CN1193405C - 光掩模、其制造方法、图形形成方法及半导体装置的制造方法 - Google Patents

光掩模、其制造方法、图形形成方法及半导体装置的制造方法 Download PDF

Info

Publication number
CN1193405C
CN1193405C CNB011440740A CN01144074A CN1193405C CN 1193405 C CN1193405 C CN 1193405C CN B011440740 A CNB011440740 A CN B011440740A CN 01144074 A CN01144074 A CN 01144074A CN 1193405 C CN1193405 C CN 1193405C
Authority
CN
China
Prior art keywords
mentioned
photomask
light
film
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB011440740A
Other languages
English (en)
Chinese (zh)
Other versions
CN1365135A (zh
Inventor
服部孝司
后藤泰子
佐藤秀寿
田中稔彦
白石洋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Electronics Corp
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of CN1365135A publication Critical patent/CN1365135A/zh
Application granted granted Critical
Publication of CN1193405C publication Critical patent/CN1193405C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/30—Alternating PSM, e.g. Levenson-Shibuya PSM; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G03F1/56—Organic absorbers, e.g. of photo-resists

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Materials For Photolithography (AREA)
CNB011440740A 2000-12-28 2001-12-28 光掩模、其制造方法、图形形成方法及半导体装置的制造方法 Expired - Fee Related CN1193405C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP401154/2000 2000-12-28
JP2000401154A JP3914386B2 (ja) 2000-12-28 2000-12-28 フォトマスク、その製造方法、パターン形成方法および半導体装置の製造方法

Publications (2)

Publication Number Publication Date
CN1365135A CN1365135A (zh) 2002-08-21
CN1193405C true CN1193405C (zh) 2005-03-16

Family

ID=18865631

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB011440740A Expired - Fee Related CN1193405C (zh) 2000-12-28 2001-12-28 光掩模、其制造方法、图形形成方法及半导体装置的制造方法

Country Status (5)

Country Link
US (2) US6927002B2 (enExample)
JP (1) JP3914386B2 (enExample)
KR (1) KR100798969B1 (enExample)
CN (1) CN1193405C (enExample)
TW (1) TW516112B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI514066B (zh) * 2009-12-21 2015-12-21 Hoya Corp 遮罩坯料、遮罩坯料製造方法、轉印坯料、轉印坯料製造方法

Families Citing this family (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003101360A (ja) * 2001-09-19 2003-04-04 Murata Mfg Co Ltd 弾性表面波素子の電極パターン形成方法
US6667385B2 (en) * 2002-01-28 2003-12-23 Energenetics International, Inc. Method of producing aminium lactate salt as a feedstock for dilactic acid or dimer production
JP3754378B2 (ja) * 2002-02-14 2006-03-08 株式会社ルネサステクノロジ 半導体集積回路装置の製造方法
DE10208785B4 (de) * 2002-02-28 2008-01-31 Qimonda Ag Lithografieverfahren zur Fotomaskenherstellung mittels Elektronenstrahllithografie
KR100861196B1 (ko) * 2002-07-18 2008-09-30 주식회사 하이닉스반도체 반도체 소자의 패턴 형성 방법
JP3771206B2 (ja) * 2002-09-25 2006-04-26 松下電器産業株式会社 水溶性材料及びパターン形成方法
US7087356B2 (en) * 2002-09-30 2006-08-08 International Business Machines Corporation 193nm resist with improved post-exposure properties
JP2006504136A (ja) * 2002-10-21 2006-02-02 ナノインク インコーポレーティッド ナノメートル・スケール設計構造、その製造方法および装置、マスク修復、強化、および製造への適用
AU2003287660A1 (en) * 2002-11-15 2004-06-15 E.I. Du Pont De Nemours And Company Process for using protective layers in the fabrication of electronic devices
US20040170925A1 (en) * 2002-12-06 2004-09-02 Roach David Herbert Positive imageable thick film compositions
US7510818B2 (en) * 2002-12-09 2009-03-31 Pixelligent Technologies Llc Reversible photobleachable materials based on nano-sized semiconductor particles and their optical applications
DE10260819A1 (de) * 2002-12-23 2004-07-01 Carl Zeiss Smt Ag Verfahren zur Herstellung von mikrostrukturierten optischen Elementen
US7524616B2 (en) * 2003-03-04 2009-04-28 Pixelligent Technologies Llc Applications of semiconductor nano-sized particles for photolithography
US8993221B2 (en) 2012-02-10 2015-03-31 Pixelligent Technologies, Llc Block co-polymer photoresist
US6858372B2 (en) * 2003-03-24 2005-02-22 The United States Of America As Represented By The Secretary Of The Navy Resist composition with enhanced X-ray and electron sensitivity
JP3993545B2 (ja) * 2003-09-04 2007-10-17 株式会社東芝 パターンの作製方法、半導体装置の製造方法、パターンの作製システム、セルライブラリ、フォトマスクの製造方法
JP4794444B2 (ja) 2003-09-05 2011-10-19 カール・ツァイス・エスエムティー・ゲーエムベーハー 粒子光学システム及び装置、並びに、かかるシステム及び装置用の粒子光学部品
CN1983028B (zh) 2003-09-29 2012-07-25 Hoya株式会社 掩膜坯及变换掩膜的制造方法
US20050100798A1 (en) * 2003-10-15 2005-05-12 Taiwan Semiconductor Manufacturing Company, Ltd. Device and method for providing wavelength reduction with a photomask
US7402373B2 (en) * 2004-02-05 2008-07-22 E.I. Du Pont De Nemours And Company UV radiation blocking protective layers compatible with thick film pastes
KR101007165B1 (ko) * 2004-03-16 2011-01-12 아키레스 가부시키가이샤 농업용 차광제
JP4632679B2 (ja) * 2004-03-16 2011-02-16 アキレス株式会社 遮光塗布液
JP4587806B2 (ja) * 2004-12-27 2010-11-24 Ｈｏｙａ株式会社 ハーフトーン型位相シフトマスクブランク及びハーフトーン型位相シフトマスク
KR20060079957A (ko) * 2005-01-04 2006-07-07 삼성에스디아이 주식회사 포토리소그래피용 연질 포토마스크, 그 제조방법, 이를채용한 패턴 형성 방법
US7524593B2 (en) * 2005-08-12 2009-04-28 Semiconductor Energy Laboratory Co., Ltd. Exposure mask
JP2007086368A (ja) * 2005-09-21 2007-04-05 Fujitsu Ltd フォトマスク、フォトマスクの製造方法および半導体装置の製造方法
JP2007149155A (ja) * 2005-11-24 2007-06-14 Hitachi Ltd 磁気記録媒体、その作製方法、及び磁気ディスク装置
KR100777806B1 (ko) 2006-03-17 2007-11-22 한국과학기술원 웨이퍼레벨의 패키지 제조방법 및 접착제 조성물
JP4936515B2 (ja) * 2006-05-18 2012-05-23 Ｈｏｙａ株式会社 フォトマスクの製造方法、およびハーフトーン型位相シフトマスクの製造方法
JP4155315B2 (ja) * 2006-06-28 2008-09-24 オムロン株式会社 金属膜の製造方法、下地組成物、金属膜およびその利用
KR20090025389A (ko) * 2006-07-10 2009-03-10 픽셀리전트 테크놀로지스 엘엘씨 포토리소그래피용 레지스트
JP2008032941A (ja) * 2006-07-27 2008-02-14 Kuraray Co Ltd 階調マスクおよびその製造方法
KR100800683B1 (ko) * 2006-08-31 2008-02-01 동부일렉트로닉스 주식회사 반도체 소자의 형성방법
KR100762244B1 (ko) * 2006-09-29 2007-10-01 주식회사 하이닉스반도체 웨이퍼 패턴 선폭 균일도를 개선하는 포토마스크 및제조방법
US7933000B2 (en) 2006-11-16 2011-04-26 Asml Netherlands B.V. Device manufacturing method, method for holding a patterning device and lithographic apparatus including an applicator for applying molecules onto a clamp area of a patterning device
US8809458B2 (en) * 2006-12-01 2014-08-19 Kaneka Corporation Polysiloxane composition
US8582079B2 (en) * 2007-08-14 2013-11-12 Applied Materials, Inc. Using phase difference of interference lithography for resolution enhancement
US20090111056A1 (en) * 2007-08-31 2009-04-30 Applied Materials, Inc. Resolution enhancement techniques combining four beam interference-assisted lithography with other photolithography techniques
US20090117491A1 (en) * 2007-08-31 2009-05-07 Applied Materials, Inc. Resolution enhancement techniques combining interference-assisted lithography with other photolithography techniques
US20100002210A1 (en) * 2007-08-31 2010-01-07 Applied Materials, Inc. Integrated interference-assisted lithography
KR100928505B1 (ko) * 2007-10-22 2009-11-26 주식회사 동부하이텍 반도체 소자 제작 방법 및 장치
JP5169206B2 (ja) * 2007-12-21 2013-03-27 日本電気株式会社 フォトマスク受納器並びにこれを用いるレジスト検査方法及びその装置
JP4321652B2 (ja) * 2007-12-27 2009-08-26 オムロン株式会社 金属膜の製造方法
JP4321653B2 (ja) * 2007-12-27 2009-08-26 オムロン株式会社 金属膜の製造方法
JP4458188B2 (ja) * 2008-09-26 2010-04-28 オムロン株式会社 ハーフミラーおよびその製造方法
JP2010191310A (ja) * 2009-02-20 2010-09-02 Hoya Corp 多階調フォトマスクの製造方法、及び半導体トランジスタの製造方法
KR20100101916A (ko) * 2009-03-10 2010-09-20 주식회사 하이닉스반도체 형광층을 이용한 위상반전마스크 제조방법
JP5409238B2 (ja) * 2009-09-29 2014-02-05 Ｈｏｙａ株式会社 フォトマスク、フォトマスクの製造方法、パターン転写方法及び表示装置用画素電極の製造方法
NL2005478A (en) * 2009-11-17 2011-05-18 Asml Netherlands Bv Lithographic apparatus, removable member and device manufacturing method.
US8349547B1 (en) * 2009-12-22 2013-01-08 Sandia Corporation Lithographically defined microporous carbon structures
US9465296B2 (en) * 2010-01-12 2016-10-11 Rolith, Inc. Nanopatterning method and apparatus
JP4853596B1 (ja) 2011-03-15 2012-01-11 オムロン株式会社 酸化金属膜を備えたセンサおよびその利用
US9018108B2 (en) 2013-01-25 2015-04-28 Applied Materials, Inc. Low shrinkage dielectric films
US9298081B2 (en) * 2013-03-08 2016-03-29 Globalfoundries Inc. Scattering enhanced thin absorber for EUV reticle and a method of making
CN103913957B (zh) * 2014-03-24 2016-08-17 京东方科技集团股份有限公司 掩膜版、掩膜图案生成控制系统及方法、掩膜系统
KR101600397B1 (ko) * 2014-04-08 2016-03-07 성균관대학교산학협력단 흑연 박막 및 이의 제조 방법, 및 이를 포함하는 펠리클
CN104483812A (zh) * 2014-11-29 2015-04-01 复旦大学 利用热显影增强电子束光刻胶对比度的制备高密度平整图形的方法
CN106154773B (zh) * 2015-04-03 2019-03-29 中芯国际集成电路制造(上海)有限公司 修正图形的方法
JP6715597B2 (ja) * 2015-12-29 2020-07-01 帝人株式会社 感光性樹脂組成物及び半導体デバイス製造方法
JP6271780B2 (ja) * 2017-02-01 2018-01-31 Hoya株式会社 マスクブランク、位相シフトマスクおよび半導体デバイスの製造方法
US10599046B2 (en) * 2017-06-02 2020-03-24 Samsung Electronics Co., Ltd. Method, a non-transitory computer-readable medium, and/or an apparatus for determining whether to order a mask structure
JP2020187246A (ja) * 2019-05-14 2020-11-19 Jsr株式会社 感放射線性樹脂組成物を用いた電子装置の製造方法、感放射線性樹脂組成物、絶縁膜及び絶縁膜を備えた電子装置
JP7234816B2 (ja) * 2019-06-11 2023-03-08 株式会社デンソー 測距装置
CN113296354B (zh) * 2020-02-22 2023-04-07 长鑫存储技术有限公司 应用于半导体光刻工艺中的掩膜版及光刻工艺方法
KR102554083B1 (ko) * 2022-06-23 2023-07-10 에스케이엔펄스 주식회사 블랭크 마스크 및 이를 이용한 포토마스크

