CN1944716A - 凸点形成用非氰系电解镀金浴 - Google Patents
凸点形成用非氰系电解镀金浴 Download PDFInfo
- Publication number
- CN1944716A CN1944716A CNA2006101414300A CN200610141430A CN1944716A CN 1944716 A CN1944716 A CN 1944716A CN A2006101414300 A CNA2006101414300 A CN A2006101414300A CN 200610141430 A CN200610141430 A CN 200610141430A CN 1944716 A CN1944716 A CN 1944716A
- Authority
- CN
- China
- Prior art keywords
- plating bath
- gold plating
- salient point
- electrolytic gold
- type electrolytic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 title claims abstract description 95
- 239000010931 gold Substances 0.000 title claims abstract description 76
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 title claims abstract description 67
- 229910052737 gold Inorganic materials 0.000 title claims abstract description 67
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical compound N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 claims abstract description 72
- 229920001515 polyalkylene glycol Polymers 0.000 claims abstract description 18
- 150000001412 amines Chemical class 0.000 claims abstract description 10
- 150000003839 salts Chemical class 0.000 claims abstract description 8
- 150000001875 compounds Chemical class 0.000 claims description 24
- -1 alkali metal salt Chemical class 0.000 claims description 20
- 229910052783 alkali metal Inorganic materials 0.000 claims description 15
- 239000003153 chemical reaction reagent Substances 0.000 claims description 14
- 238000002425 crystallisation Methods 0.000 claims description 12
- 230000008025 crystallization Effects 0.000 claims description 12
- JCDVTZPJEWWGHU-UHFFFAOYSA-N gold sulfurous acid Chemical compound [Au].S(O)(O)=O JCDVTZPJEWWGHU-UHFFFAOYSA-N 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 11
- 239000003607 modifier Substances 0.000 claims description 11
- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical compound [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 claims description 10
- GKSYFVIEBZCLEQ-UHFFFAOYSA-N OS(O)=O.N.[Au+3] Chemical compound OS(O)=O.N.[Au+3] GKSYFVIEBZCLEQ-UHFFFAOYSA-N 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- SMWDFEZZVXVKRB-UHFFFAOYSA-N anhydrous quinoline Natural products N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 claims description 3
- 125000001924 fatty-acyl group Chemical group 0.000 claims description 3
- KWIUHFFTVRNATP-UHFFFAOYSA-N glycine betaine Chemical compound C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 claims description 3
- 238000009713 electroplating Methods 0.000 abstract description 19
- 239000002280 amphoteric surfactant Substances 0.000 abstract description 11
- 239000000463 material Substances 0.000 abstract description 10
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 abstract description 2
- 239000013078 crystal Substances 0.000 abstract description 2
- SRCZENKQCOSNAI-UHFFFAOYSA-H gold(3+);trisulfite Chemical compound [Au+3].[Au+3].[O-]S([O-])=O.[O-]S([O-])=O.[O-]S([O-])=O SRCZENKQCOSNAI-UHFFFAOYSA-H 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 abstract 1
- 150000001447 alkali salts Chemical class 0.000 abstract 1
- NHFMFALCHGVCPP-UHFFFAOYSA-M azanium;gold(1+);sulfite Chemical compound [NH4+].[Au+].[O-]S([O-])=O NHFMFALCHGVCPP-UHFFFAOYSA-M 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 239000003381 stabilizer Substances 0.000 abstract 1
