DE3621014C2 - Hochreinigungsvorrichtung für Argon und Verfahren zu deren Betrieb - Google Patents

Hochreinigungsvorrichtung für Argon und Verfahren zu deren Betrieb

Info

Publication number
DE3621014C2
DE3621014C2 DE3621014A DE3621014A DE3621014C2 DE 3621014 C2 DE3621014 C2 DE 3621014C2 DE 3621014 A DE3621014 A DE 3621014A DE 3621014 A DE3621014 A DE 3621014A DE 3621014 C2 DE3621014 C2 DE 3621014C2
Authority
DE
Germany
Prior art keywords
getter
gas
argon
alloy
argon gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3621014A
Other languages
German (de)
English (en)
Other versions
DE3621014A1 (de
Inventor
Kiyoshi Nagai
Claudio Boffito
Fabrizio Doni
Marco Succi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Taiyo Sanso Co Ltd
Original Assignee
SAES Getters SpA
Taiyo Sanso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Getters SpA, Taiyo Sanso Co Ltd filed Critical SAES Getters SpA
Publication of DE3621014A1 publication Critical patent/DE3621014A1/de
Application granted granted Critical
Publication of DE3621014C2 publication Critical patent/DE3621014C2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Gas Separation By Absorption (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Manufacture And Refinement Of Metals (AREA)
DE3621014A 1985-06-28 1986-06-23 Hochreinigungsvorrichtung für Argon und Verfahren zu deren Betrieb Expired - Lifetime DE3621014C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60140629A JPS623008A (ja) 1985-06-28 1985-06-28 アルゴンの超精製装置、並びに精製方法

Publications (2)

Publication Number Publication Date
DE3621014A1 DE3621014A1 (de) 1987-01-08
DE3621014C2 true DE3621014C2 (de) 1995-05-11

Family

ID=15273137

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3621014A Expired - Lifetime DE3621014C2 (de) 1985-06-28 1986-06-23 Hochreinigungsvorrichtung für Argon und Verfahren zu deren Betrieb

Country Status (10)

Country Link
JP (1) JPS623008A (US20110158925A1-20110630-C00013.png)
KR (1) KR930006691B1 (US20110158925A1-20110630-C00013.png)
BE (1) BE904997A (US20110158925A1-20110630-C00013.png)
CA (1) CA1300344C (US20110158925A1-20110630-C00013.png)
DE (1) DE3621014C2 (US20110158925A1-20110630-C00013.png)
FR (1) FR2584063B1 (US20110158925A1-20110630-C00013.png)
GB (1) GB2177079A (US20110158925A1-20110630-C00013.png)
IT (1) IT1190142B (US20110158925A1-20110630-C00013.png)
NL (1) NL192260C (US20110158925A1-20110630-C00013.png)
SE (1) SE463511B (US20110158925A1-20110630-C00013.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009024055A1 (de) 2009-06-05 2010-12-09 Netzsch-Gerätebau GmbH Thermoanalysevorrichtung und Thermoanalyseverfahren

