DE3688356D1 - Elektronische keramische vorrichtung und zugehoeriges herstellungsverfahren. - Google Patents

Elektronische keramische vorrichtung und zugehoeriges herstellungsverfahren.

Info

Publication number
DE3688356D1
DE3688356D1 DE8686308344T DE3688356T DE3688356D1 DE 3688356 D1 DE3688356 D1 DE 3688356D1 DE 8686308344 T DE8686308344 T DE 8686308344T DE 3688356 T DE3688356 T DE 3688356T DE 3688356 D1 DE3688356 D1 DE 3688356D1
Authority
DE
Germany
Prior art keywords
production method
related production
ceramic device
electronic ceramic
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686308344T
Other languages
English (en)
Other versions
DE3688356T2 (de
Inventor
Kazuaki Nec Corporation Utsumi
Hideo Nec Corporati Takamizawa
Mitsuo Nec Corporation Tsuzuki
Michihisa Nec Corporation Suga
Sadayuki Nec Corpora Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP24321885A external-priority patent/JPS62101453A/ja
Priority claimed from JP24322085A external-priority patent/JPS62101455A/ja
Priority claimed from JP60243219A external-priority patent/JPH078575B2/ja
Priority claimed from JP60273943A external-priority patent/JPS62132500A/ja
Priority claimed from JP27394285A external-priority patent/JPS62132413A/ja
Priority claimed from JP27724385A external-priority patent/JPS62135377A/ja
Priority claimed from JP8365686A external-priority patent/JPS62239706A/ja
Priority claimed from JP8365786A external-priority patent/JPS62239799A/ja
Priority claimed from JP61150383A external-priority patent/JPH0796301B2/ja
Application filed by NEC Corp filed Critical NEC Corp
Publication of DE3688356D1 publication Critical patent/DE3688356D1/de
Publication of DE3688356T2 publication Critical patent/DE3688356T2/de
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K3/00—Apparatus or processes adapted to the manufacture, installing, removal, or maintenance of incandescent lamps or parts thereof
    • H01K3/22—Exhausting, degassing, filling, or cleaning vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5194—Metallisation of multilayered ceramics, e.g. for the fabrication of multilayer ceramic capacitors
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/88—Metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/702—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof
    • H01L21/705—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof of thick-film circuits or parts thereof
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/176—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of ceramic material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/562—Monolithic crystal filters comprising a ceramic piezoelectric layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B41J2002/14217—Multi layer finger type piezoelectric element
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00844—Uses not provided for elsewhere in C04B2111/00 for electronic applications
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
    • H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49083—Heater type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49158—Manufacturing circuit on or in base with molding of insulated base
DE8686308344T 1985-10-29 1986-10-27 Elektronische keramische vorrichtung und zugehoeriges herstellungsverfahren. Expired - Lifetime DE3688356T2 (de)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP60243219A JPH078575B2 (ja) 1985-10-29 1985-10-29 セラミック電子部品の製造方法
JP24321885A JPS62101453A (ja) 1985-10-29 1985-10-29 セラミツク電子部品の製造方法
JP24322085A JPS62101455A (ja) 1985-10-29 1985-10-29 インクジエツトヘツドとその製造方法
JP27394285A JPS62132413A (ja) 1985-12-04 1985-12-04 圧電セラミツク振動子
JP60273943A JPS62132500A (ja) 1985-12-04 1985-12-04 圧電式電気音響変換デバイス
JP27724385A JPS62135377A (ja) 1985-12-09 1985-12-09 インクジエツトヘツドおよびその製造方法
JP8365686A JPS62239706A (ja) 1986-04-11 1986-04-11 圧電セラミツク振動子の製造方法
JP8365786A JPS62239799A (ja) 1986-04-11 1986-04-11 圧電式電気音響変換デバイスの製造方法
JP61150383A JPH0796301B2 (ja) 1986-06-25 1986-06-25 セラミックインクジェットヘッドとその製造方法

Publications (2)

Publication Number Publication Date
DE3688356D1 true DE3688356D1 (de) 1993-06-03
DE3688356T2 DE3688356T2 (de) 1993-08-12

Family

ID=27577218

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686308344T Expired - Lifetime DE3688356T2 (de) 1985-10-29 1986-10-27 Elektronische keramische vorrichtung und zugehoeriges herstellungsverfahren.

Country Status (3)

Country Link
US (1) US4766671A (de)
EP (1) EP0220959B1 (de)
DE (1) DE3688356T2 (de)

Families Citing this family (64)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0265777B1 (de) * 1986-10-31 1993-02-10 Gte Products Corporation Verfahren zur Herstellung einer monolitischen Keramikstruktur mit einem inneren Holhraum
JPS63240096A (ja) * 1987-03-27 1988-10-05 富士通株式会社 グリ−ンシ−ト多層法
JPS63249394A (ja) * 1987-04-06 1988-10-17 日本電気株式会社 多層回路基板
DE3733109A1 (de) * 1987-09-30 1989-04-13 Siemens Ag Verfahren zur herstellung eines piezokeramik-elementes fuer einen tintenstrahlschreiber
JPH065656B2 (ja) * 1988-02-19 1994-01-19 株式会社村田製作所 セラミック積層体の製造方法
JP2886588B2 (ja) * 1989-07-11 1999-04-26 日本碍子株式会社 圧電／電歪アクチュエータ
DE69026765T2 (de) * 1989-07-11 1996-10-24 Ngk Insulators Ltd Einen piezoelektrischen/elektrostriktiven Film enthaltende piezoelektrischer/elektrostriktiver Antrieb
DE4020015C1 (de) * 1990-06-20 1991-09-26 Mannesmann Ag, 4000 Duesseldorf, De
JP2913806B2 (ja) * 1990-09-14 1999-06-28 ブラザー工業株式会社 圧電式インクジェットプリンタヘッド
ATE147014T1 (de) * 1990-10-18 1997-01-15 Canon Kk Herstellungsverfahren eines tintenstrahldruckkopfes
JP3148946B2 (ja) * 1991-05-30 2001-03-26 キヤノン株式会社 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ
US5527501A (en) * 1991-06-25 1996-06-18 Nippon Soken Inc. Process for producing piezoelectric ceramic sheet and dielectric ceramic sheet
FR2688929B1 (fr) * 1992-03-23 1994-05-20 Xeram Procede d'obtention d'inserts ceramiques isolants par empilement multicouches.
JP3317308B2 (ja) * 1992-08-26 2002-08-26 セイコーエプソン株式会社 積層型インクジェット記録ヘッド、及びその製造方法
JP3144948B2 (ja) * 1992-05-27 2001-03-12 日本碍子株式会社 インクジェットプリントヘッド
US5240671A (en) * 1992-06-01 1993-08-31 Microelectronics And Computer Technology Corporation Method of forming recessed patterns in insulating substrates
US6004705A (en) * 1992-07-07 1999-12-21 Toray Industries, Inc. Photosensitive ceramics green sheet
US6601949B1 (en) * 1992-08-26 2003-08-05 Seiko Epson Corporation Actuator unit for ink jet recording head
KR0127666B1 (ko) * 1992-11-25 1997-12-30 모리시다 요이찌 세라믹전자부품 및 그 제조방법
US5459501A (en) * 1993-02-01 1995-10-17 At&T Global Information Solutions Company Solid-state ink-jet print head
IT1268870B1 (it) * 1993-08-23 1997-03-13 Seiko Epson Corp Testa di registrazione a getto d'inchiostro e procedimento per la sua fabbricazione.
JPH07142822A (ja) * 1993-09-20 1995-06-02 Fujitsu Ltd 回路基板及びその製造方法
DE69434514T2 (de) * 1993-12-24 2006-06-22 Seiko Epson Corp. Tintenstrahlaufzeichnungskopf
SG64335A1 (en) * 1993-12-28 1999-04-27 Seiko Epson Corp Ink jet recording head
JPH0820109A (ja) * 1994-07-08 1996-01-23 Nec Corp インクジェット記録ヘッドおよびその製造方法
JPH0825625A (ja) * 1994-07-12 1996-01-30 Nec Corp インクジェット記録ヘッドおよびその製造方法
JP3196811B2 (ja) * 1994-10-17 2001-08-06 セイコーエプソン株式会社 積層型インクジェット式記録ヘッド、及びその製造方法
JP3471447B2 (ja) 1994-11-16 2003-12-02 日本碍子株式会社 セラミックダイヤフラム構造体およびその製造方法
JPH08187848A (ja) * 1995-01-12 1996-07-23 Brother Ind Ltd 積層式圧電素子およびその製造方法
JP3439570B2 (ja) * 1995-05-08 2003-08-25 日本碍子株式会社 ダイヤフラム構造体
US5696423A (en) * 1995-06-29 1997-12-09 Motorola, Inc. Temperature compenated resonator and method
US5617631A (en) * 1995-07-21 1997-04-08 Xerox Corporation Method of making a liquid ink printhead orifice plate
