DE69316479T2 - Verfahren und Vorrichtung zur Reinigung von Heliumgruppe Gasen - Google Patents

Verfahren und Vorrichtung zur Reinigung von Heliumgruppe Gasen

Info

Publication number
DE69316479T2
DE69316479T2 DE69316479T DE69316479T DE69316479T2 DE 69316479 T2 DE69316479 T2 DE 69316479T2 DE 69316479 T DE69316479 T DE 69316479T DE 69316479 T DE69316479 T DE 69316479T DE 69316479 T2 DE69316479 T2 DE 69316479T2
Authority
DE
Germany
Prior art keywords
helium group
group gases
cleaning
cleaning helium
gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69316479T
Other languages
English (en)
Other versions
DE69316479D1 (de
Inventor
Carl Joseph Heim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Praxair Technology Inc
Original Assignee
Praxair Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Praxair Technology Inc filed Critical Praxair Technology Inc
Publication of DE69316479D1 publication Critical patent/DE69316479D1/de
Application granted granted Critical
Publication of DE69316479T2 publication Critical patent/DE69316479T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0446—Means for feeding or distributing gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/18—Noble gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/80—Water
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
DE69316479T 1992-08-21 1993-08-20 Verfahren und Vorrichtung zur Reinigung von Heliumgruppe Gasen Expired - Fee Related DE69316479T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/933,136 US5391358A (en) 1992-08-21 1992-08-21 Gas purification system

Publications (2)

Publication Number Publication Date
DE69316479D1 DE69316479D1 (de) 1998-02-26
DE69316479T2 true DE69316479T2 (de) 1998-08-20

Family

ID=25463428

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69316479T Expired - Fee Related DE69316479T2 (de) 1992-08-21 1993-08-20 Verfahren und Vorrichtung zur Reinigung von Heliumgruppe Gasen

Country Status (9)

Country Link
US (1) US5391358A (de)
EP (1) EP0584747B1 (de)
JP (1) JP2989445B2 (de)
KR (1) KR0164231B1 (de)
BR (1) BR9303436A (de)
CA (1) CA2104562C (de)
DE (1) DE69316479T2 (de)
ES (1) ES2111100T3 (de)
MX (1) MX9305079A (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2735990B1 (fr) * 1995-06-30 1997-08-14 Air Liquide Procede et dispositif pour la preparation d'un flux substantiellement epure en l'une au moins des impuretes oxygene et monoxyde de carbone
US5762686A (en) * 1996-09-04 1998-06-09 Special Gas System, Inc. Process for determining amount of argon contamination in oxygen and related apparatus therefor
AU5466400A (en) * 1999-06-04 2000-12-28 Flair Corporation Rotating drum adsorber process and system
US6517791B1 (en) * 2000-12-04 2003-02-11 Praxair Technology, Inc. System and process for gas recovery
US6557591B2 (en) * 2001-07-17 2003-05-06 Air Products And Chemicals, Inc. Bulk gas built-in purifier with dual valve bulk container
FR2833361B1 (fr) 2001-12-06 2004-05-21 Air Liquide Procede pour garantir au moins une caracteristique d'un fluide utilise pour la production de produits alimentaires
FR2833188B1 (fr) * 2001-12-06 2004-05-21 Air Liquide Installation et procede de production de produits en utilisant un fluide
WO2005035100A1 (en) * 2003-09-24 2005-04-21 Donaldson Company, Inc. High purity air and gas fractionation system
US7449050B2 (en) * 2005-12-29 2008-11-11 Microsensor Systems, Inc. System, apparatus and method for concentrating chemical vapors
KR100867643B1 (ko) * 2006-10-23 2008-11-10 조건환 폐헬륨가스 농축 장치
CN101376077B (zh) * 2007-08-31 2011-02-09 先普半导体技术(上海)有限公司 一种小流量气体纯化方法和纯化装置
ES2375390B1 (es) 2009-10-26 2013-02-11 Consejo Superior De Investigaciones Científicas (Csic) Planta de recuperación de helio.
KR102043480B1 (ko) * 2012-02-10 2019-11-11 엔테그리스, 아이엔씨. 가스 정제기
CN110090616A (zh) * 2018-01-30 2019-08-06 北京航天试验技术研究所 一种低温液体吸附除水材料的制备
CN112495155B (zh) * 2021-02-07 2021-05-14 瑞燃(上海)环境工程技术有限公司 一种干式化学过滤装置处理有毒有害尾气的工艺系统

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2504653A1 (de) * 1974-04-26 1975-11-13 Le T I Cholodil Verfahren zur reinigung eines neonhelium-gemisches
JPS55165124A (en) * 1979-06-11 1980-12-23 Hitachi Ltd Adsorbing apparatus for corrosive gas
US4376640A (en) * 1981-12-10 1983-03-15 Calgon Corporation Repressurization of pressure swing adsorption system
US4449991A (en) * 1982-12-20 1984-05-22 Exxon Research And Engineering Co. Removal of sulfur from process streams
US4713224A (en) * 1986-03-31 1987-12-15 The Boc Group, Inc. One-step process for purifying an inert gas
EP0294142B1 (de) * 1987-06-01 1992-03-25 Japan Pionics., Ltd. Verfahren zum Reinigen von Abgas
JP2562326B2 (ja) * 1987-08-07 1996-12-11 住友精化株式会社 空気から高濃度酸素を取得する方法
US5123375A (en) * 1990-01-08 1992-06-23 Lsi Logic Corporation Structure for filtering CVD chamber process gases
CN1027802C (zh) * 1990-01-19 1995-03-08 波克集团股份有限公司 一种从原料气流中去除杂质的方法
EP0454531B1 (de) * 1990-04-20 1998-01-21 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Verfahren und Einrichtung zur Herstellung von ultrareinem Stickstoff
FR2661966B1 (fr) * 1990-05-09 1994-09-16 Volkswagen Ag Dispositif hydraulique de commande.
DE4100933A1 (de) * 1991-01-15 1992-07-16 Achenbach Cryotechnik Gmbh Anlage zur reinigung von heliumgas
JPH04358516A (ja) * 1991-02-05 1992-12-11 Teisan Kk 排ガス処理方法
US5106399A (en) * 1991-02-25 1992-04-21 Union Carbide Industrial Gases Technology Corporation Argon purification system
US5163980A (en) * 1991-10-22 1992-11-17 Kovach J Louis Water removal from humid gases laden with organic contaminants by series adsorption

Also Published As

Publication number Publication date
DE69316479D1 (de) 1998-02-26
ES2111100T3 (es) 1998-03-01
MX9305079A (es) 1994-04-29
KR940003599A (ko) 1994-03-12
JP2989445B2 (ja) 1999-12-13
KR0164231B1 (ko) 1998-12-15
EP0584747A1 (de) 1994-03-02
CA2104562A1 (en) 1994-02-22
CA2104562C (en) 1999-06-15
JPH06205971A (ja) 1994-07-26
US5391358A (en) 1995-02-21
BR9303436A (pt) 1994-03-15
EP0584747B1 (de) 1998-01-21

Similar Documents

Publication Publication Date Title
DE69328235D1 (de) Verfahren und Vorrichtung zur Reinigung von Abgas
DE600440T1 (de) Verfahren und Vorrichtung zur Reinigung von Abgasen.
DE69313597D1 (de) Verfahren und Vorrichtung zur Megaschallreinigung
DE69408957D1 (de) Vorrichtung und Verfahren zur Reinigung von Abgas
DE69402487D1 (de) Vorrichtung und Verfahren zur Entfernung von Stickstoffoxiden
DE69332739T2 (de) Verfahren und vorrichtung zur präparativen elektroforese
DE69228455T2 (de) Verfahren und Vorrichtung zur Gastrennung
DE69423857D1 (de) Verfahren und Vorrichtung zur Reinigung von Abgas
DE59400240D1 (de) Verfahren und Vorrichtung zur Reinigung von Acrylsäure
DE69331081D1 (de) Verfahren und Vorrichtung zum Mischen von Gasen
DE69226511T2 (de) Verfahren und Vorrichtung zur Belichtung von Substraten
DE69319621T2 (de) Verfahren und vorrichtung zur pyrolitischen zersetzung von kohlenwasserstoffen
DE59403354D1 (de) Verfahren und Vorrichtung zur Entstickung von Rauchgasen
DE69327069T2 (de) Vorrichtung und Verfahren zur Plasmaerzeugung
DE69318461D1 (de) Verfahren und Vorrichtung zur Entfernung von Stickoxyden
DE69213513T2 (de) Verfahren und Vorrichtung zur Gastrennung
DE69316479D1 (de) Verfahren und Vorrichtung zur Reinigung von Heliumgruppe Gasen
DE69312635D1 (de) Verfahren zur Reinigung von Schadgas
DE69130228D1 (de) Verfahren und vorrichtung zur reinigung von metallischen gegenständen
DE59302807D1 (de) Einrichtung und verfahren zur handhabung von gegenständen
DE69325092D1 (de) Verfahren und vorrichtung zur entfernung von kohlenmonoxid
DE69416726D1 (de) Verfahren und Vorrichtung zur thermischen Reinigung von Objekten
DE69428207D1 (de) Verfahren zur innenreinigung von fluidführenden röhren und dazugehörige vorrichtung
DE59408081D1 (de) Verfahren und Vorrichtung zur Abgasreinigung
ATA173892A (de) Vorrichtung und verfahren zur entfeuchtung von bauwerken

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee