TW595061B - Power supplies having protection circuits - Google Patents

Abstract

A power supply including an inverter receiving a DC input signal from a DC input source (11). The inverter is comprised of two half bridges (S1A, S2A and S1B, S2B). Each inverter is driven by a signal source (13A, 13B), which outputs an AC signal. The output from each inverter is input to a first stage harmonic filter. The power supply includes an output circuit that includes first and second rectifiers (D1, D2) arranged about a point so that if the inverter attempts to drive the point beyond a predetermined first and second voltage, the respective rectifier conducts in order to return at least one of power and current to the DC input source. The output from the first harmonic filter (L1A, C1; L1B, C1) is output to a second harmonic filter (L2, C2) and is then output from the power supply.

Description

595061 A7

FIELD OF THE INVENTION The present invention relates to a power supply for supplying AC power, and more particularly, to a protection circuit for a switching portion of a power supply. BACKGROUND OF THE INVENTION Radio frequency (RF) energy is used in a variety of industries to process materials through induction heating, dielectric heating, and plasma excitation. Electrical destruction excitation can be in the form of induction, capacitance, or real electromagnetic (EM) waves, microwaves and other transformations. The supply and utilization of RF energy generators range from single-grade A transistor amplifiers that provide tens of watts to a variety of circuit patterns that provide several kilowatts of self-oscillating I-tube (read-type) generators. RF electrodes deposit and etch micron- and sub-micron-sized films. For this application—a typical power supply can include—line frequency transformer / rectifier / capacitor DC power supply and high frequency 及) linear power amplifiers. Typical power and frequency values can be as high as 10KW in the range of 400KHz to 60.0MHz. Linear power amplifiers use high frequency / very high frequency (HF / VHF) RF power transistors with high power divergence. In this way, the power supply or generator will have power that can be controlled to within 1 or 2% of the output load accuracy of 1 or 2%. The generator is usually specially configured to output to a predetermined load, typically 50 ohms, but it should be able to drive any load without failure, even if mismatched. Typical protection designs reduce power. For example, the drive level to a linear amplifier is reduced to a corresponding reduction in current or power dissipation. In a 50 ohm system, a change from a typical 50 ohm can be measured as reflected power. The driving level has been reduced to limit the anti-paper size to the Chinese National Standard (CNS) A4 (210 X 297 mm) (please read the precautions on the back before this page) J ^ T · · Staff of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the Consumer Cooperative 4 595061 V. Description of the invention (2) Radio power. Figure 1 shows a push-pull rf power amplifier with a typical transformer | Mahe, one of the typical transformers SI or S2 driven by a sine wave out of phase. A five-element harmonic rejection filter includes an inductor Li, and capacitors Cl, C2, and C4. Harmonic rejection filters typically determine a high purity or uniform sine wave output. Not shown can be a bias design for grade AB or grade B. Typically a bipolar junction surface transistor (Bjt) or a metal oxide semiconductor field effect transistor (MOSFET) can be used. The transformer D has a ratio selected to match the power required for a given DC supply voltage, usually 28V or 50V. The detailed circuit follows standard industrial applications designed for wideband hf / vhf power amplifiers as will be used for communication. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The amplifier in Figure 1 provides one major advantage, but several disadvantages. The main advantage is a wide-band design, which easily changes the output frequency only by changing the drive or input frequency. For a given output frequency, only the output filter needs to be changed. If the amplifier's basic linearity / purity is good enough, apply them together. The circuit in Figure 1 has the disadvantages of poor efficiency and high transistor power dissipation. Efficiency is theoretically not more than 70% but typically less than 50%. In order to solve the high-power divergence, many applications often use beryllium oxide (BE0) low-temperature electricity: expensive and special transistor technology. This often requires large air or water cooling radiators. A lot of information is published on RF linear amplifier designs. It is expected that any power supply manufacturer designing a generator may use a transistor manufacturer application circuit with a high degree of reliability. As can be seen in Figure 2, the circuit of Figure 2 utilizes different modes of operation that provide high efficiency and low power divergence. The paper in the circuit in Figure 2 drives the paper-size paper towel® national standard (CNS) A4 specification — 297 mm. 595061 5. Description of the invention (3) The dynamic signal is fixed to a square wave, so that the transistor is now switching instead of Linear portability mode order. Alas, the switches or transistors S1 and S2 of Fig. 1 operate in a fully-off and fully-on region. Operate the switch or transistor S1 in Figure 2 by switching from full on to complete: off. The output of the transformer D appears in the system-square wave. Includes inductors LI, L2, and capacitors. , Heart A four-element filter filters out the required fundamental frequency to generate _sine wheel out. Capacitor C4 is filtered by a wire; the leather device provides an inductive output that repels all wave currents. Although the voltage of the transistor and transformer is square, the current is sinusoidal. Efficiency can now be 100%, and typically falls in the range of 80-95%. Such a circuit is usually referred to as a resonant converter or converter, rather than an amplifier. The circuit printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs has some disadvantages. Filters are sufficiently selected for a particular output frequency so that only a fixed or narrow frequency range or band operation is possible. At the same time, the output power cannot be controlled directly. Unlike the ground in Figure 丨, the circuit in Figure 2 cannot be directly connected to a line or socket voltage. Instead, the DC input of Figure 2 needs to be adjusted using an additional power converter typically implemented using a switching converter. In addition, mismatched loads can cause high circulating currents between the oscilloscope and the transistor. By limiting the DC input current, the circulating current may not be limited. SUMMARY OF THE INVENTION In one aspect of the invention, a power supply circuit having a DC input provides AC power to a load. An inverter produces an AC output, and an output circuit directly receives the AC output and feeds it to a load. The output circuit includes a paper scale connected to one point in the output circuit, which is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm). 5. Description of the invention (4) The first and second rectifiers, if The converter attempts to drive the point to a voltage exceeding a predetermined positive voltage or a predetermined negative voltage, and then one of the first and first rectifiers is turned on to return the voltage and / or current to the DC voltage source. The voltage and / or current is fed back into the converter. This can be achieved, for example, by connecting the first rectifier between the negative input of the ground point or the DC input and the point, and connecting the second rectifier between the point and the positive input of the DC voltage. Ming will feel that when any rectifier is on, these are clamped to the voltage of its associated individual input at the DC input. The rectifiers can be implemented as diodes. In alternative configurations, the rectifiers can be connected to a discrete voltage source or multiple voltage sources, and the clamping will occur at a voltage determined by the voltage source (s). The invention includes a constant voltage draw-out if the first and second rectifiers are implemented using, for example, a Zener diode. The Zener diodes can emit at least some voltage and / or current, and they can have an associated transistor that can borrow to dissipate higher levels of energy. In either case, divergence occurs through heat dissipation. Zener diodes can be connected back-to-back so that each diode performs a rectifying action on the other diode. Alternatively, a suitable, discrete rectifier diode or rectifier circuit is used in series with each Zener. In a architecture where the first and second diodes are connected to either side of the point, each diode can be implemented by forming a diode string chain like a Schottky diode, and The diodes can be structured in a single ceramic matrix. The converter may include at least two switching devices. The power supply circuit may also include a point-to-point inductor connected between the two switching devices, so that the charging and discharging of these devices, and any associated capacitors are roughly inductive electricity. A4 Regulations (210 X 297 mm) 7 595061 V. Description of the Invention (5) Stream. In still another embodiment of the present invention, a power supply circuit has = 1 input 'and supplies AC power to a load. The -converter produces -f input iU 'and the wheel output circuit directly receives the AC output and feeds it to the load. The wheel-out circuit further includes a constant voltage draw to diverge the voltage and / or current when the converter seeks to drive a-predetermined point in the circuit to a-voltage outside the -Long voltage band. In another aspect of the invention, a power supply includes a power supply output and first and second power supply circuits as defined above. The wheels of each of the first and first power circuits are connected in parallel to the output of the supplier. The individual k-sources switch the converters of the first and second supplier circuits, and control a circuit for changing the relative phase of the source such as βH to adjust the power at the output of the supplier. These power supply circuits can be connected in series or in parallel. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs In another aspect of the invention, a power supply supplies AC current to a load. The first and second power supply circuits each include a converter. A parent stream signal source supplies an AC signal to switch the converter, and supplies the AC signal to individual power outputs. The power output is connected to the supply output in parallel or in series through a harmonic filter. A control circuit changes the relative phase of the AC signal to adjust the power at the output of the supplier. In a further aspect of the invention, an input circuit for a voltage converter has at least two switching devices. The circuit includes an inductor connected to a point between the devices so that the charging and discharging of the devices, and any associated electrical valleys, generally pass through an induced current. This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) A7 B7 V. Description of the invention (6) For a more complete understanding of the invention, its purpose and advantages, please refer to the following description and drawings. The simple description of the Zhou style can be used to implement the invention in many ways, and specific related inventions will now be described by way of example with reference to the accompanying drawings, in which: Figures 1 and 2 are circuit diagrams implemented in the conventional technology described above; Figure 3 FIG. 4 is a power supply circuit configured according to the principles of the present invention; FIG. 4 illustrates a related invention in which circuits are connected in series to produce a combined output; FIG. 5 is a circuit in which circuits are connected in parallel to produce a combined power output A related invention; Figure 6 is a related invention in which each half of a switching bridge is protected by a single clamping diode pair; Figure 7 is a resonant circuit and a single switch providing an output and a single clamping two A related invention of a polar pair protecting the circuit; Figure 8 is a three-level implementation of the circuit of Figure 7; printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs; Figure 9 shows a half-bridge converter and a protection Related inventions for circuits; Figures 10-12 illustrate alternative configurations for switching devices based on special switching devices; Figure 13 has a parallel connection to one of the clamping diodes The circuit of a capacitor; Figure 14 is a capacitor with a capacitor in parallel with each clamped diode ^ Dimension meaning --- 595061 A7 B7 V. Description of the invention (Road; Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Figure 15 shows a circuit with a voltage across a string of capacitors and diodes; Figure 16 shows an inductor and a ruler in a protective circuit [circuit of the circuit; Figure 17 shows a circuit for improving the filter network A mOsfet circuit operated by the circuit; FIG. 18 is a circuit for resolving the device capacitance for a replacement input circuit of a current transformer; FIG. 19 shows a converter current for resolving the device capacitance using multiple FETs Figure 20 is an improvement on the input circuit of Figure 18; Figure 21 shows a converter with an additional LC series circuit; Figure 22 illustrates a power supply circuit for changing the clamping voltage; Figures 23-26 illustrate alternative constant voltage draw configurations for use with the converter of Figure 22; Figures 27a-27m illustrate waveforms taken from an example half-bridge converter incorporating a protection circuit; Figure 28a -28f An example illustrating the comparison waveforms of a half-bridge converter that never incorporates a protection circuit; Figure 29 is a block diagram of a control circuit for a power supply; Figure 30 is a plasma using a protection circuit Block diagram of the system; and Figure 31 is a matching network for the control circuit of Figure 30. For a detailed description of the invention, please read the note on the back first

Page size This paper is sized for China National Standard (CNS) A4 (210 X 297 mm) 10

