CN102745453B - Plate-like body conveyance device - Google Patents
Plate-like body conveyance device Download PDFInfo
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- CN102745453B CN102745453B CN201110437325.2A CN201110437325A CN102745453B CN 102745453 B CN102745453 B CN 102745453B CN 201110437325 A CN201110437325 A CN 201110437325A CN 102745453 B CN102745453 B CN 102745453B
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- Prior art keywords
- container part
- air supply
- supply source
- air
- guide plate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning In General (AREA)
Abstract
A kind of plate-like body conveyance device, there is the lower surface air supply to tabular body (1), with the blast type support unit (2) of the accommodating plate-shaped body of contactless state (1), this blast type support unit (2) comprises the air supply source (11) of air supply, there is the container part (14) of the ejiction opening (13) spraying air upward, make the guide channel portion (15) that air supply source (11) is communicated with container part (14), and the guide plate portion (16) that configure adjacent with container part (14), air supply source (11) is disposed in the position of staggering in the horizontal direction relative to container part (14), thus it is not overlapping with the ejiction opening (13) of container part (14) when overlooking.Plate-like body conveyance device of the present invention easily implements foreign matter removing operation.
Description
Technical field
The present invention relates to plate-like body conveyance device, this Handling device has: to tabular body lower surface air supply thus apply the propulsive force applying unit of propulsive force on carrying direction with the blast type support unit of the accommodating plate-shaped body of contactless state and to tabular body, described blast type support unit is located at the position of the width size being positioned at tabular body transport path.
Background technology
Above-mentioned plate-like body conveyance device is with the lower surface air supply of blast type support unit to tabular body, thus with the accommodating plate-shaped body of contactless state, and apply to carry the propulsive force on direction to this tabular body by propulsive force applying unit, thus along carrying direction carrying tabular body.And blast type support unit is located at the position of the width size being positioned at tabular body transport path, thus makes plate-like body conveyance device comparatively compact on width direction.
In addition, on this plate-like body conveyance device, past is the fan filter unit being provided as blast type support unit, and above fan filter unit with fan filter unit in the overlapping state setting unit (see patent documentation 1) of above-below direction.
Patent documentation 1: Japanese invention open patent 2005-029359 publication
When adopting above-mentioned traditional plate-like body conveyance device, once the tabular body carried is damaged, the fragment of the tabular body of this breakage will be fallen in container part as foreign matter, and foreign matter can invade in vessel space from the ejiction opening of container part sometimes.And the foreign matter invaded in vessel space can continue fall and invade blast type support unit.Once there be foreign matter to invade blast type support unit, blast type support unit will be taken off remove to remove this foreign matter, and the operation of removing foreign matter bothers very much.Especially when forming blast type support unit with fan filter unit, because foreign matter can invade in the dust removal filter of fan filter unit, therefore must take off blast type support unit to remove fragment and change dust removal filter etc., the operation of removing foreign matter is bothered very much.
Summary of the invention
In view of the foregoing, object is to provide a kind of plate-like body conveyance device easily carrying out foreign bodies removal operation in the present invention.
Plate-like body conveyance device of the present invention has: blast type support unit, and this blast type support unit is located at the position of the width size being positioned at tabular body transport path, and to the lower surface air supply of tabular body, thus with the accommodating plate-shaped body of contactless state; And propulsive force applying unit, this propulsive force applying unit applies the propulsive force on carrying direction to tabular body.Described blast type support unit has: the air supply source of air supply; Container part, this container part is formed for the container cavity be pressed into from the air of described air supply source and has the ejiction opening spraying air from this container cavity upward; Guide channel portion, this guide channel portion makes described air-source be communicated with described container part with the state air from described air supply source supply being directed to described container cavity; Guide plate portion, this guide plate portion and described container part adjoin and configure, to guide the lower surface of the air sprayed from described ejiction opening to the lower surface of tabular body along tabular body, described air supply source is located at the position of staggering in the horizontal direction relative to described container part, thus the described ejiction opening overlooking container part described in Shi Buyu is overlapping.
That is, be pressed in the container cavity of container part from the air of air supply source supply along the flowing of guide channel portion, and this air spray upward from the ejiction opening of container part.Further, the air sprayed upward from ejiction opening supplies to the lower surface of tabular body, and the air supplied to the lower surface of tabular body flows along the upper surface in guide plate portion and the lower surface of tabular body in the space between guide plate portion and tabular body.
Namely, at the position being provided with container part, the air sprayed upward from container part can be utilized with the lower surface of the accommodating plate-shaped body of contactless state, and be provided with the position in guide plate portion, the air layer formed in this guide plate portion then can be utilized with the lower surface of the accommodating plate-shaped body of contactless state, therefore not only at the position being provided with container part, being just connected in the position being provided with guide plate portion around container part also can with the accommodating plate-shaped body of contactless state.
