FR2819594B1 - Structure optique a poutre isolee et son procede de fabrication - Google Patents

Structure optique a poutre isolee et son procede de fabrication

Info

Publication number
FR2819594B1
FR2819594B1 FR0100476A FR0100476A FR2819594B1 FR 2819594 B1 FR2819594 B1 FR 2819594B1 FR 0100476 A FR0100476 A FR 0100476A FR 0100476 A FR0100476 A FR 0100476A FR 2819594 B1 FR2819594 B1 FR 2819594B1
Authority
FR
France
Prior art keywords
manufacturing
optical structure
insulated beam
insulated
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0100476A
Other languages
English (en)
Other versions
FR2819594A1 (fr
Inventor
Michel Bruel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Opsitech Optical System on a Chip SAS
Original Assignee
Opsitech Optical System on a Chip SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Opsitech Optical System on a Chip SAS filed Critical Opsitech Optical System on a Chip SAS
Priority to FR0100476A priority Critical patent/FR2819594B1/fr
Priority to EP02711932A priority patent/EP1352284A1/fr
Priority to US10/466,179 priority patent/US6993215B2/en
Priority to PCT/FR2002/000070 priority patent/WO2002056087A1/fr
Publication of FR2819594A1 publication Critical patent/FR2819594A1/fr
Application granted granted Critical
Publication of FR2819594B1 publication Critical patent/FR2819594B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12145—Switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/3552—1x1 switch, e.g. on/off switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3594—Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
FR0100476A 2001-01-15 2001-01-15 Structure optique a poutre isolee et son procede de fabrication Expired - Lifetime FR2819594B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR0100476A FR2819594B1 (fr) 2001-01-15 2001-01-15 Structure optique a poutre isolee et son procede de fabrication
EP02711932A EP1352284A1 (fr) 2001-01-15 2002-01-10 Commutateur optique a poutre isolee flexible et son procede de fabrication
US10/466,179 US6993215B2 (en) 2001-01-15 2002-01-10 Optical switch with flexible insulated beam and method for making same
PCT/FR2002/000070 WO2002056087A1 (fr) 2001-01-15 2002-01-10 Commutateur optique a poutre isolee flexible et son procede de fabrication

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0100476A FR2819594B1 (fr) 2001-01-15 2001-01-15 Structure optique a poutre isolee et son procede de fabrication

Publications (2)

Publication Number Publication Date
FR2819594A1 FR2819594A1 (fr) 2002-07-19
FR2819594B1 true FR2819594B1 (fr) 2003-05-16

Family

ID=8858817

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0100476A Expired - Lifetime FR2819594B1 (fr) 2001-01-15 2001-01-15 Structure optique a poutre isolee et son procede de fabrication

Country Status (4)

Country Link
US (1) US6993215B2 (fr)
EP (1) EP1352284A1 (fr)
FR (1) FR2819594B1 (fr)
WO (1) WO2002056087A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2978600B1 (fr) 2011-07-25 2014-02-07 Soitec Silicon On Insulator Procede et dispositif de fabrication de couche de materiau semi-conducteur
CN102608756B (zh) * 2012-02-08 2013-08-07 南京邮电大学 基于微流控光学技术的压控可调光衰减器
US9059252B1 (en) 2014-02-10 2015-06-16 International Business Machines Corporation Silicon waveguide on bulk silicon substrate and methods of forming
CN110967790B (zh) * 2018-09-30 2021-12-31 济南量子技术研究院 用于ppln波导器件的光纤耦合方法、波导器件及单光子探测器
DE102020209122A1 (de) * 2020-07-21 2022-01-27 Robert Bosch Gesellschaft mit beschränkter Haftung Herstellungsverfahren für ein mikrooptoelektromechanisches Bauelement und entsprechendes mikrooptoelektromechanisches Bauelement

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2659148B1 (fr) * 1990-03-01 1993-04-16 Commissariat Energie Atomique Procede de connexion entre une fibre optique et un microguide optique.
FR2729232A1 (fr) * 1995-01-10 1996-07-12 Commissariat Energie Atomique Dispositif optique pour application optomecanique
US5559912A (en) * 1995-09-15 1996-09-24 International Business Machines Corporation Wavelength-selective devices using silicon-on-insulator
FR2748578B1 (fr) * 1996-05-10 1998-05-29 Commissariat Energie Atomique Dispositif optomecanique et application a des capteurs en optique integree
GB2320104B (en) * 1997-10-16 1998-11-18 Bookham Technology Ltd Thermally isolated silicon layer
US6496612B1 (en) * 1999-09-23 2002-12-17 Arizona State University Electronically latching micro-magnetic switches and method of operating same

Also Published As

Publication number Publication date
EP1352284A1 (fr) 2003-10-15
US20040101231A1 (en) 2004-05-27
US6993215B2 (en) 2006-01-31
WO2002056087A1 (fr) 2002-07-18
FR2819594A1 (fr) 2002-07-19

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