CN102556565B - Plate-shaped article transporting device - Google Patents
Plate-shaped article transporting device Download PDFInfo
- Publication number
- CN102556565B CN102556565B CN201110437310.6A CN201110437310A CN102556565B CN 102556565 B CN102556565 B CN 102556565B CN 201110437310 A CN201110437310 A CN 201110437310A CN 102556565 B CN102556565 B CN 102556565B
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- Prior art keywords
- plate portion
- directing plate
- width
- air
- pair
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Abstract
The invention provides a kind of plate-shaped article transporting device, this plate-shaped article transporting device can utilize supply from the air of small-sized air supply source and with contactless state accommodating plate-shaped body rightly.Possess air blowing unit and a pair directing plate portion and the lower surface air supply formed towards tabular body and with the blast type bracing or strutting arrangement of the accommodating plate-shaped body of contactless state, this air blowing unit is purchased along conveyance direction and is sprayed towards top by the air supplied from air supply source, this a pair directing plate portion is configured with the state of the both sides being adjacent to Width relative to air blowing unit, the end from the side that air blowing unit is left of the Width of the side in a pair directing plate portion, possesses projecting strip part, than the height being more positioned at below by the lower surface of tabular body transported, project to top from the upper surface in directing plate portion and form projecting strip part along conveyance direction.
Description
Technical field
The present invention relates to and possess blast type bracing or strutting arrangement and propelling force application apparatus and the plate-shaped article transporting device formed, blast type bracing or strutting arrangement towards tabular body lower surface air supply and with the accommodating plate-shaped body of contactless state, propelling force application apparatus gives the propulsive force of conveyance direction relative to tabular body.
Background technology
The plate-shaped article transporting device related to, by blast type bracing or strutting arrangement towards the lower surface air supply of tabular body and with the accommodating plate-shaped body of contactless state, the propulsive force of conveyance direction is given relative to this tabular body, along conveyance direction conveyance tabular body by propelling force application apparatus.
And, in such plate-shaped article transporting device, all the time, there is a kind of plate-shaped article transporting device, this plate-shaped article transporting device by the lower surface throughout tabular body with contactless state support scope entirety with opposed state, air blowing unit is set, and the air sprayed from air blowing unit towards top with the scope entirety supply of contactless state support of the lower surface throughout tabular body, thus by blast type bracing or strutting arrangement with the accommodating plate-shaped body of contactless state (for example, referring to patent documentation 1).
Patent documentation 1: Japanese Unexamined Patent Publication 2005-029359 publication
Summary of the invention
But, due in above-mentioned existing plate-shaped article transporting device, throughout the air sprayed from air blowing unit towards top with the scope entirety supply of contactless state support of the lower surface of tabular body, thus wider from the scope of air blowing unit ejection, so the air quantitative change sprayed towards top from air blowing unit is many, result, because the amount of air supplied from air supply source must become many, thus air supply source becomes the large-scale plant that can supply a large amount of air.
The present invention makes in view of above-mentioned actual conditions, its object is to, there is provided a kind of plate-shaped article transporting device, this plate-shaped article transporting device can seek the miniaturization of air supply source, utilizes supply from the air of air supply source and rightly with the accommodating plate-shaped body of contactless state simultaneously.
The plate-shaped article transporting device that the present invention relates to possesses following: towards tabular body lower surface air supply and with the blast type bracing or strutting arrangement of the accommodating plate-shaped body of contactless state; The propelling force application apparatus of the propulsive force of conveyance direction is given relative to tabular body.Aforementioned blast type bracing or strutting arrangement possesses air blowing unit and a pair directing plate portion and forms, air blowing unit is purchased along aforementioned conveyance direction, the air supplied from air supply source is sprayed towards top, a pair directing plate portion guides the air of the lower surface being ejected to tabular body from aforementioned air blowing unit in order to the lower surface along tabular body on the Width intersected with aforementioned conveyance direction, be configured with the state of the both sides being adjacent to foregoing width direction relative to aforementioned air blowing unit, in the end from the side that aforementioned air blowing unit is left in the foregoing width direction of one or both in aforementioned a pair directing plate portion, possesses projecting strip part, aforementioned projecting strip part, above projecting to from the upper surface in aforementioned directing plate portion than the height being more positioned at below by the lower surface of tabular body transported, and formed along aforementioned conveyance direction.
That is, air is supplied to air blowing unit from air supply source, and this air sprays from air supply unit towards top.And, the air sprayed towards top from air blowing unit is supplied to the lower surface of tabular body, the space of the air being supplied to the lower surface of this tabular body between directing plate portion and tabular body along the upper surface in directing plate portion and tabular body lower surface and flow in the direction of the width.
Namely, be provided with the position of air blowing unit, the air sprayed towards top from air blowing unit can be utilized with the lower surface of the accommodating plate-shaped body of contactless state, in addition, be provided with the position in directing plate portion, can utilizing and be formed at air layer in this directing plate portion with the lower surface of the accommodating plate-shaped body of contactless state.And, due to among the air blowing unit of the lower surface of the accommodating plate-shaped body of contactless state and directing plate portion, the ejection of air is only in air blowing unit, thus the amount of air of the lower surface being supplied to tabular body from blast type bracing or strutting arrangement can be reduced, owing to can make to tail off from the amount of air of air supply source supply, the miniaturization of air supply source thus can be sought.