In addition, air from air supply source is pressed in the container cavity of container part along the flowing of guide channel portion, even if therefore produce pulsation (pulsation) in the air of air supply source supply, also the positice ground effect (cushioning) by container cavity absorbs this pulsation, therefore, it is possible to alleviate the pulsation of the air from ejiction opening ejection.
Further, air supply source is located at the position of staggering in the horizontal direction relative to described container part, thus not overlapping with the ejiction opening of container part when overlooking.Thus even if there are the foreign matters such as the fragment of damaged tabular body to invade in container cavity from ejiction opening, this foreign matter also directly can not fall air supply source, and therefore foreign matter is difficult to invading air supply source.That is, the foreign body retention of intrusion can be made in container part, as long as therefore remove the foreign matter in container cavity, the operation of removing foreign matter easily be carried out.Thus, the plate-like body conveyance device easily carrying out foreign bodies removal operation can be realized.
In the embodiment of plate-like body conveyance device of the present invention, best described container part is arranged to the form extended along described carrying direction, described guide plate portion is configured in the both sides, width direction intersected with described carrying direction and the adjacent state of described container part, and is located at by described air supply source on the position of staggering on described width direction relative to described container part.
Namely, spray air upward from the ejiction opening of the container part arranged along carrying direction and the lower surface of air to tabular body is supplied, and flow along width direction along the lower surface of the upper surface in guide plate portion and tabular body in the space of the air supplied to the lower surface of this tabular body between guide plate portion and the tabular body of the side of being located thereon, wherein guide plate portion and container part are adjacent in both sides, width direction.
Thus, blast type support unit can be made even to the bearing force of tabular body on carrying direction, reduce the flexure (deflection) along tabular body during the carrying tabular body of carrying direction.
More specifically, at the position being provided with container part, it is the lower surface utilizing the air sprayed upward from container part to carry out accommodating plate-shaped body, and be provided with the position in guide plate portion, it is then the lower surface utilizing the air layer formed in this guide plate portion to carry out accommodating plate-shaped body, therefore be provided with the position of container part and be provided with the position in guide plate portion, the bearing force supported the lower surface of tabular body is different.
Once container part different for this bearing force and edge, guide plate portion are carried direction and row arrangement, position difference on carrying direction will cause support unit different to the bearing force of tabular body, therefore when along during the carrying tabular body of carrying direction, teetertottering of tabular body easily occurring.
To this, by by container part and guide plate portion along width direction and row arrangement, blast type support unit can being made even to the bearing force of tabular body on carrying direction, therefore not easily there is teetertottering of tabular body along during the carrying tabular body of carrying direction, the flexure of tabular body can be reduced.
In the embodiment of plate-like body conveyance device of the present invention, described blast type support unit is arranged side by side a pair along the width direction intersected with described carrying direction, and between described a pair blast type support unit, form the exhaust pathway of being discharged to the space below described guide plate portion by the air in described guide plate portion.
Namely, by forming the exhaust pathway of being discharged to the space below guide plate portion by the air in guide plate portion between a pair blast type support unit be arranged side by side along width direction, and discharge air from this exhaust pathway, make air not easily be trapped in the below of the pars intermedia of tabular body.Thus, because air is not easily trapped in the below of pars intermedia, the tabular body be handled upside down can the protuberance of pars intermedia be suppressed, close to the state of flat-hand position under be handled upside down, can alleviate to tabular body apply load.
In the embodiment of plate-like body conveyance device of the present invention, as described propulsive force applying unit, preferably there is a pair following propulsive force applying unit: support is contacted to the end, described width direction one on tabular body, thus tabular body is applied to the end side propulsive force applying unit of the propulsive force on carrying direction, and support is contacted to the other end, described width direction on tabular body, thus tabular body is applied to the other end side propulsive force applying unit of the propulsive force on carrying direction, the guide plate portion be arranged on described a pair blast type support unit is configured to separately: less than the guide plate portion, outside away from described exhaust pathway on described width direction close to the width of the guide plate portion, inner side of described exhaust pathway on described width direction on described width direction.
Namely, end side propulsive force applying unit is utilized to be contacted support to the end of tabular body on width direction, and utilize other end side propulsive force applying unit to be contacted support to tabular body the other end on width direction, thus by a pair propulsive force applying unit, support is contacted to the both ends of tabular body on width direction.Thus, to be supported by contacting the both ends of tabular body on width direction by a pair propulsive force applying unit and with the accommodating plate-shaped body of stable state, and apply propulsive force to the both ends of the tabular body supported, therefore, it is possible to stable state along carrying direction carrying tabular body.
And, because the guide plate portion be arranged on a pair blast type support unit is configured to separately: the width of guide plate portion, inner side on width direction is less than guide plate portion, outside, therefore container part is finally the state configuration of being partial to exhaust pathway side, the air sprayed can be supplied to the lower surface near the width direction central authorities of tabular body from container part.Thus, by with a pair blast type support unit by air to the lower surface supply near the central authorities of tabular body on width direction, a pair propulsive force applying unit is inhibit to reduce the contact of tabular body, can with the pars intermedia of the accommodating plate-shaped body of the mode suppressing tabular body to relax on width direction, thus tabular body can be handled upside down under the state obtaining stable support, can realize the carrying of tabular body smoothly.
In the embodiment of plate-like body conveyance device of the present invention, best described container part in its lower section portion or side surface part forms maintenance opening, and is provided with the cover part of this maintenance opening of freely openable.
Namely, owing to defining maintenance opening in container part, and be provided with the cover part of this maintenance opening of freely openable, therefore maintenance opening can be closed with cover part at ordinary times, and when upkeep operation will be carried out uncap parts, and carry out upkeep operation from maintenance opening in container cavity.
Thus when there being foreign matter to invade container part, uncap parts just can remove foreign matter from maintenance opening, easily carry out foreign bodies removal operation.
In the embodiment of plate-like body conveyance device of the present invention, best described air supply source has air fed supply range upward, one end in described guide channel portion is connected with the supply range of described air supply source, the other end is connected with the side surface part of described container part, and the passage width of above-below direction is broadening along with extending to described container part side.
That is, the air supplied upward from air supply source can be directed to container part side by guide channel portion and be pressed in the container cavity of container part.And, interflow occurs air due to air supply source supply a certain from container part side can make the amount of air guided by guide channel portion increase, but because guide channel portion is broadening along with extending to container part side at the passage width of above-below direction, utilizing the guide channel portion broadening gradually along with extending to container part side to guide the air along with increasing gradually to the flowing of container part side, air just can be made successfully to flow to container part.
In the embodiment of plate-like body conveyance device of the present invention, best described air supply source is formed by electrodynamic type blowing fan and dust removal filter are assembled all-in-one-piece fan filter unit.
That is, as the setting of air supply source, as long as arrange, electrodynamic type blowing fan and dust removal filter are assembled all-in-one-piece fan filter unit, the setting of blast type support unit is very simple, thus is convenient to manufacture plate-like body conveyance device.
In the embodiment of plate-like body conveyance device of the present invention, best described air supply source is located at the position of staggering in the below of above-below direction with described container part, thus to make cross side apparent time not overlapping with described container part.
In addition, in the embodiment of plate-like body conveyance device of the present invention, preferably be provided with convex strip portions in the outboard end in described guide plate portion, described convex strip portions protrudes upward from the upper surface in described guide plate portion, it highly arrives the below of the lower surface of the tabular body carried, and described convex strip portions linearly extends continuously along carrying direction.
Accompanying drawing explanation
Fig. 1 is the block diagram of plate-like body conveyance device.
Fig. 2 is the vertical profile front view of plate-like body conveyance device.
Fig. 3 is the vertical profile front view of blast type support unit.
Fig. 4 is the vertical profile front view of container part.
Fig. 5 is the vertical profile front view of the blast type support unit of other embodiment.
Detailed description of the invention
Below in conjunction with accompanying drawing, plate-like body conveyance device of the present invention is described, this Handling device, for carrying the tabular body as rectangular substrate, is the glass substrate for carrying flat-panel monitor (flat-paneldisplay) specifically.
As shown in Figure 1, plate-like body conveyance device H has: towards glass substrate 1 lower surface supplying clean air thus with the blast type support unit 2 of contactless state support glass substrate 1 and contacted the lower surface of glass substrate 1 and support and apply the propulsive force applying unit 3 of propulsive force on carrying direction to glass substrate 1.In addition, plate-like body conveyance device H is provided with along carrying direction the tabular body handling unit U that multiple stage has blast type support unit 2 and propulsive force applying unit 3.
Propulsive force applying unit 3 is provided with multiple spinning rollers 6 along carrying direction, the width direction end orthogonal with carrying direction on this spinning rollers 6 pairs of glass substrate 1 lower surfaces is contacted to be supported, and drive each spinning rollers 6 to rotate with the electro-motor 7 corresponding with each spinning rollers 6, to apply the propulsive force on carrying direction to glass substrate 1.Also the structure rotated to drive multiple spinning rollers through gear mechanism with an electro-motor can be adopted.
In addition, as propulsive force applying unit 3, be provided with a pair propulsive force applying unit 3, namely, support is contacted to the end, width direction one on glass substrate 1 lower surface, to apply the end side propulsive force applying unit 3 of propulsive force on carrying direction to glass substrate 1, and supports contact, to carry the other end side propulsive force applying unit 3 of the propulsive force on direction to glass substrate 1 applying to the other end, width direction on glass substrate 1 lower surface.From below support is contacted to the both ends, width direction on glass substrate 1 lower surface by this pair propulsive force applying unit 3, and the propulsive force on carrying direction is applied to these both ends.
As shown in Figures 2 and 3, when overlooking, blast type support unit 2 is located between a pair propulsive force applying unit 3.Further, blast type support unit 2 is arranged on the position that entirety is positioned at the width size of glass substrate 1 transport path, to the width direction pars intermedia supplying clean air of glass substrate 1 lower surface, thus with contactless state support glass substrate 1.
Namely, as shown in Figures 2 and 3, the both ends, width direction of plate-like body conveyance device H propulsive force applying unit 3 pairs of glass substrates 1 are contacted support, and give non-contact support with the width direction central portion of blast type support unit 2 pairs of glass substrates 1, the propulsive force on carrying direction is applied in this case, thus along carrying direction moving glass substrate 1 with the both ends, width direction of propulsive force applying unit 3 pairs of glass substrates 1.
[blast type support unit]
Below blast type support unit 2 is described.
As shown in Figure 3, blast type support unit 2 has the air supply source 11 of air supply, container part 14, guide channel portion 15 and guide plate portion 16.Container part 14 forms the container cavity 12 be pressed into for the air from air supply source 11, and has the ejiction opening 13 spraying air from this container cavity 12 upward.The air supplied by air supply source 11 is directed to container part 14 by guide channel portion 15.Flow from ejiction opening 13 to the air of the lower surface of glass substrate 1 ejection along the lower surface of glass substrate 1 to guide, guide plate portion 16 is arranged to the state adjacent with container part 14.Herein, so-called " press-in ", the pressure referring to make to import the air in container cavity 12 from air-source 11 imports higher than the mode of the pressure of container part 14 outside.This pressure can make air spray from ejiction opening 13.
The air supplied from air supply source 11 is directed to the container part 14 arranged along carrying direction by blast type support unit 2 by guide channel portion 15, and is sprayed upward from ejiction opening 13 by the air of pulsation suppressed in container part 14.
Under the state giving non-contact support with blast type support unit 2 pairs of glass substrates 1, the air sprayed upward from ejiction opening 13 just supplies to the lower surface of glass substrate 1, and flows along the upper surface in guide plate portion 16 and the lower surface of glass substrate 1 in width direction in the space of the air of this lower surface to glass substrate 1 supply between guide plate portion 16 and glass substrate 1.
Between guide plate portion 16 and glass substrate 1, air layer is formed by making air flow like this, not only can with contactless state support glass substrate 1 at the position of the container part 14 being provided with the lower surface ejection air to glass substrate 1, also can with contactless state support glass substrate 1 at the position being provided with guide plate portion 16 of its horizontal side.
Blast type support unit 2 be in width direction the mutual empty standard width of a room in an old-style house every arranging a pair, and between a pair blast type support unit 2, form the exhaust pathway 17 (be sometimes referred to as the exhaust pathway 17a of central portion, be equivalent to exhaust pathway of the present invention) of being discharged to the space below guide plate portion 16 by the air in guide plate portion 16.In addition, a pair blast type support unit 2 separately with relative to propulsive force applying unit 3 the mutual empty standard width of a room in an old-style house every state arrange, between blast type support unit 2 and propulsive force applying unit 3, also form the exhaust pathway 17 (being sometimes referred to as the exhaust pathway 17b of end) of being discharged to the space below guide plate portion 16 by the air in guide plate portion 16.
By the way, blast type support unit 2 with continuous print state along the arrangement of carrying direction, and in the container part 14 that adjoins of carrying direction to each other and very close to each other to each other in the guide plate portion 16 that carrying direction is adjacent.
The each several part of blast type support unit 2 is below described, but a pair blast type support unit 2 forms symmetrically relative to the imaginary line extended along carrying direction on the middle position of Width, their structure is identical, therefore following only explanation is positioned at the blast type support unit 2 of side, width direction, and omits the explanation to the blast type support unit 2 being positioned at opposite side.In addition, when each several part of blast type support unit 2 is described, sometimes the side of the exhaust pathway 17a defining width direction central portion is called inner side, and the side of the exhaust pathway 17b defining end, width direction is called outside.
[air supply source]
Air supply source 11 is configured to fan filter unit, forms by electrodynamic type blowing fan 9 and dust removal filter 10 being assembled into one, and blowing fan 9 rotates around vertical axis, and dust removal filter 10 is arranged to cover the state above this blowing fan 9.Such configuration air supply source 11, just by driving blowing fan 9 to rotate the air provided below air supply source 11, and the air provided is discharged as clean air through dust removal filter 10 above air supply source 11, thus air supply upward.
By the way, it is rectangular when air supply source 11 is overlooked, air supply source 11 is about 1/2 ~ 1/3 of the width of blast type support unit 2 in width direction at the width in width direction, and air supply source 11 is about 1/2 of the width of blast type support unit 2 in carrying direction at the width in carrying direction.
Air supply source 11 is at supply range (upper surface) the upper formation supply port 18 of this air supply source 11, and this supply port 18 is disposed in when overlooking and staggers outside width direction thus not overlapping with the ejiction opening 13 in container part 14 position relative to container part 14.In addition, when air supply source 11 is disposed in viewed from horizontal side, relative to container part 14, stagger thus not overlapping with container part 14 position in downside vertically.
The air supply source 11 of setting like this becomes following state: the upper end of its width direction medial end is close to the lower end of the width direction outboard end of container part 14.By the way, when overlooking, the medial end of air supply source 11 is overlapping with the outboard end of container part 14.
[guide channel portion]
Guide channel portion 15 pipeline is formed, and the supply port 18 of air supply source 11 is communicated with the introducing port 19 formed on horizontal side, the outside of container part 14 by this pipeline.
Specifically, one end in guide channel portion 15 is connected with the framework be positioned at around supply port 18 of air supply source 11, be connected with the supply range of air supply source 11 thus, the other end in guide channel portion 15 is then connected with the side plate be positioned at around introducing port 19 of container part 14, is connected thus with the horizontal side surface part 14a outside container part 14.
It is skewed that the upper part in guide channel portion 15 is formed as raising to the inner side in width direction, and from carrying direction, the shape in guide channel portion 15 is triangular in shape.The guide channel portion 15 of formation like this, it is broadening towards inner side (near container part 14) from the outside (outboard end near air supply source 11) in width direction from the above-below direction passage width viewed from carrying direction.That is, the passage width in guide channel portion 15 is broadening inside the width direction that air vent amount increases.
By the way, the front surface portion being configured in carrying front end, direction in guide channel portion 15 and the aft section being configured in rear end stand vertically along width direction and are parallel to each other, and width direction width during the overlooking of guide channel portion 15 forms same widths in outside and inner side.In addition, the passage width of guide channel portion 15 on carrying direction and supply port 18 and introducing port 19 are formed as same widths carrying the width on direction.
[container part]
As shown in Figure 4, container part 14 is formed as the corner box like of the posture of laying across of falling down to carrying direction, and arrange along carrying direction, space forms container cavity 12 therein.That is, upper surface portion 14b, a pair horizontal side 14a and the lower face 14c that form the inner space of container part 14 extend along carrying direction.
The anti-metal of scratching of the upper surface portion 14b of container part 14 is formed, and is used in this anti-hole that metal is formed of scratching to form ejiction opening 13.Like this, just form multiple ejiction opening 13 spraying air upward on the top of container part 14, and arrange on the top of container part 14 by the air blowing unit 20 arranging along carrying direction, form for multiple ejiction openings 13 that the air supplied from air supply source 11 is sprayed upward.
The previous section being configured in carrying front end, direction of container part 14 stands vertically along width direction with the aft section being configured in rear end and is parallel to each other.
And container part 14 imports being directed to the air that channel part 15 guides in container cavity 12 from introducing port 19, and sprays upward from multiple ejiction opening 13 under the state of pulsation that inhibit the air of this importing.
Introducing port 19 is formed at the position till playing setting height from the lower face 14c of container part 14, and between the lower face 14c and introducing port 19 of container part 14, height of formation is poor.
The upper surface of the width direction Outboard Sections of lower face 14c is formed as tabular surface, and the upper surface of inboard portion, width direction is formed as the dip plane raised upward towards inner side.
Further, in container part 14, until the horizontal side surface part 14a of inner side from lower face 14c, form maintenance opening 21, and be provided with the cover part 22 of this maintenance opening 21 of freely openable.Cover part 22 fixed parts be made up of butterfly bolt etc. is secured in container part 14, and instrument need not be used to load and unload, and opening and closing is safeguarded with opening 21 thus.
That is, even if having the foreign matters such as the fragment of damaged glass substrate 1 to invade in container cavity 12 from ejiction opening 13, container part 14 also assigns to catch foreign matter by the outside portion, width direction of bulging downwards on its lower face 14c, especially lower face 14c.Further, because guide channel portion 15 is connected with the horizontal side surface part 14a of container part 14, and define diff-H between introducing port 19 and lower face 14c, therefore, it is possible to prevent foreign matter from entering in guide channel portion 15, foreign matter invading air supply source 11 can be prevented thus.As for the foreign matter caught by the lower face 14c of container part 14, by cover part 22 is taken off, maintenance opening 21 is opened, just the foreign matter in container cavity 12 can be fetched into outside by maintenance opening 21.
In addition, container part 14 is provided with air volume test unit 24, for detecting the situation that the air delivery volume supplied from air supply source 11 is below set amount.
This air volume test unit 24 is provided with the droop pendular body 25 freely swung round the axle center consistent with carrying direction and the detection bodies 26 be made up of floodlight device and light-receiving device, and pendular body 25 and detection bodies 26 are supported on the position, top of the introducing port 19 of the horizontal side surface part 14a in outside of container part 14.In addition, when pendular body 25 is in vertical position, its lower end is positioned at the below of the upper end of introducing port 19, and a denier air supply source 11 works and from air supply source 11 air supply, pendular body 25 just switches to the inclination attitude swung to the inside from vertical position.
Further, when supplying to give appropriate air from air supply source 11, pendular body 25 just can swing to more than set angle, makes detection bodies 26 become the detected state of wobble detection body 25.In addition, when failing to supply appropriate air from air supply source 11 because dust removal filter 10 blocks, make supplied air delivery volume for set amount (such as the delivery volume that carried glass substrate 1 may be made downwards to bend and contact with blast type support unit 2) below time, pendular body 25 just swings only to below set angle, makes detection bodies 26 become the non-detection status of not wobble detection body 25.
