CN104062476B - 探针卡用导板 - Google Patents

探针卡用导板 Download PDF

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Publication number
CN104062476B
CN104062476B CN201410099102.3A CN201410099102A CN104062476B CN 104062476 B CN104062476 B CN 104062476B CN 201410099102 A CN201410099102 A CN 201410099102A CN 104062476 B CN104062476 B CN 104062476B
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CN
China
Prior art keywords
hole
probe
guide plate
probe card
silicon substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
CN201410099102.3A
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English (en)
Chinese (zh)
Other versions
CN104062476A (zh
Inventor
木村哲平
白石晶纪
藤原洸辅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Electronic Materials Corp
Shinko Electric Co Ltd
Original Assignee
Japan Electronic Materials Corp
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Electronic Materials Corp, Shinko Electric Co Ltd filed Critical Japan Electronic Materials Corp
Publication of CN104062476A publication Critical patent/CN104062476A/zh
Application granted granted Critical
Publication of CN104062476B publication Critical patent/CN104062476B/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CN201410099102.3A 2013-03-18 2014-03-17 探针卡用导板 Active CN104062476B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-054498 2013-03-18
JP2013054498A JP6235785B2 (ja) 2013-03-18 2013-03-18 プローブカード用ガイド板およびプローブカード用ガイド板の製造方法

Publications (2)

Publication Number Publication Date
CN104062476A CN104062476A (zh) 2014-09-24
CN104062476B true CN104062476B (zh) 2018-06-12

Family

ID=51524808

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410099102.3A Active CN104062476B (zh) 2013-03-18 2014-03-17 探针卡用导板

Country Status (5)

Country Link
US (1) US9459287B2 (enExample)
JP (1) JP6235785B2 (enExample)
KR (1) KR102193964B1 (enExample)
CN (1) CN104062476B (enExample)
TW (1) TWI623752B (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6033130B2 (ja) 2013-03-13 2016-11-30 新光電気工業株式会社 プローブガイド板及びその製造方法
TWI541515B (zh) * 2014-06-27 2016-07-11 旺矽科技股份有限公司 探針卡的定位件與探針卡的探針頭
EP3227692A2 (en) * 2014-12-04 2017-10-11 Technoprobe S.p.A Testing head comprising vertical probes
MY180767A (en) * 2014-12-17 2020-12-08 Jf Microtechnology Sdn Bhd Contact assembly in a testing apparatus for integrated circuits
JP6890921B2 (ja) 2015-10-21 2021-06-18 株式会社日本マイクロニクス プローブカード及び接触検査装置
JP6706076B2 (ja) 2016-01-14 2020-06-03 新光電気工業株式会社 プローブガイド板及びその製造方法とプローブ装置
JP6706079B2 (ja) 2016-01-18 2020-06-03 新光電気工業株式会社 プローブガイド板及びプローブ装置とそれらの製造方法
JP6654061B2 (ja) * 2016-02-23 2020-02-26 日本電子材料株式会社 プローブガイド、プローブカード及びプローブガイドの製造方法
JP6727988B2 (ja) * 2016-08-31 2020-07-22 日本電子材料株式会社 プローブカードの製造方法
JP6814024B2 (ja) * 2016-11-08 2021-01-13 日本電子材料株式会社 プローブカード用ガイド板
JP6872960B2 (ja) * 2017-04-21 2021-05-19 株式会社日本マイクロニクス 電気的接続装置
DE102017209441A1 (de) * 2017-06-02 2018-12-06 Feinmetall Gmbh Elektrische Kontaktieranordnung zur Berührungskontaktierung
CN109507456A (zh) * 2017-09-15 2019-03-22 中华精测科技股份有限公司 探针装置及其导板
KR102072451B1 (ko) * 2018-07-27 2020-02-04 주식회사 에스디에이 프로브카드 헤드블록
KR102865650B1 (ko) * 2020-01-31 2025-09-29 (주)포인트엔지니어링 프로브 헤드 및 이를 포함하는 프로브 카드
WO2022153536A1 (ja) * 2021-01-18 2022-07-21 日本電信電話株式会社 プローブカードおよびその製造方法
CN116265954A (zh) * 2021-12-17 2023-06-20 思达尔科技(武汉)有限公司 具弹性结构的探针测试装置
KR102673349B1 (ko) * 2022-02-25 2024-06-07 (주)티에스이 저마찰형 프로브 헤드
KR20240050065A (ko) 2022-10-11 2024-04-18 (주)포인트엔지니어링 가이드 플레이트 및 이를 포함하는 검사 장치

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KR20040089244A (ko) 2003-04-11 2004-10-21 주식회사 유림하이테크산업 프로브 카드의 니들 어셈블리
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JP4274566B2 (ja) * 2005-04-25 2009-06-10 エルピーダメモリ株式会社 半導体装置の製造方法
JP2007171140A (ja) * 2005-12-26 2007-07-05 Apex Inc プローブカード、インターポーザおよびインターポーザの製造方法
JP2007171139A (ja) 2005-12-26 2007-07-05 Apex Inc プローブ保持構造およびバネ型プローブ
JP2007303826A (ja) * 2006-05-08 2007-11-22 Tokyo Electron Ltd プローブ
US7902643B2 (en) * 2006-08-31 2011-03-08 Micron Technology, Inc. Microfeature workpieces having interconnects and conductive backplanes, and associated systems and methods
US7666768B2 (en) * 2006-09-29 2010-02-23 Intel Corporation Through-die metal vias with a dispersed phase of graphitic structures of carbon for reduced thermal expansion and increased electrical conductance
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JP5536322B2 (ja) * 2007-10-09 2014-07-02 新光電気工業株式会社 基板の製造方法
JP5276895B2 (ja) * 2008-05-19 2013-08-28 新光電気工業株式会社 プローブカード及びその製造方法
CN101644724B (zh) * 2008-08-04 2012-08-08 旺矽科技股份有限公司 探针测试装置
JP2012093127A (ja) * 2010-10-25 2012-05-17 Advanced Systems Japan Inc バーチカルプローブヘッド
US8541884B2 (en) * 2011-07-06 2013-09-24 Research Triangle Institute Through-substrate via having a strip-shaped through-hole signal conductor
JP5847663B2 (ja) 2012-08-01 2016-01-27 日本電子材料株式会社 プローブカード用ガイド板の製造方法
JP6033130B2 (ja) * 2013-03-13 2016-11-30 新光電気工業株式会社 プローブガイド板及びその製造方法

Also Published As

Publication number Publication date
TWI623752B (zh) 2018-05-11
JP2014181910A (ja) 2014-09-29
US20140266275A1 (en) 2014-09-18
TW201439545A (zh) 2014-10-16
CN104062476A (zh) 2014-09-24
US9459287B2 (en) 2016-10-04
KR102193964B1 (ko) 2020-12-22
JP6235785B2 (ja) 2017-11-22
KR20140114288A (ko) 2014-09-26

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