to the X direction as an example here.
  • the moving speed of the needle-like portion 96 can be appropriately selected, but can be, for example, about 5 to 30 mm / s.
  • the discharge pressure of the needle-like portion 96 can be appropriately selected, and can be, for example, about 100 to 400 kPa.
  • the core portion 11A is a portion mainly composed of a paste-like resin precursor having viscosity (appropriate flowability and shapeability), and is a portion which is polymerized and cured in a later step and finally becomes the core portion 11.
  • a material of core part 11A a material which has as a main ingredient a resin precursor which can be polymerized and hardened to form a silicone resin can be used, for example.
  • a material having as a main component a resin precursor which can be polymerized and cured to form an acrylic resin, an epoxy resin, a polyimide resin, a polyolefin resin, a polynorbornene resin or the like may be used as a material of the core portion 11A.
  • the material of the core portion 11A for example, a material containing, as a main component, a plurality of resin precursors that can be polymerized and cured to form these resins may be used.
  • the material of the core portion 11A can be appropriately selected from light curing property, thermosetting property, thermoplasticity and the like.
  • the viscosity of the core portion 11A can be, for example, about 12000 cPs.
  • the cross-sectional shape is adjusted by adjusting the moving speed of the discharge part 94, the discharge pressure of the needle-like part 96, and the inner diameter of the ring of the needle-like part 96 in accordance with the material of the core part 11A and the material of the clad part 19A.
  • the diameter in the case where the cross-sectional shape of the core portion 11A is circular can be, for example, about 10 to 200 ⁇ m.
  • the moving speed of the discharge part 94 and the discharge pressure of the needle part 96 are adjusted according to the material of the core part 11A and the material of the clad part 19A, whereby the diameter is smaller than the inner diameter of the ring of the needle part 96. It is possible to produce a circular (cross-sectional shape) core portion 11A.
  • the reason is that when the viscous material is discharged from the needle portion 96, the material is difficult to be discharged from the vicinity of the inner surface of the annular ring due to the friction between the inner surface of the annular ring and the material, and the inner surface of the annular ring The reason is that only the material in the vicinity of the center of the ring where friction does not occur is discharged preferentially.
  • the core 91A is formed by fixing the support 91 on which the clad 19A is formed and moving the needle-like part 96 in the clad 19A is shown.
  • the present invention is not limited to such an aspect, and for example, the core portion 11A may be formed by fixing the needle-like portion 96 and moving the support 91 on which the cladding portion 19A is formed.
  • the discharge part 94 is moved in the Z direction from the state shown in FIG. 9 to withdraw the needle-like part 96 from the cladding part 19A. Then, the process of FIG. 9 and the removal of the needle-like portion 96 are repeated to form the core portions 12A, 13A, and 14A in parallel to the core portion 11A.
  • the material similar to core part 11A can be used.
  • the pitch of the adjacent core portions can be, for example, about 20 to 300 ⁇ m.
  • FIG. 10 (A) is a plan view, and (B) is a cross-sectional view taken along the line DD of (A). However, illustration of the discharge part 94 is abbreviate
  • the core portions 11A, 12A, 13A, and 14A and the clad portion 19A are polymerized and cured by a predetermined method.
  • a predetermined method For example, if each of the core portions 11A, 12A, 13A, and 14A, and the cladding portion 19A is a photocurable material, it is irradiated with light (such as ultraviolet light) to be cured.
  • light such as ultraviolet light
  • heating may be further performed after the light irradiation.
  • the core portions 11A, 12A, 13A, and 14A having the paste-like resin precursor as a main component, and the cladding portion 19A are respectively polymerized and cured, and core portions 11, 12, 13 having a resin as a main component And 14, and the cladding part 19 are formed.
  • the core portions 11 to 14 are continuously and integrally formed without forming an interface in the core portions 11 to 14, respectively, and the clad portion 19 does not form an interface in the clad portion 19. It is integrally formed.
  • the optical waveguide 10 shown in FIGS. 1 to 3 is completed.
  • the manufacturing process of the optical waveguide illustrated in FIGS. 6 to 10 may be referred to as an injection method.
  • the support 91 is prepared to manufacture the optical waveguide, but the support 91 is not necessarily required.
  • the clad portion 19A may be produced in a concave shape formed in an integrated circuit or a printed circuit board, or a groove or a slit in the board may be produced as a substitute for a support.
  • the dispenser method is, for example, a method exemplified in the proceedings of the 71st Annual Meeting of the Institute of Applied Physics Annual Conference (Autumn 2010, Nagasaki University).
  • the imprint method is, for example, O plus E, vol 27, No. It is the method illustrated to 2 grade
  • 11 to 13 are views illustrating the manufacturing process of the optical waveguide by the dispenser method.
  • the support 91 is prepared as in the injection method, and a predetermined material is applied to the upper surface of the bottom plate 92 exposed in the outer frame 93 of the support 91 and spread uniformly.
  • the cladding part 19E having a substantially constant layer thickness is manufactured.
  • a material of clad part 19E the same material as clad part 19A can be used, for example.
  • a coating device (not shown) having the discharge portion 94 (having the discharge portion main body 95 and the needle portion 96) is prepared, and the prepared coating device (not shown) is operated.
  • the needle-like portion 96 at the tip of the discharge portion 94 is disposed on the cladding portion 19E.
  • the needle portion 96 is not inserted into the clad portion 19E, and the tip end of the needle portion 96 and the upper surface of the clad portion 19E are disposed so as to have a predetermined distance.
  • the coating device (not shown) is operated to move the needle-like portion 96 over the clad portion 19E while discharging a predetermined material from the needle-like portion 96 disposed on the clad portion 19E, and one core portion Form 11E. Thereafter, the same operation is repeated, and for example, four core portions 11E are juxtaposed.
  • a material of core part 11E the same material as core part 11A can be used, for example.
  • a clad portion 19F having a substantially constant layer thickness is produced on the clad portion 19E so as to cover the core portion 11E in the same manner as the step shown in FIG.
  • a material of clad part 19F the same material as clad part 19E can be used, for example.
  • the clad portion 19E, the core portion 11E, and the clad portion 19F are cured.
  • the support 91 is removed to complete the optical waveguide.
  • an interface 61 is generated inside the cladding (at the boundary between the cladding 19E and the cladding 19F).
  • FIG. 14 to FIG. 16 are views illustrating the manufacturing process of the optical waveguide by the imprint method.
  • a predetermined material is coated on a substrate or the like and spread uniformly to manufacture a clad portion 19M having a substantially constant layer thickness.
  • a material of the cladding part 19M for example, the same material as that of the cladding part 19A can be used.
  • a mold 200 having a convex portion corresponding to the shape of the core portion to be formed is prepared. Then, the convex portion of the mold 200 is brought into contact with one surface of the cladding portion 19M.
  • the mold 200 is pressurized (may be heated if necessary) in a state in which the convex portion of the mold 200 is in contact with one surface of the cladding portion 19M.
  • the clad 19M is cured.
  • mold 200 is exfoliated from clad part 19M. If the residue or the like of the mold 200 is attached to the cladding portion 19M, it is removed by dry etching or the like. Thereby, the concave portion 50 to which the convex portion of the mold 200 is transferred is formed on one surface of the cladding portion 19M.
  • the recess 50 of the cladding portion 19M is filled with a predetermined material to fabricate the core portion 11N.
  • a material of core part 11N the same material as core part 11A can be used, for example.
  • a cladding portion 19N having a substantially constant layer thickness is fabricated on the cladding portion 19M so as to cover the core portion 11N.
  • the same material as clad part 19M can be used, for example.
  • the core portion 11N and the cladding portion 19N are cured to complete the optical waveguide.
  • an interface 62 is generated inside the cladding (at the boundary between the cladding 19M and the cladding 19N).
  • the dispenser method and the imprint method since the step of laminating the clad portion is present, the manufacturing process of the optical waveguide is complicated. Further, in the dispenser method or the imprint method, an interface is generated at the boundary of the stacked clad portions, and the change in refractive index is accompanied at the interface (the refractive index is discontinuous at the interface).
  • the GI-type optical waveguide can be manufactured by a simple method which does not include the step of laminating the clad portion.
  • the core portion is produced directly inside one clad portion without the step of laminating the clad portion, the clad portion is integrally formed without producing an interface inside.
  • a simple manufacturing process different from the dispenser method or the imprint method can be used to manufacture an optical waveguide (having no interface inside the cladding part) having a structure different from the dispenser method or the imprint method.
  • the injection method moves the needle-like portion in the clad portion while discharging a predetermined material from the needle-like portion to form the core portion, so that the core portion is formed by controlling the moving direction of the needle-like portion. You can lay out freely.
  • the injection method since it is easy to form a three-dimensional flexible core part continuously, it is possible to easily manufacture a three-dimensional optical waveguide unlike the dispenser method and the imprint method. This will be described in the second embodiment, the third embodiment, and the example.
  • a preform method (see, for example, JP-A-2008-242449) can be mentioned as a comparative example different from the dispenser method and the imprint method.
  • the preform method is an application of the thermal drawing process of the preform used in the manufacturing process of GI type plastic optical fiber to the optical waveguide manufacturing process, and an optical waveguide ranging from one preform to several hundreds of meters is used. It is excellent in productivity because it can be manufactured at one time.
  • the preform method is not a method of forming an optical waveguide on a substrate, it is necessary to separately and precisely mount the formed optical waveguide on a printed board or the like, which may cause a problem of mounting cost.
  • the optical waveguide can be easily manufactured on an integrated circuit, a printed circuit board or the like.
  • FIG. 17 is a plan view illustrating an optical waveguide according to the second embodiment.
  • FIG. 18 is a cross-sectional view taken along the line EE of FIG.
  • FIG. 19 is a cross-sectional view taken along the line FF in FIG.
  • the optical waveguide 20 is a GI-type optical waveguide in which four channels of core portions 21 to 24 are arranged in parallel in the cladding portion 29.
  • the materials, cross-sectional shapes, functions and the like of the core portions 21 to 24 and the clad portion 29 are the same as those of the core portions 11 to 14 and the clad portion 19 of the first embodiment, and thus detailed description will be omitted.
  • the entire core portions 11 to 14 are formed linearly in one direction (direction substantially parallel to the X direction), but in the optical waveguide 20, the core portions 21 to 24 are inclined respectively It is formed to include a portion (slope portion). That is, the core portions 21 to 24 each include a bent portion, and are not formed linearly in one direction.
  • the bending part may be curved (it may be bent like a bow).
  • the core portion 21 of the optical waveguide 20 is a portion 21a formed in a straight line in a direction substantially parallel to the X direction, a bent portion 21b, and a line in a direction inclining in the Z direction with respect to the X direction. It includes a portion 21c (slope portion) formed in a shape, a bent portion 21d, and a portion 21e formed linearly in the direction substantially parallel to the X direction.
  • the parts 21a, 21c and 21e lie on different straight lines.
  • the portion 21 a and the portion 21 e are different layers having different distances from the bottom surface of the cladding portion 29.
  • each of these parts is obtained by dividing the core part 21 into a plurality of parts for the sake of convenience, and the core part 21 is continuously and integrally formed without producing an interface in the core part 21.
  • Cores 22 to 24 also have the same shape as core 21.
  • the needle-like portion 96 is moved while changing the vertical distance from the bottom surface of the uncured clad portion.
  • the application device (not shown) may be programmed. That is, if the coating device (not shown) is programmed to move in the X direction while moving the needle-like portion 96 in the X direction, the slope portion (portion 21c) can be formed.
  • the moving speed in the X direction and the moving speed in the Z direction can be appropriately set in consideration of the inclination angle of the slope portion (portion 21c) to be formed.
  • a core portion including a portion inclined in the Y direction with respect to the XZ plane by moving the needle-like portion 96 while changing the horizontal distance from the side surface of the uncured clad portion. Further, by changing the vertical distance from the bottom surface of the uncured clad portion and changing the horizontal distance from the side surface, the needle-like portion 96 is inclined in the Z direction with respect to the XY plane and in the XZ plane. It is also possible to form a core portion including a portion inclined in the Y direction. In short, by controlling the coating device (not shown) and discharging the predetermined material from the needle-like portion 96 while moving the needle-like portion 96 in any direction, the core portion of various shapes can be obtained by a simple method. It can be formed.
  • the portions 21a, 21c, and 21e are formed in a straight line, but the portions 21a, 21c, and 21e have a curved shape (including coil, spiral, and helix)
  • a curved shape including coil, spiral, and helix
  • linear portions and curved portions may be mixed.
  • the portion 21a may be formed linearly, and the portions 21c and 21e may be formed curved.
  • the portions 21a, 21c, and 21e may be on the same plane, or may be on different planes.
  • a predetermined clad portion can be formed in one clad portion integrally formed without producing an interface. It is possible to easily manufacture a slope type optical waveguide including a core portion parallel to the surface and a core portion inclined with respect to a predetermined surface of the cladding portion.
  • FIG. 20 is a plan view illustrating an optical waveguide according to the third embodiment.
  • FIG. 21 is a cross-sectional view taken along the line G-G of FIG.
  • FIG. 22 is a cross-sectional view taken along the line HH of FIG.
  • the optical waveguide 30 is a GI-type optical waveguide in which 8-channel core portions 31 to 38 are formed in the cladding portion 39.
  • the materials, cross-sectional shapes, functions and the like of the core portions 31 to 38 and the clad portion 39 are the same as those of the core portions 11 to 14 and the clad portion 19 in the first embodiment, and thus detailed description will be omitted.
  • the core portions 31 to 34 are formed linearly in one direction (direction substantially parallel to the Y direction).
  • the core portions 35 to 38 are formed to include inclined portions (slope portions), respectively. That is, the core portions 35 to 38 each include a bent portion, and are not formed linearly in one direction.
  • the bending part may be curved (it may be bent like a bow).
  • the core portion 35 of the optical waveguide 30 is inclined in the Z direction with respect to the X direction (a portion 35a formed in a straight line in a direction substantially parallel to the X direction and a bent portion 35b)
  • a portion 35g (slope portion) formed linearly in a direction inclined (falling) in the Z direction, a bent portion 35h, and a portion 35i formed linearly in a direction substantially parallel to the X direction Contains.
  • the portions 35a, 35c, 35e and 35g are on different straight lines, but the portions 35a and 35i are on the same straight line. However, the portions 35a and 35i may not necessarily be formed on the same straight line.
  • the portions 35 a and 35 i and the portion 35 e are different layers having different distances from the bottom surface of the cladding portion 39. However, each of these portions is obtained by dividing the core portion 35 into a plurality of portions for the sake of convenience, and the core portion 35 is continuously and integrally formed without producing an interface in the core portion 35. .
  • the core portions 36 to 38 also have the same shape as the core portion 35.
  • the core portions 35 to 38 three-dimensionally intersect with the core portions 31 to 34.
  • the manufacturing method of the first embodiment and the manufacturing method of the second embodiment may be combined, but first, the core portions 31 to 34 are manufactured, It should be noted that the core portions 35 to 38 should be manufactured after that.
  • various operations can be performed by controlling a coating device (not shown) and discharging a predetermined material from the needle portion 96 while moving the needle portion 96 in an arbitrary direction. It is possible to form a core portion of a simple shape in a simple manner.
  • the portions 35a, 35c, 35e, 35g, and 35i may be formed in a curved shape, or a linear portion and a curved portion may be mixed. Also, the portions 35a, 35c, 35e, 35g, and 35i may be on the same plane, or may be on different planes.
  • the same effects as those of the first embodiment can be obtained, and the core portions can be three-dimensional in one clad portion integrally formed without producing an interface. Can easily be manufactured.
  • Example 1 In Example 1, under the conditions shown in Table 1, an optical waveguide in which the core portion of one channel was formed in the clad portion was manufactured.
  • a support 91 was produced, and a clad material 19B was applied to the support 91.
  • an acrylic plate of 10 cm long ⁇ 10 cm wide ⁇ 3 mm thick is used as the bottom plate 92, and four acrylic plates cut to a desired size near the periphery of the bottom plate 92 have a substantially frame shape in plan view. It was stuck and it was set as the outer frame 93, and the support body 91 was produced. Then, the clad material 19 B was applied to the upper surface of the bottom plate 92 exposed in the outer frame 93 of the support 91.
  • the cladding material 19 B is mainly composed of a resin precursor which is polymerized and cured to form the cladding portion 19, and here, FX-W 713 (viscosity, approximately 10,300 cPs) manufactured by ADEKA Corporation is used.
  • a clad portion 19A was produced. Specifically, the clad material 19B is uniformly spread in the outer frame 93 while the support 91 is inclined at about 45 degrees from the horizontal direction, and then the support 91 is allowed to stand horizontally to form the clad material 19B. The air bubbles mixed in were removed with a polydropper 97, and it was allowed to stand for about 30 minutes in the state shielded from light at room temperature while keeping it horizontal, to produce a clad portion 19A approximately 9 cm long x 4 cm wide x 3 mm thick . The cladding portion 19A and the cladding portion 19B are different only in the shape, and the physical properties are the same.
  • the core material was discharged into the inside of the clad portion 19A to fabricate a core portion 11A.
  • the support 91 on which the cladding portion 19A was manufactured was attached to the work table of a tabletop coating robot (SHOTmini SL 200DS manufactured by Musashi Engineering Co., Ltd.).
  • FX-W712 viscosity, approximately 12000 cPs
  • ADEKA Corporation was filled as a core material in a 5 ml UV block syringe (PSY-5E manufactured by Musashi Engineering Co., Ltd.), defoamed, and attached to a table-top type coating robot .
  • a metal needle (SN-27G-LF manufactured by Musashi Engineering Co., Ltd.) with an inner diameter of 190 ⁇ m was attached to the table-top type coating robot as a discharge part 94 (having a discharge part main body 95 and a needle part 96).
  • the position of the discharge portion 94 was adjusted so that the height from the upper surface of the bottom plate 92 of the support 91 to the tip of the needle portion 96 was 300 ⁇ m.
  • the discharge pressure of the dispenser (ML-808FXcom, manufactured by Musashi Engineering Co., Ltd.) was set to 250 kPa, and the drawing operation speed (moving speed of the discharge unit 94) of the tabletop coating robot was set to 8 mm / s.
  • the length of the optical waveguide becomes 8.5 cm at a height of 300 ⁇ m from the upper surface of the bottom plate 92 of the support 91 to the tip of the needle portion 96
  • the core material FX-W 712 was discharged into the inside of the clad portion 19A to form the core portion 11A.
