WO2002056087A1 - Commutateur optique a poutre isolee flexible et son procede de fabrication - Google Patents
Commutateur optique a poutre isolee flexible et son procede de fabrication Download PDFInfo
- Publication number
- WO2002056087A1 WO2002056087A1 PCT/FR2002/000070 FR0200070W WO02056087A1 WO 2002056087 A1 WO2002056087 A1 WO 2002056087A1 FR 0200070 W FR0200070 W FR 0200070W WO 02056087 A1 WO02056087 A1 WO 02056087A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- groove
- zone
- optical
- cavity
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12061—Silicon
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12145—Switch
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
- G02B6/3552—1x1 switch, e.g. on/off switch
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3594—Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
Definitions
- the present invention relates to the field of optical wave transmission in optical guide structures.
- optical guides are used which are commonly made of optical fibers or micro-fibers and / or integrated components which include optical microguides.
- the optical fibers generally comprise a core for transmitting the optical wave which is surrounded by a tubular envelope, the refractive index of the material or materials constituting the core being greater than the refractive index of the material constituting the envelope.
- the components with integrated micro-guides comprise a core in general for transmitting the optical wave formed between two layers, the refractive index of the material constituting the core being greater than the refractive index of the material or materials constituting these layers.
- Patent FR-A-90 03 902 describes integrated optical switches in which a flexible beam which longitudinally carries an optical micro-guide is capable of being deformed relative to a fixed body in order to selectively bring the end of the core of the beam micro-guide coincident with the end of fixed microguides.
- the patent FR-A-95 00 201 describes integrated optical switches which include a mobile platform placed between two parts of a body and connected to the latter by arms.
- the platform carries integrated optical micro-guides arranged so as to switch, when it is moved transversely, a light wave arriving by an optical micro-guide from one of the parts of the body selectively towards two optical micro-guides of its other part.
- actuators for the flexible beam and the movable platform are made of an electrically insulating material and have arms covered with a metallic layer and the bodies have parts covered with a metallic layer. These layers are placed at a distance so as to constitute the electrodes with capacitive or inductive effect and are connected to supply lines for example by tracks and / or wire bridges.
- the object of the present invention is in particular to improve and simplify the constitution of actuating members in optical structures with moving or deformable parts ensuring in particular optical switching.
- the present invention firstly relates to a method for producing an optical structure provided with at least one optical guide means for the transmission of at least one optical or light wave.
- this method consists in providing a substrate with a first electrically non-conductive layer and with a second electrically conductive layer; producing an electrical insulation wall in the second layer at least up to the first layer, having two opposite ends and partially surrounding a first zone of this layer; and digging a cavity in the second layer and then in said first layer, partially surrounding a second zone of the second layer, adjacent to or extending said first zone and into which opens said wall, this cavity comprising a clearance in the second layer below at least part of the second zone; so that the closed part of the second layer corresponding to said zones is electrically isolated from the rest of this layer and that the part released from below said second zone constitutes a beam.
- the method consists in providing a substrate with a first electrically non-conductive layer and with a second electrically conductive layer; digging a groove in the second layer at least up to the first layer, having two opposite ends and partially surrounding a first area of this layer; at least partially filling the groove with an electrically insulating material; and digging a cavity in the second layer and then in said first layer, partially surrounding a second zone of the second layer, adjacent to or extending said first zone and into which opens said groove, this cavity comprising a clearance in the second layer below at least part of the second zone; so that the closed part of the second layer corresponding to said zones is electrically isolated from the rest of this layer and that the part released from below said second zone constitutes a beam.
- the method preferably consists in producing a clearance such that said beam is cantilevered.
- the method preferably consists in producing at least one optical guide means which passes over said filled groove and between said ends of this filled groove.
- the method preferably consists, between the operation of filling said antlers and the operation of producing said cavity, in producing at least one optical micro-guide on the second layer, which passes over said groove filled and which passes between said ends of this groove.
- the method preferably consists, between the operation of filling said groove and the operation of producing said cavity, in making at least one surface groove in said second layer which passes over said filled groove and which passes between said ends of this groove and, after the operation of producing said cavity and said clearance, fixing along this groove an optical micro-fiber.
- the method preferably consists in producing at least one surface groove which passes over the cavity to be produced.
- the method preferably consists in producing a groove which has close end portions.
- this method preferably consists in producing a groove which delimits a first T-shaped zone which has a central branch directed towards said second zone and two opposite lateral branches.
- the method preferably consists in producing an electrical connection pad on said first zone.
- the method consists in producing said insulating wall by local doping of said second layer.
- the present invention also relates to an optical structure provided with at least one optical guide means for the transmission of at least one optical or light wave.
- this structure successively comprises, on a substrate, a first electrically non-conductive layer, a second electrically conductive layer and optical guide means.
- the second layer comprises a closed part, the periphery of which is delimited by a groove and a cavity which are hollowed out at least up to the first layer so as to electrically isolate this part from the rest of this layer, said groove being at least partly filled with an electrically insulating material and said cavity extending into said first layer while providing a clearance under said second layer so that the second layer constitutes a beam above this clearance.
- the structure preferably comprises at least one optical guide means extending over said second layer and passing over said filled groove and between the ends of this groove.
- the second layer comprises a closed part, the periphery of which is delimited by an electrical insulation wall and a cavity which are hollowed out at least as far as the first layer. electrically isolating this part from the rest of this layer, said cavity extending into said first layer by providing a clearance under said second layer so that the second layer constitutes a beam above this clearance.
- the structure comprises at least one optical guide means extending over said second layer and passing over said insulation wall and between the ends of said insulation wall.
- said groove preferably delimits a first T-shaped or C-shaped zone, which has a central branch directed towards said second zone and two opposite lateral branches.
- said clearance preferably extends so as to constitute a cantilever beam.
- said optical guide means preferably comprises an integrated optical micro-guide.
- said optical guide means preferably comprises a surface groove produced in said second layer and at least one optical micro-fiber installed along this groove.
- said optical guide means preferably extends to the edge of said cavity.
- the structure preferably comprises an electrical connection pad formed on said first zone.
- the structure preferably comprises an actuating member, said beam comprising at least a part of this actuating member.
- Figure 2 shows a top view of the basic structure of Figure 1 after the completion of a first manufacturing operation
- Figure 3 shows a cross section along 111-111 • of the structure of Figure 2;
- FIG. 4 shows a top view of the basic structure after a second manufacturing operation
- - Figure 5 shows a cross section along IV-IV of the structure of Figure 4;
- FIG. 6 shows a top view of the basic structure after a third manufacturing operation
- FIG. 7 shows a cross section along VII- VII of the structure of Figure 6;
- FIG. 8 shows a top view of the basic structure after a fourth manufacturing operation
- FIG. 9 shows a section along IX-IX of the structure of Figure 8;
- - Figure 10 shows a top view of the basic structure after a fifth manufacturing step, which constitutes a first final optical structure according to the present invention;
- FIG. 11 shows a cross section along XI-XI of the final optical structure of Figure 10
- - Figure 12 shows a longitudinal section of a second base structure after a first manufacturing step, which corresponds to the first base structure of Figures 2 and 3;
- FIG. 13 shows a cross section of the second base structure after a second manufacturing step
- FIG. 14 represents a top view of the second basic structure after a second manufacturing step, which constitutes a second final optical structure according to the present invention
- - Figure 15 shows a cross section along XV-
- FIGS. 10 and 11 show a cross section along XVI-XVI of the final optical structure of Figure 14. Referring to Figures 1 to 11, we will first describe the different operations to achieve an optical structure 100, shown definitively in FIGS. 10 and 11.
- a basic structure 1 multi-layers, which includes a substrate 2 for example of silicon, which is covered by a first layer 3 of an insulating material such as silicon dioxide (Si ⁇ 2), itself covered with a second layer 4 of an electrically conductive material, for example silicon.
- the conductive layer 4 is hollowed out so as to produce a groove 5 which extends in depth to the conductive layer 3.
- This groove 5 delimits and partially surrounds a first zone 6 of the layer driver 4.
