CN103222180B - 振动型执行器的控制设备 - Google Patents
振动型执行器的控制设备 Download PDFInfo
- Publication number
- CN103222180B CN103222180B CN201180055873.7A CN201180055873A CN103222180B CN 103222180 B CN103222180 B CN 103222180B CN 201180055873 A CN201180055873 A CN 201180055873A CN 103222180 B CN103222180 B CN 103222180B
- Authority
- CN
- China
- Prior art keywords
- frequency
- signal
- protrusions
- vibration
- type actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
- H02N2/142—Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/0075—Electrical details, e.g. drive or control circuits or methods
- H02N2/008—Means for controlling vibration frequency or phase, e.g. for resonance tracking
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010264218A JP5679781B2 (ja) | 2010-11-26 | 2010-11-26 | 振動型アクチュエータの制御装置 |
| JP2010-264218 | 2010-11-26 | ||
| PCT/JP2011/075243 WO2012070365A1 (en) | 2010-11-26 | 2011-10-26 | Control apparatus of vibration-type actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103222180A CN103222180A (zh) | 2013-07-24 |
| CN103222180B true CN103222180B (zh) | 2016-04-06 |
Family
ID=45048166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180055873.7A Expired - Fee Related CN103222180B (zh) | 2010-11-26 | 2011-10-26 | 振动型执行器的控制设备 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US20130249445A1 (enExample) |
| JP (1) | JP5679781B2 (enExample) |
| CN (1) | CN103222180B (enExample) |
| WO (1) | WO2012070365A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5606282B2 (ja) * | 2010-04-09 | 2014-10-15 | キヤノン株式会社 | 振動型アクチュエータの制御回路 |
| KR101459487B1 (ko) * | 2013-12-17 | 2014-11-07 | 현대자동차 주식회사 | 차량용 디스플레이 장치 |
| US9455395B2 (en) * | 2014-01-10 | 2016-09-27 | Ecomotors, Inc. | Piezoelectric actuator control for high rate of operation |
| DE102015209665B4 (de) | 2014-06-25 | 2022-10-20 | Vitesco Technologies GmbH | Verfahren zur Identifizierung von Ventilsteuerzeiten eines Verbrennungsmotors |
| EP3234524A4 (en) * | 2014-12-18 | 2018-08-15 | Sikorsky Aircraft Corporation | Virtual tachometers based on time series filtering |
| JP6478680B2 (ja) | 2015-02-12 | 2019-03-06 | キヤノン株式会社 | 制御装置、レンズ装置、および撮像装置 |
| US10419653B2 (en) * | 2015-06-19 | 2019-09-17 | Canon Kabushiki Kaisha | Vibration drive device capable of generating click feeling and image pickup apparatus |
| JP6746314B2 (ja) * | 2016-01-05 | 2020-08-26 | キヤノン株式会社 | 制御装置、これを備えた装置およびプログラム |
| JP6697313B2 (ja) * | 2016-04-08 | 2020-05-20 | オークマ株式会社 | 送り軸制御装置における周波数特性測定方法 |
| JP6995495B2 (ja) * | 2017-05-11 | 2022-01-14 | キヤノン株式会社 | 振動型アクチュエータの制御装置、駆動装置、撮像装置及び振動型アクチュエータの制御方法 |
| EP3638989B1 (en) * | 2017-06-14 | 2023-03-01 | Micro Motion, Inc. | A notch filter in a vibratory flow meter |
| US20190301300A1 (en) * | 2018-03-28 | 2019-10-03 | Pratt & Whitney Canada Corp. | Systems and methods for engine vibration monitoring |
| JP2021043294A (ja) * | 2019-09-10 | 2021-03-18 | キヤノン株式会社 | レンズ装置および撮像装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5438229A (en) * | 1993-02-08 | 1995-08-01 | Matsushita Electric Industrial Co., Ltd. | Ultrasonic motor and ultrasonic motor control method |
| US5872416A (en) * | 1994-09-16 | 1999-02-16 | Crouzet Automatismes | Surface acoustic wave machine |
| EP0966049A1 (fr) * | 1998-06-18 | 1999-12-22 | Eaton | Moteur piézo-électrique avec capteur de position intégré |
| CN1892187A (zh) * | 2005-06-29 | 2007-01-10 | 精工爱普生株式会社 | 压电致动器的驱动量检测装置及电子设备 |
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| US4273399A (en) | 1979-11-05 | 1981-06-16 | Amp Incorporated | Transducer supporting and contacting means |
| JPS5933415A (ja) * | 1982-08-18 | 1984-02-23 | Nippon Sheet Glass Co Ltd | レンズ及びその製造方法 |
| JPS59132755A (ja) | 1983-01-18 | 1984-07-30 | Mitsubishi Electric Corp | 固定子巻線端部支持装置 |
| US4623030A (en) * | 1985-10-21 | 1986-11-18 | Alcor, Inc. | Piezoelectric ratio weighing device |
| US4794294A (en) * | 1986-06-12 | 1988-12-27 | Canon Kabushiki Kaisha | Vibration wave motor |
| US4816727A (en) * | 1987-09-30 | 1989-03-28 | University Of Lowell | Vibratory interference sensor |
| DE68919100T2 (de) | 1988-03-17 | 1995-03-09 | Tdk Corp | Piezoelektrischer Summer und Verfahren zu dessen Herstellung. |
| JPH03145976A (ja) * | 1989-10-30 | 1991-06-21 | Nikon Corp | 超音波モータの駆動装置 |
| US5461273A (en) * | 1992-12-16 | 1995-10-24 | Matsushita Electric Industrial Co., Ltd. | Method and an apparatus for controlling a moving velocity of an ultrasonic motor |
| JP3060081B2 (ja) | 1993-01-27 | 2000-07-04 | セイコーインスツルメンツ株式会社 | 超音波モータ |
| JP3358267B2 (ja) * | 1993-02-08 | 2002-12-16 | 松下電器産業株式会社 | 超音波モータおよび超音波モータの制御法 |
| JP2957836B2 (ja) | 1993-03-31 | 1999-10-06 | アルプス電気株式会社 | 超音波モータおよび直動案内装置 |
| JPH0739179A (ja) | 1993-07-23 | 1995-02-07 | Canon Inc | 振動波モータおよびこれを用いたプリンタ |
| FR2708790B1 (fr) * | 1993-07-30 | 1995-10-27 | Crouzet Automatismes | Moteur à ondes acoustiques de surface. |
| US5883705A (en) * | 1994-04-12 | 1999-03-16 | The Board Of Trustees Of The Leland Stanford, Jr. University | Atomic force microscope for high speed imaging including integral actuator and sensor |
| JP2000023475A (ja) | 1998-07-07 | 2000-01-21 | Nikon Corp | 振動アクチュエータ装置 |
| US6205872B1 (en) * | 1998-12-29 | 2001-03-27 | Montronix, Inc. | Broadband vibration sensor apparatus |
| JP2002071840A (ja) | 2000-08-29 | 2002-03-12 | Seiko Instruments Inc | 電子機器 |
| US6940252B2 (en) * | 2001-01-31 | 2005-09-06 | Canon Kabushiki Kaisha | DC motor control method and apparatus |
| JP2003033057A (ja) * | 2001-07-12 | 2003-01-31 | Canon Inc | 振動型アクチュエータの位置検知装置 |
| GB0117904D0 (en) | 2001-07-23 | 2001-09-12 | Lucas Industries Ltd | Motor control system |
| JP4109891B2 (ja) * | 2002-04-19 | 2008-07-02 | キヤノン株式会社 | 能動制振装置、露光装置及びデバイス製造方法 |
| JP4190936B2 (ja) * | 2002-09-17 | 2008-12-03 | エスアイアイ・ナノテクノロジー株式会社 | 走査型プローブ顕微鏡およびその操作法 |
| WO2005011294A1 (ja) * | 2003-07-28 | 2005-02-03 | Nec Corporation | 視聴調査システム |
| JP4314088B2 (ja) | 2003-09-25 | 2009-08-12 | キヤノン株式会社 | 振動型アクチュエータの制御装置および制御方法、振動型アクチュエータを駆動源とする装置 |
| JP4497891B2 (ja) * | 2003-10-31 | 2010-07-07 | キヤノン株式会社 | 記録装置と搬送制御装置 |
| US7345772B2 (en) * | 2004-08-06 | 2008-03-18 | Voith Paper Patent Gmbh | Optical triangulation device and method of measuring a variable of a web using the device |
| JP4395052B2 (ja) | 2004-11-10 | 2010-01-06 | 太陽誘電株式会社 | 駆動装置 |
| JP4586754B2 (ja) | 2005-06-29 | 2010-11-24 | セイコーエプソン株式会社 | 圧電アクチュエータの駆動量検出装置および電子機器 |
| JP2007221865A (ja) | 2006-02-14 | 2007-08-30 | Seiko Epson Corp | 圧電振動体、圧電振動体の固有振動数調整方法、圧電アクチュエータ、および電子機器 |
| US7922385B2 (en) | 2007-03-01 | 2011-04-12 | Seiko Epson Corporation | Piezoelectric drive device and electronic device |
| US7571648B2 (en) * | 2007-05-23 | 2009-08-11 | Seiko Epson Corporation | Piezoelectric vibration angular velocity sensor |
| JP2009136067A (ja) * | 2007-11-29 | 2009-06-18 | Canon Inc | 振動波アクチュエータ駆動装置、及びその制御方法 |
| JP5590795B2 (ja) | 2008-12-27 | 2014-09-17 | キヤノン株式会社 | 振動波駆動装置 |
| US7969065B2 (en) | 2008-09-09 | 2011-06-28 | Canon Kabushiki Kaisha | Vibration wave driving device |
| JP4805329B2 (ja) | 2008-11-07 | 2011-11-02 | ファナック株式会社 | 産業機械の消費電力を計算する制御装置 |
| JP5201084B2 (ja) | 2009-05-18 | 2013-06-05 | 俊夫 清水 | 指輪の製造方法 |
| JP5709413B2 (ja) | 2010-06-21 | 2015-04-30 | キヤノン株式会社 | 振動型駆動装置 |
| JP2012178947A (ja) | 2011-02-28 | 2012-09-13 | Ngk Insulators Ltd | 圧電アクチュエータ及び圧電アクチュエータアレイ |
| JP5765993B2 (ja) | 2011-03-31 | 2015-08-19 | キヤノン株式会社 | 振動型駆動装置 |
| US9327839B2 (en) | 2011-08-05 | 2016-05-03 | General Atomics | Method and apparatus for inhibiting formation of and/or removing ice from aircraft components |
| JP5818707B2 (ja) | 2012-01-31 | 2015-11-18 | キヤノン株式会社 | 振動波駆動装置、二次元駆動装置及び画像振れ補正装置 |
| JP2014003731A (ja) | 2012-06-15 | 2014-01-09 | Canon Inc | 振動型アクチュエータの駆動装置及びこれを用いた医用システム |
-
2010
- 2010-11-26 JP JP2010264218A patent/JP5679781B2/ja active Active
-
2011
- 2011-10-26 US US13/989,144 patent/US20130249445A1/en not_active Abandoned
- 2011-10-26 WO PCT/JP2011/075243 patent/WO2012070365A1/en not_active Ceased
- 2011-10-26 CN CN201180055873.7A patent/CN103222180B/zh not_active Expired - Fee Related
-
2016
- 2016-02-17 US US15/046,313 patent/US9800180B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5438229A (en) * | 1993-02-08 | 1995-08-01 | Matsushita Electric Industrial Co., Ltd. | Ultrasonic motor and ultrasonic motor control method |
| US5872416A (en) * | 1994-09-16 | 1999-02-16 | Crouzet Automatismes | Surface acoustic wave machine |
| EP0966049A1 (fr) * | 1998-06-18 | 1999-12-22 | Eaton | Moteur piézo-électrique avec capteur de position intégré |
| CN1892187A (zh) * | 2005-06-29 | 2007-01-10 | 精工爱普生株式会社 | 压电致动器的驱动量检测装置及电子设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103222180A (zh) | 2013-07-24 |
| JP5679781B2 (ja) | 2015-03-04 |
| US20160173005A1 (en) | 2016-06-16 |
| JP2012115102A (ja) | 2012-06-14 |
| US9800180B2 (en) | 2017-10-24 |
| US20130249445A1 (en) | 2013-09-26 |
| WO2012070365A1 (en) | 2012-05-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160406 Termination date: 20211026 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |