DE60042938D1 - Plasma-Stromversorgung mit Schutzschaltung - Google Patents

Plasma-Stromversorgung mit Schutzschaltung

Info

Publication number
DE60042938D1
DE60042938D1 DE60042938T DE60042938T DE60042938D1 DE 60042938 D1 DE60042938 D1 DE 60042938D1 DE 60042938 T DE60042938 T DE 60042938T DE 60042938 T DE60042938 T DE 60042938T DE 60042938 D1 DE60042938 D1 DE 60042938D1
Authority
DE
Germany
Prior art keywords
power supply
protection circuit
plasma power
plasma
protection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60042938T
Other languages
English (en)
Inventor
Paul George Bennett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9917047.4A external-priority patent/GB9917047D0/en
Priority claimed from GB0009669A external-priority patent/GB0009669D0/en
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Application granted granted Critical
Publication of DE60042938D1 publication Critical patent/DE60042938D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
    • H02H7/10—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers
    • H02H7/12—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers for static converters or rectifiers
    • H02H7/122—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers for static converters or rectifiers for inverters, i.e. dc/ac converters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/493—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode the static converters being arranged for operation in parallel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32522—Temperature
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/12—Arrangements for reducing harmonics from ac input or output
    • H02M1/126—Arrangements for reducing harmonics from ac input or output using passive filters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/538—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a push-pull configuration
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Inverter Devices (AREA)
  • Protection Of Static Devices (AREA)
DE60042938T 1999-07-22 2000-07-21 Plasma-Stromversorgung mit Schutzschaltung Expired - Lifetime DE60042938D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9917047.4A GB9917047D0 (en) 1999-07-22 1999-07-22 Power supplies
GB0009669A GB0009669D0 (en) 2000-04-20 2000-04-20 Power supplies

Publications (1)

Publication Number Publication Date
DE60042938D1 true DE60042938D1 (de) 2009-10-22

Family

ID=26244133

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60011874T Expired - Lifetime DE60011874T2 (de) 1999-07-22 2000-07-21 Stromversorgungen mit schutzschaltungen
DE60042938T Expired - Lifetime DE60042938D1 (de) 1999-07-22 2000-07-21 Plasma-Stromversorgung mit Schutzschaltung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE60011874T Expired - Lifetime DE60011874T2 (de) 1999-07-22 2000-07-21 Stromversorgungen mit schutzschaltungen

Country Status (8)

Country Link
EP (2) EP1272014B1 (de)
JP (2) JP4884624B2 (de)
KR (1) KR20010075262A (de)
CN (1) CN1342340B (de)
AU (1) AU6358600A (de)
DE (2) DE60011874T2 (de)
HK (1) HK1045766B (de)
WO (1) WO2001008288A2 (de)

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US7180758B2 (en) * 1999-07-22 2007-02-20 Mks Instruments, Inc. Class E amplifier with inductive clamp
US6469919B1 (en) 1999-07-22 2002-10-22 Eni Technology, Inc. Power supplies having protection circuits
US6868310B2 (en) * 2001-04-06 2005-03-15 Eni Technology, Inc. Predictive failure scheme for industrial thin films processing power delivery system
JP3641785B2 (ja) * 2002-08-09 2005-04-27 株式会社京三製作所 プラズマ発生用電源装置
US6831423B2 (en) * 2003-03-28 2004-12-14 General Electric Company High Q impedance matching inverter circuit with automatic line regulation
DE10336881B4 (de) * 2003-08-11 2008-05-15 Hüttinger Elektronik GmbH & Co. KG Hochfrequenzanregungsanordnung mit einer Begrenzungsschaltung
JP4658506B2 (ja) * 2004-03-31 2011-03-23 浩史 滝川 パルスアークプラズマ生成用電源回路及びパルスアークプラズマ処理装置
JP4536468B2 (ja) * 2004-09-21 2010-09-01 パナソニック株式会社 Ｅ級増幅器、及びｅｅｒ変調増幅装置
DE502005003768D1 (de) 2005-10-17 2008-05-29 Huettinger Elektronik Gmbh HF-Plasmaversorgungseinrichtung
DE102006060350B4 (de) * 2006-12-20 2010-11-04 Puls Gmbh Schaltung zur Begrenzung mindestens einer Spannung und Verfahren zum Betrieb der Schaltung
EP2097920B1 (de) 2007-07-23 2017-08-09 TRUMPF Hüttinger GmbH + Co. KG Plasmaversorgungseinrichtung
JP4858556B2 (ja) * 2009-02-23 2012-01-18 船井電機株式会社 プッシュプルインバータ、及びプッシュプルインバータに用いられるトランス
US8707922B2 (en) 2009-12-15 2014-04-29 Federal Mogul Ignition Company Spark ignition device for an internal combustion engine and central electrode assembly therefor
DE102010008777A1 (de) * 2010-02-22 2011-08-25 Siemens Aktiengesellschaft, 80333 Hochfrequenzversorgung einer Last ohne Impedanzanpassung
CN102413622A (zh) * 2011-07-27 2012-04-11 台达电子企业管理（上海）有限公司 照明装置、其中的电子式安定器及其保护方法
JP5797313B1 (ja) 2014-08-25 2015-10-21 株式会社京三製作所 回生サーキュレータ、高周波電源装置、及び高周波電力の回生方法
JP2016152640A (ja) * 2015-02-16 2016-08-22 Tdk株式会社 共振インバータおよび共振型電源装置
US10177685B2 (en) * 2015-09-10 2019-01-08 Texas Instruments Incorporated Switching converter with improved power density
KR101995684B1 (ko) 2016-09-30 2019-07-02 가부시키가이샤 알박 전원 장치
JP6829879B2 (ja) * 2017-03-13 2021-02-17 国立大学法人横浜国立大学 線形増幅器、及び電力変換装置
US10546724B2 (en) * 2017-05-10 2020-01-28 Mks Instruments, Inc. Pulsed, bidirectional radio frequency source/load
EP3744173A1 (de) * 2017-11-27 2020-12-02 Zasso Group AG Vorrichtung zur unkrautinaktivierung
JP6714887B2 (ja) * 2019-05-28 2020-07-01 Tdk株式会社 共振インバータおよび共振型電源装置
DE102020104090A1 (de) 2020-02-17 2021-08-19 Comet Ag Hochfrequenzverstärker-Anordnung für einen Hochfrequenzgenerator
JP6810316B1 (ja) * 2020-04-23 2021-01-06 京都電機器株式会社 プラズマ加工装置用直流パルス電源装置

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Publication number Priority date Publication date Assignee Title
US4067057A (en) * 1976-06-25 1978-01-03 Pacific Electronic Enterprises Inc. DC to AC switching converter
GB2108786B (en) * 1981-11-05 1985-12-11 Sanyo Electric Co Induction heating apparatus
US4455600A (en) * 1982-06-07 1984-06-19 Lortec Power Systems, Inc. Single phase, double-ended thyristor inverter with choke-coupled impulse commutation
IL72925A0 (en) * 1983-10-07 1984-12-31 Sundstrand Corp Pulse width modulated inverter
US4719556A (en) * 1986-08-07 1988-01-12 Armstrong World Industries, Inc. Current and voltage limited inverter
JPH01103064A (ja) * 1987-10-15 1989-04-20 Toshiba Corp テレコントロール受信装置
DE68922049T2 (de) * 1988-09-06 1995-09-21 Toshiba Kawasaki Kk Pulsbreiten-modulierte Leistungsversorgung mit Unterdrückungsfähigkeit von Modulierungsfrequenzsignalkomponenten von Erdpotentialen.
US4916599A (en) * 1989-03-29 1990-04-10 Hyperpower, Inc. Switching power supply
JP2754411B2 (ja) * 1989-09-20 1998-05-20 富士電機株式会社 電力変換装置のスナバ回路
US5198969A (en) * 1990-07-13 1993-03-30 Design Automation, Inc. Soft-switching full-bridge dc/dc converting
IT1242227B (it) * 1990-10-15 1994-03-03 Ansaldo Spa Circuito di potenza per inverter a tensione impressa,a (2*n+1) livelli di tensione
US5314603A (en) * 1991-07-24 1994-05-24 Tokyo Electron Yamanashi Limited Plasma processing apparatus capable of detecting and regulating actual RF power at electrode within chamber
DE9109503U1 (de) * 1991-07-31 1991-10-17 Magtron Magneto Elektronische Geraete Gmbh, 7583 Ottersweier Schaltungsanordnung für ein Stromversorgungsgerät für Geräte und Anlagen der Plasma- und Oberflächentechnik
WO1993021685A1 (en) * 1992-04-16 1993-10-28 Advanced Energy Industries, Inc. Stabilizer for switch-mode powered rf plasma processing
JPH0645082A (ja) * 1992-07-27 1994-02-18 Matsushita Electric Works Ltd 無電極放電灯点灯装置
US5471376A (en) * 1993-03-05 1995-11-28 Digital Equipment Corporation Low-loss active voltage-clamp circuit for single-ended forward PWM converter
JP2910518B2 (ja) * 1993-07-30 1999-06-23 サンケン電気株式会社 ブリッジ型インバ−タ装置
JP3261911B2 (ja) * 1995-01-18 2002-03-04 富士電機株式会社 半導体装置のスナバ回路
DE19522369A1 (de) * 1995-06-20 1997-01-02 Niepenberg Dalex Werke Gleichrichter-Netzteil
JP3402923B2 (ja) * 1996-04-30 2003-05-06 松下電工株式会社 電源装置
JPH10241895A (ja) * 1996-11-04 1998-09-11 Applied Materials Inc プラズマシース発生高調波をフィルタリングすることによるプラズマプロセス効率の改善
JPH10164860A (ja) * 1996-11-29 1998-06-19 Toshiba Lighting & Technol Corp 電源装置、放電灯点灯装置および照明装置
JPH11136952A (ja) * 1997-10-28 1999-05-21 Matsushita Electric Works Ltd インバータ装置
US5910886A (en) * 1997-11-07 1999-06-08 Sierra Applied Sciences, Inc. Phase-shift power supply
JPH11341802A (ja) * 1998-02-14 1999-12-10 Toshiyasu Suzuki 共振型ａｃ―ｄｃコンバ―タ装置

Also Published As

Publication number Publication date
CN1342340A (zh) 2002-03-27
WO2001008288A3 (en) 2001-10-11
EP1145411B1 (de) 2004-06-30
JP4884624B2 (ja) 2012-02-29
EP1145411A3 (de) 2002-03-06
AU6358600A (en) 2001-02-13
JP5258836B2 (ja) 2013-08-07
DE60011874T2 (de) 2005-08-25
HK1045766A1 (en) 2002-12-06
EP1272014A1 (de) 2003-01-02
EP1272014B1 (de) 2009-09-09
CN1342340B (zh) 2011-02-09
HK1045766B (zh) 2011-11-04
JP2003524361A (ja) 2003-08-12
KR20010075262A (ko) 2001-08-09
WO2001008288A2 (en) 2001-02-01
JP2010220471A (ja) 2010-09-30
DE60011874D1 (de) 2004-08-05
EP1145411A2 (de) 2001-10-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: HEYER, V., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW., 806