CN104900685B - 具有钝化层的半导体器件及用于制作其的方法 - Google Patents
具有钝化层的半导体器件及用于制作其的方法 Download PDFInfo
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- CN104900685B CN104900685B CN201510099304.2A CN201510099304A CN104900685B CN 104900685 B CN104900685 B CN 104900685B CN 201510099304 A CN201510099304 A CN 201510099304A CN 104900685 B CN104900685 B CN 104900685B
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- H10D12/481—Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions having gate structures on slanted surfaces, on vertical surfaces, or in grooves, e.g. trench gate IGBTs
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Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Junction Field-Effect Transistors (AREA)
- Bipolar Transistors (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/200732 | 2014-03-07 | ||
| US14/200,732 US20150255362A1 (en) | 2014-03-07 | 2014-03-07 | Semiconductor Device with a Passivation Layer and Method for Producing Thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104900685A CN104900685A (zh) | 2015-09-09 |
| CN104900685B true CN104900685B (zh) | 2019-10-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510099304.2A Active CN104900685B (zh) | 2014-03-07 | 2015-03-06 | 具有钝化层的半导体器件及用于制作其的方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (3) | US20150255362A1 (https=) |
| JP (2) | JP2015170857A (https=) |
| CN (1) | CN104900685B (https=) |
| DE (1) | DE102015103318B4 (https=) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017174608A1 (en) * | 2016-04-06 | 2017-10-12 | Abb Schweiz Ag | Semiconductor chip with moisture protection layer |
| CN106252244A (zh) * | 2016-09-22 | 2016-12-21 | 全球能源互联网研究院 | 一种终端钝化方法及半导体功率器件 |
| DE102017100109A1 (de) | 2017-01-04 | 2018-07-05 | Infineon Technologies Ag | Halbleitervorrichtung und verfahren zum herstellen derselben |
| JP6828472B2 (ja) * | 2017-02-01 | 2021-02-10 | 富士電機株式会社 | 半導体装置 |
| JP6528793B2 (ja) | 2017-02-22 | 2019-06-12 | サンケン電気株式会社 | 半導体装置 |
| JP6558385B2 (ja) * | 2017-02-23 | 2019-08-14 | トヨタ自動車株式会社 | 半導体装置の製造方法 |
| JP6846687B2 (ja) * | 2017-09-12 | 2021-03-24 | パナソニックIpマネジメント株式会社 | 半導体装置およびその製造方法 |
| US10332817B1 (en) * | 2017-12-01 | 2019-06-25 | Cree, Inc. | Semiconductor die with improved ruggedness |
| DE102019100130B4 (de) * | 2018-04-10 | 2021-11-04 | Infineon Technologies Ag | Ein halbleiterbauelement und ein verfahren zum bilden eines halbleiterbauelements |
| DE102019131238B4 (de) * | 2018-12-06 | 2025-09-18 | Infineon Technologies Ag | Passivierungsstruktur enthaltende halbleitervorrichtung und herstellungsverfahren |
| US10957664B2 (en) * | 2019-05-29 | 2021-03-23 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor structure and manufacturing method thereof |
| JP7611155B2 (ja) | 2019-09-30 | 2025-01-09 | ローム株式会社 | 半導体装置 |
| US20240404905A1 (en) * | 2020-12-16 | 2024-12-05 | Stmicroelectronics Pte Ltd | Passivation layer for an integrated circuit device that provides a moisture and proton barrier |
| US20220189840A1 (en) * | 2020-12-16 | 2022-06-16 | Stmicroelectronics Pte Ltd | Passivation layer for an integrated circuit device that provides a moisture and proton barrier |
| DE112022001137T5 (de) * | 2021-03-26 | 2023-12-21 | Rohm Co., Ltd. | Halbleiterbauteil |
| CN113921588A (zh) * | 2021-09-01 | 2022-01-11 | 格力电器(合肥)有限公司 | 半导体器件及其制备方法 |
| JPWO2023067925A1 (https=) * | 2021-10-21 | 2023-04-27 | ||
| IT202100027101A1 (it) * | 2021-10-21 | 2023-04-21 | St Microelectronics Srl | Procedimento di fabbricazione di un dispositivo elettronico di carburo di silicio e dispositivo elettronico di carburo di silicio |
| DE102024203635A1 (de) * | 2024-04-18 | 2025-10-23 | Infineon Technologies Ag | Halbleiterchip und verfahren zum herstellen desselben |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5698894A (en) * | 1994-07-29 | 1997-12-16 | Sgs-Thomson Microelectronics, Inc. | Double mask hermetic passivation structure |
| CN101356649A (zh) * | 2006-01-10 | 2009-01-28 | 克里公司 | 高电压碳化硅半导体器件的环境坚固钝化结构 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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2017
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2019
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2021
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| US20150255362A1 (en) | 2015-09-10 |
| DE102015103318B4 (de) | 2023-09-21 |
| DE102015103318A1 (de) | 2015-09-10 |
| US20220005742A1 (en) | 2022-01-06 |
| JP6691076B2 (ja) | 2020-04-28 |
| CN104900685A (zh) | 2015-09-09 |
| US11854926B2 (en) | 2023-12-26 |
| JP2015170857A (ja) | 2015-09-28 |
| JP2017224838A (ja) | 2017-12-21 |
| US11158557B2 (en) | 2021-10-26 |
| US20190252282A1 (en) | 2019-08-15 |
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