- the groove 5 is, in plan view, in the form of a C, the ends of which extend by two longitudinal end portions 5 a and 5b which are parallel and close together, so that the zone 6 is presented, in top view, in the form of a T with thick branches, its two opposite lateral branches being delimited by the C and its central branch being delimited by the two end parts 5a and 5b and extending longitudinally.
- the groove 5 is filled with an electrically insulating material 7, for example with silica or silicon dioxide.
- An electrical insulation wall is thus obtained consisting of the groove 5 filled with the material 7.
- a longitudinal groove 8 for example of V-shaped cross section, which crosses the filled groove 5 and which axially crosses the area, is hollowed out in the conductive layer 4, superficially. 6 passing between its longitudinal end portions 5a and 5b.
- a cavity 9 is hollowed out in the conductive layer 4 and up to the insulating layer 3 which partially surrounds a second zone 10 of this layer 4 and into which the filled cavity 5.
- the second zone 10 extends longitudinally the central branch of the first zone 6 and has a transverse end surface 11, opposite zone 6, which extends a short distance from a transverse wall 12 of the cavity 9 so as to delimit a space 13.
- the surface groove 8 extends longitudinally to the second zone 12 and this groove 8 is interrupted by the space 13.
- the first zone 6 and this second zone 10 are adjacent and peripherally completely surrounded by the groove 5 and the cavity 9, so that the closed part 14 of the conductive layer 4 thus delimited is electrically isolated from the rest of this layer surrounding the groove 5 and the cavity 9.
- the insulating layer 3 is then hollowed out around and below the zone 10 of the insulated part 14 of the conductive layer 4, so that the deepened cavity 9 has a clearance 15 in- below the second zone
- the zone 10 of the insulated part 14 of the conductive layer 4 constitutes a cantilever beam 16 which extends freely in the cavity 9 and which is firmly embedded by its zone 6 surrounded by the filled groove 5 and attached from below to the insulating layer 3.
- An electrical connection pad 19 is then produced, for example on the zone 6 of the insulated part 14 of the conductive layer 4 and an electrical connection pad 20 at a location of the rest of this conductive layer 4, so as to be able to electrically control the 'actuator mentioned above as will be described later.
- FIGS. 12 to 16 we will now describe the different stages of manufacturing a second optical structure 200, shown definitively in FIGS. 16 and 17.
- a base structure 21 identical to the base structure 1 of the previous example which comprises a substrate 22 on which a first layer 23 is deposited in an insulating material, on which is deposited a second layer 24 of an electrically conductive material.
- a groove 25 is hollowed out in the conductive layer 24, of the same shape as the groove 5 of the previous example, which is filled with an insulating material 26, this groove partially surrounding and delimiting a first zone 27.
- an integrated longitudinal micro-guide 28 is produced by depositing a layer 29 and producing a longitudinal optical transmission core 30, the surface layer 29 being of an electrically insulating material, for example of undoped silica, and the transmission core 29 being for example of doped silica or of silicon nitride.
- the transmission core 30 extends longitudinally, passing above the filled groove 25 and between the end parts 25a and 25b of this groove. Referring to FIGS. 14 to 16, it can be seen that, subsequently, a hollow 31 is formed in the non-conductive surface layer 29, then in the conductive layer 24, then in the non-conductive layer 23, the filled groove 25 opening into this cavity 31.
- the cavity 31 partially delimits and surrounds a second zone 33 adjacent to the first zone 27, so that the conductive layer 24 has an insulated part 34, the periphery of which is surrounded by the groove 25 and the cavity 31, the zone 27 and the groove 25 this time being covered by the surface layer 29.
- a longitudinal cantilever beam 35 is thus produced in the cavity 31, in the second zone 33 and in the extension of the first zone 27, the transverse end surface 36 of this beam 35 being separated from a transverse wall 37 of the cavity 31 by a space 38.
- the optical micro-guide 28 Being cut by the space 38, the optical micro-guide 28 has a part 28a whose transmission core extends along the beam 35, to its end 36, and a part 28b whose transmission core s extends to the transverse wall 37 of the cavity 31, these parts 28a and 28b being optically coupled via the space 38.