- 229910021653 sulphate ion Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 18
- 238000005530 etching Methods 0.000 description 16
- 239000002202 Polyethylene glycol Substances 0.000 description 12
- 229920001223 polyethylene glycol Polymers 0.000 description 12
- 239000011734 sodium Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 239000003795 chemical substances by application Substances 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 229920003986 novolac Polymers 0.000 description 7
- 238000000354 decomposition reaction Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229910052740 iodine Inorganic materials 0.000 description 3
- 239000011630 iodine Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 230000003019 stabilising effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000007669 thermal treatment Methods 0.000 description 3
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 229910052938 sodium sulfate Inorganic materials 0.000 description 2
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulfite Chemical compound [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 2
- 235000011152 sodium sulphate Nutrition 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229910052716 thallium Inorganic materials 0.000 description 2
- KLBIUKJOZFWCLW-UHFFFAOYSA-N thallium(iii) nitrate Chemical compound [Tl+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O KLBIUKJOZFWCLW-UHFFFAOYSA-N 0.000 description 2
- QCYOIFVBYZNUNW-UHFFFAOYSA-N 2-(dimethylazaniumyl)propanoate Chemical class CN(C)C(C)C(O)=O QCYOIFVBYZNUNW-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- LLQHSBBZNDXTIV-UHFFFAOYSA-N 6-[5-[[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]methyl]-4,5-dihydro-1,2-oxazol-3-yl]-3H-1,3-benzoxazol-2-one Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)CC1CC(=NO1)C1=CC2=C(NC(O2)=O)C=C1 LLQHSBBZNDXTIV-UHFFFAOYSA-N 0.000 description 1
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 description 1
- 244000248349 Citrus limon Species 0.000 description 1
- 235000005979 Citrus limon Nutrition 0.000 description 1
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 1
- 241000555268 Dendroides Species 0.000 description 1
- 239000003109 Disodium ethylene diamine tetraacetate Substances 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- DWAQJAXMDSEUJJ-UHFFFAOYSA-M Sodium bisulfite Chemical compound [Na+].OS([O-])=O DWAQJAXMDSEUJJ-UHFFFAOYSA-M 0.000 description 1
- OCNFLBCBOWEIRI-UHFFFAOYSA-N [K+].[Au+].S(O)(O)=O Chemical compound [K+].[Au+].S(O)(O)=O OCNFLBCBOWEIRI-UHFFFAOYSA-N 0.000 description 1
- RXNUQHQAZAAIDP-UHFFFAOYSA-N [Na+].[Au+].OS(O)=O Chemical compound [Na+].[Au+].OS(O)=O RXNUQHQAZAAIDP-UHFFFAOYSA-N 0.000 description 1
- IKWTVSLWAPBBKU-UHFFFAOYSA-N a1010_sial Chemical compound O=[As]O[As]=O IKWTVSLWAPBBKU-UHFFFAOYSA-N 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- LHIJANUOQQMGNT-UHFFFAOYSA-N aminoethylethanolamine Chemical compound NCCNCCO LHIJANUOQQMGNT-UHFFFAOYSA-N 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 229960002594 arsenic trioxide Drugs 0.000 description 1
- GOLCXWYRSKYTSP-UHFFFAOYSA-N arsenic trioxide Inorganic materials O1[As]2O[As]1O2 GOLCXWYRSKYTSP-UHFFFAOYSA-N 0.000 description 1
- 238000003287 bathing Methods 0.000 description 1
