CN111010123B - 电极具有空隙层和凸起结构的体声波谐振器、滤波器及电子设备 - Google Patents
电极具有空隙层和凸起结构的体声波谐振器、滤波器及电子设备 Download PDFInfo
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- CN111010123B CN111010123B CN201911027015.6A CN201911027015A CN111010123B CN 111010123 B CN111010123 B CN 111010123B CN 201911027015 A CN201911027015 A CN 201911027015A CN 111010123 B CN111010123 B CN 111010123B
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Images
Classifications
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- H—ELECTRICITY
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- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (28)
Priority Applications (2)
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EP20879698.7A EP4072014A4 (en) | 2019-10-23 | 2020-05-06 | BULK WAVE RESONATOR WITH ELECTRODES WITH A GAP LAYER AND A PROJECTING STRUCTURE, FILTER AND ELECTRONIC DEVICE |
PCT/CN2020/088665 WO2021077715A1 (zh) | 2019-10-23 | 2020-05-06 | 电极具有空隙层和凸起结构的体声波谐振器、滤波器及电子设备 |
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CN201911009262 | 2019-10-23 | ||
CN2019110092623 | 2019-10-23 |
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CN111010123A CN111010123A (zh) | 2020-04-14 |
CN111010123B true CN111010123B (zh) | 2021-06-01 |
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CN201911027015.6A Active CN111010123B (zh) | 2019-10-23 | 2019-10-26 | 电极具有空隙层和凸起结构的体声波谐振器、滤波器及电子设备 |
CN201911027009.0A Active CN111010122B (zh) | 2019-10-23 | 2019-10-26 | 电极具有空隙层的体声波谐振器、滤波器及电子设备 |
CN201911267553.2A Active CN111082774B (zh) | 2019-10-23 | 2019-12-11 | 电极具有空隙层的体声波谐振器、滤波器及电子设备 |
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CN201911027009.0A Active CN111010122B (zh) | 2019-10-23 | 2019-10-26 | 电极具有空隙层的体声波谐振器、滤波器及电子设备 |
CN201911267553.2A Active CN111082774B (zh) | 2019-10-23 | 2019-12-11 | 电极具有空隙层的体声波谐振器、滤波器及电子设备 |
Country Status (3)
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EP (4) | EP4068627A4 (zh) |
CN (4) | CN111162748B (zh) |
WO (4) | WO2021077715A1 (zh) |
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CN111162748B (zh) * | 2019-10-23 | 2021-06-01 | 诺思(天津)微系统有限责任公司 | 电极具有空隙层的体声波谐振器、滤波器及电子设备 |
CN111600566B (zh) * | 2020-04-21 | 2021-06-01 | 诺思(天津)微系统有限责任公司 | 滤波器、体声波谐振器组件及其制造方法、电子设备 |
CN111600569B (zh) * | 2020-04-29 | 2022-02-22 | 诺思(天津)微系统有限责任公司 | 体声波谐振器及其制造方法、滤波器及电子设备 |
CN111585537B (zh) * | 2020-06-05 | 2024-02-20 | 武汉衍熙微器件有限公司 | 谐振器及滤波器 |
CN111740718A (zh) * | 2020-06-22 | 2020-10-02 | 深圳市信维通信股份有限公司 | 一种体声波谐振装置、一种滤波装置及一种射频前端装置 |
CN111884617A (zh) * | 2020-06-29 | 2020-11-03 | 瑞声声学科技(深圳)有限公司 | 谐振器及其制备方法 |
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CN112202415B (zh) * | 2020-09-25 | 2021-09-24 | 杭州星阖科技有限公司 | 一种体声波谐振器的制造工艺方法和体声波谐振器 |
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CN112311347B (zh) * | 2020-10-16 | 2024-05-24 | 浙江大学杭州国际科创中心 | 一种可提高薄膜体声波谐振器品质因子q值的结构 |
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CN112511129A (zh) * | 2020-12-02 | 2021-03-16 | 赛莱克斯微系统科技(北京)有限公司 | 一种薄膜体声波谐振器的气密封装结构及其制备方法 |
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WO2022183379A1 (zh) * | 2021-03-02 | 2022-09-09 | 天津大学 | 石英薄膜谐振器及其制造方法 |
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CN115694398A (zh) * | 2021-07-29 | 2023-02-03 | 诺思(天津)微系统有限责任公司 | 具有多个底电极层的体声波谐振器、滤波器及电子设备 |
CN115706571A (zh) * | 2021-08-10 | 2023-02-17 | 诺思(天津)微系统有限责任公司 | 具有双压电层的体声波谐振器、滤波器及电子设备 |
CN113810006A (zh) * | 2021-09-08 | 2021-12-17 | 常州承芯半导体有限公司 | 一种体声波谐振装置、滤波装置及射频前端装置 |
CN114006595B (zh) * | 2021-12-30 | 2022-03-29 | 深圳新声半导体有限公司 | 体声波谐振器和体声波滤波器 |
CN117375568B (zh) * | 2023-12-07 | 2024-03-12 | 常州承芯半导体有限公司 | 体声波谐振装置及体声波谐振装置的形成方法 |
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- 2020-05-06 EP EP20879253.1A patent/EP4068628A4/en active Pending
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EP4072013A4 (en) | 2024-04-10 |
EP4068628A1 (en) | 2022-10-05 |
WO2021077715A1 (zh) | 2021-04-29 |
EP4068627A4 (en) | 2024-01-10 |
EP4068627A1 (en) | 2022-10-05 |
EP4072014A1 (en) | 2022-10-12 |
CN111162748A (zh) | 2020-05-15 |
WO2021077711A1 (zh) | 2021-04-29 |
CN111010122A (zh) | 2020-04-14 |
EP4068628A4 (en) | 2024-04-10 |
WO2021077717A1 (zh) | 2021-04-29 |
EP4072013A1 (en) | 2022-10-12 |
CN111010123A (zh) | 2020-04-14 |
WO2021077712A1 (zh) | 2021-04-29 |
CN111162748B (zh) | 2021-06-01 |
EP4072014A4 (en) | 2024-06-26 |
CN111010122B (zh) | 2021-06-01 |
CN111082774A (zh) | 2020-04-28 |
CN111082774B (zh) | 2021-03-12 |
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