  • the core portion 11A and the clad portion 19A are irradiated with ultraviolet rays 99 using the ultraviolet irradiation device 98 to polymerize and cure the resin precursor, and then the structure shown in FIG.
  • the outer frame 93 was removed from the support 91, and the core 11A and the clad 19A were peeled off from the bottom plate 92 using a razor (not shown).
  • the peeled core portion 11A and the clad portion 19A were completely cured by post-baking in an air bath at 90 ° C. for about 19 minutes.
  • the drawing line operation speed (moving speed of the discharge unit 94) of the tabletop coating robot is sequentially set to 10, 12, 14 mm / s, and the same process is performed.
  • Three optical waveguides were produced.
  • the discharge pressure of the dispenser is set to 350 kPa
  • the drawing line operation speed (moving speed of the discharge unit 94) of the table-top type coating robot is sequentially set to 8, 10, 12, 14 mm / s.
  • Four optical waveguides were produced.
  • eight optical waveguides having different conditions of the discharge pressure and the drawing operation speed (moving speed of the discharge part 94) were completed.
  • FIG. 25 is a cross-sectional photograph of each of the optical waveguides produced in Example 1.
  • an optical waveguide having a core portion 11 whose cross-sectional shape is close to a circle was produced.
  • the diameter of each core portion 11 is about 100 ⁇ m in each case.
  • FIG. 26 is a diagram illustrating the relationship between the diameter of each core portion 11 and the ejection conditions in the first embodiment.
  • the vertical axis represents the diameter of the core portion 11
  • the horizontal axis represents the moving speed of the discharge portion 94.
  • the graph showed linearity.
  • FIGS. 25 and 26 show an example of the diameter of the core portion 11 and the manufacturing condition of the core portion 11, respectively, and the two do not correspond completely.
  • Example 2 In Example 2, under the conditions shown in Table 2, an optical waveguide in which the core portion of one channel was formed in the clad portion was manufactured.
  • the discharge pressure of the dispenser is sequentially set to 250, 350, and 450 kPa, and secondly, the drawing operation speed (moving speed of the discharge unit 94) of the desktop type coating robot is sequentially
  • the drawing operation speed moving speed of the discharge unit 94
  • the third point is that a metal needle (SN-30G-LF manufactured by Musashi Engineering Co., Ltd.) having an inner diameter of 150 ⁇ m is used as the discharge part 94.
  • the other conditions were the same as in Example 1, and an optical waveguide was manufactured by the steps shown in FIG. 23 and FIG.
  • FIG. 27 is a cross-sectional photograph of each of the optical waveguides produced in Example 2. As shown in FIG. 27, even when the inner diameter of the metal needle is reduced, under any of the conditions shown in Table 2, an optical waveguide having a core portion 11 whose cross-sectional shape is close to a circle is produced. The diameter of each core portion 11 is about 50 ⁇ m in each case.
  • the characteristics of the optical waveguide manufactured in Example 2 were evaluated.
  • the emission near-field pattern (NFP) of the optical waveguide manufactured in Example 2 was measured.
  • a white light source (AQ-4303B manufactured by Ando Electric Co., Ltd.) is used as a light source, and a GI-type multimode fiber with a core diameter of 50 ⁇ m and a length of 1 m (AFP2-FC / FC-10G manufactured by Aim Electronics Co., Ltd.) is used as an incident probe.
  • the emitted light from the optical waveguide was measured with a beam profiler (BeamStar FX50 manufactured by Ophir) using 50-01-1C).
  • FIG. 28 shows an exit near-field pattern (NFP) image of the optical waveguide manufactured in Example 2 ((A) is a two-dimensional image, (B) is a three-dimensional image).
  • FIG. 28 shows data of an optical waveguide manufactured under the conditions of the inner diameter of the metal needle of 150 ⁇ m, the discharge pressure of 350 kPa, and the moving speed of the discharge portion (metal needle) of 12 mm / s.
  • FIG. 29 is an interference fringe measurement photograph of the optical waveguide manufactured in Example 2.
  • 30 and 31 are diagrams illustrating refractive index profiles calculated from the interference fringes of FIG. 29 to 31 are data of optical waveguides manufactured under the conditions that the inner diameter of the metal needle is 150 ⁇ m, the discharge pressure is 350 kPa, and the moving speed of the discharge part (metal needle) is 12 mm / s. is there.
  • Example 3 In Examples 1 and 2, it has been verified that it is possible to manufacture a GI-type optical waveguide having a circular cross-sectional shape of the core by using the method (injection method) shown in FIG. 23 and FIG. In Example 3, it was examined whether parallelization of optical waveguides was possible by the injection method. Specifically, by repeatedly executing the steps shown in FIG. 23 and FIG. 24, an optical waveguide in which core portions of four channels were formed in parallel in the clad portion under the conditions shown in Table 3 was produced.
