DE69312635D1 - Verfahren zur Reinigung von Schadgas - Google Patents

Verfahren zur Reinigung von Schadgas

Info

Publication number
DE69312635D1
DE69312635D1 DE69312635T DE69312635T DE69312635D1 DE 69312635 D1 DE69312635 D1 DE 69312635D1 DE 69312635 T DE69312635 T DE 69312635T DE 69312635 T DE69312635 T DE 69312635T DE 69312635 D1 DE69312635 D1 DE 69312635D1
Authority
DE
Germany
Prior art keywords
harmful gas
cleaning harmful
cleaning
gas
harmful
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69312635T
Other languages
English (en)
Other versions
DE69312635T2 (de
Inventor
Keiichi Iwata
Toshiya Hatakeyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Pionics Ltd
Original Assignee
Japan Pionics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Pionics Ltd filed Critical Japan Pionics Ltd
Publication of DE69312635D1 publication Critical patent/DE69312635D1/de
Application granted granted Critical
Publication of DE69312635T2 publication Critical patent/DE69312635T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/38—Removing components of undefined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
DE69312635T 1992-11-09 1993-11-05 Verfahren zur Reinigung von Schadgas Expired - Fee Related DE69312635T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP29880692 1992-11-09
JP32557292 1992-12-04
JP33294992 1992-12-14
JP33294892 1992-12-14
JP35540892 1992-12-21
JP35540992 1992-12-21

Publications (2)

Publication Number Publication Date
DE69312635D1 true DE69312635D1 (de) 1997-09-04
DE69312635T2 DE69312635T2 (de) 1997-11-27

Family

ID=27554513

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69312635T Expired - Fee Related DE69312635T2 (de) 1992-11-09 1993-11-05 Verfahren zur Reinigung von Schadgas

Country Status (4)

Country Link
US (1) US5417948A (de)
EP (1) EP0597393B1 (de)
KR (1) KR100243560B1 (de)
DE (1) DE69312635T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW369434B (en) * 1994-02-03 1999-09-11 Mitsui Chemicals Inc Exhaust gas treating agent and a method of treating exhaust gas using the agent
JP3280173B2 (ja) * 1994-11-29 2002-04-30 日本エア・リキード株式会社 排ガス処理装置
JP4037475B2 (ja) * 1996-09-04 2008-01-23 忠弘 大見 ハロゲン系化合物を含有する排ガスの処理方法
JP3986597B2 (ja) * 1996-10-15 2007-10-03 関東電化工業株式会社 三フッ化窒素含有ガスの処理方法及びそのための処理剤
US20010001652A1 (en) 1997-01-14 2001-05-24 Shuichi Kanno Process for treating flourine compound-containing gas
US5935540A (en) * 1997-04-25 1999-08-10 Japan Pionics Co., Ltd. Cleaning process for harmful gas
EP1340533B1 (de) * 1997-06-20 2010-06-16 Hitachi, Ltd. Verfahren, Katalysator und Vorrichtung zur Zersetzung fluorierter Verbindungen
US6106790A (en) * 1997-08-18 2000-08-22 Air Products And Chemicals, Inc. Abatement of NF3 using small particle fluidized bed
US5910294A (en) * 1997-11-17 1999-06-08 Air Products And Chemicals, Inc. Abatement of NF3 with metal oxalates
US6067999A (en) * 1998-04-23 2000-05-30 International Business Machines Corporation Method for deposition tool cleaning
US6352676B1 (en) 1999-02-16 2002-03-05 Air Products And Chemicals, Inc. Abatement of F2 using small particle fluidized bed
US6514471B1 (en) 2000-10-31 2003-02-04 Air Products And Chemicals, Inc. Removing fluorine from semiconductor processing exhaust gas
GB0101769D0 (en) 2001-01-24 2001-03-07 Ineos Fluor Ltd Decomposition of fluorine compounds
GB0418125D0 (en) * 2004-08-13 2004-09-15 Boc Group Plc Treatment of effluent gases
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US7220626B2 (en) * 2005-01-28 2007-05-22 International Business Machines Corporation Structure and method for manufacturing planar strained Si/SiGe substrate with multiple orientations and different stress levels
WO2007053626A2 (en) 2005-10-31 2007-05-10 Applied Materials, Inc. Process abatement reactor
CN107202858B (zh) * 2017-06-09 2019-06-18 秦皇岛出入境检验检疫局煤炭检测技术中心 一种用于直接测汞仪的复合净化添加剂及其在直接测汞仪中的应用

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE431351C (de) * 1924-12-21 1926-07-09 Andreas Berger Vorrichtung zur Abscheidung staubfoermiger Fremdkoerper aus Gasen und Daempfen
US4339309A (en) * 1981-05-05 1982-07-13 The United States Of America As Represented By The United States Department Of Energy Method for removing fluoride contamination from nitric acid
US4629611A (en) * 1985-04-29 1986-12-16 International Business Machines Corporation Gas purifier for rare-gas fluoride lasers
EP0333084B1 (de) * 1988-03-16 1994-07-27 MITSUI TOATSU CHEMICALS, Inc. Verfahren zur Herstellung von gasförmigen Fluoriden
IT1227219B (it) * 1988-09-26 1991-03-27 Getters Spa Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno
US4983373A (en) * 1988-11-23 1991-01-08 Air Products And Chemicals, Inc. Process for the production of high purity zirconium tetrafluoride and other fluorides
EP0382986A1 (de) * 1989-02-13 1990-08-22 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Verfahren und Vorrichtung zur Entgiftung von Stickstoff- oder Kohlenstoffhalogeniden
DE3940493A1 (de) * 1989-12-07 1991-06-13 Man Technologie Gmbh Verfahren und vorrichtung zur entfernung von fluor und anorganischen fluoriden aus gasen
JP2971116B2 (ja) * 1990-10-15 1999-11-02 日本パイオニクス株式会社 希ガスの精製方法

Also Published As

Publication number Publication date
KR100243560B1 (ko) 2000-02-01
EP0597393B1 (de) 1997-07-30
KR940011048A (ko) 1994-06-20
US5417948A (en) 1995-05-23
EP0597393A1 (de) 1994-05-18
DE69312635T2 (de) 1997-11-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee