KR20120062618A - Plate-shaped article transporting device - Google Patents

Abstract

PURPOSE: A device for transporting a plate shaped body is provided to prevent foreign materials from entering into a guide passage part because the foreign materials can be caught by the bottom surface of a chamber part. CONSTITUTION: A device for transporting a plate shaped body comprises blowing type support units(2) and propelling force supplying units(3). The blowing type support units supply air to the bottom surface of a plate shaped body(1) and support the plate shaped body in a contactless state. The propelling force supplying units apply propelling force of a transporting direction to the plate shaped body. The blowing type support units are installed in positions locating within a horizontal width of a transporting path of the plate shaped body. Each blowing type support unit comprises air supply sources(11), chambers(14), guide passage parts, and guide plate parts(16). The chamber part comprises an outlet.

Description

Plate-shaped conveying device {PLATE-SHAPED ARTICLE TRANSPORTING DEVICE}

The present invention provides blow-type support means for supplying air toward the lower surface of the plate-like body to support the plate-like body in a non-contact state, and imparting a driving force to the plate-shaped body to impart a propulsion force in the conveying direction. The blower support means is related with the plate-shaped object conveyance apparatus provided in the position located in the horizontal width of the conveyance path | route of a plate-shaped object.

Such a plate-shaped conveying apparatus supplies air toward the lower surface of a plate-shaped object by a blowable support means, supports a plate-shaped object in a non-contact state, and gives a propulsion force in a conveyance direction with the propulsion force provision means to the plate-shaped object, And conveying a plate-shaped object along a conveyance direction. And the ventilation support means is provided in the position located in the horizontal width of the conveyance path | route of a plate-shaped object, and the plate-shaped object conveying apparatus is made compact in a horizontal width direction.

And in such a plate-shaped conveying apparatus, conventionally, the fan filter unit as a ventilation support means was provided, and the chamber part was installed in the state which overlaps with a fan filter unit in the up-down direction above the fan filter unit (example See, for example, Patent Document 1).

Japanese Laid-Open Patent Publication No. 2005? 029359

In the above-mentioned conventional plate-shaped conveying apparatus, when the conveying plate-shaped object is damaged, the fragment of the damaged plate-shaped object falls as a foreign material on a chamber part, and a foreign material may intrude into a chamber space from the ejection opening of a chamber part. . And the foreign matter which penetrated into the chamber space falls down as it is, and invades even a ventilation type support means. When foreign matter enters the ventilation support means, in order to remove the foreign matter, it is necessary to separate the ventilation support means and remove the foreign matter, which is cumbersome. In particular, when the blower support means is constituted by the fan filter unit, foreign matter enters the vibration suppression filter of the fan filter unit. Therefore, in order to remove the debris, the blower support means is removed to replace the damper filter. Work of the foreign matter was troublesome to remove the foreign matter.

This invention is made | formed in order to solve the above problems, The objective is to provide the plate-shaped conveyance apparatus which can carry out the removal work of a foreign material easily.

The plate-shaped body conveying apparatus which concerns on this invention is provided with the ventilation type | mold support means which supplies air toward the lower surface of a plate-shaped object, and supports a plate-shaped object in a non-contact state, and the propulsion force provision means which gives a propulsion force in a conveyance direction with respect to a plate-shaped object. It includes, and the said blowing support means is provided in the location located in the horizontal width of the conveyance path | route of a plate-shaped object,

The said blowing support means is provided with the air supply source for air supply, and the blower outlet which forms the chamber space in which air from the said air supply is press-fitted, and blows air upward from this chamber space. A chamber portion, a guide passage portion for communicating the air supply source and the chamber portion in a state of guiding air supplied from the air supply source to the chamber space, and air ejected from the jet port to the lower surface of the plate body, And a guide plate disposed adjacent to the chamber to guide along the lower surface, wherein the air supply is horizontal with respect to the chamber so that the air supply does not overlap with the ejection opening in the chamber in plan view. It is installed in the position shifted in the direction.

That is, the air from the air supply source flows through the guide passage portion and is pressurized into the chamber space of the chamber portion, and the air is blown upward from the blowing port of the chamber portion. And the air blown upward from the blower outlet is supplied to the lower surface of the plate-shaped object, The air supplied to the lower surface of this plate-shaped object carries the space between the guide plate part and the plate-shaped object, Flow along.

That is, in the place where the chamber part is provided, the lower surface of the plate-shaped object can be supported by non-contact state by the air blown upward from the chamber part, and in the place where the guide plate part is provided, the air formed on the guide plate part is provided. Since the lower surface of the plate-shaped object can be supported by a non-contact state by the layer of, the plate-shaped object can be supported in a non-contact state not only in the place where the chamber part is provided but also in the place where the guide plate part around the chamber part is provided.

In addition, since the air from the air source flows through the guide passage and is pressurized into the chamber space of the chamber part, even if pulsation occurs in the air supplied from the air source, the pulsation is applied to the cushioning of the chamber space. Since it absorbs by this, the pulsation of the air blown out from a blower outlet can be suppressed.

And the air supply source is provided in the position shifted in the horizontal direction with respect to the chamber part so that it may not overlap with the blowing port in a chamber part by planar view. Therefore, even if foreign matters, such as debris of the damaged plate-like body, intrude into the chamber space from the jet port, the foreign matters do not directly fall to the air supply source, and thus foreign matters do not easily enter the air supply source. In other words, the foreign matters that have penetrated can remain in the chamber, so that the foreign matters in the chamber space can be easily removed. Therefore, the plate-shaped conveyance apparatus which can carry out the removal work of a foreign material easily was provided.

In the Example of the plate-shaped object conveyance apparatus which concerns on this invention, the said chamber part is provided so that it may extend along the said conveyance direction, and the said guide plate part adjoins both sides of the horizontal width direction which cross | intersects the said conveyance direction with respect to the said chamber part. It is preferable that it is arrange | positioned in the state to make it, and the said air supply source is provided in the position shifted to the said horizontal width direction with respect to the said chamber part.

That is, air is blown upward from the jet port of the chamber part provided along a conveyance direction, and air is supplied to the lower surface of the plate-shaped object, and the air supplied to the lower surface of the plate-shaped object adjoins both sides of the width direction with respect to a chamber part. The space between the guide plate portion and the plate-shaped body positioned above the portion flows along the horizontal width direction along the upper surface of the guide plate portion and the lower surface of the plate-shaped body.

Therefore, uniformity of the bearing force in the conveyance direction with respect to a plate-shaped object by a ventilation support means can be aimed at, and the deflection of the plate-shaped object at the time of conveying a plate-shaped object along a conveyance direction can be suppressed.

In addition, in the place where the chamber part is provided, while the lower surface of the plate-shaped object is supported by the air blown upward from the chamber part, in the place where the guide plate part is provided, the air formed on the guide plate part Since the floor supports the lower surface of the plate-shaped object, the location in which the chamber part is provided and the location in which the guide plate part is provided differ in the supporting force which supports the lower surface of the plate-shaped object.

When arranging and arranging the chamber portions and the guide plate portions having such a different supporting force in the conveying direction, when the plate-shaped bodies are conveyed along the conveying direction, since the bearing force on the plate-shaped body by the blowing support means is different depending on the position in the conveying direction. Plate-like body is easy to move up and down.

On the other hand, by arranging and arranging the chamber part and the guide plate part in the horizontal width direction, since the bearing force with respect to the plate-shaped object by the ventilation type support means in a conveyance direction becomes uniform, when a plate-shaped object is conveyed along a conveyance direction, a plate-shaped object becomes easy. Since it does not move up and down, the curvature of a plate-shaped object can be suppressed.

In the Example of the plate-shaped object conveying apparatus which concerns on this invention, a pair of said ventilation support means is provided in the horizontal width direction which cross | intersects the said conveyance direction, and is arranged on the said guide plate part between the said pair of ventilation support means. It is preferable that an exhaust path for exhausting air into the space below the guide plate portion is formed.

That is, an exhaust path is formed between the pair of blowing support means arranged in the horizontal width direction to exhaust the air on the guide plate into the space below the guide plate, and the air is exhausted from the exhaust path. The air does not easily stay below the middle part. Therefore, the conveyed plate-shaped object is conveyed in a state close to the horizontal posture in which the intermediate portion is suppressed from swelling by not allowing air to easily stay below the intermediate portion, thereby reducing the load on the plate-shaped object.

In the Example of the plate-shaped object conveyance apparatus which concerns on this invention, as said propulsion force provision means, the propulsion force of the one end side which contacts and supports the one end part of the said horizontal width direction in a plate-shaped object, and gives propulsion force in a conveyance direction with respect to a plate-shaped object. And a pair of propulsion force imparting means with the imparting means and the propulsion force imparting means on the other end side which comes in contact with and supports the other end portion in the transverse width direction in the plate-shaped object to impart a propulsion force in the conveying direction to the plate-shaped object. Each of the guide plate portions provided in the blowing support means has a narrower width in the horizontal width direction than the guide plate portion closer to the exhaust path in the horizontal width direction than the guide plate portion farther from the exhaust path in the horizontal width direction. It is preferable that it is formed and comprised by i).

That is, the one end side propulsion force provision means contacts and supports the one end part of the horizontal width direction in a plate-shaped object, The other end side propulsion force provision means contacts and supports the other end part of the horizontal width direction in a plate-shaped object, and a pair Both end portions of the plate-shaped body in the transverse direction are contacted and supported by the propulsion force applying means. Therefore, the plate-like body is supported in a stable state by contact-supporting both ends in the horizontal width direction of the plate-like body by a pair of propulsion force applying means, and the propulsion force is applied to both ends of the supported plate-like body, so that the plate is in a stable state. The upper body can be conveyed along the conveyance direction.

Since each of the guide plate portions provided in the pair of blowable support means is formed by forming the inner guide plate portion in a widthwise direction than the outer guide plate portion, the chamber portion is arranged in a state inclined toward the exhaust passage side. The air blown out from the chamber can be supplied to the lower surface near the center of the transverse direction in the plate-like body. Therefore, by supplying air to the lower surface near the center of the horizontal width direction of a plate-shaped object by a pair of ventilation support means, while reducing the contact pressure with respect to a plate-shaped object by a pair of propulsion force provision means, Since the intermediate part of the width direction can be supported so that the looseness of a plate-shaped object can be suppressed, a plate-shaped object can be conveyed in the state supported by the stable attitude, and can convey a plate-shaped object smoothly.

In the embodiment of the plate-shaped object conveying apparatus according to the present invention, the chamber portion is provided with a cover member which is provided with a maintenance opening at a lower surface portion or a side surface thereof and which can open and close the maintenance opening. It is desirable to have.

That is, since the maintenance opening is formed in the chamber part and the cover member which can open and close the maintenance opening is comprised, normally, the maintenance opening is closed by the cover member, and maintenance is carried out. When carrying out work, maintenance work can be performed with respect to the chamber space from the maintenance opening by opening a cover member.

Therefore, when foreign matter enters the chamber, the cover member can be opened to remove foreign matter from the maintenance opening, and the foreign matter removal operation can be easily performed.

In the Example of the plate-shaped object conveying apparatus which concerns on this invention, the said air supply source is comprised including the supply surface which supplies air upwards, The said guide path part is the one end part, The supply surface of the said air supply source It is preferable that the other end is connected with the side part of the said chamber part, and the width | variety of an up-down direction passage becomes wider toward the said chamber part side.

That is, the air supplied upward from the air supply source can be guided to the chamber part side by the guide passage part, and can press-in the chamber space of the chamber part. The amount of air guided by the guide passage portion increases due to the confluence of air supplied from an air supply source on the chamber portion side, but the width of the passage in the vertical direction of the guide passage portion becomes wider toward the chamber portion side, and toward the chamber portion side. The air gradually increasing gradually is guided by the guide passage portion that becomes wider gradually toward the chamber portion, so that the air can be smoothly flowed to the chamber portion.

In the Example of the plate-shaped object conveyance apparatus which concerns on this invention, it is preferable that the said air supply source is comprised by the fan filter unit comprised by assembling an electric blower fan and a damping filter integrally.

That is, as the installation of the air supply source, only the fan filter unit in which the electric blowing fan and the vibration damping filter are integrally assembled is provided, so that the installation of the blowing support means becomes simple, and the production of the plate-shaped conveying device is facilitated. Can be planned.

Moreover, in the Example of the plate-shaped object conveyance apparatus which concerns on this invention, it is a thing provided that the said air supply source is provided in the position shifted below the said chamber part to the downward direction so that it may not overlap with the said chamber part from the horizontal side view. desirable.

Moreover, in the Example of the plate-shaped object conveyance apparatus which concerns on this invention, the protrusion part is provided in the edge part of the outer side of the said guide plate part, and the said protrusion part is located in the height located below the lower surface of the plate-shaped object conveyed, It is preferable that it is formed so that it may protrude upward from the upper surface of the said guide plate part, and may extend continuously linearly along a conveyance direction.

1 is a perspective view of a plate-shaped conveyer.
It is a terminal front view of a plate-shaped conveyance apparatus.
3 is a longitudinal front view of the blower supporting means.
4 is a longitudinal front view of the chamber portion.
5 is a longitudinal front view of a blower supporting means of another embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, the case where the plate-shaped object conveyance apparatus which concerns on this invention is comprised so that a rectangular board | substrate and a glass substrate for flat panel displays as a plate-shaped object can be conveyed is demonstrated with reference to drawings.

As shown in FIG. 1, the plate-shaped object conveyance apparatus H is provided with the blowing support means 2 which supplies clean air toward the lower surface of the glass substrate 1, and supports the glass substrate 1 in a non-contact state, It comprises the propulsion force provision means 3 which contact-supports the lower surface of the glass substrate 1, and provides the propulsion force in a conveyance direction with respect to the glass substrate 1. And plate-shaped object conveyance apparatus H is comprised by providing several plate-shaped object conveyance unit U provided with the ventilation type | mold support means 2 and the propulsion force provision means 3 together in a conveyance direction.

The propulsion force imparting means 3 provides a plurality of rotary rollers 6 in contact with and supports the end portions of the transverse width direction orthogonal to the conveying direction at the lower surface of the glass substrate 1 along the conveying direction, and each of the rotating rollers. It is comprised so that 6 may be rotated separately by the electric motor 7 corresponding to it, and the propulsion force in a conveyance direction with respect to the glass substrate 1 is comprised. Instead of such a configuration, it is also possible to drive a plurality of rotating rollers through a gear mechanism to rotate by one electric motor.

In addition, as the propulsion force imparting means 3, the propulsion force imparting means on one side of the one end portion in the transverse width direction at the lower surface of the glass substrate 1 to contact and support the propulsion force in the conveying direction with respect to the glass substrate 1 ( 3) and a pair of propulsion force provision means 3 of the other end side which contact-supports the other end part of the width direction in the lower surface of the glass substrate 1, and imparts a propulsion force in a conveyance direction with respect to the glass substrate 1 The propulsion force imparting means (3) is provided. And by these pair of propulsion force provision means 3, the both ends of the width direction in the lower surface of the glass substrate 1 are contact-supported from the lower side, and to provide the propulsion force in a conveyance direction with respect to the both ends. It is.

As shown in FIG.2 and FIG.3, the blowing support means 2 is provided between a pair of propulsion force provision means 3 in plan view. And the ventilation support means 2 is provided in the location where the whole is located in the horizontal width of the conveyance path | route of the glass substrate 1, and clean air is in the middle part of the horizontal width direction in the lower surface of the glass substrate 1 Is supplied to support the glass substrate 1 in a non-contact state.

That is, as shown in FIG.2 and FIG.3, the plate-shaped conveyance apparatus H contacts and supports both edge part of the horizontal width direction of the glass substrate 1 by the pushing force provision means 3, and the glass substrate 1 Propulsion force in the conveying direction with respect to both ends of the transverse width direction of the glass substrate 1 by the propulsion force provision means 3 in the state which non-contactedly supported the center part of the transverse direction by the ventilation type support means 2 By providing this, it is comprised so that the glass substrate 1 may be conveyed along a conveyance direction.

[Ventilation support means]

Next, the blowing support means 2 is demonstrated.

As shown in FIG. 3, the blowing support means 2 includes an air supply source 11 for supplying air, a chamber portion 14, a guide passage portion 15, and a guide plate portion 16. Consists of. The chamber portion 14 forms a chamber space 12 into which air from the air supply source 11 is press-fitted, and has a jet port 13 for blowing air upward from the chamber space 12. . The guide passage portion 15 guides the air supplied from the air supply source 11 to the chamber portion 14. The guide plate part 16 is installed in the state adjacent to the chamber part 14 so that the air blown out from the blower opening 13 toward the lower surface of the glass substrate 1 may flow-guide along the lower surface of the glass substrate 1. It is. The expression "indentation" is used here in the sense that the pressure of the air introduced into the chamber space 12 from the air supply source 11 is introduced to be higher than the outside of the chamber portion 14. Because of this pressure, air is blown out from the blower outlet 13.

The blowing support means 2 guides the air supplied from the air supply source 11 to the chamber part 14 provided along the conveyance direction via the guide passage part 15, and the pulsation in the chamber part 14 is carried out. It is comprised so that this suppressed air may be blown upward from the blower outlet 13. As shown in FIG.

And in the state which is non-contactly supporting the glass substrate 1 by the blowing support means 2, the air blown upward from the blower outlet 13 is supplied toward the lower surface of the glass substrate 1, and this glass The air supplied toward the lower surface of the substrate 1 forms a space between the guide plate 16 and the glass substrate 1 along the upper surface of the guide plate 16 and the lower surface of the glass substrate 1 in the horizontal width direction. To flow.

Thus, the chamber part 14 which blows air toward the lower surface of the glass substrate 1 is provided by forming a layer of air between the guide plate part 16 and the glass substrate 1 by flowing air. Not only does the glass substrate 1 be supported in a non-contact state at the point, but also the glass substrate 1 can be supported in a non-contact state even at the location where the side guide plate part 16 is provided.

The blowing support means 2 is provided in the horizontal width direction one pair, and is arrange | positioned at the space | interval with each other, The air on the guide plate part 16 guides the air on the guide plate part 16 between a pair of blowing support means 2. The exhaust path 17 (sometimes called the exhaust path 17a of the center part and corresponded to the exhaust path of this application) is exhausted to the space below the (). In addition, each of the pair of blowing support means 2 is provided in a state spaced apart from each other with respect to the propulsion force applying means 3, and between the blowing support means 2 and the propulsion force applying means 3. An exhaust path 17 (sometimes referred to as an exhaust path 17b at the end) is formed to exhaust the air on the guide plate 16 to the space below the guide plate 16.

In addition, the blowing support means 2 is provided in the conveyance direction in a continuous state, and between the chamber parts 14 which adjoin in a conveyance direction, or between the guide plate parts 16 which adjoin in a conveyance direction. The gap is not formed.

Next, although each part of the blowing support means 2 is demonstrated, a pair of blowing support means 2 is symmetrical about the virtual line extended along a conveyance direction in the center position in the width direction. Since it is comprised similarly except having comprised normally, the blowing support means 2 located in one side of the width direction is demonstrated, and description is abbreviate | omitted about the blowing support means 2 located in the other side. . In addition, in explaining each part of the ventilation support means 2, the exhaust path 17b of the edge part in an inside and the horizontal width direction is shown in the side in which the exhaust path 17a of the center part in the horizontal width direction is formed. ) May be described as an outer side.

[Air supply source]

The air supply source 11 is comprised by the fan filter unit comprised by assembling the electric blowing fan 9 and the damping filter 10 integrally, The blowing fan 9 rotates around a vertical axis, and the blowing The damping filter 10 is provided so that the upper part of the fan 9 may be covered. By arranging the air supply source 11 in this manner, the blower fan 9 is rotated to supply air to the lower side of the air supply source 11, and the supplied air is supplied to the air through the vibration suppression filter 10. It is arrange | positioned so that it may exhaust as clean air upward of the supply source 11, and supply air upward.

In addition, the air supply source 11 is formed in the rectangle in planar view, and the width | variety in the horizontal width direction of the air supply source 11 is 1 / of the width | variety in the horizontal width direction of the ventilation support means 2. It is about 2 to 1/3, and the width | variety in the conveyance direction of the air supply source 11 is about 1/2 of the width | variety of the conveyance direction of the ventilation type support means 2.

The air supply source 11 has a chamber part 14 so that the supply port 18 formed in the supply surface (upper surface) of this air supply source 11 does not overlap with the blowing port 13 in the chamber part 14 in plan view. ) Is provided at a position shifted outward in the widthwise direction. In addition, the air supply source 11 is provided in the position shifted below the chamber part 14 in the up-down direction so that it may not overlap with the chamber part 14 in the horizontal side view.

The air supply source 11 provided in this way is provided in the state in which the upper end of the inner edge part of the horizontal width direction is approaching the lower end of the outer edge part of the horizontal width direction of the chamber part 14. In addition, the inner end of the air source 11 and the outer end of the chamber portion 14 overlap in plan view.

[Guide passage part]

The guide passage part 15 is comprised by the duct provided in the state which communicates the supply port 18 of the air supply source 11, and the inlet port 19 formed in the horizontal side surface of the outer side of the chamber part 14. As shown in FIG. It is.

Adding an explanation, one end part of the guide passage part 15 is connected with the supply surface of the air supply source 11 by connecting with the frame body of the air supply source 11 located around the supply port 18, The other end part of the guide passage part 15 is connected with the side plate of the chamber part 14 located around the introduction port 19, and is connected with the horizontal side part 14a of the outer side of the chamber part 14. have.

The upper surface part of the guide passage part 15 is formed in the inclined shape so that it may become high toward the inside of a horizontal width direction, and the shape of the guide passage part 15 in the conveyance direction is formed in triangle shape. The guide passage portion 15 formed as described above has the passage width in the vertical direction as viewed in the conveying direction toward the inner side (the chamber portion 14 side) than the outer side (the outer end side of the air supply source 11) in the horizontal width direction. Increasingly wider. That is, the passage width of the guide passage part 15 is formed so that it becomes wider toward the inside of the horizontal width direction which increases the air flow amount.

In addition, the front part arrange | positioned at the front end in the conveyance direction, and the back part arrange | positioned at the rear end of the guide passage part 15 are perpendicular to the posture along the horizontal width direction. The guide passage portion 15 is formed in parallel with each other, and the width of the transverse width direction in plan view is formed to be the same width on the outside and the inside. In addition, the passage width in the conveyance direction of the guide passage part 15 is formed in the same width | variety in the conveyance direction of the supply port 18 and the introduction port 19. As shown in FIG.

[Chamber part]

As shown in FIG. 4, the chamber portion 14 is laterally in the conveying direction. It is formed in the rectangular box shape of the falling posture, is formed along a conveyance direction, and the chamber space 12 is formed by the internal space. That is, the upper surface part 14b which forms the internal space of the chamber part 14, the pair of horizontal side part 14a, and the lower surface part 14c extend in the conveyance direction.

The upper surface part 14b in the chamber part 14 is comprised by the punching metal, and the blowing hole 13 is formed by the hole formed in this punching metal. In this way, a plurality of blow holes 13 for blowing air upward are formed in the upper portion of the chamber portion 14, and are provided in the upper portion of the chamber portion 14 along the conveying direction and from the air supply source 11. An air blowing section 20 constituted by a plurality of blowing holes 13 is provided for blowing the supplied air upward.

The front part of the chamber part 14 arrange | positioned at the front end in the conveyance direction, and the rear part arrange | positioned at the rear end are provided perpendicularly to the posture along the horizontal width direction, and are formed in parallel with each other.

And the chamber part 14 introduces the air guided by the guide passage part 15 into the chamber space 12 from the inlet port 19, and in the state which suppressed the pulsation of the introduced air, It is comprised so that it may eject upward from the some blower opening 13.

The inlet port 19 is formed at a position as high as a set height from the lower surface part 14c of the chamber part 14, and a step is formed between the lower surface part 14c of the chamber part 14 and the inlet port 19. (Iii) is formed.

As for the lower surface part 14c, the upper surface of the outer part of a horizontal width direction is formed in the flat surface, and the upper surface of the inner part of the horizontal width direction is formed in the inclined surface located upwards toward the outer side.

And the chamber part 14 is provided with the maintenance opening 21 from the lower surface part 14c to the inner horizontal side part 14a, and the cover member which can open and close this maintenance opening 21 ( 22) is configured. And the cover part 22 is being fixed to the chamber part 14 by the fixing member comprised by the butterfly bolt etc., so that it can attach or detach without using a tool, and can open and close the opening 21 for maintenance. Consists of.

That is, even if foreign matters, such as fragments of the broken glass substrate 1, infiltrate into the chamber space 12 from the blower opening 13, the chamber part 14 may inject the foreign matters into the lower surface part 14c of the chamber part 14. ), In particular, can be caught at the outer portion in the transverse width direction that expands downward from the lower surface portion 14c. And since the guide passage part 15 is connected with the horizontal side part 14a of the chamber part 14, and the step | step is formed between the inlet 19 and the lower surface part 14c, the guide path part ( It is possible to prevent foreign matters from entering 15), thereby preventing foreign matters from entering the air supply source 11. The foreign matter caught in the lower surface portion 14c of the chamber portion 14 separates the cover member 22 and opens the maintenance opening 21 to maintain the foreign matter in the chamber space 12. It is comprised so that it can take out to the outside through the opening 21.

Moreover, the chamber part 14 is equipped with the air volume detection means 24 which detects that the supply amount of the air supplied from the air supply source 11 became below a preset amount.

This air volume detecting means 24 is constituted by a swinging body 25 which is suspended and supported around the shaft center along the conveyance direction, a light projector, and a light receiver. The detector 26 is provided, and the oscillator 25 and the detector 26 are located above the inlet port 19 of the horizontal side portion 14a of the outer side in the chamber 14. Is supported. In addition, the oscillator 25 is formed so that the lower end is located below the upper end of the inlet port 19 in the vertical posture. When the air supply 11 is operated to supply air from the air supply 11, The body 25 is set to switch to the inclined posture which rocked inward from the vertical posture.

In the state in which air is properly supplied from the air supply source 11, the swinging body 25 swings at a predetermined angle or more, so that the detector 26 is in a detection state for detecting the swinging body 25. . In addition, air is not properly supplied from the air supply source 11 due to clogging of the vibration damping filter 10, and the supply amount of the air to be supplied is set to a predetermined amount (for example, the glass substrate 1 to be conveyed is bent downward and blown). Supply amount which may come into contact with support means 2] Since the oscillator 25 only swings below the set angle, the detector 26 does not detect the oscillator 25 without detection. It is supposed to be in a state.

[Information board department]

As shown in FIG.2 and FIG.3, the guide board part 16 carries the air blown off from the chamber part 14 (air blowing part 20) toward the lower surface of the glass substrate 1 of the glass substrate 1; A pair is arranged in a state adjacent to both sides of the horizontal width direction with respect to the chamber part 14 so that it may guide in the horizontal width direction along a lower surface. And the protrusion part 27 is provided in the edge part of the outer side in one of a pair of guide plate part 16, and the protrusion part 27 is located in the height below the lower surface of the glass substrate 1 conveyed, and the guide plate part ( It protrudes upward from the upper surface of 16), and is formed so that it may extend continuously linearly along a conveyance direction.

Adding a description, each of a pair of guide plate part 16 is provided in a horizontal attitude | position so that the upper surface may follow the lower surface of the glass substrate 1 conveyed. In addition, the chamber part 14 is formed so that the upper surface may follow the lower surface of the glass substrate 1 which is conveyed, and each pair of guide plate part 16 and the chamber part 14 has the same top surface as each other. It is arrange | positioned in the state to become.

In the pair of guide plates 16, the outer side guide plate portion 16b adjacent to the outside of the chamber portion 14 extends to the vicinity of the propulsion force applying means 3 at an outer end in the transverse direction. As for the inner side guide plate part 16a adjacent to the inside of the chamber part 14, the inner edge part of the horizontal width direction extends to the vicinity of the center part of the horizontal width direction of the plate-shaped conveyance apparatus H. As shown in FIG.

Further, the inner guide plate portion 16a is formed narrower in the widthwise direction than the outer guide plate portion 16b. Thus, by forming the horizontal width of the pair of guide plate portions 16, the chamber portion 14 is arranged in a state inclined toward the exhaust passage 17a side of the center portion rather than the exhaust passage 17b at the end portion, and thus the chamber portion 14 The air blown out from) is supplied to the lower surface near the center of the glass substrate 1.

Moreover, the width | variety of the width direction of the inner side guide plate part 16a is formed in the width of about 1 / 3-1 / 4 of the width | variety of the width direction of the chamber part 14, and the outer side guide plate part 16b is carried out. The width | variety of the width direction of the width | variety is formed in about 2.5 times the width | variety of the width | variety of the width direction of the chamber part 14. As shown in FIG.

And the protrusion part 27 is provided in the edge part of the outer side in the outer side guide plate part 16b over the full width of the guide plate part 16 along a conveyance direction. In addition, the protrusion part 27 is not provided in the guide plate part 16a of an inner side.

That is, since the distance from the chamber part 14 to the exhaust path 17b of the edge part is longer than the distance from the chamber part 14 to the exhaust path 17a of the center part, the air blown out from the chamber part 14 is an inner side. It is easy to flow in, and does not flow easily outward. However, since the air flowing outward from the chamber portion 14 is not easily exhausted from the exhaust passage 17b at the end due to the presence of the protruding portion 27, a layer of air is also formed outside the chamber portion 14. It is intended to be easy to do.

In the guide plate part 16, the support body 28 is formed in the state which protrudes upwards rather than the upper surface of the guide plate part 16, and is spaced apart below the glass substrate 1 conveyed, The glass substrate 1 squeezed downward due to the failure of the blowable support means 2 due to the failure of the blowable support means 2, etc. is lower than the upper surface of the guide plate 16 by the support 28. It is configured to support upwards.

And the support body 28 is comprised by the resin ball body which can be rotated, and is the width direction of the inner edge part in the guide plate part 16a of the inside, and the width direction in the guide plate part 16b of the outer side. It is provided in each of the center part and the inner edge part in the outer side guide plate part 16b at predetermined intervals along a conveyance direction.

As described above, in the present embodiment, the air supply source 11 includes the ejection opening 13 in the chamber portion 14 when the supply port 18 formed on the supply surface of the air supply source 11 is viewed in plan view. It is provided in the position shifted to the outer side of the width direction with respect to the chamber part 14 so that it may not overlap. Therefore, even if foreign matters such as fragments of the broken glass substrate 1 enter the chamber space 12 from the jet port 13, the foreign matters can be caught by the lower surface portion 14c of the chamber portion 14. The foreign matters can be prevented from entering the guide passage part 15, whereby the foreign matters can be prevented from entering the air supply source 11.

[Other Examples]

(1) In the above embodiment, the inner guide plate portion 16a is formed to be narrower in the widthwise direction than the outer guide plate portion 16b, but as shown in Fig. 5A, the inner guide plate portion 16a is formed. The width 16a may be formed to be wider in the horizontal width direction than the outer guide plate portion 16b, and the width in the horizontal width direction between the inner guide plate portion 16a and the outer guide plate portion 16b. May be formed in the same width.