  • Example 3 corresponds to the above-described first embodiment.
  • FIG. 32 is a cross-sectional photograph of the optical waveguide manufactured in Example 3.
  • FIG. 32 shows data of an optical waveguide manufactured under the condition that the moving speed of the discharge part (metal needle) is 22 mm / s.
  • the cross-sectional shape of the core part was circular, and the pitch of the core part succeeded in producing a 4-channel resin parallel optical waveguide (PPOW) having a pitch of about 250 ⁇ m.
  • PPOW 4-channel resin parallel optical waveguide
  • NFP output near field pattern
  • FIG. 33 shows an exit near-field pattern (NFP) image of the optical waveguide manufactured in Example 3 ((A): two-dimensional image; (B): three-dimensional image).
  • a white light source (AQ-4303B manufactured by Ando Electric Co., Ltd.) is used as a light source, and an SI type multimode fiber (FV95P2-ST800G manufactured by Mitsubishi Electric Industries, Ltd.) having a length of 1 m and a core diameter of 800 ⁇ m is used as an incident probe.
  • the emitted light from the optical waveguide was measured by a beam profiler (BeamStar FX50 manufactured by Ophir).
  • FIG. 34 is an interference fringe measurement photograph of the optical waveguide manufactured in Example 3.
  • FIG. 35 is a diagram illustrating the refractive index distribution calculated from the interference fringes of FIG. 33 to 35 are data of optical waveguides manufactured under the condition that the moving speed of the discharge part (metal needle) is 22 mm / s, as in FIG. Moreover, FIG. 35 is a refractive index distribution of the core part of the 1st channel of the produced optical waveguide.
  • Example 4 In Example 4, by repeatedly executing the steps shown in FIG. 23 and FIG. 24, an optical waveguide in which 8-channel core portions were formed in parallel in the clad portion under the conditions shown in Table 4 was manufactured.
  • FIG. 36 is a cross-sectional photograph of the optical waveguide manufactured in Example 4.
  • fabrication of an 8-channel resin parallel optical waveguide (PPOW) in which the cross-sectional shape of the core part is circular and the pitch of the core part is about 250 ⁇ m has succeeded.
  • the guiding of the light was confirmed by an output near field pattern (NFP) image.
  • FIG. 37 shows an output near-field pattern (NFP) image of the optical waveguide manufactured in Example 4 ((A): two-dimensional image; (B): three-dimensional image).
  • a white light source (AQ-4303B manufactured by Ando Electric Co., Ltd.) is used as a light source, and an SI type multimode fiber (FV95P2-ST800G manufactured by Mitsubishi Electric Industries, Ltd.) having a length of 1 m and a core diameter of 800 ⁇ m is used as an incident probe.
  • the emitted light from the optical waveguide was measured by a beam profiler (BeamStar FX50 manufactured by Ophir).
  • Example 5 In Example 5, under the conditions shown in Table 5, a sloped-type optical waveguide in which a core portion which is partially inclined was formed in the clad portion was manufactured.
  • Example 5 corresponds to the second embodiment described above (however, the manufactured core portion is only one channel).
  • a clad portion 29A approximately 7 cm long ⁇ 4 cm wide ⁇ 2 mm thick was manufactured.
  • the clad portion 29A is mainly composed of a paste-like resin precursor having viscosity (moderate flowability and formability), and is polymerized and cured in a later step, and finally the clad portion 29 (FIG. 17 to FIG. 19)).
  • a metal needle with an inner diameter of 150 ⁇ m (SN-30G-LF manufactured by Musashi Engineering Co., Ltd.) is attached to the desktop type coating robot as the discharge portion 94.
  • the position of the discharge part 94 was adjusted so that the height H 2 (see FIG. 38) from the upper surface of the needle 96 to the tip of the needle part 96 would be 150 ⁇ m.
  • the discharge pressure of the dispenser was set to 200 kPa, and the drawing line operation speed (moving speed of the discharge unit 94) of the table-top type coating robot was set to 16 mm / s.
  • a portion 21a (length in the X direction ⁇ 10 mm) linearly formed in a direction substantially parallel to the X direction is bent in the clad portion 29A having a thickness T 1 2 2 mm Part 21b, part 21c (slope part) (length in X direction 50 50 mm) formed in a straight line in a direction inclined (rising) in the Z direction with respect to X direction, bent part 21d, substantially in X direction
  • a portion 21e (length in the X direction 10 10 mm) formed linearly in parallel direction can be drawn by a series of operations, and the end point of the portion 21a (bending portion 21b) and the end point of the portion 21c (bending portion)
  • the dispenser was programmed so that the height difference H 3 (input and output height difference) in the Z direction 21 d) was 100 ⁇ m, and the core material FX-W 712 was discharged into the inside of the clad portion 29A to form the core portion 21A.