- HOQPTLCRWVZIQZ-UHFFFAOYSA-H bis[[2-(5-hydroxy-4,7-dioxo-1,3,2$l^{2}-dioxaplumbepan-5-yl)acetyl]oxy]lead Chemical compound [Pb+2].[Pb+2].[Pb+2].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O HOQPTLCRWVZIQZ-UHFFFAOYSA-H 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical class OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 235000019301 disodium ethylene diamine tetraacetate Nutrition 0.000 description 1
- 229940009662 edetate Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002659 electrodeposit Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 150000002461 imidazolidines Chemical class 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- RLJMLMKIBZAXJO-UHFFFAOYSA-N lead nitrate Chemical compound [O-][N+](=O)O[Pb]O[N+]([O-])=O RLJMLMKIBZAXJO-UHFFFAOYSA-N 0.000 description 1
- 229910000403 monosodium phosphate Inorganic materials 0.000 description 1
- 235000019799 monosodium phosphate Nutrition 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 150000003016 phosphoric acids Chemical class 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- BHZRJJOHZFYXTO-UHFFFAOYSA-L potassium sulfite Chemical compound [K+].[K+].[O-]S([O-])=O BHZRJJOHZFYXTO-UHFFFAOYSA-L 0.000 description 1
- 235000019252 potassium sulphite Nutrition 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- AJPJDKMHJJGVTQ-UHFFFAOYSA-M sodium dihydrogen phosphate Chemical compound [Na+].OP(O)([O-])=O AJPJDKMHJJGVTQ-UHFFFAOYSA-M 0.000 description 1
- HRZFUMHJMZEROT-UHFFFAOYSA-L sodium disulfite Chemical compound [Na+].[Na+].[O-]S(=O)S([O-])(=O)=O HRZFUMHJMZEROT-UHFFFAOYSA-L 0.000 description 1
- 235000010267 sodium hydrogen sulphite Nutrition 0.000 description 1
- 235000010262 sodium metabisulphite Nutrition 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- BXBMHLIYMZRCNK-UHFFFAOYSA-H thallium(3+);trisulfate Chemical compound [Tl+3].[Tl+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O BXBMHLIYMZRCNK-UHFFFAOYSA-H 0.000 description 1
- UFVDXEXHBVQKGB-UHFFFAOYSA-L thallous malonate Chemical compound [Tl+].[Tl+].[O-]C(=O)CC([O-])=O UFVDXEXHBVQKGB-UHFFFAOYSA-L 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- ZEMGGZBWXRYJHK-UHFFFAOYSA-N thiouracil Chemical compound O=C1C=CNC(=S)N1 ZEMGGZBWXRYJHK-UHFFFAOYSA-N 0.000 description 1
- 229950000329 thiouracil Drugs 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/48—Electroplating: Baths therefor from solutions of gold
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
- C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electroplating Methods And Accessories (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
实施例 | |||||||
1 | 2 | 3 | 4 | 5 | 6 | 7 | |
电镀条件电镀温度(℃)电流密度(A/dm2)电镀时间(分) | 520.548 | 540.548 | 560.548 | 540.460 | 540.640 | 560.548 | 580.548 |
配合浓度(g/L)Na3Au(SO3)2as AuNa2SO3 as SO3Na2SO4 as SO41,2-二氨基乙烷Tl(mg/L)缓冲剂A缓冲剂B聚乙二醇A聚乙二醇B聚乙二醇C两性表面活性剂A两性表面活性剂B | 126510112010--3-8- | 126510112010--2-10- | 126510112010--3-12- | 126510112010--2-12- | 126510112010--3-8- | 10451041515-0.5--4- | 10451041515-0.7--5- |
凸点膨胀长边(μm)短边(μm)浴稳定性电镀被膜外观被膜硬度未热处理(Hv)300℃热处理后(Hv)蚀刻性综合评价 | 0-0.5○○12544○○ | 0-0.4○○11847○○ | 0.40○○11248○○ | 0-0.3○○11448○○ | 0-0.4○○11947○○ | 0-0.2○○11946○○ | 00○○11448○○ |
实施例 | |||||||
8 | 9 | 10 | 11 | 12 | 13 | 14 | |
电镀条件电镀温度(℃)电流密度(A/dm2)电镀时间(分) | 600.548 | 580.460 | 580.640 | 570.460 | 570.460 | 570.460 | 570.460 |
