DE60019985D1 - Verfahren zur Herstellung eines korrosionsbeständigen Bauteils, und korrosionsbeständiges Bauteil - Google Patents

Verfahren zur Herstellung eines korrosionsbeständigen Bauteils, und korrosionsbeständiges Bauteil

Info

Publication number
DE60019985D1
DE60019985D1 DE60019985T DE60019985T DE60019985D1 DE 60019985 D1 DE60019985 D1 DE 60019985D1 DE 60019985 T DE60019985 T DE 60019985T DE 60019985 T DE60019985 T DE 60019985T DE 60019985 D1 DE60019985 D1 DE 60019985D1
Authority
DE
Germany
Prior art keywords
corrosion
resistant component
producing
resistant
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60019985T
Other languages
English (en)
Other versions
DE60019985T2 (de
Inventor
Yasufumi Aihara
Keiichiro Watanabe
Kiyoshi Araki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60019985D1 publication Critical patent/DE60019985D1/de
Publication of DE60019985T2 publication Critical patent/DE60019985T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/60—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using solids, e.g. powders, pastes
    • C23C8/62—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using solids, e.g. powders, pastes only one element being applied
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12556—Organic component

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemically Coating (AREA)
DE60019985T 1999-02-01 2000-02-01 Verfahren zur Herstellung eines korrosionsbeständigen Bauteils, und korrosionsbeständiges Bauteil Expired - Lifetime DE60019985T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2392699 1999-02-01
JP2392699 1999-02-01
JP14124099 1999-05-21
JP14124099 1999-05-21
JP32268799A JP4054148B2 (ja) 1999-02-01 1999-11-12 耐食性部材の製造方法及び耐食性部材
JP32268799 1999-11-12

Publications (2)

Publication Number Publication Date
DE60019985D1 true DE60019985D1 (de) 2005-06-16
DE60019985T2 DE60019985T2 (de) 2006-05-04

Family

ID=27284439

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60019985T Expired - Lifetime DE60019985T2 (de) 1999-02-01 2000-02-01 Verfahren zur Herstellung eines korrosionsbeständigen Bauteils, und korrosionsbeständiges Bauteil

Country Status (4)

Country Link
US (2) US6406799B1 (de)
EP (1) EP1026281B1 (de)
JP (1) JP4054148B2 (de)
DE (1) DE60019985T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4166386B2 (ja) * 1999-09-30 2008-10-15 日本碍子株式会社 耐蝕性部材およびその製造方法
JP2002038252A (ja) * 2000-07-27 2002-02-06 Ngk Insulators Ltd 耐熱性構造体、耐ハロゲン系腐食性ガス材料および耐ハロゲン系腐食性ガス性構造体
DE10163107C1 (de) * 2001-12-24 2003-07-10 Univ Hannover Magnesium-Werkstück und Verfahren zur Ausbildung einer korrosionsschützenden Deckschicht eines Magnesium-Werkstücks
US6632325B2 (en) 2002-02-07 2003-10-14 Applied Materials, Inc. Article for use in a semiconductor processing chamber and method of fabricating same
US7119032B2 (en) 2004-08-23 2006-10-10 Air Products And Chemicals, Inc. Method to protect internal components of semiconductor processing equipment using layered superlattice materials
US20060037861A1 (en) * 2004-08-23 2006-02-23 Manos Paul D Electrodeposition process
JP5058548B2 (ja) * 2006-10-02 2012-10-24 株式会社アルバック アルミニウム材の表面処理方法
TWI411703B (zh) * 2006-10-02 2013-10-11 Ulvac Inc 鋁合金之表面處理法及鎂合金之表面處理法
KR101143571B1 (ko) 2009-12-28 2012-05-22 그린웍스 주식회사 중불화암모늄을 분해하여 불화수소가스를 불화수소 수용액으로 회수하는 방법 및 장치
US8748515B2 (en) 2010-04-15 2014-06-10 Henry Company Llc Mixtures and emulsions for use in providing strength to gypsum compositions
JP5876259B2 (ja) * 2011-04-14 2016-03-02 信越化学工業株式会社 窒化アルミニウム膜によって被覆された部材の製造方法
US20220195605A1 (en) * 2019-10-04 2022-06-23 Showa Denko K.K. Corrosion-resistant member
US20220243072A1 (en) * 2020-03-11 2022-08-04 Showa Denko K.K. Corrosion-resistant member

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE393994A (de) 1932-12-21
DE1198074B (de) 1957-09-18 1965-08-05 Aluminum Co Of America Verfahren zur Vorbehandlung von Halbzeug und Fertigteilen aus einer Aluminiumlegierung
JPS6133752A (ja) 1984-07-26 1986-02-17 Toyota Central Res & Dev Lab Inc 複合アルミニウム部材の製造方法
JP2867376B2 (ja) 1988-12-09 1999-03-08 ステラケミファ株式会社 フッ化不動態膜が形成された金属材料、その金属材料を用いたガス装置、並びに該フッ化不動態膜の形成方法
EP0460700B1 (de) 1990-06-07 1997-04-16 Applied Materials, Inc. Korrosionsbeständiger Schutzüberzug auf Aluminiumsubstrat oder Oberfläche und Verfahren zur Herstellung derselben
US5069938A (en) * 1990-06-07 1991-12-03 Applied Materials, Inc. Method of forming a corrosion-resistant protective coating on aluminum substrate
JP2986859B2 (ja) 1990-07-05 1999-12-06 三菱アルミニウム株式会社 アルミニウム合金材およびその製造方法
JPH051365A (ja) 1991-06-25 1993-01-08 Kokusai Electric Co Ltd 金属表面処理方法
US5756222A (en) 1994-08-15 1998-05-26 Applied Materials, Inc. Corrosion-resistant aluminum article for semiconductor processing equipment
FR2730746B1 (fr) * 1995-02-16 1997-04-30 Fond Et Ateliers Du Belier Procede de mouillage d'un insert en aluminium dans une piece moulee en aluminium
EP0770702A1 (de) 1995-10-23 1997-05-02 DECHEMA Deutsche Gesellschaft für Chemisches Apparatewesen, Chemische Technik und Biotechnologie e.V. Verfahren zur Erhöhung der Korrosionsbeständigkeit von Legierungen auf der Basis TiAl

Also Published As

Publication number Publication date
DE60019985T2 (de) 2006-05-04
US20020179192A1 (en) 2002-12-05
JP2001040464A (ja) 2001-02-13
JP4054148B2 (ja) 2008-02-27
EP1026281A3 (de) 2001-02-14
US6406799B1 (en) 2002-06-18
EP1026281A2 (de) 2000-08-09
EP1026281B1 (de) 2005-05-11

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