CN105873881A - 氧化物烧结体、该烧结体的制造方法及溅射靶 - Google Patents

氧化物烧结体、该烧结体的制造方法及溅射靶 Download PDF

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Publication number
CN105873881A
CN105873881A CN201480070391.2A CN201480070391A CN105873881A CN 105873881 A CN105873881 A CN 105873881A CN 201480070391 A CN201480070391 A CN 201480070391A CN 105873881 A CN105873881 A CN 105873881A
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sintered body
oxide
thin film
phase
powder
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CN201480070391.2A
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Chinese (zh)
Inventor
笘井重和
井上吉
井上一吉
江端晃
江端一晃
柴田雅敏
宇都野太
霍间勇辉
石原悠
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Idemitsu Kosan Co Ltd
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Idemitsu Kosan Co Ltd
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Priority to CN202211043880.1A priority Critical patent/CN115340360B/zh
Publication of CN105873881A publication Critical patent/CN105873881A/zh
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