And, the air that upper surface along directing plate portion flows to outside is difficult to due to the existence of projecting strip part be vented from the end in directing plate portion, so also easily form air layer in the end of tabular body, easily by the air layer be formed in directing plate portion with contactless state accommodating plate-shaped body rightly.So complete and can provide a kind of plate-shaped article transporting device, this plate-shaped article transporting device can seek the miniaturization of air supply source, utilize the confession from the air of air supply source to give contactless state accommodating plate-shaped body rightly simultaneously.
In the embodiment of the plate-shaped article transporting device that the present invention relates to, preferably, as aforementioned propelling force application apparatus, possess a pair propelling force application apparatus, this a pair propelling force application apparatus is an end in the foregoing width direction intersected with conveyance direction of the accommodating plate-shaped body of contact and gives the propelling force application apparatus of the end side of the propulsive force of conveyance direction relative to tabular body, and contact accommodating plate-shaped body foregoing width direction the other end and give the propelling force application apparatus of another side of the propulsive force of conveyance direction relative to tabular body, aforementioned blast type bracing or strutting arrangement is disposed between aforementioned a pair propelling force application apparatus in plan view, one or both among aforementioned a pair directing plate portion of aforementioned blast type bracing or strutting arrangement extends near aforementioned propelling force application apparatus.
Namely, an end of the Width of accommodating plate-shaped body is contacted by the propelling force application apparatus of end side, contacted the other end of the Width of accommodating plate-shaped body by the propelling force application apparatus of another side, contacted the both ends of the Width of accommodating plate-shaped body by a pair propelling force application apparatus.So, by being contacted the both ends of the Width of accommodating plate-shaped body by a pair propelling force application apparatus, thus with the accommodating plate-shaped body of stable state, and give propulsive force relative to the both ends of the tabular body of this support, thus can transport tabular body with stable state along conveyance direction.
And, because blast type bracing or strutting arrangement is disposed between a pair propelling force application apparatus in plan view, one or both among a pair directing plate portion of blast type bracing or strutting arrangement extends near propelling force application apparatus, owing to can be supported with contactless state until contacted near the part of support by the propulsive force bracing or strutting arrangement of tabular body by blast type bracing or strutting arrangement, propelling force application apparatus and blast type bracing or strutting arrangement accommodating plate-shaped body rightly thus can be utilized.
In the embodiment of the plate-shaped article transporting device that the present invention relates to, preferably, the directing plate portion that the directing plate portion of the side among aforementioned a pair directing plate portion is formed as than the opposing party on foregoing width direction is wider, and the aforementioned one side only among aforementioned a pair directing plate portion possesses aforementioned projecting strip part.
Namely, the width that width due to the Width in the directing plate portion of a side is formed as the Width in the directing plate portion than the opposing party is wider, thus easily flow to the guiding panel part side of the opposing party from the air of air blowing unit ejection, be difficult to the guiding panel part side flowing to a side.But, flow to the air of the guiding panel part side of a side from air blowing unit, be prevented from flowing due to the existence of projecting strip part, be thus difficult to be vented from end.Therefore, the directing plate portion of a side also easily can form air layer.So, in the directing plate portion of a side, easily in directing plate portion, air layer is formed by possessing projecting strip part, in the directing plate portion of the opposing party, the easy air layer that formed in directing plate portion by being formed narrower, easily by the air layer be formed in a pair directing plate portion with contactless state accommodating plate-shaped body rightly.
In the embodiment of the plate-shaped article transporting device that the present invention relates to, preferably, aforementioned blast type bracing or strutting arrangement purchases a pair side by side with the state spaced apart along foregoing width direction, between aforementioned a pair blast type bracing or strutting arrangement, be formed the air exhaust on aforementioned tabular body to the gap of exhaust in the space of the below of aforementioned tabular body, respective aforementioned a pair directing plate portion of aforementioned a pair blast type bracing or strutting arrangement, from the directing plate portion of the side close to the gap of aforementioned exhaust on foregoing width direction, be formed as narrower than the directing plate portion from the side away from the gap of aforementioned exhaust on foregoing width direction, the directing plate portion from the side away from the gap of aforementioned exhaust only among aforementioned a pair directing plate portion, possesses aforementioned projecting strip part.
Namely, the width that width due to the Width in (i.e. outside) the directing plate portion of the gap side far away from exhaust is formed as the Width in (namely) the directing plate portion of a side close to than the gap from exhaust is wider, thus easily flow to the guiding panel part side of interior side from the air of air blowing unit ejection, be difficult to the guiding panel part side flowing to outside.But, flow to the air of the guiding panel part side in outside from air blowing unit, be prevented from flowing due to the existence of projecting strip part, be thus difficult to be vented from end.Therefore, in the directing plate portion in outside, also easily air layer can be formed.So, in the directing plate portion in outside, easily in directing plate portion, air layer is formed by possessing projecting strip part, in the directing plate portion of inner side, the easy air layer that formed in directing plate portion by being formed narrower, easily by the air layer be formed in a pair directing plate portion with contactless state accommodating plate-shaped body rightly.
