CN1879209A - 半导体装置及其制造方法 - Google Patents
半导体装置及其制造方法 Download PDFInfo
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- CN1879209A CN1879209A CNA2005800011240A CN200580001124A CN1879209A CN 1879209 A CN1879209 A CN 1879209A CN A2005800011240 A CNA2005800011240 A CN A2005800011240A CN 200580001124 A CN200580001124 A CN 200580001124A CN 1879209 A CN1879209 A CN 1879209A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 55
- 238000004519 manufacturing process Methods 0.000 title claims description 30
- 229910052751 metal Inorganic materials 0.000 claims abstract description 105
- 239000002184 metal Substances 0.000 claims abstract description 103
- 229910021332 silicide Inorganic materials 0.000 claims abstract description 88
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims abstract description 86
- 238000000034 method Methods 0.000 claims abstract description 44
- 239000000203 mixture Substances 0.000 claims abstract description 35
- 238000009413 insulation Methods 0.000 claims abstract 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 211
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 88
- 229920005591 polysilicon Polymers 0.000 claims description 85
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 claims description 80
- 229910021334 nickel silicide Inorganic materials 0.000 claims description 79
- 229910052759 nickel Inorganic materials 0.000 claims description 56
- 229910052710 silicon Inorganic materials 0.000 claims description 49
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 46
- 239000010703 silicon Substances 0.000 claims description 46
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 39
- 238000009792 diffusion process Methods 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 36
- 229910052735 hafnium Inorganic materials 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 17
- 239000000377 silicon dioxide Substances 0.000 claims description 17
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 17
- 229910052726 zirconium Inorganic materials 0.000 claims description 16
- 229910005881 NiSi 2 Inorganic materials 0.000 claims description 15
- 238000006243 chemical reaction Methods 0.000 claims description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 230000004888 barrier function Effects 0.000 claims description 13
- -1 silica nitride Chemical class 0.000 claims description 12
- 229910044991 metal oxide Inorganic materials 0.000 claims description 10
- 150000004706 metal oxides Chemical class 0.000 claims description 10
- 229910052914 metal silicate Inorganic materials 0.000 claims description 10
- PEUPIGGLJVUNEU-UHFFFAOYSA-N nickel silicon Chemical compound [Si].[Ni] PEUPIGGLJVUNEU-UHFFFAOYSA-N 0.000 claims description 9
- 238000010276 construction Methods 0.000 claims description 8
- 239000000376 reactant Substances 0.000 claims description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 7
- 230000008676 import Effects 0.000 claims description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 5
- 230000033228 biological regulation Effects 0.000 claims description 4
- 238000002679 ablation Methods 0.000 claims 1
- 239000003989 dielectric material Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 90
- 238000005516 engineering process Methods 0.000 description 21
- 229910052721 tungsten Inorganic materials 0.000 description 17
- 239000000463 material Substances 0.000 description 15
- 239000010937 tungsten Substances 0.000 description 15
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 14
- 229910021342 tungsten silicide Inorganic materials 0.000 description 14
- 230000000052 comparative effect Effects 0.000 description 13
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 13
- 239000012535 impurity Substances 0.000 description 12
- 239000011229 interlayer Substances 0.000 description 11
- 239000012528 membrane Substances 0.000 description 11
- 238000000926 separation method Methods 0.000 description 9
