CN105556654A - 用于传送基板的气动终端受动器装置、基板传送系统与方法 - Google Patents

用于传送基板的气动终端受动器装置、基板传送系统与方法 Download PDF

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CN105556654A
CN105556654A CN201480051766.0A CN201480051766A CN105556654A CN 105556654 A CN105556654 A CN 105556654A CN 201480051766 A CN201480051766 A CN 201480051766A CN 105556654 A CN105556654 A CN 105556654A
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丹尼尔·格林伯格
阿扬·马宗达
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Abstract

提供用于在电子器件制造系统的系统部件之间传送基板的包含气动终端受动器的系统、装置与方法。在一个方面中，终端受动器具有适于与机器人部件连接的基部，及定位于所述基部上的一个或多个气动吸力元件。将气动源应用于气动吸力元件以吸引基板与终端受动器的接触垫接触。公开方法与系统及多个其他方面。

Description

用于传送基板的气动终端受动器装置、基板传送系统与方法
相关申请
本申请主张于2013年9月26日提出申请的美国临时专利申请第61/882,787号的优先权权益，所述美国临时专利申请发明名称为“PNEUMATICENDEFFECTORAPPARATUS,SYSTEMS,ANDMETHODSFORTRANSPORTINGSUBSTRATES(用于传送基板的气动终端受动器装置、系统与方法)”(代理人案号21232/L)，为所有目的，所述美国临时专利申请通过被本申请参考的方式结合于此。
技术领域
本发明关于电子器件的制造，而更特定而言是关于用于传送基板的终端受动器装置、系统与方法。
先前技术
在电子器件、产品和存储器制品(memoryarticle)的制造中，对于这些半导体晶片(例如，图案以及非图案化的基板)的前驱物制品可通过机器人装置在制造设施的多个部件之间以及在工具中传送。例如，在传送腔室中可由一个工艺腔室传送到另一个工艺腔室，从装载锁定室传送到工艺腔室，从基板载体传送到群集工具的工厂接口中的载入口，或诸如此类。在这样的机器人传送期间，移动与放置基板需要具有速度与精确度。终端受动器上基板的任何滑动都可能导致产生不必要的颗粒且可能需要未对准校正，这可能花费时间。
因此，寻求电子器件制造中用于传送基板的有效的系统、装置与方法。
发明内容
根据第一方面，提供一种用于电子器件制造系统中的在系统部件之间传送基板的终端受动器装置。所述终端受动器装置包括适于与机器人部件连接的基部，及定位在所述基部上的气动吸力元件。
在另一个方面中，提供一种用于在电子器件制造系统部件之间传送基板的基板传送系统。所述基板传送系统包括机器人部件，及与机器人部件耦接的终端受动器，终端受动器包含适于与机器人部件连接的基部，及定位在所述基部上的气动吸力元件。
在又另一个方面中，提供一种于在电子器件制造系统的部件之间传送基板的方法。所述方法包括提供与机器人部件耦接的终端受动器，终端受动器具有一个或多个气动吸力元件及三个或更多个接触垫，在三个或更多个接触垫上支撑基板，及通过一个或多个气动吸力元件的操作而产生吸力以吸引基板与至少三个接触垫有增加的接触力，所述增加的接触力超过重力所提供的接触力。
根据本发明的这些与其他实施方式，提供多个其他方面。本发明实施方式的其他特征与方面将由下文中详细的描述、附加的申请专利范围和附图而更加清楚明了。
图式简单说明
图1根据实施方式绘示包括气动吸力元件(pneumaticsuctionelement)的终端受动器的透视图。
图2根据实施方式绘示包括裸露气动通道(移除覆盖物)的终端受动器基部的实施方式的一部分的下侧透视图。
图3A绘示沿着图1的线3A-3A的终端受动器的气动吸力元件的截面示意图。