- holes are dug in the surface layer 29 up to the conductive layer 24, which is filled with electrically conductive material so as to constitute on the one hand an electrical connection pad 39 on the area 27 of the part 34 of the layer 24 and on the other hand an electrical connection pad 40 on the other part of this layer, these pads 39 and 40 being intended to establish a potential difference between these isolated parts of the conductive layer 24.
- the cavity 31 and the clearance 32 are hollowed out so as to constitute, in addition, by the same operations, an actuating member 41 of the beam 35.
- This actuating member 41 comprises, in the cavity 31, a transverse arm 42 secured to the beam 35, in a close location from its end 36, which extends parallel to the wall 37 of the cavity 31 and which laterally carries opposite branches 43 and 44.
- the actuating member 41 further comprises opposite branches 45 and 46 which are protruding into the cavity 31 from the transverse wall 37 and from an opposite transverse wall
- the lateral arm 42 and the branches 43, 44, 45 and 46 are made from the material of the layers 24 and 29.
- the lateral arm 42 and the branches 43 and 44 form part of the second isolated zone 33 electrically and are electrically connected to the pad 39 via the beam 35, while the branches 45 and 46 are electrically connected to the electrical connection pad 40.
- the facing faces of the branches 43 and 45 on the one hand and of the branches 44 and 46 on the other hand are covered, subsequently, with metal layers not shown, so that these branches constitute electrodes .
- the pads 39 and 40 to a control device not shown, so as to activate the actuating member 41 in order to flex the beam at will. 35 and thus modify the optical coupling between the two parts 28a and 28b of the optical micro-guide 28.
- the actuating member 41 as just described can be produced in the optical structure 100 described in reference to FIGS. 1 to 11 during the operation of the cavity 9.
- the thickness of the conductive layer 24 could be approximately 60 microns and the width of the core of the optical micro-guide 28 could be approximately 8 microns.
- the width and the length of the branches of the first zone could be approximately 50 microns and the width of the groove could be approximately 5 microns, the cavity 31 being sufficiently wide to allow the flexions of the beam 35 and so as not to electrically disturb the operation of the actuating member 41.
- Such dimensions are also applicable to the optical structure 100.
- the groove 5 filled with material 7 could be replaced by doping of the layer 4 in order to create an integrated electrical insulation wall.
- the operations allowing the production of the grooves, cavities and holes as well as the production operations of the optical micro-guides can be carried out by photolithography, etching, deposition and mechanical-chemical planarization processes. known in microelectronics.
- the present invention is not limited to the examples described above.
- the optical structures could have filled grooves and cavities suitable for constituting beams of all desired shapes, in particular platforms carried by electrically insulated arms and movable in translation.
- the optical structures could present a multiplicity of optical microfibers or of integrated micro-guides.
- the actuating bodies could present different provisions.
- the shape of the grooves filled with insulation could have different shapes. Many variations are indeed possible without departing from the scope defined by the appended claims.
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02711932A EP1352284A1 (fr) | 2001-01-15 | 2002-01-10 | Commutateur optique a poutre isolee flexible et son procede de fabrication |
US10/466,179 US6993215B2 (en) | 2001-01-15 | 2002-01-10 | Optical switch with flexible insulated beam and method for making same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR01/00476 | 2001-01-15 | ||
FR0100476A FR2819594B1 (fr) | 2001-01-15 | 2001-01-15 | Structure optique a poutre isolee et son procede de fabrication |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002056087A1 true WO2002056087A1 (fr) | 2002-07-18 |
Family
ID=8858817
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR2002/000070 WO2002056087A1 (fr) | 2001-01-15 | 2002-01-10 | Commutateur optique a poutre isolee flexible et son procede de fabrication |
Country Status (4)
Country | Link |
---|---|
US (1) | US6993215B2 (fr) |
EP (1) | EP1352284A1 (fr) |
FR (1) | FR2819594B1 (fr) |
WO (1) | WO2002056087A1 (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2978600B1 (fr) | 2011-07-25 | 2014-02-07 | Soitec Silicon On Insulator | Procede et dispositif de fabrication de couche de materiau semi-conducteur |
CN102608756B (zh) * | 2012-02-08 | 2013-08-07 | 南京邮电大学 | 基于微流控光学技术的压控可调光衰减器 |
US9059252B1 (en) | 2014-02-10 | 2015-06-16 | International Business Machines Corporation | Silicon waveguide on bulk silicon substrate and methods of forming |
CN110967790B (zh) * | 2018-09-30 | 2021-12-31 | 济南量子技术研究院 | 用于ppln波导器件的光纤耦合方法、波导器件及单光子探测器 |
DE102020209122A1 (de) * | 2020-07-21 | 2022-01-27 | Robert Bosch Gesellschaft mit beschränkter Haftung | Herstellungsverfahren für ein mikrooptoelektromechanisches Bauelement und entsprechendes mikrooptoelektromechanisches Bauelement |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5559912A (en) * | 1995-09-15 | 1996-09-24 | International Business Machines Corporation | Wavelength-selective devices using silicon-on-insulator |
US5612815A (en) * | 1995-01-10 | 1997-03-18 | Commissariat A L'energie Atomique | Optical device for optomechanical application |
GB2320104A (en) * | 1997-10-16 | 1998-06-10 | Bookham Technology Ltd | Thermally isolated silicon layer |
US5926591A (en) * | 1996-05-10 | 1999-07-20 | Commissariat A L'energie Atomique | Optomechanical acceleration sensor |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2659148B1 (fr) * | 1990-03-01 | 1993-04-16 | Commissariat Energie Atomique | Procede de connexion entre une fibre optique et un microguide optique. |
US6496612B1 (en) * | 1999-09-23 | 2002-12-17 | Arizona State University | Electronically latching micro-magnetic switches and method of operating same |
-
2001
- 2001-01-15 FR FR0100476A patent/FR2819594B1/fr not_active Expired - Lifetime
-
2002
- 2002-01-10 WO PCT/FR2002/000070 patent/WO2002056087A1/fr not_active Application Discontinuation
- 2002-01-10 EP EP02711932A patent/EP1352284A1/fr not_active Withdrawn
- 2002-01-10 US US10/466,179 patent/US6993215B2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5612815A (en) * | 1995-01-10 | 1997-03-18 | Commissariat A L'energie Atomique | Optical device for optomechanical application |
US5559912A (en) * | 1995-09-15 | 1996-09-24 | International Business Machines Corporation | Wavelength-selective devices using silicon-on-insulator |
US5926591A (en) * | 1996-05-10 | 1999-07-20 | Commissariat A L'energie Atomique | Optomechanical acceleration sensor |
GB2320104A (en) * | 1997-10-16 | 1998-06-10 | Bookham Technology Ltd | Thermally isolated silicon layer |
Non-Patent Citations (2)
Title |
---|
ENG T T H ET AL: "Surface-micromachined epitaxial silicon cantilevers as movable optical waveguides on silicon-on-insulator substrates", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 49, no. 1-2, June 1995 (1995-06-01), pages 109 - 113, XP004303630, ISSN: 0924-4247 * |
ENG T T H ET AL: "VOLTAGE-CONTROLLED MICROMECHANICAL SOI OPTICAL WAVEGUIDES", 1995 IEEE TENCON. IEEE REGION TEN INTERNATIONAL CONFERENCE ON MICROELECTRONICS AND VLSI. HONG KONG, NOV. 6 - 10, 1995, IEEE REGION TEN INTERNATIONAL CONFERENCE ON MICROELECTRONICS AND VLSI.(TENCON), NEW YORK, IEEE, US, 6 November 1995 (1995-11-06), pages 195 - 197, XP000585775, ISBN: 0-7803-2625-3 * |
Also Published As
Publication number | Publication date |
---|---|
EP1352284A1 (fr) | 2003-10-15 |
US20040101231A1 (en) | 2004-05-27 |
FR2819594B1 (fr) | 2003-05-16 |
US6993215B2 (en) | 2006-01-31 |
FR2819594A1 (fr) | 2002-07-19 |
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