DE60235738D1 - Rutheniumkomplex, Verfahren zu dessen Herstellung und Verfahren zur Herstellung einer Dünnschicht - Google Patents

Rutheniumkomplex, Verfahren zu dessen Herstellung und Verfahren zur Herstellung einer Dünnschicht

Info

Publication number
DE60235738D1
DE60235738D1 DE60235738T DE60235738T DE60235738D1 DE 60235738 D1 DE60235738 D1 DE 60235738D1 DE 60235738 T DE60235738 T DE 60235738T DE 60235738 T DE60235738 T DE 60235738T DE 60235738 D1 DE60235738 D1 DE 60235738D1
Authority
DE
Germany
Prior art keywords
producing
preparation
thin film
ruthenium complex
ruthenium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60235738T
Other languages
English (en)
Inventor
Kazuhisa Kawano
Kenichi Sekimoto
Noriaki Oshima
Tetsuo Shibutami
Shuji Kumagai
Taishi Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Tosoh Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Corp filed Critical Tosoh Corp
Application granted granted Critical
Publication of DE60235738D1 publication Critical patent/DE60235738D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F17/00—Metallocenes
    • C07F17/02—Metallocenes of metals of Groups 8, 9 or 10 of the Periodic Table
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
DE60235738T 2001-09-12 2002-09-10 Rutheniumkomplex, Verfahren zu dessen Herstellung und Verfahren zur Herstellung einer Dünnschicht Expired - Lifetime DE60235738D1 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2001276481 2001-09-12
JP2001276479 2001-09-12
JP2001276478 2001-09-12
JP2001276480 2001-09-12
JP2001359769 2001-11-26
JP2002078970 2002-03-20

Publications (1)

Publication Number Publication Date
DE60235738D1 true DE60235738D1 (de) 2010-05-06

Family

ID=27554998

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60235738T Expired - Lifetime DE60235738D1 (de) 2001-09-12 2002-09-10 Rutheniumkomplex, Verfahren zu dessen Herstellung und Verfahren zur Herstellung einer Dünnschicht

Country Status (6)

Country Link
US (1) US6605735B2 (de)
EP (1) EP1293509B1 (de)
JP (2) JP5104499B2 (de)
KR (1) KR100727372B1 (de)
CN (1) CN1255417C (de)
DE (1) DE60235738D1 (de)

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Also Published As

Publication number Publication date
JP2010163441A (ja) 2010-07-29
JP5136576B2 (ja) 2013-02-06
US20030088116A1 (en) 2003-05-08
JP2008266329A (ja) 2008-11-06
KR100727372B1 (ko) 2007-06-12
EP1293509A2 (de) 2003-03-19
JP5104499B2 (ja) 2012-12-19
EP1293509B1 (de) 2010-03-24
KR20030023484A (ko) 2003-03-19
CN1255417C (zh) 2006-05-10
US6605735B2 (en) 2003-08-12
CN1408717A (zh) 2003-04-09
EP1293509A3 (de) 2004-05-19

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