In the embodiment of the plate-shaped article transporting device that the present invention relates to, preferably, aforementioned air supply source is made up of blower fan filtering unit (fan filter unit), electrodynamic type breeze fan and dust removal filter is assembled integratedly and forms this blower fan filtering unit.
Namely, due to can by means of only arranging the blower fan filtering unit electrodynamic type breeze fan and dust removal filter assembled integratedly and arranging air supply source, thus blast type bracing or strutting arrangement arrange simple, thereby, it is possible to seek the facilitation of the making of plate-shaped article transporting device.
In the embodiment of the plate-shaped article transporting device that the present invention relates to, preferably, be provided with the chamber portion formed from the bulged-in cavity space of air of aforementioned air supply source, aforementioned air blowing unit is possessed on the top in aforementioned cavity portion, aforementioned air supply source is disposed in the position of the width of the transport path being positioned at tabular body, and is disposed in the position of staggering in the horizontal direction relative to aforementioned cavity portion in mode not overlapping with the aforementioned ejiction opening in aforementioned cavity portion in plan view.
Namely, air from air supply source flows in path of navigation portion and is pressed into the cavity space in chamber portion, thus, even if produce pulsation (pulsation) at the air from air supply source, absorb this pulsation due to the buffer action (cushioning) by cavity space, thus also can suppress the pulsation of the air from ejiction opening ejection.
And air supply source is disposed in the position of staggering in the horizontal direction relative to chamber portion in mode not overlapping with the ejiction opening in chamber portion in plan view.So, even if the foreign matters such as the fragmentation of the tabular body of breakage invade in cavity space from ejiction opening, because this foreign matter does not directly fall to air supply source, foreign matter thus can be made to be difficult to invading air supply source.That is, owing in advance the foreign matter of intrusion can be stayed chamber portion, the removing operation of the foreign matter that the foreign matter in cavity space can wait can thus easily only be removed.
Moreover in the embodiment of the plate-shaped article transporting device that the present invention relates to, preferably, aforementioned projecting strip part linearly extends continuously along aforementioned conveyance direction.
Accompanying drawing explanation
Fig. 1 is the block diagram of plate-shaped article transporting device.
Fig. 2 is the vertical profile front elevation of plate-shaped article transporting device.
Fig. 3 is the vertical profile front elevation of blast type bracing or strutting arrangement.
Fig. 4 is the vertical profile front elevation in chamber portion.
Fig. 5 is the front elevation of the blast type bracing or strutting arrangement of other embodiment.
Nomenclature
1 tabular body
2 blast type bracing or strutting arrangements
3 propelling force application apparatus
9 breeze fans
10 dust removal filters
11 air supply sources
14 chamber portions
16 directing plate portions
Directing plate portion inside 16a
Directing plate portion outside 16b
17 exhaust line
20 air blowing units
27 projecting strip parts
Detailed description of the invention
Below, based on accompanying drawing, the substrate of the rectangle transported as tabular body is described, the mode being specially the glass substrate of flat-panel monitor (flat-panel display) forms the situation of the plate-shaped article transporting device that the present invention relates to.
As shown in Figure 1, plate-shaped article transporting device H possesses blast type bracing or strutting arrangement 2 and propelling force application apparatus 3 and forms, blast type bracing or strutting arrangement 2 towards glass substrate 1 lower surface supplying clean air and with contactless state support glass substrate 1, propelling force application apparatus 3 contacts the lower surface of support glass substrate 1, gives the propulsive force of conveyance direction relative to glass substrate 1.In addition, plate-shaped article transporting device H, be set up in parallel multiple stage plate material transporting unit U along conveyance direction and form, this plate material transporting unit U possesses blast type bracing or strutting arrangement 2 and propelling force application apparatus 3.
Propelling force application apparatus 3 is configured to be set up in parallel multiple rotating roller 6 along conveyance direction, and make each rotating roller 6 by the electro-motor 7 corresponding with it rotary actuation and give the propulsive force of conveyance direction relative to glass substrate 1 respectively, wherein, rotating roller 6 contacts the end of the Width vertical with conveyance direction of the lower surface of support glass substrate 1.Also can by an electro-motor via transmission device the multiple rotating roller of rotary actuation, to replace such formation.
In addition, as propelling force application apparatus 3, possess a pair propelling force application apparatus 3, namely, one end of the Width of the lower surface of contact support glass substrate 1 and give the propelling force application apparatus 3 of the end side of the propulsive force of conveyance direction relative to glass substrate 1, and the other end of the Width of the lower surface of contact support glass substrate 1 and give the propelling force application apparatus 3 of another side of the propulsive force of conveyance direction relative to glass substrate 1.And, utilize this pair propelling force application apparatus 3, contact the both ends of the Width of the lower surface of support glass substrate 1 from below, and, the propulsive force of conveyance direction is given relative to these both ends.
As shown in Figure 2 or Figure 3, blast type bracing or strutting arrangement 2, in plan view, is disposed between a pair propelling force application apparatus 3.And blast type bracing or strutting arrangement 2 is disposed in the position that entirety is positioned at the width of the transport path of glass substrate 1, to the Width of the lower surface of glass substrate 1 pars intermedia supplying clean air and with contactless state support glass substrate 1.
Namely, as shown in Figure 2 or Figure 3, plate-shaped article transporting device H is configured at the both ends of the Width being contacted support glass substrate 1 by propelling force application apparatus 3 and under state by the central portion of the Width of blast type bracing or strutting arrangement 2 non-contact support glass substrate 1, by being given the propulsive force of conveyance direction relative to the both ends of the Width of glass substrate 1 by propelling force application apparatus 3, thus along conveyance direction conveyance glass substrate 1.
[blast type bracing or strutting arrangement]
Then, blast type bracing or strutting arrangement 2 is described.
As shown in Figure 3, blast type bracing or strutting arrangement 2 possesses the air supply source 11 of air supply, chamber portion 14, path of navigation portion 15 and directing plate portion 16 and form.Chamber portion 14, forms the bulged-in cavity space 12 of air from air supply source 11, and possesses the ejiction opening 13 spraying air from this cavity space 12 towards top.The air supplied from air supply source 11 is guided to chamber portion 14 by path of navigation portion 15.Directing plate portion 16 in order to the lower surface guide of flow along glass substrate 1 from ejiction opening 13 towards the lower surface of glass substrate 1 ejection air and arrange with the state being adjacent to chamber portion 14.At this, use the statement of " press-in " with such implication: the pressure being directed into the air in cavity space 12 from air supply source 11 is imported into become the mode higher than the outside in chamber portion 14.Due to this pressure, air sprays from ejiction opening 13.
Blast type bracing or strutting arrangement 2 is configured to the air supplied from air supply source 11 be guided to the chamber portion 14 arranged along conveyance direction by path of navigation portion 15, and repressed air of pulsing in chamber portion 14 sprays from ejiction opening 13 towards top.
And, under the state by blast type bracing or strutting arrangement 2 non-contact support glass substrate 1, towards the air of lower surface supply ejection from ejiction opening 13 towards top of glass substrate 1, towards the air that the lower surface of this glass substrate 1 supplies, the space between directing plate portion 16 and glass substrate 1 along the upper surface in directing plate portion 16 and glass substrate 1 lower surface and flow in the direction of the width.
Between directing plate portion 16 and glass substrate 1, air layer is formed by making air flow like this, thus can not only the position in chamber portion 14 towards the lower surface ejection air of glass substrate 1 be provided with contactless state support glass substrate 1, and also can with contactless state support glass substrate 1 in the position being provided with directing plate portion 16 of its horizontal side.
Blast type bracing or strutting arrangement 2, a pair is purchased side by side along Width with state spaced at intervals, between a pair blast type bracing or strutting arrangement 2, be formed the air exhaust in directing plate portion 16 to the exhaust line 17 (be sometimes called the exhaust line 17a of central portion, be equivalent to the exhaust line of the application or the gap of exhaust) in the space of the below in directing plate portion 16.In addition, a pair blast type bracing or strutting arrangement 2 is purchased with the state spaced at intervals relative to propelling force application apparatus 3 respectively, between blast type bracing or strutting arrangement 2 and propelling force application apparatus 3, be also formed the air exhaust in directing plate portion 16 to the exhaust line 17 (being sometimes called the exhaust line 17b of end) in the space of the below in directing plate portion 16.
Incidentally, blast type bracing or strutting arrangement 2 is set up in parallel along conveyance direction with continuous print state, in the chamber portion 14 adjoined along conveyance direction each other or along the adjacent directing plate portion 16 of conveyance direction each other, does not form gap.
Then, further illustrate the various piece of blast type bracing or strutting arrangement 2, a pair blast type bracing or strutting arrangement 2, similarly form except in forming symmetrically relative to the imaginary line extended along conveyance direction at the middle position of Width, thus the blast type bracing or strutting arrangement 2 being positioned at the side of Width is described, about the blast type bracing or strutting arrangement 2 being positioned at opposite side, then omit the description.In addition, when the various piece of blast type bracing or strutting arrangement 2 is described, sometimes the side being formed with the exhaust line 17a of central portion of Width is called inner side, the side being formed with the exhaust line 17b of end of Width is called outside and is described.
[air supply source]
Air supply source 11, be made up of blower fan filtering unit, electrodynamic type breeze fan 9 and dust removal filter 10 assembled integratedly and form this blower fan filtering unit formation, breeze fan 9 rotates around vertical axis, and is equipped with dust removal filter 10 in the mode of the top covering this breeze fan 9.By configuring air supply source 11 in this wise, thus be configured to by making breeze fan 9 rotary actuation, thus the air of the below of air supply supply source 11, and make the air of this supply be vented to the top of air supply source 11 as clean air by dust removal filter 10, towards top air supply.
Incidentally, air supply source 11 is formed as rectangle in plan view, the width of the Width of air supply source 11 is about 1/2 ~ 1/3 of the width of the Width of blast type bracing or strutting arrangement 2, and the width of the conveyance direction of air supply source 11 is about 1/2 of the width of the conveyance direction of blast type bracing or strutting arrangement 2.
Air supply source 11, in the mode that the supply port 18 of the supply range (upper surface) being formed at this air supply source 11 is not overlapping with the ejiction opening 13 in chamber portion 14 in plan view, be disposed in and stagger to the position in the outside of Width relative to chamber portion 14.In addition, air supply source 11, in mode not overlapping with chamber portion 14 in horizontal lateral plan, is disposed in and staggers to the position of the downside of above-below direction relative to chamber portion 14.
The air supply source 11 arranged in this wise, is arranged with the state of the upper end of the medial end of its Width close to the lower end of the outboard end of the Width in chamber portion 14.Incidentally, the medial end of air supply source 11 and the outboard end in chamber portion 14 are overlapping in plan view.
[path of navigation portion]
Path of navigation portion 15 is made up of conduit, and this conduit is arranged with the state of introducing port 19 of horizontal side in the supply port 18 being communicated with air supply source 11 and the outside that is formed at chamber portion 14.
If further illustrated, the then end of a side in path of navigation portion 15, the supply range of air supply source 11 is connected to by being connected with the framework of the ambient air supply source 11 being positioned at supply port 18, the end of the opposing party in path of navigation portion 15, by being connected with the side plate in chamber portion 14 of the surrounding being positioned at introducing port 19 and being connected to the horizontal side surface part 14a in the outside in chamber portion 14.
The upper surface portion in path of navigation portion 15, with the inner side of Width, then the mode being located more high position is formed as skewed, and the shape in the path of navigation portion 15 in conveyance direction view is formed as triangle.For the path of navigation portion 15 formed in this wise, the duct width of the above-below direction in conveyance direction view is formed as in the direction of the width inner side (side, chamber portion 14) and then gets over wider than outside (the outboard end side of air supply source 11).That is, the duct width in path of navigation portion 15, is formed in the mode that the inner side of the many Width of the ventilation quantitative change of air is then wider.
Incidentally, path of navigation portion 15, the previous section of the front end that is configured at conveyance direction and be configured at the aft section of rear end, be formed as uprightly arranging with the posture vertical ground along Width and being parallel to each other, for path of navigation portion 15, the width of the Width in plan view is formed as same widths in inner side and outer side.In addition, the duct width of the conveyance direction in path of navigation portion 15 is formed as the width identical with the width of the conveyance direction of supply port 18 or introducing port 19.
[chamber portion]
As shown in Figure 4, chamber portion 14, is formed as the corner box like of the traverse posture of toppling over along conveyance direction, arranges, form cavity space 12 by its inner space along conveyance direction.That is, the upper surface part 14b, a pair horizontal side surface part 14a and lower surface portion 14c that form the inner space in chamber portion 14 extend along conveyance direction.
The upper surface part 14b in chamber portion 14 is made up of punch metal (punching metal), forms ejiction opening 13 by the hole being formed at this punch metal.Like this, on the top in chamber portion 14, be formed with multiple ejiction opening 13 towards top ejection air, on the top in chamber portion 14, in order to be sprayed towards top by the air supplied from air supply source 11, possesses the air blowing unit 20 be made up of multiple ejiction opening 13 along conveyance direction.
Chamber portion 14, the previous section of the front end that is configured at conveyance direction and be configured at the aft section of rear end, be formed as uprightly arranging with the posture vertical ground along Width and being parallel to each other.
And chamber portion 14 is configured to be guided the air come to be directed in cavity space 12 from introducing port 19 by path of navigation portion 15, and to suppress the state of the pulsation of the air of this importing to spray from multiple ejiction opening 13 towards top.
Introducing port 19 is formed to the high position of setting height from the lower surface portion 14c in chamber portion 14, forming station jump between the lower surface portion 14c in chamber portion 14 and introducing port 19.
For lower surface portion 14c, the upper surface of the Outboard Sections of Width is formed as tabular surface, and the upper surface of the inboard portion of Width is formed as outside and is then located the dip plane of top.
And in chamber portion 14, the horizontal side surface part 14a from lower surface portion 14c to inner side, is formed with maintenance opening 21, and, possess and make this maintenance opening 21 opening and closing cover 22 freely.And cover 22 is fixed on chamber portion 14 by fixed parts, and can not use that instrument carries out loading and unloading and the mode of opening and closing maintenance opening 21 is formed, wherein, fixed parts is made up of fly-headed bolt etc.
Namely, for chamber portion 14, even if the foreign matters such as the fragmentation of the glass substrate of breakage 1 invade in cavity space 12 from ejiction opening 13, also can by the lower surface portion 14c in chamber portion 14, especially bulging to the Outboard Sections of the Width of below of lower surface portion 14c stops this foreign matter.And, be configured to, because path of navigation portion 15 is connected to the horizontal side surface part 14a in chamber portion 14, further, between introducing port 19 and lower surface portion 14c, be formed with step difference, thus can prevent foreign matter from invading to path of navigation portion 15, thereby, it is possible to prevent foreign matter from invading to air supply source 11.And, be configured to by unloading lower cover member 22 by the foreign matter that the lower surface portion 14c in chamber portion 14 stops and make maintenance opening 21 opening, thus the foreign matter in cavity space 12 is taken out to outside by maintenance opening 21.
In addition, in chamber portion 14, possess Wind volume detector 24, this Wind volume detector 24 detects the situation that the delivery volume of air supplied from air supply source 11 is below set amount.
This Wind volume detector 24 possesses rock body 25 and detection bodies 26 and forms, rock body 25 is with the support that is draped around the axle center shake mode freely along conveyance direction, detection bodies 26 is made up of light projector and light-receiving device, rock body 25 and detection bodies 26, be more supported on top position than the introducing port 19 of the horizontal side surface part 14a in the outside in chamber portion 14.In addition, rock body 25 is arranged in the mode being more positioned at below than the upper end of introducing port 19 in vertical posture lower end, if air supply source 11 works and from air supply source 11 air supply, then rock body 25 switches to shake to the inclination attitude of inner side from vertical posture.
And under air supply source 11 rightly air fed state, when rock body 25 shakes to set angle, detection bodies 26 becomes the detected state detecting rock body 25.In addition, in blocking due to dust removal filter 10 etc. and not from air supply source 11 air supply rightly, the delivery volume of air of supply be set amount (such as, the glass substrate 1 of conveyance likely bends certain delivery volume contacted with blast type bracing or strutting arrangement 2 to below) under following state, when rock body 25 only shakes below set angle, detection bodies 26 becomes the non-detection status not detecting rock body 25.
[directing plate portion]
As shown in Figure 2 or Figure 3, directing plate portion 16, in order to the air that the lower surface along glass substrate 1 guides the lower surface from chamber portion 14 (air blowing unit 20) towards glass substrate 1 to spray in the direction of the width, configure a pair with the state being adjacent to the both sides of Width relative to chamber portion 14.And, the end in the outside of the side in a pair directing plate portion 16, possesses projecting strip part 27, projecting strip part 27 is formed as above projecting to from the upper surface in directing plate portion 16 than the height being more positioned at below by the lower surface of glass substrate 1 transported, further, linearly extend continuously along conveyance direction.
Further illustrate, each directing plate portion in a pair directing plate portion 16, to arrange its upper surface along by the mode of the lower surface of glass substrate 1 transported with flat-hand position.Incidentally, chamber portion 14, to arrange its upper surface along by the mode of the lower surface of glass substrate 1 transported, a pair directing plate portion 16 and chamber portion 14, the state becoming the same face with respective upper surface is configured.
And, (namely from the side's away from exhaust line 17) the directing plate portion 16b in the outside adjoined with the outside in chamber portion 14 among a pair directing plate portion 16, the end in the outside of its Width extends near propelling force application apparatus 3, with (namely from the side's close to exhaust line 17) directing plate portion 16a of the inner side of the inner side abutment in chamber portion 14, the end of the inner side of its Width extends near the central portion of the Width of plate-shaped article transporting device H.
In addition, the directing plate portion 16a of inner side is formed as narrower than the directing plate portion 16b in outside in the direction of the width.By forming the width in a pair directing plate portion 16 in this wise, chamber portion 14 is configured with the state of the exhaust line 17a side of being more partial to central portion compared with the exhaust line 17b of end, the lower surface near the central authorities that the air sprayed from chamber portion 14 is supplied to glass substrate 1.
Incidentally, the width of the Width of the directing plate portion 16a of inner side, be formed as the width of about 1/3 ~ 1/4 of the width of the Width in chamber portion 14, the width of the Width of the directing plate portion 16b in outside, is formed as the width of about 2.5 times of the width of the Width in chamber portion 14.
And the end in the outside of the directing plate portion 16b in outside, possesses projecting strip part 27 along conveyance direction throughout whole width in directing plate portion 16.Incidentally, at the directing plate portion 16a of inner side, projecting strip part 27 is not possessed.
That is, the distance due to the exhaust line 17b from 14 to end, chamber portion is longer than the distance of the exhaust line 17a from chamber portion 14 to central portion, and the air thus sprayed from chamber portion 14 easily flows to inner side, is difficult to flow to outside.But the air flowing to outside from chamber portion 14 is difficult to be vented from the exhaust line 17b of end due to the existence of projecting strip part 27, so in the outside in chamber portion 14, also easily forms air layer.
In directing plate portion 16, with project to than the upper surface in directing plate portion 16 more top state and to be provided with supporter 28 relative to the state left in below by the glass substrate 1 transported, be configured to: the more top that by supporter 28, flexure to the glass substrate 1 of below can be supported on the upper surface in directing plate portion 16, wherein, the situations that the bearing force of blast type bracing or strutting arrangement 2 that this glass substrate 1 causes due to the fault by blast type bracing or strutting arrangement 2 etc. reduces etc. and flexure are to below.
And, supporter 28 is made up of rotatable resinous spheroid, the end of the central portion of Width of the end of the inner side of the directing plate portion 16a in inner side, the directing plate portion 16b in outside and the inner side of the directing plate portion 16b in outside, separates setting interval along conveyance direction respectively and arranges.
As described above, in the present embodiment, the end of the directing plate portion 16b in the outside of wider width among the directing plate portion 16a of inner side of both sides of Width being positioned at chamber the portion 14 and directing plate portion 16b in outside, Width, possesses projecting strip part 27.Possess projecting strip part 27 by the directing plate portion 16b in this wise in outside, make the air flowing to outside from chamber portion 14 be difficult to be vented from the exhaust line 17b of end due to the existence of projecting strip part 27, in the outside in chamber portion 14, also easily form air layer.
[other embodiments]
(1) although in the above-described embodiment, the directing plate portion 16a of inner side be formed as narrower than the directing plate portion 16b in outside in the direction of the width and form, but, as shown in Fig. 5 (a), also the directing plate portion 16a of inner side can be formed as wider than the directing plate portion 16b in outside in the direction of the width and form, in addition, also the width of the Width of the directing plate portion 16b in the directing plate portion 16a of inner side and outside can be formed as same widths and form.
(2) although in the above-described embodiment, a pair blast type bracing or strutting arrangement 2 is arranged with state spaced at intervals and form exhaust line 17 between a pair blast type bracing or strutting arrangement 2, but as shown in Fig. 5 (b), also a pair blast type bracing or strutting arrangement 2 can be arranged with the state of contiguity and do not form exhaust line 17 between a pair blast type bracing or strutting arrangement 2.
In addition, although blast type bracing or strutting arrangement 2 is set up in parallel a pair along Width and forms, but as shown in Fig. 5 (c), also blast type bracing or strutting arrangement 2 only can be arranged one instead of be set up in parallel multiple along Width, in addition, also can blast type bracing or strutting arrangement 2 be set up in parallel multiple along Width and form.
Incidentally, when only arranging a blast type bracing or strutting arrangement 2 along Width, the both sides in a pair directing plate portion 16 of blast type bracing or strutting arrangement 2 extend to propulsive force and give near means 3.
(3) although in the above-described embodiment, the directing plate portion 16 of the side only among a pair directing plate portion 16 possesses projecting strip part, but as shown in Fig. 5 (c), also the directing plate portion 16 of both sides among a pair directing plate portion 16 can possess projecting strip part 27.
In addition, although in the above-described embodiment, the directing plate portion 16b in the outside only among a pair directing plate portion 16 possesses projecting strip part 27, but as shown in Fig. 5 (a), also the directing plate portion 16a of inner side only among a pair directing plate portion 16 can possess projecting strip part 27.
(4) although in the above-described embodiment, form air supply source 11 by blower fan filtering unit, also can form air supply source 11 by compressor etc.
(5) although in the above-described embodiment, as propelling force application apparatus 3, be provided with the propelling force application apparatus 3 of end side and the propelling force application apparatus 3 of another side, but, as propelling force application apparatus 3, the propelling force application apparatus 3 of either party in the propelling force application apparatus 3 of end side or the propelling force application apparatus 3 of another side also can be only set, in addition, as propelling force application apparatus 3, the propelling force application apparatus 3 of the central portion of the Width of contact support glass substrate 1 center side relative to tabular body imparting propulsive force also can be set.
(6) although in the above-described embodiment, in mode not overlapping with the ejiction opening 13 in chamber portion 14 in plan view, air supply source 11 is disposed in the position of staggering along horizontal direction relative to chamber portion 14, but also in mode overlapping with the ejiction opening 13 in chamber portion 14 in plan view, air supply source 11 can be disposed in the position of the below in chamber portion 14.
In addition, although in the above-described embodiment, be provided with chamber portion 14 at blast type bracing or strutting arrangement 2, also can be configured to not arrange chamber portion 14 at blast type bracing or strutting arrangement 2, the air supplied from air supply source 11 is directly sprayed from air blowing unit 20.
Claims (6)
1. a plate-shaped article transporting device, possesses:
Blast type bracing or strutting arrangement, towards tabular body lower surface air supply and with the accommodating plate-shaped body of contactless state; And
Propelling force application apparatus, gives the propulsive force of conveyance direction relative to tabular body,
Wherein,
Described blast type bracing or strutting arrangement possesses:
Air blowing unit, purchases along described conveyance direction, the air supplied is sprayed towards top from air supply source; And
A pair directing plate portion, in order to the lower surface along tabular body guides the air being ejected to the lower surface of tabular body from described air blowing unit on the Width intersected with described conveyance direction, be configured with the state being adjacent to the both sides of described Width relative to described air blowing unit
In the end from the side that described air blowing unit is left of the described Width of one or both in described a pair directing plate portion, possess projecting strip part,
Described projecting strip part, above projecting to from the upper surface in described directing plate portion than the height being more positioned at below by the lower surface of tabular body transported, and linearly extends continuously along described conveyance direction and is formed.
2. plate-shaped article transporting device according to claim 1, is characterized in that,
As described propelling force application apparatus, possess a pair propelling force application apparatus, this a pair propelling force application apparatus is an end of the described Width intersected with conveyance direction of the accommodating plate-shaped body of contact and gives the propelling force application apparatus of the end side of the propulsive force of conveyance direction relative to tabular body, and contact accommodating plate-shaped body described Width the other end and give the propelling force application apparatus of another side of the propulsive force of conveyance direction relative to tabular body
Described blast type bracing or strutting arrangement, in plan view, is disposed between described a pair propelling force application apparatus,
One or both among described a pair directing plate portion of described blast type bracing or strutting arrangement extends near described propelling force application apparatus.
3. plate-shaped article transporting device according to claim 2, is characterized in that,
The directing plate portion that the directing plate portion of the side among described a pair directing plate portion is formed as than the opposing party on described Width is wider,
The directing plate portion of the one only among described a pair directing plate portion, possesses described projecting strip part.
4. plate-shaped article transporting device according to claim 3, is characterized in that,
Described blast type bracing or strutting arrangement, a pair is purchased side by side with the state spaced apart along described Width, between described a pair blast type bracing or strutting arrangement, formed the air exhaust in described directing plate portion to the gap of exhaust in the space of the below in described directing plate portion
Respective described a pair directing plate portion of described a pair blast type bracing or strutting arrangement, on described Width from the directing plate portion of the side close to the gap of described exhaust, be formed as narrower than the directing plate portion from the side away from the gap of described exhaust on described Width
The directing plate portion from the side away from the gap of described exhaust only among described a pair directing plate portion, possesses described projecting strip part.
5. the plate-shaped article transporting device according to any one in Claims 1 to 4, is characterized in that, described air supply source is made up of blower fan filtering unit, electrodynamic type breeze fan and dust removal filter is assembled integratedly and forms described blower fan filtering unit.
6. the plate-shaped article transporting device according to any one in Claims 1 to 4, is characterized in that,
Be provided with chamber portion, described chamber portion forms the bulged-in cavity space of air from described air supply source,
On the top in described chamber portion, possess described air blowing unit,
Described air supply source, is disposed in the position of the width of the transport path being positioned at tabular body, and is disposed in the position of staggering in the horizontal direction relative to described chamber portion in mode not overlapping with the described ejiction opening in described chamber portion in plan view.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010271829A JP5440875B2 (en) | 2010-12-06 | 2010-12-06 | Plate-shaped body transfer device |
| JP2010-271829 | 2010-12-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102556565A CN102556565A (en) | 2012-07-11 |
| CN102556565B true CN102556565B (en) | 2015-09-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110437310.6A Active CN102556565B (en) | 2010-12-06 | 2011-12-05 | Plate-shaped article transporting device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5440875B2 (en) |
| KR (1) | KR101536188B1 (en) |
| CN (1) | CN102556565B (en) |
| TW (1) | TWI516430B (en) |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994002395A1 (en) * | 1992-07-15 | 1994-02-03 | Minnesota Mining And Manufacturing Company | Fluid transport system for transporting articles |
| JP3339909B2 (en) * | 1993-04-21 | 2002-10-28 | 新日本製鐵株式会社 | Fluid flotation device |
| JP2000021949A (en) * | 1998-07-03 | 2000-01-21 | Tabai Espec Corp | Structure for noncontact floating transfer of work |
| JP3643725B2 (en) * | 1999-05-06 | 2005-04-27 | 三菱重工業株式会社 | Sheet guide for sheet-fed printing press |
| JP2001007187A (en) * | 1999-06-25 | 2001-01-12 | Sony Corp | Substrate transportation device |
| JP4313080B2 (en) * | 2003-04-02 | 2009-08-12 | 第一施設工業株式会社 | Non-contact levitation unit |
| JP4251279B2 (en) * | 2003-04-14 | 2009-04-08 | 株式会社ダイフク | Plate-shaped body transfer device |
| JP4258713B2 (en) * | 2003-07-08 | 2009-04-30 | 株式会社ダイフク | Plate-shaped body transfer device |
| KR100592675B1 (en) * | 2003-11-11 | 2006-06-26 | 삼성전자주식회사 | Substrate conveyor |
| JP2005191553A (en) * | 2003-12-01 | 2005-07-14 | Smc Corp | Workpiece levitation device |
| JP2007088398A (en) * | 2004-12-14 | 2007-04-05 | Realize Advanced Technology Ltd | Cleaning device, cleaning system using the cleaning device, and method of cleaning substrate to be cleaned |
| JP2007238193A (en) * | 2006-03-06 | 2007-09-20 | Kanto Auto Works Ltd | Conveying device for article |
| JP5119561B2 (en) * | 2007-08-10 | 2013-01-16 | シンフォニアテクノロジー株式会社 | Air levitation transport device, air levitation unit, air levitation transport method |
| JP2008130892A (en) * | 2006-11-22 | 2008-06-05 | Shinko Electric Co Ltd | Air float carrying apparatus and air carrying method |
| JP2010034309A (en) * | 2008-07-29 | 2010-02-12 | Dainippon Screen Mfg Co Ltd | Coating apparatus and substrate processing system |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR101536188B1 (en) | 2015-07-13 |
| JP5440875B2 (en) | 2014-03-12 |
| JP2012121642A (en) | 2012-06-28 |
| KR20120062620A (en) | 2012-06-14 |
| TW201245021A (en) | 2012-11-16 |
| CN102556565A (en) | 2012-07-11 |
| TWI516430B (en) | 2016-01-11 |
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