EP0755793B1 (de) * 1995-07-26 2001-04-04 Sony Corporation Druckvorrichtung und Verfahren zu ihrer Herstellung
JP3432974B2 (ja) * 1995-10-13 2003-08-04 日本碍子株式会社 圧電／電歪膜型素子
US5757400A (en) * 1996-02-01 1998-05-26 Spectra, Inc. High resolution matrix ink jet arrangement
US6217158B1 (en) * 1996-04-11 2001-04-17 Seiko Epson Corporation Layered type ink jet recording head with improved piezoelectric actuator unit
DE19716356A1 (de) * 1996-04-26 1997-10-30 Murata Manufacturing Co Verfahren zur Herstellung von monolithischen elektronischen Teilen
US5785800A (en) * 1996-06-21 1998-07-28 International Business Machines Corporation Apparatus for forming cavity structures using thermally decomposable surface layer
DE19758552C2 (de) * 1996-12-17 2002-08-01 Fujitsu Ltd Verfahren zur Herstellung eines Tintenstrahlkopfes, der ein piezoelektrisches Element verwendet
JP3257960B2 (ja) 1996-12-17 2002-02-18 富士通株式会社 インクジェットヘッド
JPH10211704A (ja) * 1997-01-31 1998-08-11 Minolta Co Ltd インクジェットヘッドおよびインクジェットヘッド用インク室形成部材の製造方法
US6494566B1 (en) * 1997-01-31 2002-12-17 Kyocera Corporation Head member having ultrafine grooves and a method of manufacture thereof
JPH10244669A (ja) * 1997-03-05 1998-09-14 Fujitsu Ltd インクジェットプリンタヘッド及びその製造方法、並びにインクジェットプリンタ
US6154239A (en) * 1998-08-31 2000-11-28 Eastman Kodak Company Ceramic ink jet printing element
US6675469B1 (en) * 1999-08-11 2004-01-13 Tessera, Inc. Vapor phase connection techniques
US6639508B1 (en) 1999-09-22 2003-10-28 Aptek Williams, Inc. Electrical switch device and process for manufacturing same
WO2001042017A1 (fr) * 1999-12-10 2001-06-14 Fujitsu Limited Tete a jet d'encre et imprimante
JP3407710B2 (ja) * 2000-04-26 2003-05-19 株式会社村田製作所 誘電体線路の製造方法
JP2002355977A (ja) * 2001-02-08 2002-12-10 Canon Inc 撥液部材、該撥液部材を用いたインクジェットヘッド、それらの製造方法及びインクの供給方法
US20020174937A1 (en) * 2001-05-25 2002-11-28 Motorola, Inc. Methods and apparatus for manufacturing patterned ceramic green-sheets and multilayered ceramic devices
JP3445262B2 (ja) * 2001-11-22 2003-09-08 松下電器産業株式会社 圧電体の製造方法、圧電体、超音波探触子、超音波診断装置および非破壊検査装置
JP3997865B2 (ja) * 2002-08-29 2007-10-24 ブラザー工業株式会社 インクジェットプリンタヘッド
US7232207B2 (en) * 2002-12-27 2007-06-19 Konica Minolta Holdings, Inc. Ink jet head
JP3925650B2 (ja) * 2003-03-06 2007-06-06 ブラザー工業株式会社 インクジェットプリンタヘッド
US7682000B2 (en) * 2005-03-24 2010-03-23 Brother Kogyo Kabushiki Kaisha Piezoelectric actuator, liquid transporting apparatus and method of producing piezoelectric actuator
DE102006011293A1 (de) * 2006-03-10 2007-09-13 Siemens Ag Piezoaktor und Verfahren zum Herstellen eines Piezoaktors
WO2012053359A1 (ja) * 2010-10-20 2012-04-26 新東工業株式会社 全固体電池を構成する層構造体の製造方法、製造装置及びその層構造体を備えた全固体電池
WO2013047609A1 (ja) 2011-09-30 2013-04-04 京セラ株式会社 携帯電子機器
CN102711026B (zh) * 2012-06-25 2014-07-09 汉得利（常州）电子有限公司 汽车用压电式低能耗宽频警示装置
DE102015214997A1 (de) * 2015-08-06 2017-02-09 ALL-Impex GmbH Import/Export Verfahren zur Herstellung eines Bauteils aus keramischen Werkstoffen
JP6113254B1 (ja) * 2015-11-26 2017-04-12 三菱電機株式会社 赤外線光源
US11050364B2 (en) 2016-12-09 2021-06-29 New Scale Technologies, Inc. Semi-resonant motion devices and methods thereof
CN112028638B (zh) * 2020-07-31 2022-06-28 深圳陶陶科技有限公司 一种陶瓷材料及其制备方法和应用
GB2599902A (en) * 2020-10-11 2022-04-20 Mesa Tech Ltd Printing apparatus and method

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3948706A (en) * 1973-12-13 1976-04-06 International Business Machines Corporation Method for metallizing ceramic green sheets
JPS5382170A (en) * 1976-12-28 1978-07-20 Ngk Insulators Ltd Method of producing coupled type ic ceramic package
US4246076A (en) * 1979-12-06 1981-01-20 Xerox Corporation Method for producing nozzles for ink jet printers
US4345955A (en) * 1980-10-28 1982-08-24 E. I. Du Pont De Nemours And Company Process for manufacturing multilayer ceramic chip carrier modules
JPS5817651A (ja) * 1981-07-24 1983-02-01 Hitachi Ltd 多層回路板とその製造方法
JPS5887060A (ja) * 1981-11-18 1983-05-24 Kyocera Corp インクジェットヘッドの製造方法
JPS6030355A (ja) * 1983-07-28 1985-02-15 Canon Inc インクジエツト記録ヘツドの製造方法
US4510000A (en) * 1983-11-30 1985-04-09 International Business Machines Corporation Method for palladium activating molybdenum metallized features on a ceramic substrate
FR2556503B1 (fr) * 1983-12-08 1986-12-12 Eurofarad Substrat d'interconnexion en alumine pour composant electronique
JPS60136294A (ja) * 1983-12-23 1985-07-19 株式会社日立製作所 セラミック多層配線回路板
JPS6198556A (ja) * 1984-10-20 1986-05-16 Ricoh Co Ltd マルチノズルの製法
US4654095A (en) * 1985-03-25 1987-03-31 E. I. Du Pont De Nemours And Company Dielectric composition
US4680859A (en) * 1985-12-06 1987-07-21 Hewlett-Packard Company Thermal ink jet print head method of manufacture

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EP0220959A3 (en) 1989-12-20
EP0220959A2 (de) 1987-05-06
EP0220959B1 (de) 1993-04-28
US4766671A (en) 1988-08-30
DE3688356T2 (de) 1993-08-12

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