- 229910004298 SiO 2 Inorganic materials 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 150000003377 silicon compounds Chemical class 0.000 description 7
- 238000000137 annealing Methods 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 4
- 230000004913 activation Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000005001 rutherford backscattering spectroscopy Methods 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000010955 niobium Substances 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 150000003657 tungsten Chemical class 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000009429 distress Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4966—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2
- H01L29/4975—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2 being a silicide layer, e.g. TiSi2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823828—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
- H01L21/823835—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes silicided or salicided gate conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823828—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
- H01L21/823842—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes gate conductors with different gate conductor materials or different gate conductor implants, e.g. dual gate structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66545—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Composite Materials (AREA)
- Electrodes Of Semiconductors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
TNi/TSi | |||||
0.99 | 0.67 | 1.20 | 1.80 | ||
退火温度(摄氏) | 650 | NiSi2+NiSi | |||
600 | NiSi | ||||
500 | NiSi | NiSi | NiSi+Ni3Si | ||
450 | NiSi | NiSi+Ni3Si | |||
400 | NiSi | NiSi | NiSi+Ni3Si |
Claims (31)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP184758/2004 | 2004-06-23 | ||
JP2004184758 | 2004-06-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1879209A true CN1879209A (zh) | 2006-12-13 |
CN100452357C CN100452357C (zh) | 2009-01-14 |
Family
ID=35781745
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005800011240A Expired - Fee Related CN100452357C (zh) | 2004-06-23 | 2005-06-21 | 半导体装置及其制造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7592674B2 (zh) |
JP (1) | JP4623006B2 (zh) |
CN (1) | CN100452357C (zh) |
WO (1) | WO2006001271A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8012817B2 (en) | 2008-09-26 | 2011-09-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Transistor performance improving method with metal gate |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5015446B2 (ja) * | 2005-05-16 | 2012-08-29 | アイメック | 二重の完全ケイ化ゲートを形成する方法と前記方法によって得られたデバイス |
JP2006344836A (ja) * | 2005-06-09 | 2006-12-21 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2007088372A (ja) * | 2005-09-26 | 2007-04-05 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP4287421B2 (ja) * | 2005-10-13 | 2009-07-01 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
JP2007142347A (ja) * | 2005-10-19 | 2007-06-07 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
US7786537B2 (en) * | 2005-11-14 | 2010-08-31 | Nec Corporation | Semiconductor device and method for manufacturing same |
US7838945B2 (en) | 2005-11-16 | 2010-11-23 | Nec Corporation | Semiconductor device and manufacturing method thereof |
CN101375403B (zh) * | 2006-02-14 | 2011-07-27 | 恩益禧电子股份有限公司 | 半导体器件及其制造方法 |
JP4957040B2 (ja) * | 2006-03-28 | 2012-06-20 | 富士通セミコンダクター株式会社 | 半導体装置、および半導体装置の製造方法。 |
JP2007266293A (ja) * | 2006-03-28 | 2007-10-11 | Fujitsu Ltd | 半導体装置、および半導体装置の製造方法。 |
JPWO2007142010A1 (ja) | 2006-06-09 | 2009-10-22 | 日本電気株式会社 | 半導体装置およびその製造方法 |
US7911004B2 (en) | 2006-06-19 | 2011-03-22 | Nec Corporation | Semiconductor device and manufacturing method of the same |
WO2008013125A1 (fr) * | 2006-07-25 | 2008-01-31 | Nec Corporation | Dispositif semi-conducteur et procédé de fabrication associé |
