JP4246132B2 - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
- Publication number
- JP4246132B2 JP4246132B2 JP2004291863A JP2004291863A JP4246132B2 JP 4246132 B2 JP4246132 B2 JP 4246132B2 JP 2004291863 A JP2004291863 A JP 2004291863A JP 2004291863 A JP2004291863 A JP 2004291863A JP 4246132 B2 JP4246132 B2 JP 4246132B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- semiconductor substrate
- hole
- semiconductor device
- electrode pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 246
- 238000004519 manufacturing process Methods 0.000 title claims description 36
- 239000000758 substrate Substances 0.000 claims description 172
- 238000000034 method Methods 0.000 claims description 61
- 238000005530 etching Methods 0.000 claims description 38
- 238000004070 electrodeposition Methods 0.000 claims description 32
- 239000011810 insulating material Substances 0.000 claims description 18
- 229910010272 inorganic material Inorganic materials 0.000 claims description 16
- 239000011147 inorganic material Substances 0.000 claims description 16
- 239000011368 organic material Substances 0.000 claims description 12
- 238000007639 printing Methods 0.000 claims description 12
- 230000003014 reinforcing effect Effects 0.000 claims description 7
- 239000004642 Polyimide Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 229920001721 polyimide Polymers 0.000 claims description 5
- 239000004593 Epoxy Substances 0.000 claims description 4
- 238000001039 wet etching Methods 0.000 claims description 4
- 239000012790 adhesive layer Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 225
- 239000010410 layer Substances 0.000 description 41
- 239000002184 metal Substances 0.000 description 27
- 229910052751 metal Inorganic materials 0.000 description 27
- 230000008569 process Effects 0.000 description 20
- 239000004020 conductor Substances 0.000 description 17
- 238000005229 chemical vapour deposition Methods 0.000 description 15
- 230000001681 protective effect Effects 0.000 description 11
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 238000001312 dry etching Methods 0.000 description 8
- 239000010949 copper Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 238000009713 electroplating Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 238000009413 insulation Methods 0.000 description 4
- 230000035515 penetration Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910003336 CuNi Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 208000037998 chronic venous disease Diseases 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/486—Via connections through the substrate with or without pins
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/023—Redistribution layers [RDL] for bonding areas
- H01L2224/0237—Disposition of the redistribution layers
- H01L2224/02377—Fan-in arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/0502—Disposition
- H01L2224/05023—Disposition the whole internal layer protruding from the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05541—Structure
- H01L2224/05548—Bonding area integrally formed with a redistribution layer on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05647—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06513—Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06541—Conductive via connections through the device, e.g. vertical interconnects, through silicon via [TSV]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/03—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14618—Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14636—Interconnect structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01022—Titanium [Ti]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01075—Rhenium [Re]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/1026—Compound semiconductors
- H01L2924/1032—III-V
- H01L2924/10329—Gallium arsenide [GaAs]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
Description
の製造方法が開示されている。特許文献2では、半導体基板の裏面から半導体基板表面に形成された電極まで達する貫通孔を形成し、この貫通孔内壁および電極裏面にCVDにて酸化膜を形成した後、異方性エッチングによって電極裏面に付着した酸化膜のみをエッチングし、側壁の酸化膜は残すようにしている。その後、孔内部に金属層を形成し、半導体基板の表裏を接続する貫通電極を形成している。
る外部入出力端子107とが導体層106によって導通する。
って形成される。
の金属膜を形成する工程、あるいは貫通孔内部に導体を埋め込む工程を容易にするためには、半導体基板に形成する貫通孔をテーパー形状にする必要がある。しかしながら、上記貫通孔をテーパー形状とする場合、貫通孔内壁に形成された第2の絶縁膜が、よりエッチングによって減少することになってしまう。
形成されている第3の絶縁膜の減少を防ぐことができるため、高い信頼性を確保できる。
することができ、従来技術で問題となっていた、微細な孔内部へのレジスト塗布・現像などのフォト工程は不要となり、コストアップ要因となる複数回のCVDなどの真空プロセスも不要となる。
層構造)の金属配線層が形成されている。この金属配線層上の所定の端子には図示しない半導体素子が接続されており、この半導体素子の信号入出力を行うための電極パッド3が形成されている。図1においては、上記金属配線層において電極パッド3のみを記載している。さらに金属配線層の上には、酸化膜や窒化膜からなる保護膜4が形成されている。尚、半導体基板1としては、Si以外の半導体基板、例えばGaAsなども使用可能である。また、第1の絶縁膜2は無機材料にて形成され、例えば、Si酸化膜等の酸化膜を用いることができる。
図7(a)の状態が得られる。なお、有機絶縁材料6''の埋め込み印刷には、真空印刷法を用いることで、より良好な埋め込みが可能となる。
、図1に示す半導体装置と同様な構成および作用を有する部材については、同一の部材番号を付して説明を行う。
らかじめ研磨しておき、接着剤21を形成したガラス板22に半導体基板1貼り合わせるなどの手法によりこの課題を解決することも可能である。
パターンを形成後にウエットエッチングすることでも導電層を形成することができた。
2 第1の絶縁膜2
3 電極パッド
5 第2の絶縁膜
6 第3の絶縁膜
7 導電部
8 外部入出力端子(外部接続用端子)
21 接着剤(接着層)
22 ガラス板(補強板)
23 部(CCDセンサ)
Claims (12)
- 半導体基板の第1面に無機材料からなる第1の絶縁膜を介して形成された電極パッドを有し、上記電極パッドと上記半導体基板の第2面に存在する外部接続用端子とを接続する貫通電極を有する半導体装置の製造方法において、
第1面に上記第1の絶縁膜と上記電極パッドとが形成された上記半導体基板に対し、その第2面に無機材料からなる第2の絶縁膜を形成し、上記電極パッドの直下にて上記第2の絶縁膜を開口する第1の工程と、
上記第2の絶縁膜をマスクとして、上記半導体基板に第1の絶縁膜に達する貫通孔を、第2の絶縁膜の開口縁よりも該貫通孔を後退させるように形成する第2の工程と、
上記貫通孔の内壁に有機材料からなる第3の絶縁膜を、当該第3の絶縁膜の内周面と上記第2の絶縁膜の開口縁とが、上記半導体基板の第2面側から見て一致するように形成する第3の工程と、
上記第2の絶縁膜をマスクとして、上記第1の絶縁膜をエッチングし、上記電極パッド裏面を上記半導体基板の第2面側に露出させる第4の工程と、
上記貫通孔内で上記貫通電極となると共に、上記電極パッドと上記外部接続用端子とを接続する導電部を形成する第5の工程とを含むことを特徴とする半導体装置の製造方法。 - 上記第2の工程においては、第2の絶縁膜をマスクに半導体基板を異方性エッチングし、さらに、半導体基板を等方性エッチングすることで、上記貫通孔を第2の絶縁膜の開口縁よりも後退させるように形成することを特徴とする請求項1に記載の半導体装置の製造方法。
- 上記第2の工程においては、第2の絶縁膜をマスクに半導体基板をウエットエッチングすることで、上記貫通孔を第2の絶縁膜の開口縁よりも後退させるように形成することを特徴とする請求項1に記載の半導体装置の製造方法。
- 上記第2の絶縁膜は、上記第2の工程における半導体基板のエッチング時に対し、マスク効果のあるエッチング選択比を有することを特徴とする請求項1に記載の半導体装置の製造方法。
- 上記第3の工程においては、半導体基板を陰極とする電着により上記第3の絶縁膜を形成することを特徴とする請求項1に記載の半導体装置の製造方法。
- 上記第3の工程においては、印刷法によって有機絶縁材料を上記貫通孔に埋め込み、さらに、第2の絶縁膜をマスクとして異方性エッチングを行うことによって上記第3の絶縁膜を形成することを特徴とする請求項1に記載の半導体装置の製造方法。
- 上記第3の工程においては、真空印刷法により有機絶縁材料を上記貫通孔に埋め込むことを特徴とする請求項6に記載の半導体装置の製造方法。
- 上記第3の絶縁膜がポリイミドあるいはエポキシであることを特徴とする請求項5または6に記載の半導体装置の製造方法。
- 半導体基板の第1面に無機材料からなる第1の絶縁膜を介して形成された電極パッドを有し、上記電極パッドと上記半導体基板の第2面に存在する外部接続用端子とを接続する貫通電極を有する半導体装置において、
第1面に上記第1の絶縁膜と上記電極パッドとが形成された上記半導体基板に対し、上記電極パッドの直下にて、上記半導体基板に貫通孔が形成されており、上記半導体基板の第2面には無機材料からなる第2の絶縁膜が形成されており、上記貫通孔の内壁には有機材料からなる第3の絶縁膜が形成されていると共に、
上記第2の絶縁膜の開口縁と上記第3の絶縁膜の内周面とは、半導体基板の第2面側から見て一致するように形成されることを特徴とする半導体装置。 - 上記請求項9に記載の半導体装置を複数個積層してなることを特徴とする半導体装置。
- 上記半導体基板の破損を防止するための補強板が、上記半導体基板の第1面側に接着層を介して貼り合わされていることを特徴とする請求項9に記載の半導体装置。
- 上記半導体装置は、上記補強板が光透過性部材であり、上記半導体基板と上記補強板との間にはCCDセンサが配置された固体撮像素子であることを特徴とする請求項11に記載の半導体装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004291863A JP4246132B2 (ja) | 2004-10-04 | 2004-10-04 | 半導体装置およびその製造方法 |
US11/236,806 US7365440B2 (en) | 2004-10-04 | 2005-09-28 | Semiconductor device and fabrication method thereof |
KR1020050091979A KR100651115B1 (ko) | 2004-10-04 | 2005-09-30 | 반도체 장치 및 그 제조 방법 |
TW094134687A TWI297206B (en) | 2004-10-04 | 2005-10-04 | Semiconductor device and fabrication method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004291863A JP4246132B2 (ja) | 2004-10-04 | 2004-10-04 | 半導体装置およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006108328A JP2006108328A (ja) | 2006-04-20 |
JP4246132B2 true JP4246132B2 (ja) | 2009-04-02 |
Family
ID=36124743
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004291863A Active JP4246132B2 (ja) | 2004-10-04 | 2004-10-04 | 半導体装置およびその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7365440B2 (ja) |
JP (1) | JP4246132B2 (ja) |
KR (1) | KR100651115B1 (ja) |
TW (1) | TWI297206B (ja) |
Families Citing this family (61)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8084866B2 (en) | 2003-12-10 | 2011-12-27 | Micron Technology, Inc. | Microelectronic devices and methods for filling vias in microelectronic devices |
US20050247894A1 (en) | 2004-05-05 | 2005-11-10 | Watkins Charles M | Systems and methods for forming apertures in microfeature workpieces |
US7232754B2 (en) | 2004-06-29 | 2007-06-19 | Micron Technology, Inc. | Microelectronic devices and methods for forming interconnects in microelectronic devices |
SG120200A1 (en) | 2004-08-27 | 2006-03-28 | Micron Technology Inc | Slanted vias for electrical circuits on circuit boards and other substrates |
US7300857B2 (en) | 2004-09-02 | 2007-11-27 | Micron Technology, Inc. | Through-wafer interconnects for photoimager and memory wafers |
US8278738B2 (en) * | 2005-02-17 | 2012-10-02 | Sharp Kabushiki Kaisha | Method of producing semiconductor device and semiconductor device |
JP4097660B2 (ja) * | 2005-04-06 | 2008-06-11 | シャープ株式会社 | 半導体装置 |
US7795134B2 (en) | 2005-06-28 | 2010-09-14 | Micron Technology, Inc. | Conductive interconnect structures and formation methods using supercritical fluids |
US7863187B2 (en) | 2005-09-01 | 2011-01-04 | Micron Technology, Inc. | Microfeature workpieces and methods for forming interconnects in microfeature workpieces |
US7262134B2 (en) | 2005-09-01 | 2007-08-28 | Micron Technology, Inc. | Microfeature workpieces and methods for forming interconnects in microfeature workpieces |
TWI311357B (en) * | 2006-01-05 | 2009-06-21 | Advanced Semiconductor Eng | Wafer-level chip packaging process and chip package structure |
US7749899B2 (en) | 2006-06-01 | 2010-07-06 | Micron Technology, Inc. | Microelectronic workpieces and methods and systems for forming interconnects in microelectronic workpieces |
US7629249B2 (en) | 2006-08-28 | 2009-12-08 | Micron Technology, Inc. | Microfeature workpieces having conductive interconnect structures formed by chemically reactive processes, and associated systems and methods |
US7902643B2 (en) | 2006-08-31 | 2011-03-08 | Micron Technology, Inc. | Microfeature workpieces having interconnects and conductive backplanes, and associated systems and methods |
JP2008103387A (ja) * | 2006-10-17 | 2008-05-01 | Murata Mfg Co Ltd | 半導体装置 |
US7791199B2 (en) | 2006-11-22 | 2010-09-07 | Tessera, Inc. | Packaged semiconductor chips |
US8569876B2 (en) * | 2006-11-22 | 2013-10-29 | Tessera, Inc. | Packaged semiconductor chips with array |
JP4403424B2 (ja) * | 2006-11-30 | 2010-01-27 | ソニー株式会社 | 固体撮像装置 |
US7598163B2 (en) * | 2007-02-15 | 2009-10-06 | John Callahan | Post-seed deposition process |
JP5584474B2 (ja) * | 2007-03-05 | 2014-09-03 | インヴェンサス・コーポレイション | 貫通ビアによって前面接点に接続された後面接点を有するチップ |
US7829998B2 (en) | 2007-05-04 | 2010-11-09 | Stats Chippac, Ltd. | Semiconductor wafer having through-hole vias on saw streets with backside redistribution layer |
US8445325B2 (en) | 2007-05-04 | 2013-05-21 | Stats Chippac, Ltd. | Package-in-package using through-hole via die on saw streets |
US7723159B2 (en) * | 2007-05-04 | 2010-05-25 | Stats Chippac, Ltd. | Package-on-package using through-hole via die on saw streets |
EP2477215A3 (en) * | 2007-06-12 | 2013-08-14 | Sumitomo Bakelite Company Limited | Resin composition, embedding material, insulating layer and semiconductor device |
KR101538648B1 (ko) | 2007-07-31 | 2015-07-22 | 인벤사스 코포레이션 | 실리콘 쓰루 비아를 사용하는 반도체 패키지 공정 |
SG150410A1 (en) | 2007-08-31 | 2009-03-30 | Micron Technology Inc | Partitioned through-layer via and associated systems and methods |
JP5311609B2 (ja) * | 2007-10-30 | 2013-10-09 | 新光電気工業株式会社 | シリコンインターポーザの製造方法およびシリコンインターポーザと、これを用いた半導体装置用パッケージおよび半導体装置 |
JP5197219B2 (ja) * | 2007-11-22 | 2013-05-15 | パナソニック株式会社 | 半導体装置およびその製造方法 |
US7884015B2 (en) | 2007-12-06 | 2011-02-08 | Micron Technology, Inc. | Methods for forming interconnects in microelectronic workpieces and microelectronic workpieces formed using such methods |
JP2009283503A (ja) * | 2008-05-19 | 2009-12-03 | Panasonic Corp | 半導体装置及びその製造方法 |
JP2010010324A (ja) * | 2008-06-26 | 2010-01-14 | Toshiba Corp | 半導体装置及び半導体装置の製造方法 |
JP5262350B2 (ja) * | 2008-06-27 | 2013-08-14 | Jsr株式会社 | 絶縁性被膜を有する構造体及びその製造方法並びに電子部品 |
JP2010040862A (ja) * | 2008-08-06 | 2010-02-18 | Fujikura Ltd | 半導体装置 |
WO2010058503A1 (ja) * | 2008-11-21 | 2010-05-27 | パナソニック株式会社 | 半導体装置およびその製造方法 |
JP5596919B2 (ja) * | 2008-11-26 | 2014-09-24 | キヤノン株式会社 | 半導体装置の製造方法 |
JP2010129952A (ja) * | 2008-12-01 | 2010-06-10 | Nippon Telegr & Teleph Corp <Ntt> | 貫通電極配線の製造方法 |
US8759949B2 (en) * | 2009-04-30 | 2014-06-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer backside structures having copper pillars |
KR101026489B1 (ko) * | 2009-08-10 | 2011-04-01 | 주식회사 하이닉스반도체 | 반도체 패키지 및 이의 제조 방법 |
US8716130B2 (en) * | 2010-07-01 | 2014-05-06 | Tokyo Electron Limited | Method of manufacturing semiconductor device |
US8269316B2 (en) * | 2010-07-07 | 2012-09-18 | Victory Gain Group Corporation | Silicon based substrate and manufacturing method thereof |
CN102339810B (zh) * | 2010-07-20 | 2015-07-22 | 因厄费博斯由勒有限责任公司 | 硅基基板及其制作方法 |
US8796135B2 (en) | 2010-07-23 | 2014-08-05 | Tessera, Inc. | Microelectronic elements with rear contacts connected with via first or via middle structures |
US8791575B2 (en) | 2010-07-23 | 2014-07-29 | Tessera, Inc. | Microelectronic elements having metallic pads overlying vias |
US9640437B2 (en) | 2010-07-23 | 2017-05-02 | Tessera, Inc. | Methods of forming semiconductor elements using micro-abrasive particle stream |
US8847380B2 (en) | 2010-09-17 | 2014-09-30 | Tessera, Inc. | Staged via formation from both sides of chip |
US8610259B2 (en) | 2010-09-17 | 2013-12-17 | Tessera, Inc. | Multi-function and shielded 3D interconnects |
US8637968B2 (en) | 2010-12-02 | 2014-01-28 | Tessera, Inc. | Stacked microelectronic assembly having interposer connecting active chips |
US8736066B2 (en) | 2010-12-02 | 2014-05-27 | Tessera, Inc. | Stacked microelectronic assemby with TSVS formed in stages and carrier above chip |
US8587126B2 (en) | 2010-12-02 | 2013-11-19 | Tessera, Inc. | Stacked microelectronic assembly with TSVs formed in stages with plural active chips |
KR101732975B1 (ko) | 2010-12-03 | 2017-05-08 | 삼성전자주식회사 | 반도체 장치의 제조 방법 |
US8610264B2 (en) * | 2010-12-08 | 2013-12-17 | Tessera, Inc. | Compliant interconnects in wafers |
JP5385471B2 (ja) * | 2011-08-10 | 2014-01-08 | 新光電気工業株式会社 | 半導体装置の製造方法 |
JP5357241B2 (ja) * | 2011-08-10 | 2013-12-04 | 新光電気工業株式会社 | 半導体装置及び半導体装置の製造方法 |
KR101594270B1 (ko) * | 2011-10-28 | 2016-02-15 | 인텔 코포레이션 | 듀얼 다마신 유형 접근법을 이용하여 제조된 미세 피치 백사이드 금속 재배선 라인들과 결합된 스루-실리콘 비아들을 포함하는 3d 상호연결 구조체 |
JP6099192B2 (ja) * | 2012-12-13 | 2017-03-22 | 国立研究開発法人産業技術総合研究所 | 積層lsiチップ |
KR102031908B1 (ko) | 2013-02-06 | 2019-10-14 | 삼성전자주식회사 | 관통 전극을 갖는 반도체 소자 및 그 형성 방법 |
JP6235785B2 (ja) * | 2013-03-18 | 2017-11-22 | 日本電子材料株式会社 | プローブカード用ガイド板およびプローブカード用ガイド板の製造方法 |
KR102142366B1 (ko) | 2013-11-14 | 2020-08-07 | 삼성전자 주식회사 | 반도체 집적 회로 소자 및 그 제조 방법, 반도체 패키지 |
TWI645483B (zh) * | 2017-06-30 | 2018-12-21 | 同泰電子科技股份有限公司 | 適於形成包括通孔的基板結構的製作方法 |
CN109634458B (zh) * | 2018-12-04 | 2022-04-15 | 业成科技(成都)有限公司 | 触控面板及其制造方法 |
TWI726375B (zh) * | 2019-08-01 | 2021-05-01 | 睿明科技股份有限公司 | 基板形成通孔的製作方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3186941B2 (ja) | 1995-02-07 | 2001-07-11 | シャープ株式会社 | 半導体チップおよびマルチチップ半導体モジュール |
US6620731B1 (en) * | 1997-12-18 | 2003-09-16 | Micron Technology, Inc. | Method for fabricating semiconductor components and interconnects with contacts on opposing sides |
JP3597754B2 (ja) * | 2000-04-24 | 2004-12-08 | Necエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
TW552694B (en) | 2001-08-31 | 2003-09-11 | Hitachi Chemical Co Ltd | Wiring substrate, semiconductor device and the manufacturing method thereof |
JP2003289073A (ja) * | 2002-01-22 | 2003-10-10 | Canon Inc | 半導体装置および半導体装置の製造方法 |
TW558823B (en) * | 2002-04-10 | 2003-10-21 | Via Tech Inc | Through-hole process of integrated circuit substrate |
JP4212293B2 (ja) | 2002-04-15 | 2009-01-21 | 三洋電機株式会社 | 半導体装置の製造方法 |
TW530344B (en) | 2002-05-10 | 2003-05-01 | Walsin Advanced Electronics | Conductive ball for electrical connection and applications thereof |
TWI229435B (en) * | 2002-06-18 | 2005-03-11 | Sanyo Electric Co | Manufacture of semiconductor device |
TW569416B (en) * | 2002-12-19 | 2004-01-01 | Via Tech Inc | High density multi-chip module structure and manufacturing method thereof |
-
2004
- 2004-10-04 JP JP2004291863A patent/JP4246132B2/ja active Active
-
2005
- 2005-09-28 US US11/236,806 patent/US7365440B2/en active Active
- 2005-09-30 KR KR1020050091979A patent/KR100651115B1/ko active IP Right Grant
- 2005-10-04 TW TW094134687A patent/TWI297206B/zh active
Also Published As
Publication number | Publication date |
---|---|
JP2006108328A (ja) | 2006-04-20 |
KR100651115B1 (ko) | 2006-12-01 |
TWI297206B (en) | 2008-05-21 |
TW200627616A (en) | 2006-08-01 |
US7365440B2 (en) | 2008-04-29 |
KR20060051915A (ko) | 2006-05-19 |
US20060071347A1 (en) | 2006-04-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4246132B2 (ja) | 半導体装置およびその製造方法 | |
JP4139803B2 (ja) | 半導体装置の製造方法 | |
KR100938970B1 (ko) | 반도체 장치 및 그 제조 방법 | |
KR100671921B1 (ko) | 반도체 장치 및 그 제조 방법 | |
US8952544B2 (en) | Semiconductor device and manufacturing method thereof | |
US7180149B2 (en) | Semiconductor package with through-hole | |
KR100621438B1 (ko) | 감광성 폴리머를 이용한 적층 칩 패키지 및 그의 제조 방법 | |
JP4212293B2 (ja) | 半導体装置の製造方法 | |
JP2011009645A (ja) | 半導体装置及びその製造方法 | |
US20080111213A1 (en) | Through-wafer interconnects for photoimager and memory wafers | |
US20050046038A1 (en) | Multi-dice chip scale semiconductor components | |
JP2004327910A (ja) | 半導体装置およびその製造方法 | |
KR20090076832A (ko) | 반도체 장치 및 그 제조 방법 | |
TW200834769A (en) | Semiconductor device and method of manufacturing semiconductor device | |
JP2003007909A (ja) | 半導体装置の製造方法とそれによる半導体装置およびこれを用いた電子機器 | |
JP3735547B2 (ja) | 半導体装置及びその製造方法 | |
JP4334397B2 (ja) | 半導体装置及びその製造方法 | |
JP4425235B2 (ja) | 半導体装置及びその製造方法 | |
JP4215571B2 (ja) | 半導体装置の製造方法 | |
JP4764710B2 (ja) | 半導体装置とその製造方法 | |
CN212625563U (zh) | 半导体器件 | |
JP3877700B2 (ja) | 半導体装置及びその製造方法 | |
JP4401330B2 (ja) | 半導体装置及びその製造方法 | |
JP2004273561A (ja) | 半導体装置及びその製造方法 | |
JP4443549B2 (ja) | 半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080821 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080826 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20081007 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20081028 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20081125 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090106 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090107 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4246132 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120116 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130116 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130116 Year of fee payment: 4 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |