CN102745453B - 板状体搬运装置 - Google Patents

板状体搬运装置 Download PDF

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Publication number
CN102745453B
CN102745453B CN201110437325.2A CN201110437325A CN102745453B CN 102745453 B CN102745453 B CN 102745453B CN 201110437325 A CN201110437325 A CN 201110437325A CN 102745453 B CN102745453 B CN 102745453B
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CN
China
Prior art keywords
container part
air supply
supply source
air
guide plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201110437325.2A
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English (en)
Chinese (zh)
Other versions
CN102745453A (zh
Inventor
中尾多通夫
饭塚雪夫
辻起久
斎田克彦
池田大介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Publication of CN102745453A publication Critical patent/CN102745453A/zh
Application granted granted Critical
Publication of CN102745453B publication Critical patent/CN102745453B/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning In General (AREA)
CN201110437325.2A 2010-12-06 2011-12-05 板状体搬运装置 Active CN102745453B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010271828A JP5495065B2 (ja) 2010-12-06 2010-12-06 板状体搬送装置
JP2010-271828 2010-12-06

Publications (2)

Publication Number Publication Date
CN102745453A CN102745453A (zh) 2012-10-24
CN102745453B true CN102745453B (zh) 2016-03-02

Family

ID=46503537

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110437325.2A Active CN102745453B (zh) 2010-12-06 2011-12-05 板状体搬运装置

Country Status (4)

Country Link
JP (1) JP5495065B2 (ko)
KR (1) KR101552534B1 (ko)
CN (1) CN102745453B (ko)
TW (1) TWI510422B (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6288554B2 (ja) * 2014-03-11 2018-03-07 オイレス工業株式会社 非接触式浮上搬送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050045455A (ko) * 2003-11-11 2005-05-17 삼성전자주식회사 기판이송장치
KR20050082371A (ko) * 2004-02-18 2005-08-23 한국과학기술원 공압 컨베이어
JP4258713B2 (ja) * 2003-07-08 2009-04-30 株式会社ダイフク 板状体搬送装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0745684A (ja) * 1993-07-27 1995-02-14 Kokusai Electric Co Ltd 半導体製造装置の処理室
JP3643725B2 (ja) * 1999-05-06 2005-04-27 三菱重工業株式会社 枚葉印刷機のシートガイド
JP2007088398A (ja) * 2004-12-14 2007-04-05 Realize Advanced Technology Ltd 洗浄装置、この洗浄装置を用いた洗浄システム、及び被洗浄基板の洗浄方法
JP4896148B2 (ja) * 2006-10-10 2012-03-14 株式会社日本設計工業 薄板状材料搬送装置
JP4392692B2 (ja) * 2006-12-01 2010-01-06 日本エアーテック株式会社 半導体ウエハー及び液晶ガラスエアー浮上搬送装置
JP2009012877A (ja) * 2007-06-29 2009-01-22 Ihi Corp 浮上搬送装置
JP5429523B2 (ja) * 2008-09-12 2014-02-26 株式会社ダイフク 基板用収納容器
JP2010126295A (ja) * 2008-11-27 2010-06-10 Nippon Sekkei Kogyo:Kk 薄板状材料の搬送方法及び装置
JP5446403B2 (ja) * 2009-04-07 2014-03-19 株式会社Ｉｈｉ 搬送方向転換装置及び浮上搬送システム
JP2010195592A (ja) * 2010-03-18 2010-09-09 Olympus Corp 浮上ユニット及び基板検査装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4258713B2 (ja) * 2003-07-08 2009-04-30 株式会社ダイフク 板状体搬送装置
KR20050045455A (ko) * 2003-11-11 2005-05-17 삼성전자주식회사 기판이송장치
KR20050082371A (ko) * 2004-02-18 2005-08-23 한국과학기술원 공압 컨베이어

Also Published As

Publication number Publication date
CN102745453A (zh) 2012-10-24
JP5495065B2 (ja) 2014-05-21
KR101552534B1 (ko) 2015-09-11
KR20120062618A (ko) 2012-06-14
TWI510422B (zh) 2015-12-01
TW201228912A (en) 2012-07-16
JP2012121641A (ja) 2012-06-28

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