DE3788589D1 - Lötverfahren und Gerät. - Google Patents

Lötverfahren und Gerät.

Info

Publication number
DE3788589D1
DE3788589D1 DE87103203T DE3788589T DE3788589D1 DE 3788589 D1 DE3788589 D1 DE 3788589D1 DE 87103203 T DE87103203 T DE 87103203T DE 3788589 T DE3788589 T DE 3788589T DE 3788589 D1 DE3788589 D1 DE 3788589D1
Authority
DE
Germany
Prior art keywords
soldering process
soldering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE87103203T
Other languages
English (en)
Other versions
DE3788589T2 (de
Inventor
Lewis Drucker Lipschutz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3788589D1 publication Critical patent/DE3788589D1/de
Publication of DE3788589T2 publication Critical patent/DE3788589T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/012—Soldering with the use of hot gas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75—Apparatus for connecting with bump connectors or layer connectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/42—Printed circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/751—Means for controlling the bonding environment, e.g. valves, vacuum pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/818—Bonding techniques
    • H01L2224/81801—Soldering or alloying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01075—Rhenium [Re]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/0132—Binary Alloys
    • H01L2924/01327—Intermediate phases, i.e. intermetallics compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/014—Solder alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/156—Material
    • H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901—Structure
    • H01L2924/1904—Component type
    • H01L2924/19041—Component type being a capacitor
DE3788589T 1986-04-28 1987-03-06 Lötverfahren und Gerät. Expired - Fee Related DE3788589T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/856,516 US4747533A (en) 1986-04-28 1986-04-28 Bonding method and apparatus

Publications (2)

Publication Number Publication Date
DE3788589D1 true DE3788589D1 (de) 1994-02-10
DE3788589T2 DE3788589T2 (de) 1994-06-30

Family

ID=25323824

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3788589T Expired - Fee Related DE3788589T2 (de) 1986-04-28 1987-03-06 Lötverfahren und Gerät.

Country Status (4)

Country Link
US (1) US4747533A (de)
EP (1) EP0243621B1 (de)
JP (1) JPS62257737A (de)
DE (1) DE3788589T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5102028A (en) * 1990-04-02 1992-04-07 International Business Machines Corporation Localized soldering station using state changing medium
DE4024181C1 (en) * 1990-07-30 1992-02-13 Siemens Nixdorf Informationssysteme Ag, 4790 Paderborn, De Vapour phase soldering installation - has valve in by=pass opening in dependence on preset temp. of sec. medium in soldering tank
JP4271299B2 (ja) * 1999-06-28 2009-06-03 光洋サーモシステム株式会社 リフロー炉
DE50214298D1 (de) * 2001-06-20 2010-05-06 Alstom Technology Ltd Lötverbindung und Verfahren zur Herstellung einer Lötverbindung
JP2007180447A (ja) * 2005-12-28 2007-07-12 Toyota Industries Corp 半田付け方法、半田付け装置、及び半導体装置の製造方法
JP4640170B2 (ja) * 2005-12-28 2011-03-02 株式会社豊田自動織機 半田付け方法及び半導体モジュールの製造方法並びに半田付け装置
JP4375491B1 (ja) * 2008-06-23 2009-12-02 日本ジョイント株式会社 電子部品のはんだ付け装置およびはんだ付け方法
US9166139B2 (en) * 2009-05-14 2015-10-20 The Neothermal Energy Company Method for thermally cycling an object including a polarizable material
US11445650B2 (en) * 2019-10-22 2022-09-13 International Business Machines Corporation Localized rework using liquid media soldering

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US30399A (en) * 1860-10-16 Gas-kegttlatob
US3054174A (en) * 1958-05-13 1962-09-18 Rca Corp Method for making semiconductor devices
US3825994A (en) * 1972-11-15 1974-07-30 Rca Corp Method of soldering circuit components to a substrate
US4077467A (en) * 1976-01-28 1978-03-07 Spigarelli Donald J Method and apparatus for soldering, fusing or brazing
US4055217A (en) * 1976-02-02 1977-10-25 Western Electric Company, Inc. Method for maintaining a vapor blanket in a condensation heating facility
NL7805800A (nl) * 1978-05-29 1979-12-03 Philips Nv Werkwijze en inrichting voor het solderen van onderde- len op een gatloos dikke-film substraat alsmede dikke-film substraat met onderdelen gesoldeerd met de werkwijze.
US4334646A (en) * 1980-04-17 1982-06-15 Harris Corporation Method of solder reflow assembly
DE3040274C2 (de) * 1980-10-23 1983-06-09 ERSA Ernst Sachs KG, GmbH & Co, 6980 Wertheim Vorrichtung zum Auslöten elektronischer Bauteile aus Leiterplatten
JPS57141993A (en) * 1981-02-25 1982-09-02 Matsushita Electric Ind Co Ltd Printed circuit board mounted with chip part and method of mounting chip part on printed circuit board
US4441647A (en) * 1982-06-04 1984-04-10 Northern Telecom Limited Resoldering tool for ceramic substrate hybrid electronic circuits
US4474322A (en) * 1982-11-12 1984-10-02 Epe Corporation Displacement soldering device
GB8312503D0 (en) * 1983-05-06 1983-06-08 Isc Chemicals Ltd Vapour phase soldering
US4538757A (en) * 1983-08-01 1985-09-03 Motorola, Inc. Wave soldering in a reducing atmosphere
FR2556083B1 (fr) * 1983-10-11 1986-04-25 Piezo Ceram Electronique Machine perfectionnee de chauffage d'un article ou produit par condensation de vapeur sur celui-ci
US4561584A (en) * 1983-10-17 1985-12-31 Storage Technology Partners Integrated circuit package removal
US4561586A (en) * 1984-09-04 1985-12-31 Burroughs Corporation Method of removing a soldered integrated circuit package from a printed circuit board
US4580716A (en) * 1984-10-17 1986-04-08 Rca Corporation Apparatus and method for vapor phase solder reflow
JPS6264475A (ja) * 1985-09-17 1987-03-23 Kenji Kondo 物品の融着接合装置

Also Published As

Publication number Publication date
EP0243621A2 (de) 1987-11-04
JPS62257737A (ja) 1987-11-10
EP0243621A3 (en) 1990-05-16
EP0243621B1 (de) 1993-12-29
JPH0432542B2 (de) 1992-05-29
US4747533A (en) 1988-05-31
DE3788589T2 (de) 1994-06-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee