CN1143386C - 由导电针阵列屏蔽的半导体器件及制备这种器件的方法 - Google Patents
由导电针阵列屏蔽的半导体器件及制备这种器件的方法 Download PDFInfo
- Publication number
- CN1143386C CN1143386C CNB971945144A CN97194514A CN1143386C CN 1143386 C CN1143386 C CN 1143386C CN B971945144 A CNB971945144 A CN B971945144A CN 97194514 A CN97194514 A CN 97194514A CN 1143386 C CN1143386 C CN 1143386C
- Authority
- CN
- China
- Prior art keywords
- semiconductor structure
- substrate
- embolism
- hole
- signal conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
- H01L21/743—Making of internal connections, substrate contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
- H01L23/5225—Shielding layers formed together with wiring layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/585—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries comprising conductive layers or plates or strips or rods or rings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Description
Claims (22)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE96011192 | 1996-03-22 | ||
SE9601119A SE9601119L (sv) | 1996-03-22 | 1996-03-22 | Förfarande vid tillverkning av substratkontakter |
SE9601444A SE9601444D0 (sv) | 1996-04-16 | 1996-04-16 | Förfarande vid tillverkning av substratkontakter |
SE9601444-4 | 1996-04-16 | ||
SE96014444 | 1996-04-16 | ||
SE9601119-2 | 1996-04-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1218576A CN1218576A (zh) | 1999-06-02 |
CN1143386C true CN1143386C (zh) | 2004-03-24 |
Family
ID=26662547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB971945144A Expired - Lifetime CN1143386C (zh) | 1996-03-22 | 1997-03-21 | 由导电针阵列屏蔽的半导体器件及制备这种器件的方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US6472723B1 (zh) |
EP (1) | EP0888636A1 (zh) |
JP (1) | JP2000507045A (zh) |
KR (1) | KR20000064650A (zh) |
CN (1) | CN1143386C (zh) |
AU (1) | AU2187397A (zh) |
TW (1) | TW320770B (zh) |
WO (1) | WO1997035344A1 (zh) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1021828B1 (en) | 1997-07-11 | 2010-01-06 | Infineon Technologies AG | A process for manufacturing ic-components to be used at radio frequencies |
DE19834234C2 (de) * | 1998-07-29 | 2000-11-30 | Siemens Ag | Integrierter Halbleiterchip mit Füllstrukturen |
US6133621A (en) * | 1998-10-15 | 2000-10-17 | Stmicroelectronics S.R.L. | Integrated shielded electric connection |
JP3851738B2 (ja) * | 1999-01-29 | 2006-11-29 | 株式会社東芝 | 半導体装置 |
SE515158C2 (sv) * | 1999-02-10 | 2001-06-18 | Ericsson Telefon Ab L M | Halvledaranordning med jordanslutning via en ej genomgående plugg |
CN1252809C (zh) | 1999-09-17 | 2006-04-19 | 因芬尼昂技术股份公司 | 在浅槽中形成深槽以隔离半导体器件的自对准方法 |
DE60140722D1 (de) * | 2000-09-05 | 2010-01-21 | Nxp Bv | Integrierte elektromagnetische Abschirmvorrichtung |
US6486534B1 (en) | 2001-02-16 | 2002-11-26 | Ashvattha Semiconductor, Inc. | Integrated circuit die having an interference shield |
FR2826780A1 (fr) | 2001-06-28 | 2003-01-03 | St Microelectronics Sa | Dispositif semi-conducteur a structure hyperfrequence |
US6909150B2 (en) * | 2001-07-23 | 2005-06-21 | Agere Systems Inc. | Mixed signal integrated circuit with improved isolation |
CN1579018A (zh) * | 2001-08-29 | 2005-02-09 | 皇家飞利浦电子股份有限公司 | 具有凸起桥的集成电路器件及其制造方法 |
US6750516B2 (en) * | 2001-10-18 | 2004-06-15 | Hewlett-Packard Development Company, L.P. | Systems and methods for electrically isolating portions of wafers |
WO2004042820A1 (de) * | 2002-11-08 | 2004-05-21 | Siemens Aktiengesellschaft | Abschirmung für emi-gefährdete elektronische bauteile und/oder schaltungen |
DE10309614A1 (de) * | 2003-03-05 | 2004-09-23 | Infineon Technologies Ag | Halbleiterstruktur und Verfahren zur Herstellung derselben |
CN1922734B (zh) * | 2003-12-10 | 2010-05-05 | 加利福尼亚大学董事会 | 用于混合信号集成电路的低串扰衬底 |
US7221034B2 (en) * | 2004-02-27 | 2007-05-22 | Infineon Technologies Ag | Semiconductor structure including vias |
SE528629C2 (sv) | 2004-09-08 | 2007-01-09 | Ep Technology Ab | Rillmönster för värmeväxlare |
DE602006006106D1 (de) * | 2005-04-21 | 2009-05-20 | St Microelectronics Sa | Vorrichtung zum Schutz einer elektrische Schaltung |
DE102006022360B4 (de) * | 2006-05-12 | 2009-07-09 | Infineon Technologies Ag | Abschirmvorrichtung |
DE102006062844B4 (de) * | 2006-05-12 | 2016-11-17 | Infineon Technologies Ag | Abschirmvorrichtung zum Abschirmen von elektromagnetischer Strahlung |
US20080001262A1 (en) * | 2006-06-29 | 2008-01-03 | Telesphor Kamgaing | Silicon level solution for mitigation of substrate noise |
US7701057B1 (en) * | 2007-04-25 | 2010-04-20 | Xilinx, Inc. | Semiconductor device having structures for reducing substrate noise coupled from through die vias |
US8269308B2 (en) * | 2008-03-19 | 2012-09-18 | Stats Chippac, Ltd. | Semiconductor device with cross-talk isolation using M-cap and method thereof |
US7989282B2 (en) * | 2009-03-26 | 2011-08-02 | International Business Machines Corporation | Structure and method for latchup improvement using through wafer via latchup guard ring |
DE102010000892B4 (de) * | 2010-01-14 | 2019-01-03 | Robert Bosch Gmbh | Verfahren zum Bereitstellen und Verbinden von zwei Kontaktbereichen eines Halbleiterbauelements bzw. einem Substrat, sowie ein Substrat mit zwei solchen verbundenen Kontaktbereichen |
US8587121B2 (en) * | 2010-03-24 | 2013-11-19 | International Business Machines Corporation | Backside dummy plugs for 3D integration |
US8791015B2 (en) * | 2011-04-30 | 2014-07-29 | Stats Chippac, Ltd. | Semiconductor device and method of forming shielding layer over active surface of semiconductor die |
US8759950B2 (en) * | 2011-05-05 | 2014-06-24 | Intel Corporation | Radio- and electromagnetic interference through-silicon vias for stacked-die packages, and methods of making same |
US8304916B1 (en) * | 2011-07-06 | 2012-11-06 | Northrop Grumman Systems Corporation | Half-through vias for suppression of substrate modes |
US8618640B2 (en) | 2011-07-29 | 2013-12-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of shielding through silicon vias in a passive interposer |
CN102412229B (zh) * | 2011-11-11 | 2013-12-18 | 上海华虹Nec电子有限公司 | 半导体器件中的金属塞结构 |
US9064868B2 (en) * | 2012-10-12 | 2015-06-23 | Globalfoundries Inc. | Advanced faraday shield for a semiconductor device |
US9064850B2 (en) * | 2012-11-15 | 2015-06-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Through-substrate via formation with improved topography control |
TWI528525B (zh) * | 2013-09-03 | 2016-04-01 | 瑞昱半導體股份有限公司 | 金屬溝渠減噪結構及其製造方法 |
CN106601722A (zh) * | 2015-10-16 | 2017-04-26 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件及其制造方法和电子装置 |
US10446200B2 (en) | 2018-03-19 | 2019-10-15 | Micron Technology, Inc. | Memory device with configurable input/output interface |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4470062A (en) * | 1979-08-31 | 1984-09-04 | Hitachi, Ltd. | Semiconductor device having isolation regions |
JPH021928A (ja) * | 1988-06-10 | 1990-01-08 | Toshiba Corp | 半導体集積回路 |
JPH03165058A (ja) * | 1989-11-24 | 1991-07-17 | Mitsubishi Electric Corp | 半導体装置 |
SE466078B (sv) | 1990-04-20 | 1991-12-09 | Ericsson Telefon Ab L M | Anordning vid en skaerm hos en integrerad krets och foerfarande foer framstaellning av anordningen |
US5288949A (en) * | 1992-02-03 | 1994-02-22 | Ncr Corporation | Connection system for integrated circuits which reduces cross-talk |
US5196920A (en) * | 1992-04-21 | 1993-03-23 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor integrated circuit device for limiting capacitive coupling between adjacent circuit blocks |
SE500815C2 (sv) | 1993-01-25 | 1994-09-12 | Ericsson Telefon Ab L M | Dielektriskt isolerad halvledaranordning och förfarande för dess framställning |
US5406125A (en) * | 1993-04-15 | 1995-04-11 | Martin Marietta Corp. | Semiconductor device having a metalized via hole |
DE4314906C2 (de) | 1993-05-05 | 1996-10-31 | Siemens Ag | Halbleiterbauelement mit Stromanschlüssen für hohe Integrationsdichte |
JP2684979B2 (ja) * | 1993-12-22 | 1997-12-03 | 日本電気株式会社 | 半導体集積回路装置及びその製造方法 |
JPH08250890A (ja) * | 1995-03-09 | 1996-09-27 | Nec Corp | 混成集積回路装置 |
US5574621A (en) * | 1995-03-27 | 1996-11-12 | Motorola, Inc. | Integrated circuit capacitor having a conductive trench |
US5566052A (en) * | 1995-06-08 | 1996-10-15 | Northern Telecom Limited | Electronic devices with electromagnetic radiation interference shields and heat sinks |
US6011297A (en) * | 1997-07-18 | 2000-01-04 | Advanced Micro Devices,Inc. | Use of multiple slots surrounding base region of a bipolar junction transistor to increase cumulative breakdown voltage |
GB2341272B (en) * | 1998-09-03 | 2003-08-20 | Ericsson Telefon Ab L M | High voltage shield |
US6307252B1 (en) * | 1999-03-05 | 2001-10-23 | Agere Systems Guardian Corp. | On-chip shielding of signals |
-
1997
- 1997-03-21 WO PCT/SE1997/000487 patent/WO1997035344A1/en not_active Application Discontinuation
- 1997-03-21 JP JP9533415A patent/JP2000507045A/ja not_active Abandoned
- 1997-03-21 CN CNB971945144A patent/CN1143386C/zh not_active Expired - Lifetime
- 1997-03-21 US US08/821,880 patent/US6472723B1/en not_active Expired - Lifetime
- 1997-03-21 AU AU21873/97A patent/AU2187397A/en not_active Abandoned
- 1997-03-21 KR KR1019980707362A patent/KR20000064650A/ko active Search and Examination
- 1997-03-21 EP EP97914739A patent/EP0888636A1/en not_active Ceased
- 1997-03-24 TW TW086103708A patent/TW320770B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW320770B (zh) | 1997-11-21 |
WO1997035344A1 (en) | 1997-09-25 |
US6472723B1 (en) | 2002-10-29 |
EP0888636A1 (en) | 1999-01-07 |
AU2187397A (en) | 1997-10-10 |
KR20000064650A (ko) | 2000-11-06 |
CN1218576A (zh) | 1999-06-02 |
JP2000507045A (ja) | 2000-06-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: INFINEON TECHNOLOGIES AG Free format text: FORMER OWNER: ELLISON TELEPHONE CO., LTD. Effective date: 20040827 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20040827 Address after: Munich, Germany Patentee after: Infennian Technologies AG Address before: Stockholm Patentee before: Ericsson Telephone AB |
|
REG | Reference to a national code |
Ref country code: HK Ref legal event code: WD Ref document number: 1019817 Country of ref document: HK |
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CX01 | Expiry of patent term |
Granted publication date: 20040324 |
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CX01 | Expiry of patent term |