图3B是根据实施方式的终端受动器装置的吸力元件的透视图。
图4根据实施方式绘示包括带有一个或多个气动吸力元件的终端受动器的电子器件处理系统的顶部概要示意图。
图5系根据实施方式绘示了在电子器件制造系统的部件之间传送基板的方法的流程图。
图6A-6C根据实施方式绘示带有一个或多个气动吸力元件的另一各终端受动器的多个组件与部件的示意图。
具体实施方式
电子器件制造工艺使用多个前驱物制品以产生最后装置，诸如半导体晶片、玻璃板、掩模(本发明中的全部这些前驱物制品被称为“基板”。在基板从制造工艺与系统中的一个位置到另一个位置的传送期间，基板可由终端受动器(有时被称为“叶片(blade)”)承载。在传送期间，基板静置在终端受动器上且可预期叶片与基板之间的滑动被减少或消除。当经历横向移动时，减少或消除终端受动器与基板之间这样的相对滑动移动可减少定位误差、减少当实际滑动产生时的重定位时间(如未对准校正时间)，即可进一步减少颗粒的产生，颗粒产生可能导致污染工具、其他系统部件及基板。
本发明人发现，如果提供适当的向下吸力用于将基板夹到终端受动器或将基板黏附到终端受动器，则终端受动器与被固定的基板的加速度(如垂直和/或横向加速度)可增加。因为基板可在多个系统部件之间被更快速地移动，这可转换成增加的工艺产量，潜在地导致降低电子器件制造成本。此外，可减少的颗粒产生可能导致提升的工艺良率。此外，也可期望夹紧或黏附机制可被容易地操作与放开。
根据第一方面，终端受动器装置的一个或多个实施方式可包括基部，在所述基部上具有一个或多个气动吸力元件(在所绘示的实施方式中有多个)。气动元件可操作地增加黏附力而将基板吸引到终端受动器的接触垫。因此，可通过使用一个或多个气动元件来执行终端受动器与被固定的基板的更快速的移动。
根据另一个实施方式，提供一种基板传送系统。基板传送系统可包括机器人构件，诸如机器人腕、机器人臂和/或一系列的机器人部件，并且终端受动器装置包括与机器人构件耦接的一个或多个气动吸力元件。包括一个或多个气动吸力元件的终端受动器可适当产生高黏附力(有时称为“夹持力”)，使得在垂直和/或横向移动期间可减少或消除终端受动器与基板之间的滑动。在某些例子中，可达到在基板上大于1磅的吸力。
下文通过参考图1-6C描述包括一个或多个气动吸力元件、基板传送系统的终端受动器装置，以及在电子器件制造系统的部件之间传送基板及操作终端受动器与系统的方法的这些与其他实施方式。相同的数字编号在各处用于代表相同的元件。
图1-3B根据本发明一个或多个实施方式绘示终端受动器100及终端受动器100的多个部件。终端受动器100包括基部102，所述基部102包含适于附接于机器人部件(未图示出)的第一端，及在相对于第一端的端部上的第二端，第二端包括第一腿部106与第二腿部107。如图所示，基部102可以是实质上平坦的，且可具有约0.118英寸(3mm)至约0.157英寸(4mm)之间的厚度，且可由适当材料制造，例如诸如铝、钛、不锈钢或陶瓷。根据基板的尺寸和终端受动器100可暴露的处理温度，可使用其他的材料与尺寸。
例如，基部102与第一腿部及第二腿部106、107可以与实际容纳基板支撑件(如工艺腔室的升降杆(未图示出))通过的宽度一样宽。终端受动器100可通过任何适当方法(诸如通过紧固件(如螺栓(bolt)、螺钉(screw)、铆钉、夹具、快拆或其类似物))附接于第一端上的机器人部件109(如图4中虚线所示的机器人腕或任选的的机器人臂)。
一个或多个气动吸力元件(如气动吸力元件105A-105D)可通过机械固定或凹陷定位在基部102上。附图显示了四个气动吸力元件，但可依据所需额外黏附力的程度而提供少如一个或多如四个或更多的气动吸力元件。在所示的终端受动器100中，多个气动吸力元件105A-105D定位在基部102上。可依适当间距设置多个气动吸力元件105A-105D。例如，在所绘示的实施方式中，第一气动吸力元件105A可设置于第一腿部106上且靠近于第一腿部尖端106T。第二气动吸力元件105B可设置于第二腿部107上且靠近于第二腿部尖端107T。第三气动吸力元件105C与甚至于第四气动吸力元件105D可设置于基部102上且靠近连接部分108。连接部分108适于与机器人部件109耦接(如虚线所示)。如本说明书将进一步讨论，由于所提供的吸力，终端受动器100适于产生完全向下的至少1lb.(至少1.1N)的吸力以将基板345夹持在终端受动器100上(见图4)。在某些实验性的实施方式中，估计各气动吸力元件在约60psi的流(flow)处会产生约4.3N。同样地，在40psi的流处，可产生约0.43lb.(约1.9N)的力。所以使用四个气动吸力元件105A-105D并在40psi处操作可能产生约1.7lb.的黏附力(约0.43lb.×4＝1.7lb.(约7.5N))。
终端受动器100可包括形成于基部102内的一个或多个气动通道(如111A-111D)。如图所示，提供四个气动通道111A-111D。气动通道111A-111D与气动吸力元件105A-105D连接且在气动吸力元件105A-105D处提供气动流。通道111A-111D可通过凹槽112A-112D与容纳于这些凹槽之上的一个或多个盖件114(图2中仅示出一个盖件114)的组件形成。凹槽112A-112D可于基部102的下侧中形成，如图2所示。因此，气动通道111A-111D可在基部102的层之间形成。盖件114(图中仅示出一个)可容纳于凹穴中且固定于其中，凹穴环绕基部102中的凹槽112A-112D。可通过固定件、烤(braising)、黏接剂或类似物固定。因此，在所绘示的实施方式中，基部102中的气动通道111A-111D可由具有凹槽112A-112D形成于其中的第一层及包含盖件114的第二层组成。因此，气动通道111A-111D可在层之间形成，诸如介于基部102的层之间。可使用其他用于连接到气动吸力元件105A-105D的适当构造与管道。
在某些实施方式中，气动通道111A-111D可向气动吸力元件105A-105D延伸且可将多个气动吸力元件105A-105D相互连接。各气动通道111A-111D可与主连接部115相互连接。主连接部115可与主气动供应通道116(如图1中虚线所示)耦接，所述主气动供应通道116可将气动通道111A-111D及气动吸力元件105A-105D连接至气动供应系统118。在某些实施方式中，主气动供应通道116可穿过终端受动器100所附接的机器人的多个臂元件。
通过主气动供应通道116的流以及由气动吸力元件105A-105D施于基板的吸力程度可由气动供应系统118控制。气动供应系统118可包括气动源120、一个或多个阀122及控制器124。气动源120可包括泵、储存器(reservoir)、蓄电池和/或其他适当气动部件以供应约25slm至约90slm之间的流动速率。可使用用于控制气体流动的其它流动速率与方法。可通过气动供应系统118打开及关闭流动或者可另外控制或调整流动速率。
现在参考图3A和3B，将描述气动吸力元件105A-105D的细节。每个气动吸力元件105A-105D可与本说明书所述的气动吸力元件105A相同。如图所示，气动吸力元件105A包括主体325，主体325适于与基部102耦接且具有导件(pilot)部分326、内凹部328，及与内凹部328相交并进入内凹部328的一个或多个流动口330A-330C。在绘示的实施方式中，也可提供凸缘部分332。如图所示，气动吸力元件105A包括形成于主体325与凹孔334之间的环形流动通道333，凹孔334在基部102中形成。环形流动通道333与气动通道111A互相连接，气动通道111A在基部102中形成且从气动通道111A接收气流。如图3A中所示，盖件114与基部102的主板335可形成气动通道111A。
在所绘示的实施方式中，图示了三个流动口330A-330C。然而，可使用更少个或更多个流动口。流动口330A-330C在环形流动通道333与内凹部328之间连接。具体而言，流动口330A-330C与内凹部328的外壁336相交。在所绘示的实施方式中，一个或多个流动口330A-330C进入内凹部328并被布置为规划在内凹部328的外壁336处的流。例如，流动口330A-330C可设置成使得流以与内凹部328的外壁336相切的方式进入内凹部328的角度。在此方式中，通过流动口330A-330C的流可产生涡流状的流动模式，涡流状的流动模式在内凹部328中循环旋转移动。
如图所示，主体325可容纳于凹孔334中且可提供凸缘部分332而与密封件338(诸如O形环密封件)密封接触。固定件340可将气动吸力元件105A固定到基部102。
此外，气动吸力元件105A可包括接触垫342，用于将基板345(只显示了部分)与基部102分隔开适当距离。在所绘示的实施方式中，接触垫342与主体325耦接，诸如与柱346耦接，柱346在内凹部328中向上延伸。在图1与图2所绘示的实施方式中，接触垫342的数量可实质上由每气动吸力元件105A-105D一个接触垫组成。在其他实施方式中，接触垫342可在适当位置与基部102耦接或与基部102集成，即不同于气动吸力元件105A-105D的位置。
接触垫342可以是任何适合形状(在顶视图中)，如圆形、卵形(oval)、正方形、六边形、八边形或矩形。可使用其他形状。在所绘示的实施方式中，两个接触垫342可在横向方向分隔开，诸如在腿部106、107上，且至少一个以上可设置在基部102上的其它位置。在所绘示的实施方式中，接触垫342可实质设置在气动吸力元件105A的中心线上。在某些实施方式中，接触垫342提供与基板345至少三点的接触，从而提供在基板345与基部102顶表面之间的间隙。在某些实施方式中，所述间隙可以在约0.5mm至约1.5mm之间。例如，可使用小于0.15mm的间隙，或甚至可使用小于0.10mm，或甚至可使用小于0.9mm。可使用其它的间隙尺寸。
接触垫342可通过任何适当的方法固定至主体325，诸如焊接、压配合、黏接、螺钉连接、螺栓连接或其他机械固定，或类似方法。接触垫342可具有平的或圆顶形(domed)的外形。
图4绘示适于在电子器件制造系统部件之间传送基板345(虚线所示)的基板传送系统400。基板传送系统400包括机器人部件109，诸如机器人腕元件或其他可移除的机器人元件或臂。在所绘示的实施方式中，机器人部件109可以是机器人450的部件(如机器人腕构件)，所述机器人部件109可设置在所绘示实施方式中的主机壳体454的传送腔室452中。机器人450与所耦接的终端受动器100可配置为并适于将基板345(在图4中以虚线表示)于群集工具的多个腔室来回传送，例如，诸如在处理腔室455A-455F来回传送，或在装载锁定室456A、456B来回传送。与机器人元件109耦接的终端受动器100可以是包括本说明书所述的一个或多个气动吸力元件105A-105D的终端受动器100的任一个。
如图所示，可与终端受动器100的主连接部115(图1)耦接的主气动供应通道116可穿过机器人450的多个元件，诸如经由机器人部件109与臂458、460通过并与气动供应系统118耦接。
机器人450可以是任意形式的机器人，如三连杆(three-link)机器人、四连杆(four-link)机器人、选择顺应性关节机器人臂(SCARA)机器人，或独立可控臂(independently-controllable-arm)机器人。可使用其他类型的机器人。例如，机器人450可包括支撑基部，所述基部适于安置到如主框架壳体454。任选地，包括本说明书所述的终端受动器100的工厂接口机器人461(如虚线框所示)可用于工厂接口462中以传送来自与工厂接口462的载入口及装载锁定室456A、456B耦接的基板载体464的基板。在某些实施方式中，机器人450、461可包括垂直(Z轴)移动能力。例如，沿着Z轴的终端受动器100的垂直运动可用于完成基板345在基板支撑件上的放置，诸如通过将基板345放置在处理腔室(如任何一个或多个处理腔室455A-455F)中的升降杆上，或放置在如基板载体464或装载锁定室456A、456B中的槽部上。机器人450、461可包括任意数量的机器人臂，所述机器人臂可由带或其他传动部件连接与驱动。机器人控制器(未图示出)可提供适当的控制信号到机器人450、461以控制终端受动器100的移动。气动供应系统118的控制器124(图1)可与机器人控制器集成或通信以完成基板345的传送。
终端受动器100可适于用于与任何适当的机器人450、461一起使用，所述机器人450、461适于传送基板345。例如，终端受动器100可适于与如美国专利号5,789,878、5,879,127、6,267,549、6,379,095、6,582,175、和6,722,834以及美国专利公开号2010/0178147、2013/0039726、2013/0149076、2013/0115028、和2010/0178146中所述的机器人一起使用。同样地，终端受动器100可而与其他类型与构造的工艺腔室一起使用。
图5绘示在电子器件制造系统的部件之间传送基板的方法500(见图4)。方法500包括，在502中，提供与机器人部件(如机器人部件109，诸如腕构件或其他机器人部件)耦接的终端受动器(如终端受动器100)，终端受动器具有一个或多个气动吸力元件(如气动吸力元件105A、105B、105C和/或105D)及三个或更多个接触垫(如接触垫342)。
方法500进一步包括，在504中，将基板(如基板345)支撑在三个或更多个接触垫上，以及，在506中，经由一个或多个气动吸力元件的操作产生吸力而吸引(draw)基板与至少三个接触垫有增加的接触力，所述增加的接触力超过重力所提供的接触力。吸力提供的额外的向下的力可以是1lb.(约4.45N)或更多，从而超过重力提供的力。
图6A-6C绘示终端受动器600的另一个实施方式及其多个部件。终端受动器600包括基部602，基部602包括适于被附接于机器人部件的第一端(未图示出)，及在相对于第一端的端部上的第二端，第二端包括第一腿部606与第二腿部607。如图所示，基部602可以是实质平坦的，且可具有厚度，且可由如前述所讨论的材料制成。
终端受动器100可通过任何适合的方法而附接于机器人部件109，诸如通过固定件(如螺栓(bolt)、螺钉(screw)、铆钉、夹具、快拆或类似物)。
一个或多个气动吸力元件可通过机械固定件、烤或凹陷而定位在基部602上。附图显示两个气动吸力元件605A、605B，但可依据超过重力的所需额外黏附力(如吸力)的程度而提供少如一个或多如四个或更多个气动吸力元件。在所绘示的终端受动器600中，气动吸力元件605A、605B定位于基部602上。气动吸力元件605A、605B可设置在基部602上除腿部606、607外的其它位置。
终端受动器600可包括形成于其中的一个或多个气动通道(如611A、611B)。如所绘示的，气动通道611A、611B提供在气动吸力元件605A、605B处的气动流。通道611A、611B可通过凹槽612A、612B与凹槽612C、612D的组件形成，凹槽612A、612B于基部602中形成，凹槽612C、612D于主体625中形成。因此，气动通道611A、611B可在基部602与主体625的层之间形成。主体625可容纳于凹穴中，凹穴于基部602中形成。可通过固定件或黏接剂或类似物固定。
在某些实施方式中，气动通道611A、611B可向气动吸力元件605A、605B延伸且可与气动吸力元件605A、605B相互连接。各气动通道611A、611B可与主连接部615相互连接。主连接部615可与主气动供应通道耦接，诸如图1中所示的主气动供应通道116。
再参考图6A-6C，将描述气动吸力元件605A、605B的细节。各个气动吸力元件605A、605B可以是相同的，但是他们为镜像相同。如图所示，气动吸力元件605A、605B包括适于与基部602耦接的主体625。主体625与基部602形成导件部分626、内凹部628、及与内凹部628相交并进入内凹部628的一个或多个流动口630A-630D。
在绘示的实施方式中，也提供凸缘部分632。如图所示，气动吸力元件605A、605B各包括形成于主体625与基部602之间的环形流动通道633，其中环形流动通道633与气动通道611A、611B相互连接。
在绘示的实施方式中，图示四个流动口630A-630D。然而，可使用更少或更多个流动口。流动口630A-630D连接环形流动通道633与内凹部628，并提供环形流动通道633与内凹部628之间的流动口。具体而言，流动口630A-630D与内凹部628的外壁636相交。在绘示的实施方式中，一个或多个流动口630A-630D进入内凹部628并被布置为规划在内凹部628的外壁636处的气体流。例如，流动口630A-630D可设置成使得气体流以与内凹部328的外壁636实质上相切的方式进入内凹部628的角度。在此方式中，通过流动口630A-630D的流可在内凹部628中产生涡流状的流动模式，而在基板645(在图6A中以虚线表示)上产生向下的力。