595061 V. Description of the invention (8) Please refer to Figure 3, a voltage converter circuit is generally indicated at 10, and has a direct current (DC) voltage source input at u and an alternating current (Ac) output at 12. At first please note that in the description diagram, the switch will generally refer to using a follower number S; the capacitor will refer to using a follower number C; the inductor will refer to using a follower number L; the diode will refer to In order to use a number followed by D; and the transformer will be referred to as using a number followed by T. In a circuit with a generally symmetrical pattern, each of the above reference numbers may be followed by a letter to indicate general similarity, Symmetric element. The switches S1, S2 receive as input individual individual out-of-phase square waves from a signal source or generator 13. The square wave signal switches §1 and conducts in such a manner that the polarity of the voltage across the inductor is reversed at any time when li is switched on or M is turned on. When the No. 13 source drives the switches 8b and 82 in this manner, the switches sj and S cooperate with each other to convert the DC input signal into AC ^ applied to the inductor L1. This produces an AC output at 12 with components blocked by capacitor C4. The frequency of the output signal at 12 depends on the frequency of the signal output from the signal source 13. A four-element% wave filter consisting of inductors L1, L2 * capacitors ^, ^ generally operates as described above. The inductor 1 and the capacitor C1 form the first stage of the harmonic filter, and the inductor L2 and the capacitor C2 form the second stage of the harmonic filter. The output filter removes the harmonic components of the signal input to the inductor L1 to improve the purity of the output sine wave and to match the output power for a given input voltage to an output impedance of typically 50 ohms. As mentioned above, the circuits in Figures 1 and 2 can be highly compromised by mismatching the negative paper size to the applicable Chinese National Standard (CNS) A4 specification (210 X 297 mm) (please read the precautions on the back before-this page) ) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 11 595061 A7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention Description (9) The circulating current generated by the load. A pair of clamped diodes or rectifiers 0 and D2 inserted between the first and second stage harmonic filters mitigates potential damage caused by circulating currents. Diode D2 extends from the negative channel of DC input source 11 to node X. Diode D1 extends from node X to the DC input source. Operate on the 'right circuit | try to drive node X to exceed the rail voltage, in one direction or the other, the diode associated with the channel will turn on and become conductive. When the diode is turned on, the diode clamps the node to the steering voltage again and feeds back excess voltage and / or current to the converter, especially the input and capacitor C3. More specifically, if the circuit tries to drive the node χ beyond the voltage at the positive path of the DC input 11, the diode is called on, and a current path including the body diode of the switch S2 is provided back to the DC input voltage source. 11 和 Capacitor C3. Similarly, if the circuit attempts to drive node χ below the voltage at the negative input of DC input 11, the diode 02 is turned on, and a current path including the body diode of switch s 1 is provided back to the DC input. Voltage source 11 and capacitor C3. When the effect of mismatched load increases with frequency, the circuit in Figure 3 enables the converter to be used at previously difficult to reach frequencies. Fig. 4 illustrates a related invention in which the outputs of two power supply circuits are arranged in series. Figure 4 includes the two halves A and B configured in a full-bridge architecture. The circuit of Fig. 4 enables the power at the output 12 to be adjusted by changing the phase between the switching signals applied to each of the two halves of eight and six. The first half of FIG. 4 includes a pair of switches 81 and S2A that receive one of a pair of AC signals output by the signal source UA. The switches S1A and S2a are connected in series between the negative and positive voltage rails of the DC power source 11. The output from the switch 81. The output is applied in combination with the inductor L2A and the capacitors gC1A, C2A. The paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm). Page 595061 A7 __ B7 V. Description of the Invention (10) An inductor L2A which is a two-stage, four-element harmonic filter. A first clamped diode D1A has a negative terminal or cathode connected to the positive track of the DC input source 11, and a positive terminal or anode connected between the inductors LI A and L2A. A second clamped diode D2 A has a positive terminal or anode connected to the negative track of the DC input source 11, and a negative terminal or cathode connected to the positive end of the clamped diode d1a. The output from the harmonic filter is connected to the first tap of the transformer T1. The clamped diodes D1A, D2 A provide protection to the left half of the circuit in Figure 4. When the circuit attempts to drive the voltage at the node XA beyond the positive orbit of the dc input 11, the diode D1A is turned on, thereby clamping the voltage at the node XA to the positive voltage of the DC input source 11 and a path Provided back to the DC input voltage source 11 and capacitor C3. Similarly, when the circuit attempts to drive node XA below the negative rail voltage of DC input 11, diode D2A is turned on, the voltage at node XA is clamped to about the negative rail voltage of DC input source 11, and a current The path is provided back to the DC input voltage source 11 and the capacitor C3, thereby protecting the left half of the circuit of FIG. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The circuit in Figure 4 also includes a second half B containing switches SIB and S2B. A signal source 13B outputs a pair of AC signals to the switches SIB, S2B. Please note that the signal sources 13A, 13B can be combined into a single unit. Half b also includes a four-element, two-stage harmonic filter composed of inductors LIB, L2B and capacitors C1B, C2B. The half B also includes a pair of clamped diodes DIB, D2B arranged in the half B as described in the half a. The output from circuit half B is connected to one tap of transformer T1. The paper size of the circuit half is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 13 595061 A7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs ---- B7 ---------- 5. Description of the invention (11) B operates as described with respect to circuit half A. Transformer D provides isolation between circuit halves A and B and output 12. The circuit halves a * b are connected in series through the input coil of the transformer τι. The circuit halves A, B are combined in series so that changing the phase between the switching signals controlling each half changes the power at the output 12. In particular, when the switch S1A and the switch S1B are actuated and simultaneously deactivated, the switches s1a, sib are operated in the same phase or 0 degree phase. Conversely, if the switch si A is turned off and the switch S1B is turned on, and the switch S1A is turned on and the switch S1B is turned off, the switch is called a different phase or a 180-degree phase. The same term applies to each switch S2A, S2B. The phase between each circuit half a, B is determined by a phase controller 14 which supplies an output signal to each signal source 13A, 13B to change the relative phase between each circuit half. When the circuit half a * b is operated at 180 degrees or out of phase, the maximum power is generated at output 12. When the circuit halves A and B are operated in 0 degree phase or in phase, the minimum power is generated at output 12. When the phase is zero, each half sees the same open circuit regardless of the load impedance. Transformer T1 effectively combines the output in series and does not require a blocking capacitor before output 12. The circuit components that form the harmonic filter in each circuit half A * B must be matched or equal to determine a zero output with a zero degree phase. For example, the values of B18, B12, € 18, and € 28 should be equal to the values of 1 ^, L2B, C1B, and C2B. Fig. 5 illustrates a related invention in which the first circuit half a and the second circuit half b are combined in parallel. The circuit half A includes a pair of switches S1A, S2A that receives one of the individual ac input signals from a signal generator 13A that can be combined with the signal source 13B to form a single unit. The switches S1A and S2A are connected in series. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm). 14 (Please read the note on the back? Matters on this page). -N · 595061

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

Between the individual positive and negative tracks of the DC input source 11. The outputs from switches S1a, s2a are applied to a four-element, two-stage harmonic filter composed of inductors L1A, L2A and capacitors CIA, C2A. A pair of clamped diodes D1A, D2A are arranged in series between 1) (: the individual positive and negative orbits of the input source u. The negative end or cathode of diode D1A is connected to 1) (: the positive orbit of the source, and the diode The positive terminal or anode of D1A is connected to node χA. The negative terminal or cathode of diode D2A is connected to node χA, and the positive or negative pole of diode D2a is connected to the negative track of DC power source 11. From the circuit half a The output is determined by the voltage between the negative track of the DC input source U and the output from the four-element filter. The output from the filter is applied to a blocking capacitor C4, which blocks any 0 (: component of the output signal). The capacitor is also connected to the output 12. In operation, when the circuit attempts to drive the node χA beyond the threshold defined by the negative and positive paths of the DC source 11, the diodes D1A, D2A are clamped by providing a current path to Dc The input source n and the valley C3 protect the circuit elements of circuit half a. Circuit half B is similarly configured and operates similarly to circuit half a. As shown in Figure 5, each half A is controlled Change the phase between B and B to change the power at output 12 In particular, the maximum power is generated at the output 12 when the circuit halves Hachi and ^ operate at 0 degrees or in phase. Conversely, when the circuit halves A * B operate at 180 degrees or out of phase , A short circuit occurs, and the minimum power appears at the output 12. A phase controller provides the control signal to each signal generator 13A, 13B, and controls the relative phase between each circuit half A, B. When the phase is in At 80 degrees, each circuit is considered to be the same short-circuit with an unofficial load impedance. Please note that because of electricity (please read the note on the back? Matters on this page first) This Erding.

This paper size is applicable to Zhongguanjia Standard (CNS) A4 specifications ⑵G x 297 public hair -ϋ ϋ 1- 595061 A7 ____ B7 V. Description of the invention (13) The containers C2A and C2B are connected in parallel, so they can form a single component. The circuit components that form the harmonic filters in each of the circuit halves A and B must be matched or equal to determine a zero output with a 180 degree phase. For example, the values of L1A, L2a, C1A, and C2A should be equal to the values of LIB, L2B, C1B, and C2B. Fig. 6 depicts a circuit with circuit halves A, B having common elements cooperatively applied to a signal before output 12. The circuit half A includes a pair of switches 81 A, S2 a arranged between the individual positive and negative voltage channels of the mDC input source 11 in parallel. The outputs from switches S1A, S2A are input to an inductor lia. A signal source or generator 13 outputs control switches 81 and 82, which are actuated eight (: signals. Circuit half B includes a pair of switches SIB, arranged between individual positive and negative voltage rails of a DC input source ^ in series, S2B. The output from the switches 8 ^ and S2B is input to an inductor L1B. It can be combined with the signal source 13A to form a single signal source or the generator 13B provides an AC signal to control the activation and deactivation of the switches SIB, S2B Action. A pair of clamped diodes D1, D2 are arranged in parallel with the individual switch pairs "eight, S2A and S IB, S2B. When any circuit half a, B tries to drive the node χγ beyond the individual by the DC source 11 The clamped diodes D1, D2 provide a current path back to the DC input source 11 and the capacitor C3 at a predetermined voltage defined by the positive and negative channels. The capacitor C1 is configured between the negative voltage channel of the DC source 11 and the node χγ. The voltage between the negative voltage track of the DC source 11 and the node χγ defines an inductor L2 and a capacitor C2 to a second stage formed by a harmonic filter formed by inductors LIA, L2B, L2 and capacitors Cl, C2. Input voltage of one of the filters. Capacitor The paper size combined with each inductor L1A, L2B applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) _ 16 (Please read the precautions on the back before --- this page) · Intellectual Property of the Ministry of Economic Affairs Printed by the Consumer Cooperative of the Bureau 595061 5. The description of the invention (14 is used to provide the first phase of the harmonic filter.-The blocking capacitor C4 removes the dc component of the signal before the output of output 12. When any circuit half A When B and B try to drive node XY above the positive voltage rail of DC source 11 or below the negative voltage rail of DC # U2, clamp diodes D1, D2 to provide a current path back to DC input source u and capacitor C3. Therefore, which half of the circuit halves A and B drive the node χγ above the predetermined threshold value, clamping the diodes D1 and O2 to protect the first by operating a current path back to the DC source 11 and the capacitor C3. The circuit of Fig. 6. The circuit of Fig. 6 also includes a phase controller 14 for controlling the relative phase between the circuit halves A and B by generating a control # number for each signal source 138 and ΐ3β. Figure towel, when switching half a, off phase or zero degree phase The maximum power is provided at output 12 when operating, and the minimum power is provided at output 12 when the circuit halves A and B are out of phase or operated at 180 degrees. In the circuit in Figure 6, the inductors UA and L1B must be matched to determine the zero output in 180-degree phase. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, Figure 7 depicts the circuits of the circuit halves A, B with parallel combination to provide the _AC signal at the output 12. Referring to the circuit half A, the switch S1 a receives an AC signal from the signal source 13A. The switch S1A and a commutating inductor L3 A are arranged in series between individual negative and positive voltage rails of the DC power source 11. A capacitor C6A is provided in parallel with the switch S1A. The converter inductor L3A and the capacitor C6A cooperate to form a tank circuit, so that the circuit half a provides a single-end converter function. The tank circuit turns out _ a half-wave rectified sine wave. A load-bearing valley C 7 A goes from the switch S1A and the converter inductor l 3 A! ^ 17 This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 595061 A7 B7 V. Description of the invention ( 15) DC component of the signal output. Capacitor C7A couples the ACs together and determines the same AC voltage across the devices as will be seen in Figure 8. Note that L3A and L3B can be cross-coupled to promote equal sharing. The ratio of inductor L3A to LI A determines the change in stress of switch SI A. If the current through the inductor L3A is considerably larger than that through the inductor L1A, the change in the load through the inductor LI A will have a limited effect on the stress of the switch SI A. The circuit in Figure 7 has the disadvantage that the DC voltage across the C7A generates even harmonics and is somewhat load dependent. This means that a transient charging current may flow when some loads change. The output from the blocking capacitor C7A is input to the inductor L1A. The first switching half B includes a switch S1B driven by an AC signal output from the signal source 13B. The switch S1B and the commutating inductor L3B are connected in series between the individual negative and positive rails of the DC input source 11. A capacitor C6B is provided in parallel with the switch S1B. The commutating inductor L3B and the capacitor C6B form a tank circuit. The output from the switch S1B and the inductor L3B is applied to a blocking capacitor C7B that removes the DC component from the signal. Inductor L1B is connected to capacitor C7B. The inductors L1A and L1B are connected to each other at the node χζ, and an output is provided to the inductor L2 and the capacitor C2. The other end of the capacitor C2 is connected to the negative path of the DC voltage source 11. The capacitor is connected between the negative channel of the dc voltage source ^ and the node XZ. According to this, the inductors L1A, L2 and the capacitors c1, C2 form a two-stage harmonic chirper for the output from the circuit half A. Similarly, inductors LIB, L2 and capacitors ci, C2 form a two-stage harmonic filter for the output from circuit half B. Blocking electricity (please read the precautions on the back before installing it --- this page) Order: Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

595061 A7-… B7 V. Description of the invention (16) The container C4 removes the 0 (: component) from the signal provided at the output 12. Figure 7 also includes a pair of clamped two arranged in series between the individual positive and negative tracks of the voltage source u. The poles D1, D2. The negative end or cathode of diode 01 is connected to the positive path of DC source 11, and the positive end or anode of diode m is connected to node XZ. The negative end or cathode of diode D2 is connected To the node χζ, and the positive end or anode of the diode D2 is connected to £) (:: negative of the source 11. When any circuit half A, B tries to drive the voltage at the node XY higher than a predetermined At the critical value, one of the diodes, D2 and D2 is turned on, thereby providing a circuit path from the node X z back to the source D c and the capacitor C3. For example, when the circuit of FIG. 7 attempts to connect the node χζ When driven to a voltage higher than the positive orbit of the dc source 11, the diode 01 becomes conductive, thereby providing a circuit path back to the DC input source ii and the capacitor C3 for the excess voltage and current. Similarly, when When the circuit tries to drive the voltage at the node χζ lower than the voltage at the negative track of the DC source 11, two The pole body becomes conductive, thereby providing a circuit path back to the DC input source and the capacitor C3. The circuit halves a and B of Figure 7 printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs are in parallel configuration. Configuration. When the relative phases of the control signals of the control switches SI A and S1B are in phase, or 0 degrees, the output 12 receives the maximum power. Conversely, when the phases of the signals driving the switches S1 a and S1B are out of phase, or At 18 °, output 12 receives the minimum power. A phase controller 14 changes the relative phase between circuit halves a and B by supplying an input signal to each signal source 13A, 13B. In each circuit halve A and The circuit components forming the harmonic filter in B must be matched or equal to determine the 180-degree output phase. For example, the values of L1A, L2A, C1A, and C2A should be equal to the values of LIB, L2B, C1B, and C2B. 19 Paper The standard is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 595061 A7 V. Description of the invention (17 The circuit printed in Figure 7 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-the special advantage is that it operates at high frequencies During the period Driving switches alternately within the same circuit path is generally more difficult. By using a tank circuit formed by inductor L3 and associated capacitors, the switching requirements on a particular circuit half are generally less precise. Figure 8 depicts the one-to-three-level implementation of the single-ended converter circuit of Figure 8. Figure 8 includes-pairs of circuit halves A, B, where each pair includes: prime two η, double prime ("), and Three levels designated by a triple apostrophe ('"). With reference to circuit half A, each level includes a switch S1A that receives an AC signal from a signal source 13A. The switch S1A is connected to an inductor L3A and is connected in parallel with capacitor C6A Settings. The inductor L3A and the capacitor C6A cooperate to form a tank circuit. The output from the inductor L3A and the switch S1A is input to a blocking capacitor C7A that removes the DC component from the inductor L3A and the switch SIA. The capacitor C5A is provided in parallel with the series contact of the switch S1A and the inductor L3 A. Each switch S1A ', S1A ", S1A' '' receives an analog signal from the signal source 13A. Capacitors C5A ', C5A", C5A, and decoupling three levels. Each capacitor C5A ', C5A ,,, C5A ,, passes current and blocks AC, so a current loop is provided for each DC part of each stage. Capacitors cyA ,, C7A ,, and C7A '"couple the output AC of each level together and have negligible impedance at the frequency of interest. Accordingly, each level has approximately equal voltages. For example, if it is driven by a DC input source The voltage output by Π is 300 volts, and the voltage across each capacitor is 100 volts. Therefore, each level of circuit half A must handle 1/3 of the voltage output by the DC source. Similarly, circuit half B It consists of three levels, with each level having a switch § 1 b connected in series with the inductor L3B. The switch s 1B is also connected to the first

(Please read the notes on the back before filling this page)

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595061 A7 ___ B7 V. Description of the invention (18) The capacitor C6B forming a tank circuit with the inductor L3B is connected in parallel. A blocking capacitor C7B removes the DC component from the output of the inductor L3B and the switch S1B. Each level is also connected in parallel with capacitor C5B. The components operate as described above with respect to the circuit half A. Each switch SIB ,, S2B ,,, S3B ,,, receives an AC signal from a signal generator 13B. Outputs from three levels of circuit half A are combined and input to inductor L1A. The inductor L1A cooperates with the inductor L2 and the capacitors ci and C2 to form a two-stage harmonic filter to remove the harmonics output from the half A of the circuit. Similarly, the three levels of output from circuit half B are combined and input to inductor L1B 'which cooperates with inductor L2 and capacitors c 1, C2

A two-stage harmonic filter is formed to remove harmonic components from the AC signal output from the half B of the circuit. A blocking capacitor is connected to the output of the harmonic filter to remove the dc component of the signal provided to the output 12. Figure 8 also includes a pair of pushed diodes D1, D2 arranged in series between the individual positive and negative rails of the Dc input source. When any circuit half tries to drive the node XZ beyond a predetermined threshold defined by the individual negative and positive directions of the DC input source π, the diodes D1 and D2 are clamped to cooperate to bring an employee of the Intellectual Property Bureau of the Ministry of Circuit Economy The consumer cooperative printed path provides back to the DC source 11 and capacitor C3. In operation, when any circuit half attempts to drive the 卽 point XZ to a voltage 大于 greater than the positive orbit of the DC source 11, the diode D1 is turned on, and a circuit path is returned to the DC input source ^ and the capacitor C3. Similarly, when any circuit halves a and B try to drive the voltage at the node χζ lower than the voltage at the negative track of the DC source 11, the diode D2 is turned on, and a circuit path is returned to the DC input source.丨 and capacitor C 3 〇

595061

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

丨 (Please read the precautions on the f side) Order · · The upper phase of the circuit half A and the relative phase determines the power to be supplied to the output. When the relative phase between the circuit halves A and B is in phase or 0 degrees: the output 12 receives the maximum power. Conversely, when the relative phase between the AC signals driving the switches of the individual ground halves A and B is out of phase, or 180 degrees, the output 12 receives the minimum power. A special advantage of the circuit of FIG. 8 is that by placing three circuits in series between the individual negative and positive rails of the voltage source 11, each level processes only three thirds of the entire voltage across the individual negative and positive rails of the π source 11. one. This enables a power supply for a DC input with approximately 300 volts to use a. Volt device when each level handles only one third of the input voltage, rather than the entire voltage in a single level implementation. These 400-500 volt devices are widely available and provide the best characteristics to a 300 volt input system. Figure 9 does not show the circuit diagram of a converter with a protection circuit. A 300 volt DC voltage is applied across the circuit of Figure 9 to conduct the voltage. A first capacitor C3-1 is implemented as a 22 microfarad (UF) capacitor with a capacity of 400 volts, and a second capacitor C3_2 is implemented as a 220 // F capacitor with a capacity of 38 volts, which are connected in parallel Set between voltage rails. A first AC signal is applied to a terminal of an isolation transformer T3 by a signal source (not shown). A second ac signal from this signal source (not shown) is applied to the input of transformer T4. The output from the transformer T3 is input to a pair of switches S1-1, S1-2 through a 22 ohm (Ω) resistor. Similarly, the output from the transformer T4 is input to a second switch pair S2-; i, S2-2 through a 22 ohm (Q) resistor. Open relationship is selected from an IRF740 package. Switch pair Sl-1, S1-2 This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) -22-595061 A7 Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs

V. Description of the invention (20 is set in parallel, so are the switch pairs S2-1 and S2-2. This parallel configuration of a single switch and double switches reduces the current processing requirements of each switch. The output from the switch pair SI and S2 is input To a 10_3 microhenry (ν η) inductor L1, which cooperates with a 13.2 // / inductor L2 and a 30 nanofarad (々ρ) capacitor ci and a 10 77 F capacitor C2 to provide a four-element The harmonic filter 'removes harmonics from the outputs of the switches S1 and S2. The blocking capacitor 匸 4 is implemented as a 2.2 // F capacitor with a capacity of 400V. The clamping diodes D1 and D2 are arranged in series with the DC source 11 Between individual positive and negative tracks. The clamping diodes D1 and D2 are preferably selected from the package HFAT660. The above circuits typically operate in a limited frequency range. Because LC networks are generally low-pass filters, the maximum pass power and frequency On the contrary change. At the same time, as the frequency decreases, distortions from harmonics will start to appear. Satisfactory operation in at least a 30/0 frequency bandwidth has been observed. Other circuits exist, which have feeds to multiple LC networks Yidian The source converter is that the clamp diode can be connected between the network and the DC voltage source. When the half-bridge converter circuit is explained, please understand that it also includes full-bridge and single-ended converters. LC The network values and clamping points are preferably remotely selected as described here, so that excess circulating energy can be returned to the supplier, preventing the establishment of excessive currents and voltages, thereby protecting the components. In addition to this selection, the current can be determined. Source converters are considered inductive at the source to address diode recovery considerations. Transformers can be included in such networks to help match the output, clamp point, and converter transistors or provide isolation. , Two voltage source converters can be connected to the network described here,

This paper is suitable for medium—CNS A4 specification (21G χ 297)

595061 Α7 Β7 5. Invention Description (21) The power level can be controlled by the phase relationship. In addition to the phase relationships described herein, the asymmetric network will lead to more complex phase relationships. Symmetric networks provide the advantage that maximum and minimum power phases will be frequency independent. The type of phase modulation circuit described above raises three potential design considerations. First, in some, restricted cases, DC power is circulated from one bridge side to the other. When this happens, although the FET still sees an inductive cutoff, the FET is purely rectified when averaged over the entire cycle. That is, more charge flows through the FET in the reverse direction rather than the forward direction. As a result, if the current is high enough to reverse conduct the body diode, the body diode will not fully recover when the transistor is turned off, resulting in high power divergence. This effect will expand due to the negative temperature coefficient of the body diode voltage drop when the device is warmed up, potentially causing heat to run away. This first consideration can be addressed at low frequencies by accepting losses or by using a reverse isolation diode. At higher frequencies, the FET should be chosen to have sufficiently low resistance so that the reverse current is always processed by the channel. This is achieved with the low-voltage device Car Father Valley, because the on-resistance is proportional to the voltage boosted to the 25th power, and the diode voltage drop is independent of the voltage. Second, a high gain situation exists when the LC network becomes resonant at low phases and is not embedded until the amplitude of the output (and therefore the forward power) is quite high. This situation will not be like a damage device, but will affect the accuracy of the control. This second consideration can be solved by using an extremely precise and stable phase controller or modulator design, or by inserting a resistor that reduces Q and widens the phase characteristics into the output network. Utilization only requires 丨 or ^ curse ohm power This paper size is applicable to China National Standard (CNS) A4 specifications (210 X 297 issued) Please read the notes on the back first

Η Page I. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 24 5. The resistance 1§ of the invention description (22) is sufficient. This consideration arises only if real power is not consumed at a load that may occur during a load that is purely inductive during slightly artificial conditions. In general, a plasma chamber, cable, and matching network will fully reduce the Q value. Second, the phase of power control characteristics may show warping or change under various poor matching conditions. For example, when the phase smoothly changes from zero to the maximum value, the power increases from zero, decreases slightly, and then continues to increase. This combined with a non-linear plasma impedance / power function may cause oscillations. This consideration is theoretical in nature and may not be a practical consideration. The control deduction rule can simply skip the bend, which typically disappears at a match better than the voltage standing wave ratio (VSWR) of 3 ·· 丨. At the same time, the power control characteristics are not bent within at least half of an infinite VSWR cycle, so the load can be set somewhere on the VSWR circle using the cable length, network, and the like. Traditionally, the circuit in Figure 6 is better than the one in Figure 4 because the bending is less pronounced and occurs near the maximum power that would typically not be reached in a traditional scenario. The circuit described here utilizes a metal oxide semiconductor field effect transistor (MOSFET). Although, at a rate greater than one million hertz (MHz), it is possible to pay attention to the print rate of employees' cooperatives in the Intellectual Property Bureau of the Ministry of Economic Affairs. MOSFETs are generally better than bipolar junction transistor (BJT) or insulated gate bipolar transistors ( IGBT). Figures 10-12 depict the use of one of a MOSFET, BJT, or IGBT transistor to implement the switch configuration in the above circuit. Figure 〖〇 shows a MOSFET is used in the above circuit. The mqsfeT includes a blocking diode inherent in the MOSFET design. Figure n shows a BJT 20 and a reverse parallel diode 22. In the above circuit, when BJT 20 is used to implement the paper size, the Zhongguanjia Standard (CNS) A4 specification (21G x 297 public love) 17 " 595061 A7

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs must include an anti-parallel diode 22 to provide a circuit path when clamping the diodes Di, D2. Similarly, Fig. 12 shows a preferred configuration when using the IGBT to implement the switch of the present invention. Figure Π shows the IGBT 24 and an anti-parallel diode 26 that provides the same function as the anti-parallel diode 22 of Figure 11. Please note that other switching devices or circuit combinations that provide switching and circuit path functions can be used instead of MOSFETs without altering the principles of the invention. Brother 13-15 depicts the replacement diode clamping circuit described with respect to Dl, D2. Figure 13 depicts a diode clamping circuit including diodes di, D2 and capacitor C1. This circuit has been described above. Figures 14 and 5 show an embodiment of an alternative configuration using diodes D1, D2 and capacitor C1. In each circuit, as shown in Fig. 14, the capacitor C1 can be implemented using two identical capacitors provided at half the value set across each diode. Capacitor cl / 2 is parallel in effect, and is coupled through a decoupling capacitor (^^ "" not shown in the figure). The decoupling capacitor C3 is made larger with respect to the operating frequency, so its impedance can be ignored, thereby helping the circuit to be practical Layout and component power are shared. As shown in Figure 15, at higher frequencies, it is advantageous to use two series diodes for each diode D1, D2. Generally lower voltage diodes have a lower reverse Restore the charge. With two diodes in series, the same charge flows through each diode. Divide C1 across each diode to determine the equal sharing of the ac voltage. As shown in Figure 16, in a further change in the clamping circuit , Inductors L6 and L1 are connected in series and are arranged at the junctions of the clamping diodes di and D2 and the paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 26 — -------- Order --------- (Please read the notes on the back before filling this page) 595〇61

Between filter capacitors Cl. The inductor L6 preferably has a small value. This can soften the on and off of the diode and increase the efficiency of rectification. A snubber circuit formed by capacitor C7 and resistor R1 may be needed to attenuate high frequency ringing when the diodes D1, D2 are turned off. Properly selected, this will help reduce high Q conditions if the LC network becomes resonant at low power output, such as where there is a low phase angle between two parallel bridge circuits. As mentioned above, the power control precision can be compromised due to a high gain situation such as when the LC filter network becomes resonant at low phases and is not clamped until the amplitude of the phase (and therefore the forward power) increases. . This can be solved by a very precise and stable phase modulator design, or by a resistor connected to the output network with a value sufficient to reduce the Q value and widen the phase characteristics. A consumption of 50 ohms of approximately 1-2% appears to be sufficient to address this consideration. This typically occurs only when the load consumes low power, such as in a test case under purely inductive conditions with artificial conditions. In fact, the winding, matching network, and load will be sufficient to reduce the value of q. Clamping the diode at large phase shifts prevents resonance. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Alternatively, the Q value can be selectively reduced by switching the clamping point in the resistor only when the phase is low. This can be achieved using a comparator that is set to a low value to activate the phase modulator. This can then drive a relay that 'can take the form of a MOSFET switch that is actuated at relatively low phase differences, such as at low power requirements. Fig. 17 shows a circuit for selectively inserting a resistor at a clamping point. As shown in Figure 17, it may be advantageous to use a MOSFET SR because the voltage swing is limited by the clamping diode, and because a MOSFET is bidirectionally conducting. The bias resistors R3 and R4 can charge 27. This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 595061 Α7 ______ Β7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The center of the voltage swing is set within the range of SR. R2 is selected to provide sufficient attenuation, and C8 blocks DC from flowing through R2 and MOSFET SR. The input to SR is typically provided through a control circuit. Output from C8 It is connected to the interconnection point of the diodes D1 and D2. As the operating frequency increases, the capacitance of the FET that typically implements the switch has a more significant effect on the circuit operation. Figure 18 shows the enhancement of half the bridge circuit. In Figure 18, capacitor C5 and capacitor C3 (not shown) are placed in parallel. An inductor L3 is inserted between the capacitor C5 and the output of the switches SI and S2. The inductor L3 determines that a sufficient induced current always flows. Charge and discharge the output of FET SI, S2 and Miller capacitor. Inductor B3 also ensures that if the output and clamping network allows capacitive load current to flow, the current is inductive. As mentioned above, In some cases, DC power can be circulated from one bridge side to the other. As a result, when Fet S1, S2 still sees the inductive cutoff when averaged over a whole cycle, the FETs SI and S2 are purely rectified. That is, More charge flows in the reverse direction instead of the forward direction. As a result, if the current is high enough to reverse and turn on the body diode contained in the FET, when the FET transistor is turned off, the FET switch will not fully recover and will Resulting in high power divergence. This will expand due to the negative temperature coefficient of the body diode voltage drop when the FET device is heated, potentially leading to thermal runaway. Also as described above, this situation can be achieved by accepting losses, Or use a reverse isolation diode to solve it. At higher frequencies, the FET should be selected to have a sufficiently low on-resistance so that the reverse current is always passed by the FET. Please read the precautions on the back first

Η Page I I I I I I Order Thin This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 28 595061 A7 5. Disclosure of Invention (26). This is easily accomplished with a low-voltage device because the on-resistance is proportional to the voltage boosted to the 2.5th power, while the diode voltage drop is independent of the voltage. As shown in Figure 19, two lower voltages fet si_1, S1-2 and S2-1, S2-2 can be connected in series. These FETs will typically have a quarter of the on-resistance compared to two FET devices connected in parallel, and will drop half the voltage through each. Therefore, the critical current for the diode architecture will be doubled. In FIG. 19, the capacitor C6 may be provided in parallel with each of the switches S1-1, S1-2, S2-1, and S2_2. Capacitor C6 may be needed to determine equal voltage sharing, but it is also added to the effective device capacitance. A capacitor C7 further promotes equal voltage sharing and passes only unbalanced current. In this architecture, a fast-recovery epitaxial diode (FREDFET) switch offers advantages due to its reduced reverse recovery charge. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 20 shows another improvement to the circuit in Figure 18. The two clamped diodes D11 and D12 are inserted in parallel with each capacitor C5. Diodes D11, D12 are selected to rectify the current or voltage at the junction to return to the supply. This is as shown in FIG. 18, in order to convert the capacitances of the FETs SI and S2, and also absorb the DC from the FETs SI and S2 and return the DC to the supplier to execute the road. This can also handle any DC that flows from one bridge side to the other, and therefore also resolves FET body diode recovery considerations. Capacitors 05 and diodes 011, D12 can be configured in series and parallel combinations similar to the main clamping configuration, but typically require lower power handling capabilities. If a variable frequency operation is desired, the circuit of Figure 20 provides the additional advantage that the cut-off current remains approximately the same and independent of frequency, as long as L3 and C5 are selected so that the diode Du and Di2 are always in accordance with Chinese national standards (CNS) ) A4 size (210 X 297 mm) 29

V. Invention Description (27) is continuity. The improvement of the circuit of FIG. 20 is shown in FIG. 21, which includes an inductor LS and a capacitor (: an additional of 8): (: a series circuit. Resonance is made by appropriately selecting the values of the inductor LS and the capacitor Cs. The frequency is between the main frequency of the power supply and its third wave. The current through the inductor L3 increases with frequency and maintains the DC current approximately constant. Although the negative and positive channels are provided to clamp a predetermined point in response Convenient reference voltage for mismatch effects, and also allows voltage and / or current to be fed back into the converter. It is also possible to connect the clamping diode across some other predetermined voltage source to cause clamping. Because the circuit sometimes has to For diverging excess voltage and current, the reference to an AC voltage source preferably includes a reference constant voltage draw-out. Figure 22 illustrates a circuit reference voltage except for the negative and positive voltage rails. A blocking capacitor C4 is inserted in the inductor L1 and the current transformer. Between the switches S1 and S2, so that the Zener diodes Z1 and Z2 set the individual high and low reference voltages for clamping. The Zener diodes Z1 and Z2 are connected back to back in series between points a and B. If the voltage at point X is driven to become positive, then one will be turned on and heat will be used to generate electricity, and if the voltage at point X is driven to be negative, the other will be turned on by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. And divergent energy. A diode is operated in rectifier mode when another device is in Zener mode. In general, the Zener poles Z1 and Z2 do not switch well at high speed. This can be achieved by making the 23rd The configuration of the figure replaces the zener diodes di and 〇2 to compensate. Figure 23 includes zener diodes Zl and Z2 arranged in series back-to-back with respect to the traditional diodes DZ1 and DZ2. The diodes are connected in series and then set in parallel. In this configuration, Zener diodes Z1, Z2 30 This paper size applies to the Chinese National Standard (CNS) A4 specification (21 × x297 mm) A7 B7 V. Invention Note (28 It is not necessary to operate in rectifier mode. Jin = Consideration system is currently unable to obtain a particularly high rated power of the Zener II: the maximum rated power for the Zener diode is about shoulder. There is a relatively high power Zener Diodes are typically expensive. When it is cheap and easy to obtain extremely high rated power. The method of overcoming homogeneity is to use an active Zener circuit as shown in Figure 24. In Figure 24, Zener II, and Monopolar ZA are mainly used to make the group Equipped with: The diode TA is turned on at about one times the higher power level of the diode ZA, and the body TA is turned on. The power divergence in the transistor TA is a function of the gain of the active Zener circuit. Referring to Figure 24, when the diode ZA is in Zener mode, the following equations apply: V = V2 + Vbe, where VbeM) 6v Φ i = i2 + iq, where Iq «hfexijhfemoo makes Iq» I2, and Pq > & gt P2. As can be seen from the above formula, the current flowing through the transistor D8 is much larger than the current flowing through the Zener diode ZA, and the power emitted by the transistor TA is much larger than that by the Zener diode ZA Divergent power. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 25 depicts an alternative configuration for setting one of the reference voltages other than the negative and positive rails of the converter. In particular, Figure 25 shows a diode bridge including diodes DB1A, DB2A, DB1B, and DB2B. The Zener diode ZB is connected across half of the diode bridge. According to this, regardless of the negative or positive wave, the Zener diode ZB enters the Zener mode when the voltage exceeds the critical voltage. Figure 26 depicts a one-diode bridge configuration similar to Figure 25, but this paper size applies Chinese National Standard (CNS) A4 (210 X 297 mm) -31 595061 A7

V. Description of Invention (29) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Includes a transistor TA and Zener diode ZA configuration similar to Figure 24, thereby providing increased power dissipation. The diode bridge circuits of Figures 24-26 provide several advantages. First, the design reduces costs by having to use only one Zener diode instead of two. Second, because only one Zener diode is used, a continuous clamping voltage can be obtained instead of the potentially non-continuous clamping voltage obtained using a two Zener diode configuration. Third, traditional diodes are easier to match than Zener diodes. Fig. 27 shows waveforms measured for an exemplary circuit embodiment of a power supply having a protection circuit. In the case of matching and mismatching, the operating waveform and power level are recorded for the 300V DC input. The load impedance is matched to 50 ohms and mismatched using 12, 25, 50, 100, and 200 ohms for both open and short circuits, and inductance and capacitance inductance. For reference, refer to Figures 27a-m, where each figure includes four waveforms, and 丨 _4 is marked in each figure. Waveform 1 indicates the drain voltage of the MOSFET with 200 volts per division as the output input of inductor L1. Waveform 2 indicates the current flowing through L1 at 10 amps per division. Waveform 3 is the clamping voltage of about 200 volts per division or the voltage at the node between diodes Di and 〇2. Waveform 4 is a clamped diode current of 10 amps per division. These conventions apply to each output waveform in Figures 27 and 28. The 12 discrete points provided at the infinite VSWR with selected values are sufficient to determine the worst case operation found. The following table lists the key parameters: This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 32; -------- Order --------- (Please read first Note on the back? Matters need to be filled out on this page again) 595〇6i, invention description rate dispersion power peak peak FET diode current (ampere) ampere) Load DC RF forward current power (amp) (watt) electricity Inductive capacitive 50 ohm 1.71 465 48 10 4 open circuit 0.109 138 33 10 0 200 ohm 0.139 145 42 12 0 100 0.162 157 49 13 0 50 0.226 176 68 14 10 25 0.240 155 72 14 18 12 0.242 149 73 13 23 short circuit 0.204 202 61 10 24 12 ohms 0.184 231 55 9 23 25 0.173 342 52 7 23 50 0.071 300 22 4 0 100 0.073 190 22 7 0 200 0.088 150 26 9 0 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs when the load is removed from the open circuit When inductively rotating to a short circuit and then capacitively turning back, the FET current is maintained inductive and less than 40% higher than a 50 ohm value. The DC current consumption is only one sixth of the 50 ohm value. It can be seen that clamping diodes D1, D2 to conduct slightly with a 50 ohm load can be eliminated by slightly retuning the network. However, this is not important for efficiency or effective protection. By comparison, Fig. 28M is for the output waveform of a 375KZZ half-bridge converter without a real * compliance circuit. During testing, the test device is protected from damage by devices that manually reduce the supply voltage. The following chart lists the key parameters. Now by reducing the supply voltage: protection. "

-------- Order --------- (Please read the note on the back? Matters before filling out this page) 595061 A7 B7 V. Description of the invention (31 率 散 #) Power generation peak FET Current (Ampere) Load DC Current (Ampere) RF Forward Power (Watt) 50 Ohm 1.86 514 44 10 50 Ohm 0.25 241 75 15 Inductive 25 0.41 424 124 18 12 0.36@200V 331 73 14 Short Circuit 2.15@42V 752 90 14 12 ohm 0.46@40V 53 23 2.0 Capacitive 25 0.12@50V 21 6 0.5 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs When the inductive load impedance decreases, the FET current becomes larger. If the power supply is maintained at 300V at 12 ohms, the forward power will reach 750W, which is greater than 50 ohms. In short circuit, 750W is generated from only 42V, and L1 resonates with the rest of the network. At 300V, forward RF power will be approximately 38KW, DC power will be 4.6KW, and peak transistor current will be 100A. When the load swings capacitively and the impedance begins to rise, the FET sees a capacitive load. This situation can be more troublesome than the high induced current seen before resonance, because even if the current is still modest, the FET will still suffer from high diode recovery losses. Furthermore, there is also the danger that the commutation dv / dt will fail. Note that in the last three figures, the scale has been changed for clarity. Figure 29 depicts a control circuit for a power generator. The control circuit 20 includes a filter soft-start rectifier 22 that receives an input voltage. The rectifier 22 may include a circuit breaker for over-voltage protection. An auxiliary power supply sensing unit (PSU) 24 generates a lower voltage signal for energizing the control circuit. The cooling fan 26 provides cooling to the generator circuit. ^ -------- Order --------- ^^ 1 (Please read the precautions on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 34 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 595061 A7-B7 V. Description of the invention (32) The output from the filter and wave is a soft-start rectifier 22 is applied to control the DC voltage and applied to multiple power amplifiers A selectable DC switch 28 is 30a, 30b, 30c, or 30d. The four power amplifiers 30, 30 are used in parallel to divide the processing power across the four amplifiers, rather than requiring one amplifier to process the entire power. Alternatively, one or more power amplifiers may perform the power amplifier 30a- Function of 30d. A driver circuit 32 generates a switching signal to control the switching of each power amplifier 30a-30d. The output from the power amplifier 30a-30d is input to a combination of combining each output from the power amplifier 30a-30d into a signal and Isolation transformer 34. The combination circuit 34 may include an isolation transformer to isolate the power amplifier from the output. The combination isolation transformer 34 outputs the combined signal to a filter and a power sensing circuit 36 that filters the power signal before generating the output. The power sensing part of 36 provides a feedback signal to the control phase modulator protection circuit 38. Analog or digital electronics can be used to implement the control of the phase modulator circuit 38. The circuit 38 outputs a control signal to each dc Switch 28, driver 32, and front panel control circuit 40. By changing the cut in each power amplifier 3 such as _ 30d The phase is changed, and the output power can be changed accordingly. According to this, the phase modulator circuit 38 is controlled to change the phase of the power amplifier according to the input from the filter and the power sensing circuit 36. The front panel control circuit 40 provides information to the operator It is also possible to change the desired phase and subsequent output power. Figure 30 depicts a control system in which the selected power supply described herein can be used in a system for controlling a plasma chamber. Control System 5 〇 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 35 --------------------- Order ------- -. (Please read the precautions on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 595061 A7 ------------ ^ ____ V. Invention Description (33) Including For example, a plasma chamber 52 can be used to make a integrated circuit. The plasma chamber dangles or has a gas inlet 54 and one or more gas outlets. The gas inlet 54 and outlet 56 allow gas to be input into the plasma cavity. The inside of the chamber 52 is discharged. The temperature in the plasma chamber 52 can be controlled by the heat applied to the plasma chamber 52 No. 58. A plasma controller 60 receives signals from the plasma chamber including a vacuum signal 62 indicating a degree of vacuum in the chamber, a voltage signal 64, and a signal 66 indicating a flow rate between the inlet and outlet gases. Those skilled in the art will recognize that other inputs / outputs can also be received / generated by the plasma controller 60. The plasma controller 60 uses a voltage generator 68 to determine the expectations to be applied to the plasma chamber. Input power. The voltage generator 68 includes a microprocessor 70, or other similar controller, which receives one of the input signals from the plasma controller 60. The microprocessor 70 generates a control signal to a power supply 72 which outputs a voltage signal at a desired frequency and rated power. The voltage output from the power supply 72 is input to a matching network 74 that matches the impedance between the power supply 72 and the plasma chamber 52. FIG. 31 depicts a circuit for a matching network 80 as may be implemented to the matching network 74 of FIG. 30. The matching network 80 desirably matches a 50 ohm input impedance to the output impedance supplied by the load 82. The matching network 80 is assembled in a redundant filter pattern, which includes a first variable capacitor 84, a second variable capacitor 86, and an inductor 88. The capacitors 84, 86 are implemented as variable capacitors' so that the capacitance of the filter network can be changed to properly match the impedance between the 50 ohm input and the load 82. A controller 88 receives a feedback signal that changes according to the matched impedance, and generates a control signal that changes the capacitance of the individual capacitors 84, 86. Those who are familiar with this technology will recognize and can implement other matching. This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 36 ^ -------- ^ ------- -(Please read the note on the back? Matters before filling out this page) 5. Description of the invention (34) Λ7 B7 Network configuration, such as transformer or fixed network. While the invention has been described in its presently preferred form, it will be understood that there are many applications and embodiments for the invention. According to this, the invention can be modified and changed without departing from the spirit of the invention as set in the scope of the attached patent application.

(Please read the precautions on the back before filling out this page) tr --------- # Printed by the Consumers' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 37 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 595061 A7 ___B7_ V. Description of the invention (35) The component numbers are printed in accordance with the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 10 ... the converter 54 ... the gas inlet 11 ... the direct current (DC) voltage source 56 ... the gas outlet 12 ... AC output 58 ... thermal control signals 13, 13A, 13B ... signal source 60 ... plasma controller 14 ... phase controller 62 ... vacuum signal 20 ... bipolar junction transistor 64 ... voltage signal (BJT), control Circuit 66 ... Signal 22 ... Anti-parallel diode, filter 70 ... Microprocessor soft-start rectifier 72 ... Power supply 24 ... Insulated gate bipolar transistor 74, 80 ... matching network (IGBT), auxiliary Power sensing unit 82 ... load element (PSU) 84, 86 ... variable capacitor 26 ... anti-parallel diode, cooling fan 88 ... inductor 28 ... DC switch A, B ... circuit half 30a-30d ... Power amplifiers C1-C4, CIA, C2A, C1B 32 ... Circuits C2B, C3-, C3-2, C3-C8 34 ... Isolation transformers C5A-C7A, C5B-C7B 36 ... Filters, wave filters and power sensing circuits C5A ', C5A ", C5A ,,, 38 ... phase adjustment Transformer protection circuits C7A ,, C7A ,,, C7A ,,, CS · 40 ... Front panel control circuit capacitors 50 ... Control system D, D2, D1A, D2A, D1B 52 ... Plasma chambers D2B, Dll, D12, DZ1 -------- Order --------- (Please read the notes on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ) -38-595061 A7 B7 V. Description of the invention (36) DZ2, DB1A, DB2A, DB1B, DB2B ... clamping diodes (rectifiers) L1-L3, L1A-L3A, L1B-L3B, L6, LS ... inductor R1 -R4 ... Resistors ShS2, SlA, S2A, SlB, S2B, S1A ,, S1A ,,, S1A ,,,, S1B ,, SlB ,,, SlB ,,,, SM, Sl-2, S2-1, S2 -2 ... switch SR ... metal oxide semiconductor field effect transistor (MOSFET) T1-T4 ... transformer TA ... transistor X, XA, XY, XZ ... node Z, Z2, ZA, ZB ... Zina Diode I -------- Order --------- (Please read first (Please read the notes on the back and fill in this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 39

Claims (1)

