CN111010124B - 电极具有空隙层的体声波谐振器、滤波器及电子设备 - Google Patents
电极具有空隙层的体声波谐振器、滤波器及电子设备 Download PDFInfo
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- CN111010124B CN111010124B CN201911027016.0A CN201911027016A CN111010124B CN 111010124 B CN111010124 B CN 111010124B CN 201911027016 A CN201911027016 A CN 201911027016A CN 111010124 B CN111010124 B CN 111010124B
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (19)
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CN201911027016.0A CN111010124B (zh) | 2019-10-26 | 2019-10-26 | 电极具有空隙层的体声波谐振器、滤波器及电子设备 |
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CN201911027016.0A CN111010124B (zh) | 2019-10-26 | 2019-10-26 | 电极具有空隙层的体声波谐振器、滤波器及电子设备 |
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CN111010124A CN111010124A (zh) | 2020-04-14 |
CN111010124B true CN111010124B (zh) | 2021-06-01 |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107529685A (zh) * | 2016-06-24 | 2018-01-02 | 三星电机株式会社 | 体声波谐振器以及包括该体声波谐振器的滤波器 |
CN109167585A (zh) * | 2018-07-26 | 2019-01-08 | 开元通信技术(厦门)有限公司 | 体声波谐振器及其制作方法、滤波器 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2007221588A (ja) * | 2006-02-17 | 2007-08-30 | Toshiba Corp | 薄膜圧電共振器及び薄膜圧電共振器の製造方法 |
US9608192B2 (en) * | 2013-03-28 | 2017-03-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Temperature compensated acoustic resonator device |
US9948272B2 (en) * | 2015-09-10 | 2018-04-17 | Qorvo Us, Inc. | Air gap in BAW top metal stack for reduced resistive and acoustic loss |
CN107666297B (zh) * | 2017-11-17 | 2024-02-09 | 杭州左蓝微电子技术有限公司 | 具有疏水防粘连结构的薄膜体声波谐振器及其制造方法 |
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- 2019-10-26 CN CN201911027016.0A patent/CN111010124B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107529685A (zh) * | 2016-06-24 | 2018-01-02 | 三星电机株式会社 | 体声波谐振器以及包括该体声波谐振器的滤波器 |
CN109167585A (zh) * | 2018-07-26 | 2019-01-08 | 开元通信技术(厦门)有限公司 | 体声波谐振器及其制作方法、滤波器 |
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Denomination of invention: Bulk acoustic wave resonator, filter and electronic equipment with electrode having gap layer Effective date of registration: 20210908 Granted publication date: 20210601 Pledgee: Tianjin TEDA Haihe intelligent manufacturing industry development fund partnership (L.P.) Pledgor: ROFS MICROSYSTEM(TIANJIN) Co.,Ltd. Registration number: Y2021980009022 |
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