  • each of these parts is obtained by dividing the core part 21A into a plurality of parts for the sake of convenience, and the core part 21A is continuously and integrally formed without creating an interface inside the core part 21A.
  • the core portion 21A is mainly composed of a paste-like resin precursor having viscosity (appropriate fluidity and shapeability), and is polymerized and cured in a later step, and finally the core portion 21 (FIG. 17 to FIG. 19)).
  • a slope-type optical waveguide having a core portion 21 of one channel inside the clad portion 29 was obtained by the same steps as in FIGS. 24D to 24F described above.
  • the drawing operation speed (moving speed of the discharge unit 94) of the table-top type coating robot is sequentially set to 18 and 22 mm / s, and two slope type light guides A waveguide was produced.
  • the dispenser is programmed so that the height difference H 3 is 300 ⁇ m, and the drawing operation speed (moving speed of the discharge unit 94) of the table-top type coating robot is sequentially set to 16, 18, 22 mm / s, three An optical waveguide of slope type was produced.
  • the dispenser is programmed so that the height difference H 3 is 500 ⁇ m, and the drawing operation speed (moving speed of the discharge unit 94) of the desktop type coating robot is sequentially set to 16, 18, 22 mm / s, A sloped optical waveguide was produced. In this manner, the optical waveguide conditions different nine-slope (the moving speed of the discharge portion 94) height difference H 3 and drawn lines operating speed is completed.
  • FIG. 39 is a cross-sectional photograph of the incident end and the output end of the optical waveguide produced in Example 5.
  • (A) is a cross-sectional view of the incident end
  • FIG. 39 (A) is a cross-sectional view of the incident end
  • the photograph (D) is a cross-sectional photograph of the output end in the case of the height difference
  • a white light source (AQ-4303B manufactured by Ando Electric Co., Ltd.) is used as a light source, and a multimode fiber with a core diameter of 100 ⁇ m (Fiber Instrument Sales (FIS) S57U7VM1Fis) with a length of 1 m and an incident probe.
  • FIS Fiber Instrument Sales
  • S57U7VM1Fis S57U7VM1Fis
  • the light emitted from the optical waveguide is observed with a USB microscope (M2 manufactured by SCARA CORPORATION).
  • the position of the core at the incident end is at the lowest level, and as shown in FIGS. 39 (B) to 39 (D), the emission is as per the set value of the program of the dispenser. It was confirmed that the end was in the high hierarchy.
  • Example 6 In Example 6, under the conditions shown in Table 6, a three-dimensional crossing type optical waveguide in which core portions three-dimensionally intersect in the cladding portion was manufactured. Example 6 corresponds to the third embodiment described above (however, the upper core portion produced is only one channel).
  • the details will be described below.
  • a clad portion 39A approximately 5 cm long ⁇ 4 cm wide ⁇ 2 mm thick was manufactured.
  • the clad 39A is mainly composed of a paste-like resin precursor having viscosity (moderate flowability and formability), and is polymerized and cured in a later step, and finally the clad 39 (see FIGS. 20 to 20). 22)).
  • a metal needle with an inner diameter of 150 ⁇ m (SN-30G-LF manufactured by Musashi Engineering Co., Ltd.) is attached to the desktop type coating robot as the discharge portion 94.
  • the position of the discharge part 94 was adjusted so that the height H 4 (see FIG. 40) from the upper surface of the lower part to the tip of the needle part 96 would be 150 ⁇ m.
  • the discharge pressure of the dispenser was set to 200 kPa, and the drawing line operation speed (moving speed of the discharge unit 94) of the table-top type coating robot was set to 20 mm / s.
  • the core portions 31A, 32A, 33A, and 34A are mainly composed of a paste-like resin precursor having viscosity (moderate fluidity and formability), and finally, the core portions 31, 32, 33, And 34 (see FIGS. 20 to 22).
  • the position of the discharge portion 94 was again adjusted so that the height H 4 (see FIG. 40) from the upper surface of the bottom plate 92 of the support 91 to the tip of the needle portion 96 was 150 ⁇ m. Further, the discharge pressure of the dispenser was kept at 200 kPa, and the drawing line operation speed (moving speed of the discharge part 94) of the desktop type coating robot was set to 16 mm / s. Then, as shown in FIG.
  • a portion 35a (length in the X direction 55 mm) linearly formed in a direction substantially parallel to the X direction in a clad portion 39A having a thickness T 2 22 mm, a bent portion 35b, a portion 35c (slope portion) (length in the X direction1515 mm) linearly formed in a direction inclined (rising) in the Z direction with respect to the X direction, bent portion 35d, substantially parallel to the X direction 35e (length in the X direction mm 10 mm) formed in a straight direction in the same direction, bent portion 35f, and portion 35g formed in the direction inclining (falling) in the Z direction with respect to the X direction (Slope part) (length in X direction ⁇ 15 mm), bent part 35h, and part 35i (length in X direction ⁇ 5 mm) formed linearly in the direction substantially parallel to the X direction are drawn by a series of operations And core portions 31A to 34A Height difference H 5 in the Z direction between the portion 35e of the
  • each of these portions is obtained by dividing the core portion 35A into a plurality of portions for the sake of convenience, and the core portion 35A is continuously and integrally formed without an interface in the core portion 35A.
  • the core portion 35A is mainly composed of a paste-like resin precursor having viscosity (moderate flowability and shapeability), and is polymerized and cured in a later step, and finally the core portion 35 (FIG. 20 to FIG. 22)).
  • core portions 31 to 34 and core portion 35 three-dimensionally intersecting core portions 31 to 34 are provided inside clad portion 39.
  • a three-dimensional crossed optical waveguide was obtained.
  • the drawing operation speed (moving speed of the discharge portion 94) of the desktop type coating robot is sequentially set to 18 and 22 mm / s.
  • two three-dimensional crossed optical waveguides were manufactured. In this way, three three-dimensional crossing type optical waveguides having different conditions of the drawing operation speed of the core portion 35A (moving speed of the discharge portion 94) are completed.
  • FIG. 41 is a cross-sectional photograph of the three-dimensional crossed optical waveguide manufactured in Example 6.
  • (A) is a cross-sectional photograph of the core portion 35
  • (B) is a cross-sectional photograph of the core portions 31 to.
  • an optical waveguide was obtained in which four-channel parallel core portions passing below and one-channel core portions passing above were three-dimensionally intersected.
  • FIG. 42 is a micrograph of the three-dimensional intersection of the optical waveguide manufactured in Example 6, taken from the top.
  • (A) is a photograph in which the core portion 35 is in focus
  • (B) is a photograph in which the core portions 31 to 34 are in focus.
  • 41 and 42 show data of the optical waveguide manufactured under the condition that the moving speed of the discharge part (metal needle) at the time of forming the core part 35 is 16 mm / s.
  • the core part in the horizontal direction, the core part in the oblique direction (slope part), and the core part in the vertical direction are continuously formed using the injection method. Just do it. This eliminates the need for the conventionally used 45-degree reflecting mirror and the like.
  • cross-sectional shape of the core portion is not limited to a circle, and the cross-sectional shape of the needle-like portion 96 may be appropriately modified to have various shapes such as an elliptical shape, a substantially square shape or a substantially triangular shape.
  • the core unit is one layer or two layers is shown, but the core unit can be three layers or more.
  • optical waveguide according to the present invention directly on the wiring substrate.
  • the needle portion 96 may not necessarily have a linear shape.

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  • Optical Integrated Circuits (AREA)

Abstract

Le guide d'ondes optiques d'après la présente invention est formé sur un substrat comportant une partie de cœur qui propage une lumière et une partie de gaine qui recouvre la périphérie de la partie de cœur. La partie de gaine est formée d'une seule pièce, de sorte qu'il n'y a pas de surface limite à l'intérieur de la partie de gaine.
PCT/JP2012/064839 2011-06-27 2012-06-08 Guide d'ondes optiques et son procédé de fabrication WO2013002013A1 (fr)

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US20150329354A1 (en) * 2012-12-28 2015-11-19 Citizen Holdings Co., Ltd. Method for producing microchannel, and microchannel
WO2017069259A1 (fr) * 2015-10-21 2017-04-27 日産化学工業株式会社 Procédé de fabrication d'un guide optique à gradient d'indice
WO2018105712A1 (fr) * 2016-12-07 2018-06-14 学校法人慶應義塾 Convertisseur de taille de point et son procédé de fabrication
WO2018139652A1 (fr) 2017-01-27 2018-08-02 学校法人慶應義塾 Procédé de fabrication d'un guide d'ondes optique à gradient d'indice (gi)
WO2018199305A1 (fr) 2017-04-28 2018-11-01 日産化学株式会社 Composition pour former un guide d'ondes optique qui contient un composé de silsesquioxane réactif
US10253126B2 (en) 2015-10-21 2019-04-09 Nissan Chemical Industries, Ltd. Optical waveguide-forming composition

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WO2013002013A1 (fr) * 2011-06-27 2013-01-03 学校法人 慶應義塾 Guide d'ondes optiques et son procédé de fabrication

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