CN107872169B - 压电致动器及其制造方法、压电电动机、机器人及打印机 - Google Patents

压电致动器及其制造方法、压电电动机、机器人及打印机 Download PDF

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CN107872169B
CN107872169B CN201710803960.5A CN201710803960A CN107872169B CN 107872169 B CN107872169 B CN 107872169B CN 201710803960 A CN201710803960 A CN 201710803960A CN 107872169 B CN107872169 B CN 107872169B
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piezoelectric actuator
vibrator
piezoelectric
substrate
biasing
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CN107872169A (zh
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荒川豊
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Seiko Epson Corp
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Seiko Epson Corp
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H02N2/0025—Driving devices, e.g. vibrators using only longitudinal or radial modes using combined longitudinal modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H02N2/046—Mechanical transmission means, e.g. for stroke amplification for conversion into rotary motion
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN201710803960.5A 2016-09-23 2017-09-07 压电致动器及其制造方法、压电电动机、机器人及打印机 Active CN107872169B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016185870A JP6828342B2 (ja) 2016-09-23 2016-09-23 圧電アクチュエーター、圧電モーター、ロボット、電子部品搬送装置、プリンターおよび圧電アクチュエーターの製造方法
JP2016-185870 2016-09-23

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CN107872169A CN107872169A (zh) 2018-04-03
CN107872169B true CN107872169B (zh) 2021-04-09

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US (1) US10680156B2 (enExample)
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CN (1) CN107872169B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6834262B2 (ja) * 2016-08-31 2021-02-24 セイコーエプソン株式会社 振動子、圧電アクチュエーター、圧電モーター、ロボット、電子部品搬送装置および振動子の製造方法
US10601397B2 (en) * 2017-03-24 2020-03-24 Zhuhai Crystal Resonance Technologies Co., Ltd. RF resonator electrode and membrane combinations and method of fabrication
JP7031244B2 (ja) 2017-11-17 2022-03-08 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
JP2021035213A (ja) * 2019-08-27 2021-03-01 セイコーエプソン株式会社 圧電駆動装置およびロボット
JP7272177B2 (ja) * 2019-08-27 2023-05-12 セイコーエプソン株式会社 圧電駆動装置およびロボット
CN112439640B (zh) * 2019-08-28 2022-08-02 若川深度科技有限公司 扭力杆式压电致动装置
CN110813773B (zh) * 2019-10-23 2023-06-16 台晶(宁波)电子有限公司 一种用于镀膜后的石英芯片的频率自动测量设备
JP7447677B2 (ja) * 2020-05-27 2024-03-12 セイコーエプソン株式会社 圧電駆動装置、圧電モーターおよびロボット
JP2022011405A (ja) * 2020-06-30 2022-01-17 セイコーエプソン株式会社 圧電駆動装置、圧電モーターおよびロボット
JP2022165014A (ja) * 2021-04-19 2022-10-31 セイコーエプソン株式会社 圧電駆動装置およびロボット

Citations (7)

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JP2000278967A (ja) * 1999-03-24 2000-10-06 Seiko Instruments Inc 圧電アクチュエータ
JP2006340503A (ja) * 2005-06-02 2006-12-14 Seiko Epson Corp 圧電アクチュエータ及びこれを備えた機器
CN103151956A (zh) * 2011-12-06 2013-06-12 精工爱普生株式会社 压电马达、驱动装置、机器人及打印机
CN103151958A (zh) * 2011-12-06 2013-06-12 精工爱普生株式会社 压电马达、驱动装置、电子部件输送装置及检查装置
US20150114164A1 (en) * 2013-10-30 2015-04-30 Seiko Epson Corporation Piezoelectric motor, robot hand, robot, finger assist apparatus, electronic component conveying apparatus, electronic component inspecting apparatus, liquid feeding pump, printing apparatus, electronic timepiece, and projection apparatus
US20150318801A1 (en) * 2014-04-30 2015-11-05 Seiko Epson Corporation Piezoelectric actuator and robot
CN105277183A (zh) * 2014-06-12 2016-01-27 精工爱普生株式会社 功能元件、功能元件的制造方法、电子设备以及移动体

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JP2725140B2 (ja) * 1993-12-03 1998-03-09 セイコーインスツルメンツ株式会社 圧電アクチュエータ及びその製造方法
DE19648726C2 (de) * 1996-11-12 2003-03-27 Piezosystem Jena Gmbh Piezoelektrisches Antriebselement
JP3190630B2 (ja) * 1998-11-30 2001-07-23 セイコーインスツルメンツ株式会社 圧電アクチュエータおよびその製造方法
JP2000166246A (ja) * 1998-11-30 2000-06-16 Matsushita Electric Ind Co Ltd インバータ装置の検査方法
JP5930595B2 (ja) * 2010-04-06 2016-06-08 キヤノン株式会社 振動型アクチュエータ、振動子及び振動子の製造方法
JP6269223B2 (ja) 2014-03-24 2018-01-31 セイコーエプソン株式会社 圧電モーター
CN105375812A (zh) * 2014-08-13 2016-03-02 精工爱普生株式会社 压电驱动装置及其驱动方法、机器人及其驱动方法
JP6398454B2 (ja) * 2014-08-13 2018-10-03 セイコーエプソン株式会社 圧電駆動装置、ロボット、及び、それらの駆動方法
JP6459291B2 (ja) * 2014-08-13 2019-01-30 セイコーエプソン株式会社 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法
JP6361365B2 (ja) 2014-08-13 2018-07-25 セイコーエプソン株式会社 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000278967A (ja) * 1999-03-24 2000-10-06 Seiko Instruments Inc 圧電アクチュエータ
JP2006340503A (ja) * 2005-06-02 2006-12-14 Seiko Epson Corp 圧電アクチュエータ及びこれを備えた機器
CN103151956A (zh) * 2011-12-06 2013-06-12 精工爱普生株式会社 压电马达、驱动装置、机器人及打印机
CN103151958A (zh) * 2011-12-06 2013-06-12 精工爱普生株式会社 压电马达、驱动装置、电子部件输送装置及检查装置
US20150114164A1 (en) * 2013-10-30 2015-04-30 Seiko Epson Corporation Piezoelectric motor, robot hand, robot, finger assist apparatus, electronic component conveying apparatus, electronic component inspecting apparatus, liquid feeding pump, printing apparatus, electronic timepiece, and projection apparatus
US20150318801A1 (en) * 2014-04-30 2015-11-05 Seiko Epson Corporation Piezoelectric actuator and robot
CN105277183A (zh) * 2014-06-12 2016-01-27 精工爱普生株式会社 功能元件、功能元件的制造方法、电子设备以及移动体

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US20180090663A1 (en) 2018-03-29
CN107872169A (zh) 2018-04-03
JP2018050435A (ja) 2018-03-29
US10680156B2 (en) 2020-06-09

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