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630129A (en) 1979-08-21 1981-03-26 Agency Of Ind Science & Technol Manufacture of photomask
JPH05289307A (ja) 1992-04-13 1993-11-05 Matsushita Electric Ind Co Ltd レチクルおよびレチクル製造方法
US5478679A (en) * 1994-11-23 1995-12-26 United Microelectronics Corporation Half-tone self-aligning phase shifting mask
EP0731490A3 (en) * 1995-03-02 1998-03-11 Ebara Corporation Ultra-fine microfabrication method using an energy beam
US6174631B1 (en) * 1997-02-10 2001-01-16 E. I. Du Pont De Nemours And Company Attenuating phase shift photomasks
TW449672B (en) * 1997-12-25 2001-08-11 Nippon Kogaku Kk Process and apparatus for manufacturing photomask and method of manufacturing the same
JP2000091192A (ja) 1998-09-09 2000-03-31 Nikon Corp 露光装置
TW446852B (en) * 1999-06-11 2001-07-21 Hoya Corp Phase shift mask and phase shift mask blank and methods of manufacturing the same
US6645695B2 (en) * 2000-09-11 2003-11-11 Shipley Company, L.L.C. Photoresist composition
US7008749B2 (en) * 2001-03-12 2006-03-07 The University Of North Carolina At Charlotte High resolution resists for next generation lithographies

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI514066B (zh) * 2009-12-21 2015-12-21 Hoya Corp 遮罩坯料、遮罩坯料製造方法、轉印坯料、轉印坯料製造方法

Also Published As

Publication number Publication date
US6703171B2 (en) 2004-03-09
TW516112B (en) 2003-01-01
JP3914386B2 (ja) 2007-05-16
JP2002202584A (ja) 2002-07-19
US6927002B2 (en) 2005-08-09
US20020094483A1 (en) 2002-07-18
KR20020055365A (ko) 2002-07-08
KR100798969B1 (ko) 2008-01-28
CN1365135A (zh) 2002-08-21
US20020086223A1 (en) 2002-07-04

Similar Documents

Publication Publication Date Title
CN1193405C (zh) 光掩模、其制造方法、图形形成方法及半导体装置的制造方法
CN102308256B (zh) 光掩模、光掩模的制造方法及修正方法
TW522481B (en) A semiconductor device manufacturing method
US11402745B2 (en) Mask for EUV lithography and method of manufacturing the same
JP4053263B2 (ja) 半導体装置の製造方法
CN1209682C (zh) 半导体集成电路器件制备方法,其光掩膜和它的制备方法及掩膜胚
CN100507713C (zh) 光掩模及其制造方法和使用光掩模的半导体装置制造方法
CN1438679A (zh) 半导体集成电路器件的制造方法
CN1453823A (zh) 图案形成方法和半导体器件的制造方法
JP2001308002A (ja) フォトマスクを用いたパターン作製方法、及びパターン作製装置
TW200305924A (en) Manufacturing method of mask and manufacturing method of semiconductor integrated circuit device
CN1211834C (zh) 半导体集成电路器件的制造方法
US20020052122A1 (en) Method of manufacturing a semiconductor device
JP3715189B2 (ja) 位相シフトマスク
TWI286795B (en) Manufacturing method for semiconductor integrated circuit device
CN1131754A (zh) 负型光致抗蚀剂及形成光致抗蚀图的方法
KR102705080B1 (ko) 극자외선 노광용 펠리클
US20110027699A1 (en) Reducing ion migration of absorber materials of lithography masks by chromium passivation
US20130095416A1 (en) Photomask and pattern formation method
TWI255496B (en) Method of forming resist patterns and method of producing semiconductor device
CN1320375C (zh) 扩散反射板及其制造方法
US6858375B2 (en) Method for forming resist pattern
CN1707362A (zh) 半导体器件的制造方法
KR20050007176A (ko) 레티클과, 반도체 노광장치 및 방법과, 반도체 디바이스제조방법
CN1742232A (zh) 光掩模以及在其上制造保护层的方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: RENESAS ELECTRONICS CORPORATION

Free format text: FORMER OWNER: HITACHI, LTD.

Effective date: 20121112

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20121112

Address after: Zhongyuan District in Kanagawa County, Kawasaki Japan numabe 1753 times

Patentee after: Renesas Electronics Corporation

Address before: Tokyo, Japan, Japan

Patentee before: Hitachi Ltd.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20050316

Termination date: 20161228