CN1252798C - 喷嘴清扫装置以及具备该喷嘴清扫装置的基板处理装置 - Google Patents
喷嘴清扫装置以及具备该喷嘴清扫装置的基板处理装置 Download PDFInfo
- Publication number
- CN1252798C CN1252798C CNB031326617A CN03132661A CN1252798C CN 1252798 C CN1252798 C CN 1252798C CN B031326617 A CNB031326617 A CN B031326617A CN 03132661 A CN03132661 A CN 03132661A CN 1252798 C CN1252798 C CN 1252798C
- Authority
- CN
- China
- Prior art keywords
- mentioned
- treatment fluid
- fluid supply
- supply nozzle
- wiper member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 130
- 239000000758 substrate Substances 0.000 title claims abstract description 62
- 239000012530 fluid Substances 0.000 claims description 173
- 230000000694 effects Effects 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 7
- 230000008520 organization Effects 0.000 claims description 5
- 230000005465 channeling Effects 0.000 claims description 4
- 208000028659 discharge Diseases 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 description 13
- 238000000576 coating method Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 12
- 238000002360 preparation method Methods 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 230000003028 elevating effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 241000278713 Theora Species 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
Landscapes
- Coating Apparatus (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Materials For Photolithography (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP293302/02 | 2002-10-07 | ||
JP293302/2002 | 2002-10-07 | ||
JP2002293302A JP3940054B2 (ja) | 2002-10-07 | 2002-10-07 | ノズル清掃装置およびこのノズル清掃装置を備えた基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1497659A CN1497659A (zh) | 2004-05-19 |
CN1252798C true CN1252798C (zh) | 2006-04-19 |
Family
ID=32284253
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031326617A Expired - Fee Related CN1252798C (zh) | 2002-10-07 | 2003-09-30 | 喷嘴清扫装置以及具备该喷嘴清扫装置的基板处理装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP3940054B2 (ko) |
KR (1) | KR100578392B1 (ko) |
CN (1) | CN1252798C (ko) |
TW (1) | TWI234797B (ko) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4324538B2 (ja) * | 2004-10-04 | 2009-09-02 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
KR100945360B1 (ko) | 2005-12-29 | 2010-03-08 | 엘지디스플레이 주식회사 | 롤 스토커 및 이를 이용한 액정표시장치의 제조방법 |
KR100787908B1 (ko) | 2006-07-28 | 2007-12-27 | 주식회사 케이씨텍 | 예비 토출 장치와 이를 포함하는 기판 코팅 장치 및 기판 코팅 방법 |
JP4850680B2 (ja) * | 2006-12-15 | 2012-01-11 | 中外炉工業株式会社 | 吐出ノズルの清掃装置 |
KR200467097Y1 (ko) * | 2007-11-30 | 2013-05-27 | 주식회사 케이씨텍 | 슬릿코터의 예비토출장치 |
JP2010240550A (ja) * | 2009-04-03 | 2010-10-28 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP5138058B2 (ja) * | 2011-03-07 | 2013-02-06 | 東レ株式会社 | 清掃部材と塗布器の清掃方法及び清掃装置並びにディスプレイ用部材の製造方法 |
JP5537581B2 (ja) * | 2012-03-08 | 2014-07-02 | 株式会社東芝 | 塗布装置及び塗布体の製造方法 |
CN103567160B (zh) * | 2012-07-27 | 2015-07-15 | 北京京东方光电科技有限公司 | 一种自动清洁印刷电路板的装置及其使用方法 |
CN105436037B (zh) * | 2016-01-06 | 2018-10-30 | 苏州赛腾精密电子股份有限公司 | 一种针头清胶机构及点胶机 |
EP3524553B1 (en) * | 2016-11-02 | 2022-10-19 | Zuiko Corporation | Sheet-feeding system and sheet-feeding method |
JP2019018127A (ja) * | 2017-07-12 | 2019-02-07 | 株式会社 ハリーズ | 清掃システム、透明基板の清掃方法及び電子部品の製造方法 |
KR102000017B1 (ko) * | 2017-07-21 | 2019-07-18 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
JP6909854B2 (ja) * | 2017-07-27 | 2021-07-28 | 東京エレクトロン株式会社 | 塗布処理装置、塗布処理方法及びコンピュータ記憶媒体 |
JP7408676B2 (ja) * | 2019-10-28 | 2024-01-05 | 京セラ株式会社 | 塗装装置および払拭方法 |
-
2002
- 2002-10-07 JP JP2002293302A patent/JP3940054B2/ja not_active Expired - Fee Related
-
2003
- 2003-09-03 TW TW092124338A patent/TWI234797B/zh not_active IP Right Cessation
- 2003-09-30 CN CNB031326617A patent/CN1252798C/zh not_active Expired - Fee Related
- 2003-10-02 KR KR1020030068555A patent/KR100578392B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1497659A (zh) | 2004-05-19 |
KR20040032055A (ko) | 2004-04-14 |
TWI234797B (en) | 2005-06-21 |
KR100578392B1 (ko) | 2006-05-10 |
JP2004122067A (ja) | 2004-04-22 |
JP3940054B2 (ja) | 2007-07-04 |
TW200414277A (en) | 2004-08-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060419 Termination date: 20120930 |