DE60118061D1 - Nichtflüchtiger Halbleiterspeicher - Google Patents

Nichtflüchtiger Halbleiterspeicher

Info

Publication number
DE60118061D1
DE60118061D1 DE60118061T DE60118061T DE60118061D1 DE 60118061 D1 DE60118061 D1 DE 60118061D1 DE 60118061 T DE60118061 T DE 60118061T DE 60118061 T DE60118061 T DE 60118061T DE 60118061 D1 DE60118061 D1 DE 60118061D1
Authority
DE
Germany
Prior art keywords
semiconductor memory
volatile semiconductor
volatile
memory
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60118061T
Other languages
English (en)
Other versions
DE60118061T2 (de
Inventor
Yasuhiro Shimada
Yoshihisa Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE60118061D1 publication Critical patent/DE60118061D1/de
Application granted granted Critical
Publication of DE60118061T2 publication Critical patent/DE60118061T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/10Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
    • H01L27/105Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/78391Field effect transistors with field effect produced by an insulated gate the gate comprising a layer which is used for its ferroelectric properties

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
DE60118061T 2000-06-19 2001-06-19 Nichtflüchtiger Halbleiterspeicher Expired - Lifetime DE60118061T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000182643A JP2002009255A (ja) 2000-06-19 2000-06-19 不揮発半導体記憶装置
JP2000182643 2000-06-19

Publications (2)

Publication Number Publication Date
DE60118061D1 true DE60118061D1 (de) 2006-05-11
DE60118061T2 DE60118061T2 (de) 2006-08-17

Family

ID=18683366

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60118061T Expired - Lifetime DE60118061T2 (de) 2000-06-19 2001-06-19 Nichtflüchtiger Halbleiterspeicher

Country Status (7)

Country Link
US (1) US6455883B2 (de)
EP (1) EP1168454B1 (de)
JP (1) JP2002009255A (de)
KR (1) KR100655028B1 (de)
CN (1) CN1181553C (de)
DE (1) DE60118061T2 (de)
TW (1) TW511275B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004172355A (ja) * 2002-11-20 2004-06-17 National Institute Of Advanced Industrial & Technology 強誘電体メモリアレイ
JP4831562B2 (ja) * 2005-06-23 2011-12-07 富士通株式会社 強誘電体メモリ装置
FR2973553B1 (fr) * 2011-03-31 2013-03-29 Thales Sa Procédé de mise en oeuvre d'une jonction tunnel ferroelectrique, dispositif comprenant une jonction tunnel ferroelectrique et utilisation d'un tel dispositif
US11502103B2 (en) * 2018-08-28 2022-11-15 Intel Corporation Memory cell with a ferroelectric capacitor integrated with a transtor gate
US11018239B2 (en) * 2019-04-13 2021-05-25 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor device and manufacturing method thereof
US11980037B2 (en) 2020-06-19 2024-05-07 Intel Corporation Memory cells with ferroelectric capacitors separate from transistor gate stacks

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5578846A (en) * 1995-03-17 1996-11-26 Evans, Jr.; Joseph T. Static ferroelectric memory transistor having improved data retention
KR0141160B1 (ko) * 1995-03-22 1998-06-01 김광호 강유전체 메모리 장치 및 그 제조방법

Also Published As

Publication number Publication date
CN1181553C (zh) 2004-12-22
KR100655028B1 (ko) 2006-12-07
CN1350333A (zh) 2002-05-22
EP1168454B1 (de) 2006-03-22
KR20010113555A (ko) 2001-12-28
JP2002009255A (ja) 2002-01-11
DE60118061T2 (de) 2006-08-17
EP1168454A2 (de) 2002-01-02
US20010052607A1 (en) 2001-12-20
EP1168454A3 (de) 2004-03-03
TW511275B (en) 2002-11-21
US6455883B2 (en) 2002-09-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP