CN1342340B - 具有保护电路的电源 - Google Patents
具有保护电路的电源 Download PDFInfo
- Publication number
- CN1342340B CN1342340B CN008014787A CN00801478A CN1342340B CN 1342340 B CN1342340 B CN 1342340B CN 008014787 A CN008014787 A CN 008014787A CN 00801478 A CN00801478 A CN 00801478A CN 1342340 B CN1342340 B CN 1342340B
- Authority
- CN
- China
- Prior art keywords
- circuit
- output
- voltage
- power
- inverter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- 230000001681 protective effect Effects 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 3
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- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
- H02H7/10—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers
- H02H7/12—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers for static converters or rectifiers
- H02H7/122—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers for static converters or rectifiers for inverters, i.e. dc/ac converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/493—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode the static converters being arranged for operation in parallel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32522—Temperature
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/12—Arrangements for reducing harmonics from ac input or output
- H02M1/126—Arrangements for reducing harmonics from ac input or output using passive filters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/538—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a push-pull configuration
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Inverter Devices (AREA)
- Protection Of Static Devices (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9917047.4A GB9917047D0 (en) | 1999-07-22 | 1999-07-22 | Power supplies |
GB9917047.4 | 1999-07-22 | ||
GB0009669A GB0009669D0 (en) | 2000-04-20 | 2000-04-20 | Power supplies |
GB0009669.3 | 2000-04-20 | ||
PCT/US2000/019835 WO2001008288A2 (en) | 1999-07-22 | 2000-07-21 | Power supplies having protection circuits |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009101456203A Division CN101599712B (zh) | 1999-07-22 | 2000-07-21 | 具有保护电路的电源 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1342340A CN1342340A (zh) | 2002-03-27 |
CN1342340B true CN1342340B (zh) | 2011-02-09 |
Family
ID=26244133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN008014787A Expired - Lifetime CN1342340B (zh) | 1999-07-22 | 2000-07-21 | 具有保护电路的电源 |
Country Status (8)
Country | Link |
---|---|
EP (2) | EP1145411B1 (zh) |
JP (2) | JP4884624B2 (zh) |
KR (1) | KR20010075262A (zh) |
CN (1) | CN1342340B (zh) |
AU (1) | AU6358600A (zh) |
DE (2) | DE60042938D1 (zh) |
HK (1) | HK1045766B (zh) |
WO (1) | WO2001008288A2 (zh) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7180758B2 (en) * | 1999-07-22 | 2007-02-20 | Mks Instruments, Inc. | Class E amplifier with inductive clamp |
US6469919B1 (en) | 1999-07-22 | 2002-10-22 | Eni Technology, Inc. | Power supplies having protection circuits |
US6868310B2 (en) * | 2001-04-06 | 2005-03-15 | Eni Technology, Inc. | Predictive failure scheme for industrial thin films processing power delivery system |
JP3641785B2 (ja) * | 2002-08-09 | 2005-04-27 | 株式会社京三製作所 | プラズマ発生用電源装置 |
US6831423B2 (en) * | 2003-03-28 | 2004-12-14 | General Electric Company | High Q impedance matching inverter circuit with automatic line regulation |
DE10336881B4 (de) | 2003-08-11 | 2008-05-15 | Hüttinger Elektronik GmbH & Co. KG | Hochfrequenzanregungsanordnung mit einer Begrenzungsschaltung |
JP4658506B2 (ja) * | 2004-03-31 | 2011-03-23 | 浩史 滝川 | パルスアークプラズマ生成用電源回路及びパルスアークプラズマ処理装置 |
JP4536468B2 (ja) * | 2004-09-21 | 2010-09-01 | パナソニック株式会社 | E級増幅器、及びeer変調増幅装置 |
ATE392742T1 (de) | 2005-10-17 | 2008-05-15 | Huettinger Elektronik Gmbh | Hf-plasmaversorgungseinrichtung |