KR100840786B1 (ko) * | 2006-07-28 | 2008-06-23 | 삼성전자주식회사 | 저저항 게이트 전극을 구비하는 반도체 장치 및 이의제조방법 |
WO2008015940A1 (fr) * | 2006-08-01 | 2008-02-07 | Nec Corporation | Dispositif à semi-conducteur et ses procédés de fabrication |
JPWO2008035490A1 (ja) * | 2006-09-20 | 2010-01-28 | 日本電気株式会社 | 半導体装置およびその製造方法 |
JPWO2008047564A1 (ja) * | 2006-09-29 | 2010-02-25 | 日本電気株式会社 | 半導体装置の製造方法及び半導体装置 |
US20080164529A1 (en) * | 2007-01-08 | 2008-07-10 | United Microelectronics Corp. | Semiconductor device and manufacturing method thereof |
JP4939960B2 (ja) * | 2007-02-05 | 2012-05-30 | 株式会社東芝 | 半導体装置およびその製造方法 |
US7989344B2 (en) * | 2007-02-28 | 2011-08-02 | Imec | Method for forming a nickelsilicide FUSI gate |
JP5117740B2 (ja) * | 2007-03-01 | 2013-01-16 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP5130834B2 (ja) * | 2007-09-05 | 2013-01-30 | ソニー株式会社 | 半導体装置およびその製造方法 |
JP5349903B2 (ja) * | 2008-02-28 | 2013-11-20 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法および半導体装置 |
US20090315185A1 (en) * | 2008-06-20 | 2009-12-24 | Boyan Boyanov | Selective electroless metal deposition for dual salicide process |
JP2011040513A (ja) * | 2009-08-10 | 2011-02-24 | Toshiba Corp | 半導体装置の製造方法及び半導体装置 |
US20110147855A1 (en) * | 2009-12-23 | 2011-06-23 | Joshi Subhash M | Dual silicide flow for cmos |
US8492899B2 (en) | 2010-10-14 | 2013-07-23 | International Business Machines Corporation | Method to electrodeposit nickel on silicon for forming controllable nickel silicide |
KR102376503B1 (ko) * | 2015-04-23 | 2022-03-18 | 삼성전자주식회사 | 집적회로 장치 및 이의 제조 방법 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4237332B2 (ja) * | 1999-04-30 | 2009-03-11 | 株式会社東芝 | 半導体装置の製造方法 |
JP3833903B2 (ja) * | 2000-07-11 | 2006-10-18 | 株式会社東芝 | 半導体装置の製造方法 |
AU2002230565A1 (en) * | 2000-12-06 | 2002-06-18 | Advanced Micro Devices Inc. | Method of forming nickel silicide using a one-step rapid thermal anneal process and backend processing |
JP4895430B2 (ja) * | 2001-03-22 | 2012-03-14 | ルネサスエレクトロニクス株式会社 | 半導体装置及び半導体装置の製造方法 |
JP3974507B2 (ja) * | 2001-12-27 | 2007-09-12 | 株式会社東芝 | 半導体装置の製造方法 |
JP2004152995A (ja) * | 2002-10-30 | 2004-05-27 | Toshiba Corp | 半導体装置の製造方法 |
JP4197607B2 (ja) * | 2002-11-06 | 2008-12-17 | 株式会社東芝 | 絶縁ゲート型電界効果トランジスタを含む半導体装置の製造方法 |
US6846734B2 (en) | 2002-11-20 | 2005-01-25 | International Business Machines Corporation | Method and process to make multiple-threshold metal gates CMOS technology |
JP2005228761A (ja) * | 2004-02-10 | 2005-08-25 | Rohm Co Ltd | 半導体装置及びその製造方法 |
US7098516B2 (en) * | 2004-05-24 | 2006-08-29 | Texas Instruments Incorporated | Refractory metal-based electrodes for work function setting in semiconductor devices |
US8178902B2 (en) * | 2004-06-17 | 2012-05-15 | Infineon Technologies Ag | CMOS transistor with dual high-k gate dielectric and method of manufacture thereof |
JP2006324628A (ja) * | 2005-05-16 | 2006-11-30 | Interuniv Micro Electronica Centrum Vzw | 完全ケイ化ゲート形成方法及び当該方法によって得られたデバイス |
-
2005
- 2005-06-21 JP JP2006519610A patent/JP4623006B2/ja not_active Expired - Fee Related
- 2005-06-21 CN CNB2005800011240A patent/CN100452357C/zh not_active Expired - Fee Related
- 2005-06-21 US US10/575,785 patent/US7592674B2/en active Active
- 2005-06-21 WO PCT/JP2005/011331 patent/WO2006001271A1/ja active Application Filing
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8012817B2 (en) | 2008-09-26 | 2011-09-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Transistor performance improving method with metal gate |
US8357581B2 (en) | 2008-09-26 | 2013-01-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Transistor performance improving method with metal gate |
Also Published As
Publication number | Publication date |
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US20070138580A1 (en) | 2007-06-21 |
JP4623006B2 (ja) | 2011-02-02 |
JPWO2006001271A1 (ja) | 2008-04-17 |
US7592674B2 (en) | 2009-09-22 |
WO2006001271A1 (ja) | 2006-01-05 |
CN100452357C (zh) | 2009-01-14 |
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