CN1447981B - 微电子装置制造中用于有机聚合物电介质的硬面层的有机硅酸盐树脂 - Google Patents
微电子装置制造中用于有机聚合物电介质的硬面层的有机硅酸盐树脂 Download PDFInfo
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- CN1447981B CN1447981B CN018145213A CN01814521A CN1447981B CN 1447981 B CN1447981 B CN 1447981B CN 018145213 A CN018145213 A CN 018145213A CN 01814521 A CN01814521 A CN 01814521A CN 1447981 B CN1447981 B CN 1447981B
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Classifications
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Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US22617000P | 2000-08-21 | 2000-08-21 | |
US60/226,170 | 2000-08-21 | ||
US28431701P | 2001-04-17 | 2001-04-17 | |
US60/284,317 | 2001-04-17 | ||
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KR20000063142A (ko) * | 2000-02-17 | 2000-11-06 | 이응찬 | 폴리오르가노실세스키옥산 제조용 출발물질,폴리오르가노실세스키옥산 및 폴리오르가노실세스키옥산제조방법 |
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- 2001-08-20 JP JP2002521570A patent/JP5350571B2/ja not_active Expired - Fee Related
- 2001-08-20 WO PCT/US2001/025977 patent/WO2002016477A2/en active Application Filing
- 2001-08-20 EP EP07107063.5A patent/EP1837902B1/en not_active Expired - Lifetime
- 2001-08-20 CN CN018145213A patent/CN1447981B/zh not_active Expired - Fee Related
- 2001-08-20 US US09/933,535 patent/US7115531B2/en not_active Expired - Lifetime
- 2001-08-20 EP EP01964224A patent/EP1314193A2/en not_active Withdrawn
- 2001-08-21 TW TW090120501A patent/TWI271413B/zh not_active IP Right Cessation
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2005
- 2005-10-28 US US11/262,237 patent/US7268200B2/en not_active Expired - Lifetime
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Also Published As
Publication number | Publication date |
---|---|
WO2002016477A2 (en) | 2002-02-28 |
WO2002016477A3 (en) | 2002-12-27 |
KR20040030400A (ko) | 2004-04-09 |
CN1447981A (zh) | 2003-10-08 |
US20020052125A1 (en) | 2002-05-02 |
EP1837902A3 (en) | 2008-04-02 |
KR100795714B1 (ko) | 2008-01-21 |
TWI271413B (en) | 2007-01-21 |
EP1837902B1 (en) | 2017-05-24 |
US20060063393A1 (en) | 2006-03-23 |
US7268200B2 (en) | 2007-09-11 |
EP1314193A2 (en) | 2003-05-28 |
US7115531B2 (en) | 2006-10-03 |
JP5350571B2 (ja) | 2013-11-27 |
EP1837902A2 (en) | 2007-09-26 |
JP2004506797A (ja) | 2004-03-04 |
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