DE102006060350B4 (de) * | 2006-12-20 | 2010-11-04 | Puls Gmbh | Schaltung zur Begrenzung mindestens einer Spannung und Verfahren zum Betrieb der Schaltung |
WO2009012735A1 (de) | 2007-07-23 | 2009-01-29 | Hüttinger Elektronik Gmbh + Co. Kg | Plasmaversorgungseinrichtung |
JP4858556B2 (ja) * | 2009-02-23 | 2012-01-18 | 船井電機株式会社 | プッシュプルインバータ、及びプッシュプルインバータに用いられるトランス |
US8707922B2 (en) | 2009-12-15 | 2014-04-29 | Federal Mogul Ignition Company | Spark ignition device for an internal combustion engine and central electrode assembly therefor |
DE102010008777A1 (de) * | 2010-02-22 | 2011-08-25 | Siemens Aktiengesellschaft, 80333 | Hochfrequenzversorgung einer Last ohne Impedanzanpassung |
CN102413622A (zh) * | 2011-07-27 | 2012-04-11 | 台达电子企业管理(上海)有限公司 | 照明装置、其中的电子式安定器及其保护方法 |
JP5797313B1 (ja) * | 2014-08-25 | 2015-10-21 | 株式会社京三製作所 | 回生サーキュレータ、高周波電源装置、及び高周波電力の回生方法 |
JP2016152640A (ja) * | 2015-02-16 | 2016-08-22 | Tdk株式会社 | 共振インバータおよび共振型電源装置 |
US10177685B2 (en) * | 2015-09-10 | 2019-01-08 | Texas Instruments Incorporated | Switching converter with improved power density |
WO2018061932A1 (ja) | 2016-09-30 | 2018-04-05 | 株式会社アルバック | 電源装置 |
JP6829879B2 (ja) * | 2017-03-13 | 2021-02-17 | 国立大学法人横浜国立大学 | 線形増幅器、及び電力変換装置 |
US10546724B2 (en) * | 2017-05-10 | 2020-01-28 | Mks Instruments, Inc. | Pulsed, bidirectional radio frequency source/load |
EP3744173A1 (en) | 2017-11-27 | 2020-12-02 | Zasso Group AG | Weed inactivation device |
JP6714887B2 (ja) * | 2019-05-28 | 2020-07-01 | Tdk株式会社 | 共振インバータおよび共振型電源装置 |
DE102020104090A1 (de) | 2020-02-17 | 2021-08-19 | Comet Ag | Hochfrequenzverstärker-Anordnung für einen Hochfrequenzgenerator |
JP6810316B1 (ja) * | 2020-04-23 | 2021-01-06 | 京都電機器株式会社 | プラズマ加工装置用直流パルス電源装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4067057A (en) * | 1976-06-25 | 1978-01-03 | Pacific Electronic Enterprises Inc. | DC to AC switching converter |
US4719556A (en) * | 1986-08-07 | 1988-01-12 | Armstrong World Industries, Inc. | Current and voltage limited inverter |
US5045989A (en) * | 1988-09-06 | 1991-09-03 | Kabushiki Kaisha Toshiba | PWM power supply eliminating modulation-frequency components from ground potentials |
US5077651A (en) * | 1989-09-20 | 1991-12-31 | Fuji Electric Co., Ltd. | Snubber circuit of power converter |
US5747935A (en) * | 1992-04-16 | 1998-05-05 | Advanced Energy Industries, Inc. | Method and apparatus for stabilizing switch-mode powered RF plasma processing |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2108786B (en) * | 1981-11-05 | 1985-12-11 | Sanyo Electric Co | Induction heating apparatus |
US4455600A (en) * | 1982-06-07 | 1984-06-19 | Lortec Power Systems, Inc. | Single phase, double-ended thyristor inverter with choke-coupled impulse commutation |
IL72925A0 (en) * | 1983-10-07 | 1984-12-31 | Sundstrand Corp | Pulse width modulated inverter |
JPH01103064A (ja) * | 1987-10-15 | 1989-04-20 | Toshiba Corp | テレコントロール受信装置 |
US4916599A (en) * | 1989-03-29 | 1990-04-10 | Hyperpower, Inc. | Switching power supply |
US5198969A (en) * | 1990-07-13 | 1993-03-30 | Design Automation, Inc. | Soft-switching full-bridge dc/dc converting |
IT1242227B (it) * | 1990-10-15 | 1994-03-03 | Ansaldo Spa | Circuito di potenza per inverter a tensione impressa,a (2*n+1) livelli di tensione |
KR0184675B1 (ko) * | 1991-07-24 | 1999-04-15 | 이노우에 쥰이치 | 챔버내의 전극에 있어서의 실제의 rf파워를 검출 및 제어 가능한 플라즈마 처리장치 |
DE9109503U1 (de) * | 1991-07-31 | 1991-10-17 | Magtron Magneto Elektronische Geraete Gmbh, 7583 Ottersweier | Schaltungsanordnung für ein Stromversorgungsgerät für Geräte und Anlagen der Plasma- und Oberflächentechnik |
JPH0645082A (ja) * | 1992-07-27 | 1994-02-18 | Matsushita Electric Works Ltd | 無電極放電灯点灯装置 |
US5471376A (en) * | 1993-03-05 | 1995-11-28 | Digital Equipment Corporation | Low-loss active voltage-clamp circuit for single-ended forward PWM converter |
JP2910518B2 (ja) * | 1993-07-30 | 1999-06-23 | サンケン電気株式会社 | ブリッジ型インバ−タ装置 |
JP3261911B2 (ja) * | 1995-01-18 | 2002-03-04 | 富士電機株式会社 | 半導体装置のスナバ回路 |
DE19522369A1 (de) * | 1995-06-20 | 1997-01-02 | Niepenberg Dalex Werke | Gleichrichter-Netzteil |
JP3402923B2 (ja) * | 1996-04-30 | 2003-05-06 | 松下電工株式会社 | 電源装置 |
EP0840350A2 (en) * | 1996-11-04 | 1998-05-06 | Applied Materials, Inc. | Plasma apparatus and process with filtering of plasma sheath-generated harmonics |
JPH10164860A (ja) * | 1996-11-29 | 1998-06-19 | Toshiba Lighting & Technol Corp | 電源装置、放電灯点灯装置および照明装置 |
JPH11136952A (ja) * | 1997-10-28 | 1999-05-21 | Matsushita Electric Works Ltd | インバータ装置 |
US5910886A (en) * | 1997-11-07 | 1999-06-08 | Sierra Applied Sciences, Inc. | Phase-shift power supply |
JPH11341802A (ja) * | 1998-02-14 | 1999-12-10 | Toshiyasu Suzuki | 共振型ac―dcコンバ―タ装置 |
-
2000
- 2000-07-21 WO PCT/US2000/019835 patent/WO2001008288A2/en active IP Right Grant
- 2000-07-21 CN CN008014787A patent/CN1342340B/zh not_active Expired - Lifetime
- 2000-07-21 EP EP00950487A patent/EP1145411B1/en not_active Expired - Lifetime
- 2000-07-21 JP JP2001512689A patent/JP4884624B2/ja not_active Expired - Lifetime
- 2000-07-21 DE DE60042938T patent/DE60042938D1/de not_active Expired - Lifetime
- 2000-07-21 EP EP02015536A patent/EP1272014B1/en not_active Expired - Lifetime
- 2000-07-21 DE DE60011874T patent/DE60011874T2/de not_active Expired - Lifetime
- 2000-07-21 KR KR1020017003622A patent/KR20010075262A/ko active IP Right Grant
- 2000-07-21 AU AU63586/00A patent/AU6358600A/en not_active Abandoned
-
2002
- 2002-09-27 HK HK02107148.4A patent/HK1045766B/zh not_active IP Right Cessation
-
2010
- 2010-05-06 JP JP2010106631A patent/JP5258836B2/ja not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4067057A (en) * | 1976-06-25 | 1978-01-03 | Pacific Electronic Enterprises Inc. | DC to AC switching converter |
US4719556A (en) * | 1986-08-07 | 1988-01-12 | Armstrong World Industries, Inc. | Current and voltage limited inverter |
US5045989A (en) * | 1988-09-06 | 1991-09-03 | Kabushiki Kaisha Toshiba | PWM power supply eliminating modulation-frequency components from ground potentials |
US5077651A (en) * | 1989-09-20 | 1991-12-31 | Fuji Electric Co., Ltd. | Snubber circuit of power converter |
US5747935A (en) * | 1992-04-16 | 1998-05-05 | Advanced Energy Industries, Inc. | Method and apparatus for stabilizing switch-mode powered RF plasma processing |
Non-Patent Citations (3)
Title |
---|
US -4067057 A,全文. |
全文. |
同上. |
Also Published As
Publication number | Publication date |
---|---|
JP4884624B2 (ja) | 2012-02-29 |
EP1145411B1 (en) | 2004-06-30 |
AU6358600A (en) | 2001-02-13 |
CN1342340A (zh) | 2002-03-27 |
HK1045766A1 (en) | 2002-12-06 |
EP1145411A3 (en) | 2002-03-06 |
DE60011874D1 (de) | 2004-08-05 |
DE60042938D1 (de) | 2009-10-22 |
EP1272014B1 (en) | 2009-09-09 |
JP2010220471A (ja) | 2010-09-30 |
KR20010075262A (ko) | 2001-08-09 |
WO2001008288A2 (en) | 2001-02-01 |
JP5258836B2 (ja) | 2013-08-07 |
WO2001008288A3 (en) | 2001-10-11 |
HK1045766B (zh) | 2011-11-04 |
EP1272014A1 (en) | 2003-01-02 |
DE60011874T2 (de) | 2005-08-25 |
EP1145411A2 (en) | 2001-10-17 |
JP2003524361A (ja) | 2003-08-12 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: MKS EQUIPMENT CO.,LTD. Free format text: FORMER OWNER: ENI TECHNOLOGY CO.,LTD. Effective date: 20090710 |
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TA01 | Transfer of patent application right |
Effective date of registration: 20090710 Address after: Massachusetts USA Applicant after: MKS Instruments Inc. Address before: American New York Applicant before: ENI Technology Co. |
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