配合浓度(g/L)Na3Au(SO3)2as AuNa2SO3 as SO3Na2SO4 as SO41,2-二氨基乙烷Tl(mg/L)缓冲剂A缓冲剂B聚乙二醇A聚乙二醇B聚乙二醇C两性表面活性剂A两性表面活性剂B | 10451041515-1--7- | 10451041515-0.7--5- | 10451041515-1--4- | 1537101710-10-1.5--- | 1537101710-10-3--- | 1537101710-10-30.5-- | 1537101710-10-30.5-5 |
凸点膨胀长边(μm)短边(μm)浴稳定性电镀被膜外观被膜硬度未热处理(Hv)300℃热处理后(Hv)蚀刻性综合评价 | 0.50.2○○11148○○ | 0.50.1○○11049○○ | 0-0.1○○11647○○ | 2.92.5○○11144○○ | 2.11.7○○11345○○ | 0.20○○11547○○ | 0-0.4○○11649○○ |
实施例 | 比较例 | ||||||
15 | 16 | 17 | 1 | 2 | 3 | 4 | |
电镀条件电镀温度(℃)电流密度(A/dm2)电镀时间(分) | 570.460 | 570.460 | 570.460 | 520.548 | 540.548 | 560.548 | 540.460 |
配合浓度(g/L)Na3Au(SO3)2as AuNa2SO3 as SO3Na2SO4 as SO41,2-二氨基乙烷Tl(mg/L)缓冲剂A缓冲剂B聚乙二醇A聚乙二醇B聚乙二醇C两性表面活性剂A两性表面活性剂B | 1537101710-10-30.5-10 | 1537101710-10----5 | 1537101710-10----10 | 126510112010------ | 126510112010------ | 126510112010------ | 126510112010------ |
凸点膨胀长边(μm)短边(μm)浴稳定性电镀被膜外观被膜硬度未热处理(Hv)300℃热处理后(Hv)蚀刻性综合评价 | 0.4-0.6○○11749○○ | 1.91.4○○11247○○ | 1.20.9○○11548○○ | 3.22.8○○11541○× | 3.53.1○○10945○× | 3.83.5○○10446○× | 4.03.1○○10146○× |
比较例 | |||||||
5 | 6 | 7 | 8 | 9 | 10 | 11 | |
电镀条件电镀温度(℃)电流密度(A/dm2)电镀时间(分) | 540.640 | 560.548 | 580.548 | 600.548 | 580.460 | 580.640 | 570.460 |
配合浓度(g/L)Na3Au(SO3)2as AuNa2SO3 as SO3Na2SO4 as SO41,2-二氨基乙烷Tl(mg/L)缓冲剂A缓冲剂B聚乙二醇A聚乙二醇B聚乙二醇C两性表面活性剂A两性表面活性剂B | 126510112010------ | 10451041515------ | 10451041515------ | 10451041515------ | 10451041515------ | 10451041515------ | 1537101710-10----- |
凸点膨胀长边(μm)短边(μm)浴稳定性电镀被膜外观被膜硬度未热处理(Hv)300℃热处理后(Hv)蚀刻性综合评价 | 3.43.2○○10845○× | 3.83.4○○11344○× | 4.34.0○○10945○× | 4.64.1○○10447○× | 4.54.2○○10348○× | 4.23.9○○11145○× | 3.83.3○○10442○× |
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CN101363128B (zh) * | 2007-08-07 | 2011-12-14 | 美泰乐科技(日本)股份有限公司 | 用于形成突起的非氰类电解金电镀液 |
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CN103290440A (zh) * | 2012-02-22 | 2013-09-11 | 美泰乐科技(日本)股份有限公司 | 金凸点形成用非氰系电解镀金浴及金凸点形成方法 |
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JP4925792B2 (ja) * | 2006-11-07 | 2012-05-09 | メタローテクノロジーズジャパン株式会社 | バンプ形成用非シアン系電解金めっき浴 |
JP2009062584A (ja) * | 2007-09-06 | 2009-03-26 | Ne Chemcat Corp | バンプ形成用非シアン系電解金めっき浴及びバンプ形成方法 |
JP5629065B2 (ja) * | 2009-07-02 | 2014-11-19 | メタローテクノロジーズジャパン株式会社 | 電極形成用金めっき浴及びそれを用いた電極形成方法 |
KR102477921B1 (ko) | 2021-11-11 | 2022-12-14 | 마츠다 산교 가부시끼가이샤 | 무시안 전해 금 도금액 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56108892A (en) * | 1980-01-31 | 1981-08-28 | Electroplating Eng Of Japan Co | Plating solution with pure gold |
JP2793864B2 (ja) * | 1989-12-02 | 1998-09-03 | エヌ・イーケムキヤツト株式会社 | 金めつき液およびめつき方法 |
JP2927142B2 (ja) * | 1993-03-26 | 1999-07-28 | 上村工業株式会社 | 無電解金めっき浴及び無電解金めっき方法 |
JPH1150295A (ja) * | 1997-07-28 | 1999-02-23 | Daiwa Kasei Kenkyusho:Kk | めっき浴 |
JP2003013278A (ja) * | 2001-06-26 | 2003-01-15 | Japan Pure Chemical Co Ltd | 金めっき液 |
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CN100351433C (zh) * | 2004-11-19 | 2007-11-28 | 大连理工大学 | 一种工业纯钛的镀金工艺 |
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JP2007092156A (ja) | 2007-04-12 |
TWI390086B (zh) | 2013-03-21 |
KR20070037312A (ko) | 2007-04-04 |
TW200724729A (en) | 2007-07-01 |
KR101319745B1 (ko) | 2013-10-17 |
JP4713289B2 (ja) | 2011-06-29 |
CN1944716B (zh) | 2011-12-14 |
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