595061 A8 B8 C8 D8 VI. Patent Application Scope 1.-A power supply n circuit for supplying AC power to a load: The power supply circuit contains: (Please read the precautions on the back before filling this page) Always Current (DC) voltage source; half bridge converter for receiving DC input voltage and for generating an alternating current (AC) output signal; a first harmonic filter provided at the output of the converter Reading a first harmonic filter to filter out a predetermined harmonic component of the Ac signal to generate a filtered AC signal; and an output circuit provided at the output of the first harmonic filter to receive the filtered AC signal And feeding the filtered Ac signal to a load, wherein the output circuit includes first and second rectifiers connected with respect to a point in the output circuit, so that if the converter attempts to drive the point to more than a predetermined If one of the first and second voltages is a voltage, then each of the first and second rectifiers is turned on to return at least one of the voltage and the current to the Dc voltage source. 2. The power supply circuit according to item 丨 of the patent application scope, wherein the first harmonic filter includes an inductor and a capacitor connected in series, and the first harmonic printed by the consumer cooperative of the employee of the Intellectual Property Bureau of the Ministry of Economic Affairs The filter is provided in parallel with one of the switches of the half-bridge converter. 3. The power supply circuit according to item 丨 of the patent application scope, wherein the first wave filtering state includes an inductor and a capacitor, and the inductor is provided in one of the switches of the half-bridge converter And a connection point between the first and second rectifiers, and the capacitor further includes a pair of capacitors each connected in parallel with the individual first and second rectifiers. This paper is compliant with China National Standard (CNS) A4 specifications. (210 X 297 public reply) 40 595061 A8 B8 C8 D8 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs VI. One of the scope of patent application is a combined capacitor. 4. The power supply circuit according to item 1 of the scope of patent application, wherein each of the first and second rectifiers further includes a pair of diodes connected in series, and the first unitary wave filter and the wave filter include an inductor. And a capacitor, and the inductor is disposed between an output of the switches and an interconnection point between the first and second diodes, and the capacitor further includes a combined capacitor of a plurality of capacitors. Each capacitor corresponds to one of each pair of diodes corresponding to a corresponding one and an individual diode in parallel. 5. The power supply circuit according to item 1 of the scope of patent application, further comprising: a pair of capacitors arranged in series between the individual voltage channels of the DC voltage source; the converter includes a series of capacitors arranged in series with the DC voltage source A pair of switches between individual voltage channels; and an inductor disposed between one of the capacitors 'mutual contacts and one of the switches' mutual contacts. 6. The power supply circuit according to item 5 of the patent application scope, which further includes a pair of diodes, each of which is connected in parallel with a separate capacitor. 7. The power supply circuit according to item 5 of the scope of patent application, wherein each of the switches further includes a pair of switches connected in series, and further includes a capacitor connected in parallel with each switch. 8. —A power supply circuit for supplying AC power to a load. The power supply circuit includes: a direct current (DC) voltage source; this paper size applies to China National Standard (CNS) A4 (210 X 297) (Mm) ^ -------- Order --------- (Please read the precautions on the back before filling out this page) 41 595061 Printed by a consumer cooperative: The full-bridge converter is used to receive the Dc wheel-in voltage and is used to generate the (ac) output signal. The full-bridge converter contains a bridge half; A harmonic filter is provided at the output of each of the bridge halves. The first harmonic wave filter filters out the two pre-waves of the slave signal to generate a filtered AC signal; and an output circuit, An output circuit at the combined output of the first-spectral wave filter H receives the filtered AC signal and feeds the filtered number i '. The output circuit includes a connection with respect to a point in the output circuit. First and second rectifiers, so that if the machine tries to drive this point to more than a A first voltage and a second voltage, the first and those of the other by a second conductive rectifiers, voltage and currents to the at least one returned to the voltage source Dc. 9. The power supply circuit according to item 8 of the patent claim, which further includes a second spectral wave filter at the combined output of the first spectral wave filter and the wave filter, and the second harmonic filtering The generator removes harmonic components from the filtered Ac signal to generate an output signal. 10. The power supply circuit according to item 9 of the scope of patent application, further comprising a blocking capacitor at the output of the second harmonic filter for removing a DC component from the output of the second harmonic filter. 11. The power supply circuit according to item 9 of the scope of the patent application, wherein the harmonic filter includes an inductor and a capacitor connected in series, and the first harmonic filter is connected to the half-bridge converter. The first of the switches (Please read the precautions on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 42 Printed by the Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs 595061 A8 B8 C8 ______ D8 6 2. The scope of patent application is set in parallel. 12. The power supply circuit according to the scope of the patent application, wherein the second harmonic waver includes an inductor and a capacitor, and the second harmonic filter is connected to the half-bridge type. One of the switches of the converter is set in parallel. 13. The power supply circuit according to item 9 of the scope of patent application, wherein the first spectral wave filter and the wave filter include an inductor and a capacitor, and the inductor is provided at an output of the switches and the A connection point between the first and second rectifiers, and the capacitor further includes one of a pair of capacitors each connected in parallel with the individual first and second rectifiers. Combined power 14. Power supply according to item 13 of the scope of patent application Circuit, wherein the second harmonic filter includes an inductor and a capacitor, and the inductor is disposed between an output of the switches and an interconnection point between the first and second rectifiers, And the capacitor further comprises a combined capacitance of one of a pair of capacitors each connected in parallel with the respective first and second rectifiers. 15. The power supply circuit according to item 9 of the scope of patent application, which further comprises: a pair of capacitors arranged in series between individual voltage rails of the DC voltage source; the converter includes individual units arranged in series with the DC voltage source A pair of switches between the voltage rails; and-the inductor is set at the mutual contact of one of these capacitors and the paper size applies the Chinese National Standard (CNS) A4 specification (21G X 297 public love) " ---- --43-" 7 -------- Order · -------- (Please read the notes on the back before filling this page) 6. Scope of patent application Between one of the switches and other contacts. 16. The power supply circuit according to item 15 of the scope of patent application, which further includes a pair of diodes, and each diode system is connected in parallel with a separate capacitor. 17. The power supply circuit according to item 8 of the scope of patent application, further comprising a signal generator for generating a switching signal to be supplied to each half of the converter. 18. The power supply circuit according to item 17 of the scope of patent application, wherein the generator generates a relative phase operation between the first and second bridge halves. 19. The power supply circuit according to item 8 of the patent application, wherein at least one of the voltage and current is fed back into the converter. 20 · A power supply circuit for supplying AC power to a load. The power supply circuit includes: a direct current (DC) voltage source; a pair of single-ended converters for receiving!). The input voltage is used to generate an alternating current (AC) output signal. The single-ended converters are formed in a full-bridge configuration. The third wave filter is provided at each half-bridge output. A first harmonic filter filters out a predetermined harmonic component of the AC signal to generate a filtered AC signal; and an output circuit is provided at an output of the first harmonic filter, and the output circuit receives the filtered AC signal And feed the filtered Ac ^ t number to the load, where the output circuit includes first and second rectifiers connected with respect to a -point in the output circuit, so that if the converter attempts to drive the point to One book size of the first and second paper is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) ^ III -------- Order · -------- I (Please (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 44 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs M 595061 AS B8 C8 D8 VI. One of the first and second rectifiers is turned on individually To make at least one of the voltage and current back to the DC voltage source. 21 · The power supply circuit according to item 20 of the patent application scope, wherein each single 5-terminal converter includes: a switch connected to one of the DC voltage sources in the first way; a tank circuit connected to the Between the first and a second voltage rail of the DC voltage source, the switch is operated to excite the tank circuit. · 22 · The power supply circuit according to item 21 of the patent application scope, wherein the 10-slot circuit further includes: an inductor connected between the switch and the second rail of the DC voltage source: and a capacitor, and The switches are set in parallel. 23. The power supply circuit according to item 21 of the patent application scope, further comprising a blocking capacitor between the switch and the first harmonic filter. 24. The power supply circuit according to item 20 of the patent application scope, further comprising a second spectral wave filter at the combined output of the first harmonic filters, the second harmonic filter Harmonic components are removed from the filtered Ac signal to produce an output signal. 20 25 · The power supply circuit according to item 24 of the scope of patent application, which further includes a blocking capacitor at the output of the second harmonic filter for removing DC from the output of the second harmonic filter Weight. 26. The power supply circuit according to item 25 of the patent application scope, wherein the first harmonic filter includes an inductor and a capacitor connected in series, and the paper size is applicable to the Chinese National Standard (CNS) A4 specification (21〇X 297 mm> Λ1 ^ -------- ^ --------- line (please read the precautions on the back before filling this page) 595061 Printed by A8, Consumer Cooperatives, Bureau of Intellectual Property, Ministry of Economic Affairs B8 C8 D8 6. The scope of patent application The first harmonic filter is set in parallel with one of the switches of the half-bridge converter. 27. The power supply circuit according to item 26 of the scope of patent application, where the The second harmonic filter includes an inductor and a capacitor connected in series, and the second harmonic filter is provided in parallel with one of the switches of the half-bridge converter. Item of the power supply circuit, wherein the first harmonic filter includes an inductor and a capacitor, and the inductor is provided at an output of the switches and an interconnection between the first and second rectifiers. Between the connection points, and the capacitor It further comprises one of a pair of capacitors each connected in parallel with the individual first and second rectifiers through a combined capacitor. 29. The power supply circuit according to item 28 of the patent application scope, wherein the second harmonic waver includes an inductor And a capacitor, and the inductor is disposed between an output of the switches and an interconnection point between the first and second rectifiers, and the capacitor further includes a respective first and second rectifier One of a pair of capacitors connected in parallel is combined. 30. The power supply circuit according to item 20 of the patent application scope, further comprising: a pair of capacitors arranged in series between the individual voltage channels of the DC voltage source; The device includes a pair of switches connected in series between the individual voltage rails of the DC voltage source; and this paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 46 Ί -------- Order --------- (Please read the notes on the back before filling this page) 595061 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A8 B8 C8 D8 , Set between one of these capacitors 'mutual contacts and one of these switches' mutual contacts. 31. The power supply circuit according to item 29 of the patent application scope, which further includes a pair of diodes, each of which is a two-pole system Parallel to a separate capacitor. 32. The power supply circuit according to item 21 of the patent application scope further includes a signal generator that generates a switching signal to each half of the converter. 33. According to patent application scope 32 The power supply circuit of the item, wherein the signal generator changes the relative phase operation between the first and second bridge halves. 34. The power supply circuit according to item 21 of the application, wherein the voltage and / or current is fed back into the converter. 35. A power supply circuit for supplying AC power to a load. The power supply circuit includes a direct current (DC) voltage source; a first plurality of single-ended current transformers arranged in series at Between the first and second tracks of the Dc voltage source, the first plurality of single-ended converters form a first half of a bridge configuration, and the first half of the bridge has a first combination Output; a first 'multiple early-end converters' are arranged in series between the first and second rails of the DC voltage source, and the second multiple single-end converters form one The second half, the second half of the bridge type has a second combined output; a first harmonic filter, which is set at the output of each other bridge half J .---------- --------- Order --------- (Please read the notes on the back before filling out this page} This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ) — 47 595061 A8 B8 C8 D8 6. At the scope of the patent application, the first harmonic filter filters out a predetermined harmonic component of the Ac signal to generate a filtered AC signal; and An output circuit is provided at the output of the first harmonic filter. The output circuit receives the filtered AC signal and feeds the filtered AC signal to a load, wherein the output circuit includes a voltage corresponding to that in the output circuit. The first and second rectifiers connected at a point such that if the converter attempts to drive the point to a voltage that exceeds a predetermined first and second voltage, one of the first and second rectifiers is individually Or at least one of the voltage and current is returned to the DC power supply. 36. The power supply circuit according to item 35 of the patent application scope, wherein at least one single-ended converter comprises: a switch connected to the 〇 (: a first local voltage channel of a voltage source; a tank circuit connected between a second local voltage channel of the DC voltage source and the switch, wherein the switch excites the tank circuit. 37. According to the application The power supply circuit of the 36 items of the patent, the storage tank circuit further includes an inductor connected between the switch and the second local voltage conducting channel of the voltage source and a capacitor, and The switch does 38. The power supply circuit according to item 36 of the scope of patent application, wherein the local voltage channel for a first bridge half has a corresponding local voltage channel for a first bridge half, wherein Aiming at the pressure to the bridge J ----------- Meal (Please read the precautions on the back before filling this page) --Order --------- This paper size applies to China National Standard (CNS) A4 Specification (21 × 297 male f 595061) 6. Application for Patent Scope Intellectual Property Bureau of the Ministry of Economic Affairs Employee Consumer Cooperative Printed Half of the Local Voltage Track and the Second Bridge Deer of the Second Deer Local voltage systems are interconnected. ^ 39 · = According to the 36th patent application, the power supply circuit further includes a blocking capacitor between each switch and the first harmonic filter. 40. The power supply circuit according to item 36 of the scope of the patent application, which further includes a first at the combined output of the first harmonic filters: a harmonic waver, the second wave The generator removes harmonic components from the passing signal to generate an output signal. 41. A power supply circuit for supplying AC power to a load, the power supply circuit comprising: a direct current (DC) voltage source; a full-bridge converter for receiving a DC input voltage and for Generates an alternating current (AC) output signal. The full-bridge converter includes a pair of bridge halves. The wave filter is set at the output of the converter. The harmonic filter and wave filter out the A predetermined harmonic component of the AC signal to generate a filtered AC signal; and an output circuit provided at the output of the harmonic filter to receive the filtered AC signal and feed the filtered AC signal to the carrier. The output circuit includes at least one rectifier connected with respect to the output circuit, so that if the converter attempts to drive the voltage to a voltage exceeding one of a predetermined first and second voltages, at least one rectifier is turned on. Diverge at least one of the voltage and the current ', wherein the predetermined first and second voltages are a source of negative points from the DC voltage J. -------- ^ —-------. (Please read the notes on the back before filling in this page) This paper size applies to China National Standard (CNS) A4 (210 X 297) 49) 595061 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, A8, B8, C8, D8. 6. The individual positive and negative rail voltages in the patent application range are different. 42. The power supply circuit according to item 41 of the application, wherein the at least one rectifier is a Zener diode. 43. The power supply circuit according to item 41 of the scope of patent application, wherein the at least one rectifier includes an aligned nano diode arranged back to back, and the breakdown voltage of each zener diode determines the predetermined first and second Two voltages. 44. The power supply circuit according to item 42 of the scope of patent application, which further includes a second harmonic filter at the output of the first harmonic filter, and the second harmonic filter is filtered from the filtered filter. The AC signal removes harmonic components to produce an output signal. 45. The power supply circuit according to item 43 of the scope of patent application, wherein the at least one Zener diode is inserted between a common reference voltage and the output of the first harmonic filter and waver. 46. The power supply circuit according to item 42 of the patent application, wherein the at least one rectifier activates a switch to enable the switch to conduct current and dissipate power. 47. The power supply circuit according to item 42 of the patent application, wherein the at least one rectifier and the two halves of a diode bridge are interconnected. 48 · —A control system for a power generator, the system includes: a circuit for receiving an AC signal and converting the AC signal to a DC voltage signal; a power amplifier including: a full bridge Converter for receiving the DC voltage signal and for -Γ ------------------- ^ ----- 1 --- (Please read the back first (Please pay attention to this page before filling out this page) 50 Six patent applications 8888 ABCD generates an AC output signal, the full-bridge converter has first and second halves, and the output circuit is used to receive the 遽 ac Signal and feed the mind AC ^ to the load, where the output circuit includes the first and second rectifiers connected to one of the points in the output circuit, so that ': 支 / ;, L 器 为 5 式Driving this point to a voltage exceeding one of the predetermined first and second voltages, then one of the first and second rectifiers is a conductor; and an output sensing circuit for determining the Power of the output signal, the output sensing circuit generates a sensing signal; and a phase modulator for changing the full-bridge type The relative phase of the converter to change the output power based on the sensed signal. 49. The system according to item 48 of the patent application, wherein the power amplifier includes a plurality of power amplifiers configured in parallel, and the system further includes a circuit for combining the output signals of each of the plurality of converters. Combiner. • At least one return to the converter line -------- Order --------- line (please read the precautions on the back before filling out this page) Intellectual Property Bureau, Ministry of Economic Affairs, Consumer Consumption Cooperative Printed 50 · —A plasma control system, including: a plasma chamber excited by a radio frequency (RF) signal; a plasma controller to measure the operation of the plasma chamber and generate A control signal for changing conditions in the plasma chamber; and an RF generator for generating an RF signal supplied to the plasma chamber, the RF generator includes: an RF controller for receiving a signal from the electricity This paper size of the pulp controller applies to Chinese National Standards (CNS) A: 丨 Specifications (210 X 297 males; g) 595061 A8 B8 C8 D8 Printed by the Intellectual Property Bureau Staff Consumer Cooperatives of the Ministry of Economic Affairs Generating a power supply control signal and a power supply for receiving the power supply control signal and generating a! ^^ signal according to the power supply control signal, wherein the power supply includes Pre-ordered One of the first and second rectifiers protects the circuit such that if the power supply attempts to drive the predetermined point to a voltage that exceeds one of a predetermined first and second voltages, one of the first and second rectifiers is individually Those are turned on. 51. The system according to claim 50, wherein the power supply further comprises: a direct current (DC) voltage source; a half bridge converter for receiving a DC input voltage and generating an alternating current (AC) The output signal is a wave filter | § 'Set at the output of the converter, the spectral wave filter' filters a predetermined harmonic component of the AC signal to generate a filtered, AC signal; and an output circuit ' Used to receive the filtered AC signal at the output of the harmonic filter and feed the filtered AC signal to a load, wherein the output circuit includes the first sum connected with respect to a point in the output circuit第二 rectifier. 52. The system according to item 50 of the scope of patent application, wherein the power supply further includes: a direct current (DC) voltage source; this paper size applies to China National Standard (CNS) A4 specification (210 X 297 public love)- ----------- 9 (Please read the precautions on the back before filling out this page} —Order ---------. 52 595061 A8 B8 C8 D8 VI. Scope of Patent Application Ministry of Economic Affairs The Intellectual Property Bureau employee consumer cooperative prints a full-bridge converter for receiving 1) (: input voltage and used to generate recurrent (AC) output signals. The full-bridge converter contains a pair of bridge-type half The first " white wave filter, which is provided at the output of each of the bridge halves, a Hilbert wave filter filters out a predetermined spectral wave component of the AC signal to generate a filtered AC signal; and an output circuit, which is provided at At the output of the first harmonic filter, the output circuit receives the filtered Ac signal and feeds the filtered signal to a load, wherein the output circuit includes the first connected in relation to a point in the output circuit. Primary and secondary rectifiers 53 · —A power supply circuit for switching AC The source is supplied to a load, and the power supply circuit includes: a direct current (DC) voltage source; a converter for receiving a DC input voltage and generating an alternating current (AC) output signal for input to a load; An output circuit provided at the output of the converter; and a return circuit connected to a point in the output circuit such that if the voltage at that point exceeds one of a predetermined first and second voltage, the return circuit is turned on, To return at least one of the voltage and the current to the DC voltage source. 54. The power supply circuit according to item 53 of the patent application, wherein the output circuit further includes a harmonic filter. 55. According to item 53 of the patent application The power supply circuit, the output circuit further includes a harmonic filter including an inductor and a capacitor. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ----- -------- 1 (Please read the notes on the back before filling out this page) Order --------- ^ 9. 53 595061 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A8 B8 C8 D8 wave device. 56. A power supply circuit according to item 53 of the patent application, wherein the return circuit includes first and second rectifiers. 57. The power supply circuit according to item 53 of the patent application, wherein the converter includes a half-bridge converter. 58. The power supply circuit according to item 53 of the application, wherein the converter includes a full-bridge converter having two halves, and the halves are connected to the load in one of series and parallel. Settings. 59. A power supply circuit according to item 5 of the patent application, wherein the return circuit returns at least one of a voltage and a current to the converter. 60. A power supply circuit for supplying AC power to a load. The power supply circuit includes: a direct current (DC) voltage source; a converter for receiving a DC input voltage and for generating An alternating current (AC) output signal for output to a load; an output circuit provided at the output of the converter; and a divergent circuit connected to a point in the output circuit such that if the voltage at that point exceeds one One of the first and second voltages is scheduled to be turned on so that at least one of the voltage and the current can be diverged. J 61. The power supply circuit according to item 60 of the patent application, wherein the divergent circuit includes at least one Zener diode. 62. The power supply circuit according to item 60 of the scope of the patent application, wherein the divergent circuit includes a back-to-back aligning diode and the breakdown voltage of each zener diode determine the predetermined first and second voltages. This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) '------ ^ 54. ------------- f (Please read the Note for this page, please fill out this page) —Order ---------. Printed by the Consumers 'Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs /', patent application scope 63 · —A plasma control system, including: a plasma chamber excited by a radio frequency (RF) signal; a plasma chamber A plasma controller for generating a control signal for changing the conditions in the plasma chamber; and an RF generator for generating an RF signal to the plasma chamber, the RF generator Includes an RF controller, the RF controller can receive the control signal from the plasma control alpha device and can generate a power supply control signal, and a RF power control signal to receive and control the power supply The power supply control signal of the power supply generates an RF signal. The power supply further includes: a direct current (DC) voltage source; 5 a half bridge for receiving the DC input voltage and generating an alternating current (ac) output signal A first harmonic filter provided at the output of the converter, the first harmonic filter can filter a predetermined harmonic component of the AC signal to generate a filtered AC signal; And 0 — an output circuit provided at the output of the first harmonic filter to receive the filtered AC signal and feed the filtered AC signal to a load, wherein the output circuit includes The first and second rectifiers are connected at one point, so that if the converter tries to drive the point to more than one of the predetermined first and second voltages, the paper size applies the Chinese National Standard (CnS) a4 specification (210 X 297 (Public) 55L --------------------- Order · -------- line (Please read the precautions on the back before filling in this page) 595061 A8 B8 C8 D8 6. For the voltage of one of the patent application scopes, each of the first and second rectifiers will be turned on to enable at least one of the voltage and the current to be returned to the DC voltage source. 64. The plasma control system according to item 63 of the patent application scope, wherein the 5 first harmonic filter includes an inductor and a capacitor connected in series, and the first harmonic filter is connected to the half-bridge type. One of the switches of the converter is connected in parallel. 65. The plasma control system according to item 63 of the scope of patent application, wherein the first harmonic filter includes an inductor and a capacitor, and the inductor is provided in the half-bridge converter. One of the switches is connected to an internal interconnection between the first and second rectifiers, and the capacitor further includes a combination of one of a pair of capacitors, each of the pair of capacitors being connected to an individual first And the second rectifier is connected in parallel. .----------------- (Please read the notes on the back before filling out this page) Is- 'Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs br 66 · Based on patent application The plasma control system of the scope item 63, wherein the first and second rectifiers each include a pair of diodes connected in series, and the first harmonic filter includes an inductor and a capacitor, and the The inductor is disposed at an output of the switches and an internal interconnection between the first and second diodes, and the capacitor further includes one of a plurality of capacitors combined with a capacitor, wherein individual capacitors correspond to One of each individual diode pair is connected in parallel to a corresponding individual diode. 67 · Plasma control system according to item 63 of the scope of patent application, which further includes ·· A pair of individual-line paper sizes connected in series to the DC voltage source are designed to Chinese National Standard (CNS) A: I specifications ( 210 X 297 male: g) The Intellectual Property Bureau employee consumer cooperative of the Ministry of Economic Affairs prints capacitors between the tracks of the patent application scope; the converter includes a pair of switches connected in series between the individual voltage rails of the DC voltage source; and An internal interconnection of capacitors and an inductor between the internal interconnections of one of the switches. 68. The plasma control system according to item 67 of the patent application scope further includes a pair of diodes, each of which is connected in parallel with a separate capacitor. 69. The plasma control system according to item 67 of the application, wherein each of these switches further includes a pair of switches connected in series, and further includes a capacitor connected in parallel with each switch. 70 · —A plasma control system comprising: a plasma chamber excited by a radio frequency (RF) signal; an RF generator for generating an RF signal supplied to the plasma chamber, the RF generator Including: an RF controller, the RF controller can generate a power supply control signal; and a power supply for receiving the power supply control signal and generating an RF signal according to the power supply control signal, the power supply The power supply further includes: a direct current (DC) voltage source; a full bridge converter for receiving the DC input voltage and for generating an alternating current (AC) output signal, the full bridge converter includes a pair. Half-bridge converters; a first spectral wave I paper size (CNS) A4 specification (21 () x 297) set at the output of each individual half-bridge converter was duplicated: ^ ---- ---- ^ --------- ^ (Please read the notes on the back before filling out this page) 丄 Α8 Β8 C8 D8 10 15 Printed by the Intellectual Property Bureau Employee Consumer Cooperatives of the Ministry of Economic Affairs 20 Scope of Patent Application Wave filter 'The harmonic filter can filter a predetermined harmonic component of the Ac signal to generate a filter Wave AC signal; and a turn-out circuit provided at the combined output of the first harmonic filters, the output circuit may receive the filtered Ac signal and feed the filtered AC signal to a load, wherein the output The circuit includes first and second rectifiers connected with respect to a point in the output circuit such that if the converter attempts to drive the point to a voltage exceeding one of a predetermined first and second voltage, such Each of the first and second rectifiers will be turned on to return at least one of the voltage and the current to the DC voltage source. 71. The plasma control system according to item 70 of the patent application scope further includes a 72. According to a second harmonic filter at the combined output of the first harmonic filters, the second harmonic filter may remove a harmonic component from the first filtered AC signal to generate an output signal. The plasma control system of the scope of patent application No. 71 further includes a blocking capacitor located at the output of the second harmonic filter to remove a DC component from the output of the second harmonic waver. 73 · The plasma control system according to item 71 of the application, wherein the first harmonic filter includes an inductor and an electrical appliance connected in series, and the first harmonic filter is connected to the half-bridge converter. One of the switches is connected in parallel. 74. The plasma control system according to item 72 of the scope of patent application, wherein the second harmonic filter includes an inductor and a capacitor connected in series, and The second harmonic filter is the same as that of the half-bridge converter * ------------- installation -------- order ------- -Line f Jing first read the precautions on the back before filling out this page) 595061 A8 B8 C8 D8 10 15 Printed by the Intellectual Property Bureau Staff Consumer Cooperatives of the Ministry of Economic Affairs 20, one of the Shen Qing patent range switches is set in parallel. 75. The plasma control system according to item 71 of the scope of patent application, wherein the first harmonic filter includes an inductor and a capacitor, and the inductor is disposed at an output of the switches and the first harmonic filter. One of the internal interconnections between the first and second rectifiers, and the capacitor further includes a combination of one of a pair of capacitors, each of the pair of capacitors being connected in parallel with an individual first and second rectifier. 76. The plasma control system according to item 75 of the scope of patent application, wherein the first spectral wave filter includes an inductor and a capacitor, and the inductor is provided at an output of the switches and the first One of the internal interconnections between the first and second rectifiers, and the capacitor further includes a combination of one of a pair of capacitors, each of the pair of capacitors being connected in parallel with the respective first and second rectifiers. 77. The plasma control system according to item 71 of the scope of patent application, further comprising: a pair of capacitors connected in series between the individual voltage rails of the DC voltage source; the converter comprising a pair of serial connections provided in the A switch between the individual voltage rails of the DC voltage source; and an inductor disposed between an internal interconnection of the capacitors and an internal interconnection of the switches. 78. The plasma control system according to item 70 of the scope of patent application, further comprising a switching signal generator capable of generating each half-bridge converter supplied to the converter, wherein the signal generator can be changed in operation A relative phase between the first and half-bridge converters. This paper size applies to China National Standard (CNS) A4 specification (210 X 297 g) ·: ------------- Loading --- (Please read the precautions on the back before filling this page ) Order: Line 5 ο 11 5 11 Patent application scope Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 2 79 · Plasma control system according to item 70 of the scope of patent application, where at least one of these voltages and currents One is fed back to the converter. 80 · —A plasma control system, comprising: a plasma chamber excited by a radio frequency (RF) signal; a measurement of the operation of the plasma chamber and the generation of changes in the plasma chamber A plasma controller for a control signal; and an rF generator for generating an RF signal supplied to the plasma chamber, the RF generator comprising: an RF controller; The control signal of the pulp controller may generate a power supply control signal; a power supply for receiving the power supply control signal and generating an RF signal according to the power supply control signal; and a RF power supply capable of receiving the RF A signal divergence circuit, wherein if the voltage at a predetermined point of the RF generator exceeds one of a predetermined first and second voltage ', the divergence circuit will be turned on to diverge at least one of the voltage and the current. 81. The plasma control system according to item 80 of the scope of patent application, wherein the power supply further includes: a direct current (DC) voltage source; one for receiving the DC input voltage and for generating an alternating current (AC) wheel out Signal half-bridge converter; a harmonic filter set at the output of the converter, the harmonic filter can filter the predetermined harmonic component of the AC signal to produce a paper size suitable for China National Standard (CNS) A4 Specification (210 X 297 mm) A8 B8 C8 D8 Patent application wave AC signal; and an output circuit provided at the output of the harmonic filter to receive the filtered AC signal and to feed the filtered AC signal to a load, wherein the output circuit includes The first and second rectifiers connected with respect to the point in the output circuit. 82. The plasma control system according to item 80 of the scope of patent application, wherein the power supply further includes a direct current (DC) voltage source; 10 15 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs for receiving The DC input voltage is used to generate an alternating current (AC) full-bridge converter. The full-bridge converter includes a pair of half-bridge converters. One is provided at each individual half-bridge converter. A first harmonic filter at the output of the filter, the harmonic filter may filter a predetermined harmonic component of the Ac signal to generate a filtered AC signal; and a combination of the first harmonic filters An output circuit at the output, the output circuit can receive the filtered AC signal and can feed the filtered AC signal to a load, wherein the output circuit includes the first and the first connected with respect to the point in the output circuit Two rectifiers. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)