[guide plate portion]
As shown in Figures 2 and 3, in order to the air that will spray from container part 14 (air blowing unit 20) to the lower surface of glass substrate 1 guides along the lower surface of glass substrate 1 along width direction, guide plate portion 16 is with the state adjoined with it in the both sides, width direction of container part 14 configuration a pair.And, in a pair guide plate portion 16, the outboard end of is provided with convex strip portions 27, convex strip portions 27 protrudes upward from the upper surface of guiding tabular 16, and it highly reaches the below of the lower surface of the glass substrate 1 of carrying, and convex strip portions 27 is along the carrying linearly continuous extension in direction.
Specifically, to be arranged to respective upper surface with flat-hand position consistent with the lower surface of the glass substrate 1 of carrying a pair guide plate portion 16.By the way, it is consistent with the lower surface of the glass substrate 1 of carrying that container part 14 is arranged to its upper surface, and a pair guide plate portion 16 and container part 14 are configured to the state that respective upper surface becomes a plane.
And, the width direction outboard end of guide plate portion, the outside 16b adjoined with the outside of container part 14 in a pair guide plate portion 16 extends near propulsive force applying unit 3, extends near the width direction central portion of plate-like body conveyance device H with the width direction medial end of guide plate portion, the inner side 16a of the inner side abutment of container part 14.
In addition, the width of inner side guide plate portion 16a in width direction is less than guide plate portion, outside 16b.By so forming the width in a pair guide plate portion 16, making container part 14 than the exhaust pathway 17b of end closer to the exhaust pathway 17a of central portion, making the air sprayed from container part 14 to the lower surface supply near the central authorities of glass substrate 1.
By the way, guide plate portion, the inner side width of 16a in width direction is about 1/3 ~ 1/4 of the width of container part 14 in width direction, and the width of guide plate portion, outside 16b in width direction is then about 2.5 times of the width of container part 14 in width direction.
Further, convex strip portions 27 arranges along the whole guide plate portion 16 of carrying direction in the outboard end of guide plate portion, outside 16b.By the way, inner side guide plate portion 16a does not establish convex strip portions 27.
That is, the distance of the exhaust pathway 17b from container part 14 to end, than the distance of the exhaust pathway 17a from container part 14 to central portion, therefore easily flows to the inside from the air of container part 14 ejection and is difficult to flow laterally.But the air flowed laterally from container part 14 is difficult to extract from the exhaust pathway 17b of end due to the existence of convex strip portions 27, even if be therefore also easy in the outside of container part 14 form air layer.
Guide plate portion 16 is provided with supporter 28, this supporter 28 protrudes upward from the upper surface in guide plate portion 16, and depart from below with the glass substrate 1 be handled upside down, when the fault etc. due to blast type support unit 2 causes that under the bearing force of blast type support unit 2, degradation makes glass substrate 1 bend downwards, supporter 28 support glass substrate 1 on the position of the upper surface more top than guide plate portion 16 can be used.
Supporter 28 is formed as the resin-made spheroid rotated freely, and is disposed on the medial end of the inner side medial end of guide plate portion 16a, the width direction central portion of guide plate portion, outside 16b and guide plate portion, outside 16b along carrying direction with setting.
As mentioned above, in the present embodiment, air supply source 11 forms supply port 18 on the supply range of this air supply source 11, and this supply port 18 is disposed in when overlooking and staggers outside width direction thus not overlapping with the ejiction opening 13 in container part 14 position relative to container part 14.Thus, even if there are the foreign matters such as the fragment of damaged glass substrate 1 to invade in container cavity 12 from ejiction opening 13, this foreign matter also can be caught by the lower face 14c of container cavity 14, can prevent foreign matter from invading in guide channel portion 15, thus prevent foreign matter invading air supply source 11.
[other embodiment]
(1) in the embodiment above, make the width of inner side guide plate portion 16a in width direction narrower than guide plate portion, outside 16b, but also can as Fig. 5 (a), make the width of inner side guide plate portion 16a in width direction wider than guide plate portion, outside 16b, or make the width of inner side guide plate portion 16a in width direction identical with guide plate portion, outside 16b.
(2) in the above-described embodiments, a pair blast type support unit 2 with the mutual empty standard width of a room in an old-style house every state arrange, thus exhaust pathway 17 is formed between a pair blast type support unit 2, but also can as Fig. 5 (b), a pair blast type support unit 2 is arranged to the state of close contact, thus does not form exhaust pathway 17 between a pair blast type support unit 2.
In addition, be more than be arranged side by side a pair blast type support unit 2 in width direction, but also as Fig. 5 (c), a blast type support unit 2 can be set in width direction, or multiple blast type support unit 2 is set in width direction.
(3) in the above-described embodiments, container part 14 in its lower section portion 14c or horizontal side surface part 14a forms maintenance opening 21, and be provided with the cover part 22 of free maintenance opening 21, but also can form maintenance opening 21 on the upper surface portion 14b of container part 14, and by form upper surface portion 14b anti-scratch that metal makes can the structure of opening and closing.
(4) in the above-described embodiments, that air supply source 11 is configured to air fed state upward, and guide channel portion 15 end is connected with the upper surface portion of air supply source 11, but the air fed state in inner side that also air supply source 11 can be configured to width direction, and guide channel portion 15 end is connected with the horizontal side surface part of the inner side of air supply source 11.
In addition, in the above-described embodiments, be that the side surface part of the other end in guide channel portion 15 with container part 14 is connected, but also the lower face of the other end in guide channel portion 15 with container part 14 can be connected.
(5) in the above-described embodiments, that container part 14 is set along carrying direction, the adjacent configuration guide plate portion 16 in the both sides, width direction of container part 14, and arrange air supply source 11 at the position of staggering on width direction relative to container part 14, but also can be that container part 14 is set along width direction, the adjacent configuration guide plate portion 16 in the both sides, carrying direction of container part 14, and arrange air supply source 11 at the position of staggering on carrying direction relative to container part 14.
(6) in the above-described embodiments, be form air supply source 11 with fan filter unit, but also can form air supply source 11 with compressor etc.
(7) in the above-described embodiments, as propulsive force applying unit 3, that one end propulsive force applying unit 3 and other end propulsive force applying unit 3 are set, but as propulsive force applying unit 3, also any one the propulsive force applying unit 3 in one end propulsive force applying unit 3 and other end propulsive force applying unit 3 can only be established, or, as propulsive force applying unit 3, also can arrange to be contacted the width direction pars intermedia of glass substrate 1 and support thus the center side propulsive force applying unit 3 of propulsive force is applied to tabular body.
(8) in the above-described embodiments, scratch with anti-the upper surface portion 14b that metal forms container part 14, and be used in the anti-hole that metal is formed of scratching to form ejiction opening 13, but also can be the whole upper surface portion 14b opening making container part 14, and form ejiction opening 13 with this opening.
(nomenclature)
1 tabular body
2 blast type support units
3 propulsive force applying units
9 blowing fans
10 dust removal filters
11 air supply sources
12 container cavity
13 ejiction openings
14 container part
15 guide channel portions
16 guide plate portions
Guide plate portion inside 16a
Guide plate portion outside 16b
17a exhaust pathway
21 maintenance openings
22 cover parts
Claims (8)
1. a plate-like body conveyance device, has:
Blast type support unit, this blast type support unit is disposed in the position of the width size being positioned at tabular body transport path, and to the lower surface air supply of tabular body, thus with the accommodating plate-shaped body of contactless state;
And propulsive force applying unit, this propulsive force applying unit applies the propulsive force on carrying direction to tabular body,
It is characterized in that,
Described blast type support unit has:
The air supply source of air supply;
Container part, this container part forms the container cavity be pressed into for the air from described air supply source, and has the ejiction opening spraying air from this container cavity upward;
Guide channel portion, this guide channel portion makes described air supply source be communicated with described container part with the state air from described air supply source supply being directed to described container cavity;
And guide plate portion, this guide plate portion and described container part are adjacent to be configured, thus is guided by the lower surface of the air sprayed from described ejiction opening to the lower surface of tabular body along tabular body,
Described air supply source is disposed in the position of staggering on the width direction intersected with described carrying direction relative to described container part, thus the described ejiction opening overlooking container part described in Shi Buyu is overlapping,
Described air supply source is formed by electrodynamic type blowing fan and dust removal filter are assembled all-in-one-piece fan filter unit,
Described blowing fan rotates around vertical axis, described dust removal filter is arranged to cover the state above described blowing fan, thus described air supply source is configured to provide the air below air supply source, and the air making this provide is discharged as clean air through described dust removal filter and air supply upward above described air supply source.
2. plate-like body conveyance device as claimed in claim 1, is characterized in that,
Described container part is arranged to the form extended along described carrying direction,
Described guide plate portion is configured to the state adjoined with it in the both sides, width direction intersected with described carrying direction of described container part.
3. plate-like body conveyance device as claimed in claim 2, is characterized in that,
Described blast type support unit is provided with a pair along the width direction intersected with described carrying direction,
The exhaust pathway of being discharged to the space below described guide plate portion by the air in described guide plate portion is formed between a pair blast type support unit.
4. plate-like body conveyance device as claimed in claim 3, is characterized in that,
As described propulsive force applying unit, there is a pair following propulsive force applying unit: support is contacted to the end, described width direction one on tabular body thus tabular body is applied to one end propulsive force applying unit of the propulsive force of carrying on direction, and the other end, described width direction on tabular body contacted support thus the other end propulsive force applying unit of propulsive force on carrying direction is applied to tabular body
The guide plate portion be arranged on a pair blast type support unit is formed separately as follows: less than the guide plate portion, outside away from described exhaust pathway on described width direction close to the width of the guide plate portion, inner side of described exhaust pathway on described width direction on described width direction.
5. the plate-like body conveyance device according to any one of Claims 1 to 4, is characterized in that,
Described container part in its lower section portion or side surface part forms maintenance opening, and is provided with the cover part of this maintenance opening of freely openable.
6. the plate-like body conveyance device according to any one of Claims 1 to 4, is characterized in that,
One end in described guide channel portion is connected with the upper surface portion of described air supply source, and the other end is connected with the side surface part of described container part, and the passage width of above-below direction is broadening along with extending to described container part side.
7. the plate-like body conveyance device according to any one of Claims 1 to 4, is characterized in that,
Described air supply source is disposed in the position of staggering in the below of above-below direction relative to described container part, thus to make cross side apparent time not overlapping with described container part.
8. the plate-like body conveyance device according to any one of Claims 1 to 4, is characterized in that,
Be provided with convex strip portions in the outboard end in described guide plate portion, described convex strip portions protrudes upward from the upper surface in described guide plate portion, and it highly arrives the below of the lower surface of the tabular body of carrying, and convex strip portions linearly extends continuously along carrying direction.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-271828 | 2010-12-06 | ||
| JP2010271828A JP5495065B2 (en) | 2010-12-06 | 2010-12-06 | Plate-shaped body transfer device |
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| Publication Number | Publication Date |
|---|---|
| CN102745453A CN102745453A (en) | 2012-10-24 |
| CN102745453B true CN102745453B (en) | 2016-03-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110437325.2A Active CN102745453B (en) | 2010-12-06 | 2011-12-05 | Plate-like body conveyance device |
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|---|---|
| JP (1) | JP5495065B2 (en) |
| KR (1) | KR101552534B1 (en) |
| CN (1) | CN102745453B (en) |
| TW (1) | TWI510422B (en) |
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|---|---|---|---|---|
| JP6288554B2 (en) * | 2014-03-11 | 2018-03-07 | オイレス工業株式会社 | Non-contact levitation transfer device |
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| KR20050045455A (en) * | 2003-11-11 | 2005-05-17 | 삼성전자주식회사 | Substrate conveyor |
| KR20050082371A (en) * | 2004-02-18 | 2005-08-23 | 한국과학기술원 | Air conveyer |
| JP4258713B2 (en) * | 2003-07-08 | 2009-04-30 | 株式会社ダイフク | Plate-shaped body transfer device |
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| JPH0745684A (en) * | 1993-07-27 | 1995-02-14 | Kokusai Electric Co Ltd | Treatment chamber of semiconductor manufacturing device |
| JP3643725B2 (en) * | 1999-05-06 | 2005-04-27 | 三菱重工業株式会社 | Sheet guide for sheet-fed printing press |
| JP2007088398A (en) * | 2004-12-14 | 2007-04-05 | Realize Advanced Technology Ltd | Cleaning device, cleaning system using the cleaning device, and method of cleaning substrate to be cleaned |
| KR101038844B1 (en) * | 2006-10-10 | 2011-06-03 | 가부시키가이샤 니혼 셋케이 고교 | Sheet-like material conveying device |
| JP4392692B2 (en) * | 2006-12-01 | 2010-01-06 | 日本エアーテック株式会社 | Semiconductor wafer and liquid crystal glass air levitation transfer device |
| JP2009012877A (en) * | 2007-06-29 | 2009-01-22 | Ihi Corp | Float-carrying device |
| JP5429523B2 (en) * | 2008-09-12 | 2014-02-26 | 株式会社ダイフク | Substrate storage container |
| JP2010126295A (en) * | 2008-11-27 | 2010-06-10 | Nippon Sekkei Kogyo:Kk | Method and apparatus for conveying thin sheet-like material |
| JP5446403B2 (en) * | 2009-04-07 | 2014-03-19 | 株式会社Ｉｈｉ | Conveyance direction changing device and levitating conveyance system |
| JP2010195592A (en) * | 2010-03-18 | 2010-09-09 | Olympus Corp | Floating unit and substrate inspection apparatus |
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2010
- 2010-12-06 JP JP2010271828A patent/JP5495065B2/en active Active
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2011
- 2011-10-20 TW TW100138069A patent/TWI510422B/en active
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4258713B2 (en) * | 2003-07-08 | 2009-04-30 | 株式会社ダイフク | Plate-shaped body transfer device |
| KR20050045455A (en) * | 2003-11-11 | 2005-05-17 | 삼성전자주식회사 | Substrate conveyor |
| KR20050082371A (en) * | 2004-02-18 | 2005-08-23 | 한국과학기술원 | Air conveyer |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI510422B (en) | 2015-12-01 |
| JP2012121641A (en) | 2012-06-28 |
| CN102745453A (en) | 2012-10-24 |
| KR101552534B1 (en) | 2015-09-11 |
| KR20120062618A (en) | 2012-06-14 |
| TW201228912A (en) | 2012-07-16 |
| JP5495065B2 (en) | 2014-05-21 |
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