如图所示，主体625可容纳于基部602的凹孔中且可与所述主体密封接触，诸如通过焊接、烤、黏接剂、固定件或类似物。
此外，基部602可包括用于将基板645从基部602分隔一适当距离的接触垫642。接触垫642的数量可包括三个或更多个且可在适当位置与基部602耦接或集成。
接触垫642可以是任意形状(在顶视图中)，如圆形、卵形、正方形、六边形、八边形或矩形。可使用其他形状。优选地，两个接触垫642可在横向方向分隔开，诸如在腿部606、607上，且至少一个以上接触垫可设置在基部602上的其它位置。在所绘示的实施方式中，接触垫642提供与基板645至少三点的接触，从而提供在基板645与基部602顶表面之间的间隙。所述间隙在某些实施方式中可以在约0.5mm至约1.5mm之间。例如，可使用小于0.15mm的间隙，或甚至可使用小于0.10mm，或甚至可使用小于0.9mm。可使用其他的间隙尺寸。接触垫342可具有平的或圆顶形的外形。
前述说明只公开本发明的示例性实施方式。落于本发明范围内的对以上公开的系统、装置与方法的变化将对本领域技术人员是是显而易见的。因此，虽然已公开本发明与其相关联的若干实施方式，但应当了解其他实施方式也可落于通过以下申请专利范围所定义的本发明范围内。

Claims (15)

1.一种终端受动器装置，包括：
基部，所述基部适于连接到机器人部件；及
气动吸力(pneumaticsuctionelement)元件，所述气动吸力元件定位于所述基部上。
2.如权利要求1所述的终端受动器装置，包括多个定位于所述基部上的气动吸力元件。
3.如权利要求1所述的终端受动器装置，其中所述终端受动器适于产生至少1lb的总吸力。
4.如权利要求1所述的终端受动器装置，其中所述基部包括第一层和第二层，并且气动通道形成在所述第一层和所述第二层之间。
5.如权利要求1所述的终端受动器装置，包括至少部分形成于所述基部内的气动通道。
6.如权利要求1所述的终端受动器装置，其中所述基部进一步包括第一层和第二层，及至少一个气动通道形成于所述层之间并向所述气动吸力元件延伸。
7.如权利要求1所述的终端受动器装置，其中所述气动吸力元件包括适于与所述基部耦接的主体及与所述主体耦接的接触垫。
8.如权利要求1所述的终端受动器装置，其中所述气动吸力元件包括主体，所述主体具有：
导件(pilot)部分，
内凹部，及
一个或多个流动口，所述一个或多个流动口与所述内凹部相交。
9.如权利要求1所述的终端受动器装置，其中所述气动吸力元件包括适于与所述基部耦接的主体，及形成在所述主体与所述基部之间的环形流动通道，其中所述环形流动通道与气动通道相互连接。
10.如权利要求1所述的终端受动器装置，其中所述气动吸力元件包括适于与所述基部耦接的主体、在所述主体中的内凹部、及进入所述内凹部的一个或多个流动口。
11.如权利要求10所述的终端受动器装置，其中进入所述内凹部的所述一个或多个流动口与所述内凹部的外壁实质地相切。
12.如权利要求1所述的终端受动器装置，其中所述气动吸力元件包括适于与所述基部耦接的主体，所述主体包含容纳于所述主体的凹孔中的导件部分及在所述导件部分与所述凹孔之间的环形流动通道。
13.一种用于在电子器件制造系统部件之间传送基板的基板传送系统，包括：
机器人部件；及
终端受动器，所述终端受动器与所述机器人部件耦接，所述终端受动器包含：基部，所述基部适于与机器人部件连接，及
气动吸力元件，所述气动吸力元件定位在所述基部上。
14.如权利要求13所述的基板传送系统，包括至少部分形成于所述基部中的一个或多个气动通道及与所述一个或多个气动通道耦接的气动供应系统。
15.一种在电子器件制造系统的部件之间传送基板的方法，包括以下步骤：
提供与机器人部件耦接的终端受动器，所述终端受动器具有一个或多个气动吸力元件及三个或更多个接触垫；
在所述三个或更多个接触垫上支撑基板；及
通过所述一个或多个气动吸力元件的操作产生吸力，以吸引所述基板与所述至少三个接触垫有增加的接触力，所述增加的接触力超过重力所提供的接触力。
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