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1227219B (it) * 1988-09-26 1991-03-27 Getters Spa Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno
DE3835825C1 (US20110158925A1-20110630-C00013.png) * 1988-10-21 1990-03-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De
DE3926015A1 (de) * 1989-08-05 1991-02-07 Messer Griesheim Gmbh Verfahren zur feinreinigung von gasen
IT1237944B (it) * 1990-01-05 1993-06-19 Getters Spa Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura
IT1246358B (it) * 1990-07-12 1994-11-17 Getters Spa Processo per eliminare impurita' da un gas idruro
IT1247110B (it) * 1991-02-28 1994-12-12 Getters Spa Processo per la purificazione di gas fluorurati
IT1270875B (it) * 1993-04-29 1997-05-13 Getters Spa Procedimento di purificazione dell'idrogeno e purificatore relativo
US5238469A (en) * 1992-04-02 1993-08-24 Saes Pure Gas, Inc. Method and apparatus for removing residual hydrogen from a purified gas
US6436352B1 (en) 1993-04-29 2002-08-20 Saes Getter, S.P.A. Hydrogen purification
RU2123971C1 (ru) * 1993-04-29 1998-12-27 Саес Геттерс С.П.А. Способ удаления газообразных примесей из потока водорода и устройство для его осуществления
CA2117319A1 (en) * 1993-07-12 1995-01-13 John D. Baker Method for the purification of noble gases, nitrogen and hydrogen
JP3462560B2 (ja) * 1994-03-04 2003-11-05 日本パイオニクス株式会社 水素ガスの精製方法
KR970008347B1 (ko) * 1994-04-12 1997-05-23 한국에너지기술연구소 암모니아 퍼지가스에서 아르곤 및 수소를 고농도로 분리하는 흡착분리방법과 그 장치
WO1997003745A1 (en) * 1995-07-21 1997-02-06 Ultrapure Systems, Inc. Single gas purifier vessel and heat exchanger
DE19528784C1 (de) * 1995-08-04 1996-08-29 Inst Neuwertwirtschaft Gmbh Verfahren zur Reinigung von Inertgasen mittels Sorbenzien
AU2342097A (en) * 1996-03-28 1997-10-17 Saes Pure Gas, Inc. Method and apparatus for purifying hydrogen gas
US6059859A (en) * 1997-09-19 2000-05-09 Aeronex, Inc. Method, composition and apparatus for water removal from non-corrosive gas streams
WO1999019049A2 (en) * 1997-10-15 1999-04-22 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
US6068685A (en) * 1997-10-15 2000-05-30 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
WO1999019050A1 (en) 1997-10-15 1999-04-22 Saes Pure Gas, Inc. Gas purification system with safety device and method for purifying gases
US6733571B1 (en) * 1999-07-12 2004-05-11 Saes Pure Gas, Inc. Gas purification system with an integrated hydrogen sorption and filter assembly
IT1319667B1 (it) * 2000-11-17 2003-10-23 Getters Spa Metodo per la misura della concentrazione di azoto in argon mediantespettroscopia di mobilita' ionica.
ITMI20011193A1 (it) 2001-06-06 2002-12-06 Getters Spa Metodo per la misura mediante spettroscopia di mobilita' ionica dellaconcentrazione di acqua in argon, idrogeno, azoto e elio
JP4520372B2 (ja) * 2005-06-21 2010-08-04 シーケーディ株式会社 精製筒及び空気又は不活性ガスの循環精製装置
CN104291284B (zh) * 2014-10-09 2016-06-22 昆明物理研究所 一种超纯氩气在线净化系统及方法
US10071336B1 (en) 2017-01-24 2018-09-11 Northrop Grumman Systems Corporation Gas purification getter construction for airborne and space applications
JP2018150246A (ja) * 2017-03-10 2018-09-27 国立大学法人東北大学 有機化合物析出方法
CN114193028A (zh) * 2021-11-26 2022-03-18 中国核工业第五建设有限公司 保护气纯度提高装置、保护气提纯方法、焊接保护方法
CN115231533A (zh) * 2022-08-09 2022-10-25 上海交通大学 低氡放射率高温高纯惰性气体纯化器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB961925A (en) * 1959-04-10 1964-06-24 Western Detail Manufacturers L Improvements relating to the purification of argon and helium gas
FR1539693A (fr) * 1966-06-07 1968-09-20 Japan Pure Hydrogen Company Lt Procédé d'enlèvement des impuretés dans les gaz rares
BE792561A (en) * 1972-12-11 1973-03-30 Getters Spa Gas purifier - esp for rare gases and hydrogen with regeneration system for absorber cartridges
IT1110271B (it) * 1979-02-05 1985-12-23 Getters Spa Lega ternaria getterante non evaporabile e metodo di suo impiego per l'assorbimento di acqua,vapore d'acqua,di altri gas
IT1115156B (it) * 1979-04-06 1986-02-03 Getters Spa Leghe zr-fe per l'assorbimento di idrogeno a basse temperature
IT1198325B (it) * 1980-06-04 1988-12-21 Getters Spa Struttura e composizione getteranti,particolarmente adatti per basse temperature
JPS59107910A (ja) * 1982-12-10 1984-06-22 Toshiba Corp アルゴンガスの精製方法
FR2557810A1 (fr) * 1984-01-05 1985-07-12 Analyseurs Epurateur Sarl Ste Procede non polluant pour eliminer les traces d'impuretes contenues dans les gaz rares portes a haute temperature

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009024055A1 (de) 2009-06-05 2010-12-09 Netzsch-Gerätebau GmbH Thermoanalysevorrichtung und Thermoanalyseverfahren
WO2010139311A1 (de) 2009-06-05 2010-12-09 Netzsch-Gerätebau GmbH Thermoanalysevorrichtung und thermoanalyseverfahren

Also Published As

Publication number Publication date
DE3621014A1 (de) 1987-01-08
BE904997A (fr) 1986-10-16
KR930006691B1 (ko) 1993-07-22
SE8602869L (sv) 1986-12-29
JPH0456771B2 (US20110158925A1-20110630-C00013.png) 1992-09-09
IT1190142B (it) 1988-02-10
FR2584063A1 (fr) 1987-01-02
NL192260B (nl) 1996-12-02
GB2177079A (en) 1987-01-14
NL192260C (nl) 1997-04-03
IT8620962A0 (it) 1986-06-27
CA1300344C (en) 1992-05-12
FR2584063B1 (fr) 1990-12-21
GB2177079B (US20110158925A1-20110630-C00013.png) 1989-12-20
NL8601691A (nl) 1987-01-16
GB8615618D0 (en) 1986-07-30
IT8620962A1 (it) 1987-12-27
KR870000239A (ko) 1987-02-17
SE463511B (sv) 1990-12-03
SE8602869D0 (sv) 1986-06-27
JPS623008A (ja) 1987-01-09

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8128 New person/name/address of the agent

Representative=s name: LEWALD, D., DIPL.-ING., PAT.-ANW., 8000 MUENCHEN

D2 Grant after examination
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: VONNEMANN, KLOIBER & KOLLEGEN, 80796 MUENCHEN