(2) In the above embodiment, the pair of blowable support means 2 are arranged so as to be spaced apart from each other so that the exhaust path 17 is formed between the pair of blowable support means 2, but FIG. As shown in (b) of 5, a pair of ventilation support means 2 may be provided in intimate state, and may be arrange | positioned so that the exhaust path 17 may not be formed between a pair of ventilation support means 2. .

In addition, although the pair of ventilation support means 2 was provided and arranged in the horizontal width direction, as shown in FIG.5 (c), it is not necessary to provide a plurality of ventilation support means 2 in the horizontal width direction. In addition, the ventilation support means 2 may be provided by arranging a large number in the horizontal width direction.

(3) In the above embodiment, the chamber portion 14 can be formed in the lower surface portion 14c or the horizontal side portion 14a, and the maintenance opening 21 can be opened and closed. Although the cover member 22 was comprised, the chamber part 14 forms the maintenance opening 21 in the upper surface part 14b, and the punching metal which comprises the upper surface part 14b is used for opening and closing operation. You may comprise and comprise.

(4) In the above embodiment, the air supply source 11 is arranged to supply air upward, and the guide passage portion 15 is connected to one end thereof with the upper surface portion of the air supply source 11, The air supply source 11 may be arrange | positioned so that air may be supplied toward the inner side of the horizontal width direction, and the guide passage part 15 may connect one end part with the horizontal side part inside the air supply source 11.

In addition, in the said Example, although the other end of the guide passage part 15 was connected with the side part of the chamber part 14, the other end of the guide path part 15 was connected with the chamber part 14 of the chamber part 14. As shown in FIG. You may connect with the lower surface part.

(5) In the said embodiment, the chamber part 14 is installed along a conveyance direction, and the guide plate part 16 is installed in the state adjacent to both sides of the width direction with respect to the chamber part 14, and the air supply source ( 11 is installed at a position shifted from the widthwise direction with respect to the chamber portion 14, but the chamber portion 14 is provided along the widthwise direction, and the guide plate portion 16 is conveyed with respect to the chamber portion 14. You may provide in the state adjacent to both sides of the, and the air supply source 11 may be provided in the position shifted to the chamber part 14 in the conveyance direction.

(6) In the above embodiment, the air supply source 11 is configured by the fan filter unit, but the air supply source 11 may be configured by a compressor or the like.

(7) In the above embodiment, the propulsion force imparting means 3 on one side and the propulsion force imparting means 3 on the other end are provided as the propulsion force imparting means 3, but as the propulsion force imparting means 3, Only the propulsion force imparting means 3 of any one of the propulsion force imparting means 3 or the other end propulsion force imparting means 3 may be provided, and as the propulsion force imparting means 3, the horizontal width direction in the glass substrate 1 is provided. May be provided with a driving force imparting means (3) on the center side for contacting and supporting the intermediate portion of the center to impart a driving force to the plate-like body.

(8) In the above embodiment, the upper surface portion 14b of the chamber portion 14 is formed of a punching metal, and the jet port 13 is formed by a hole formed in the punching metal. The whole upper surface part 14b may be opened, and the blowing port 13 may be formed by the opening.

1: platelet
2: blowing support means
3: propulsion means
9: blowing fan
10: dust removal filter
11: air source
12: chamber space
13: spout
14: chamber portion
15: guide passage
16: information board
16a: inner guide plate
16b: outer side guide plate
17a: Exhaust Furnace
21: Maintenance opening
22: cover member

Claims (9)

Blowing support means for supplying air toward a lower surface of the plate-like body to support the plate-like body in a non-contact state;
Propulsion force imparting means for imparting a propulsion force in a conveying direction to the plate-like body
Including,
The said blowing type support means is a plate-shaped object conveying apparatus provided in the location located in the horizontal width of the conveyance path | route of the said plate-shaped object,
The blowing support means,
An air source for supplying air;
A chamber portion which forms a chamber space into which air from the air supply source is press-fitted, and has a blowing port for blowing air upward from the chamber space;
A guide passage portion communicating the air supply source and the chamber part in a state of guiding air supplied from the air supply source to the chamber space;
Guide plate portion disposed in a state adjacent to the chamber portion to guide the air ejected from the jet port to the lower surface of the plate body along the lower surface of the plate body
And,
The said air supply source is provided in the plate-shaped conveyance apparatus provided in the position shifted in the horizontal direction with respect to the said chamber part so that it may not overlap with the said blowing port in the said chamber part in plan view. The method of claim 1,
The chamber portion is provided to extend along the conveying direction,
The guide plate portion is disposed in a state adjacent to both sides of the horizontal width direction intersecting the conveying direction with respect to the chamber portion,
The said air supply source is provided in the plate-shaped object conveyance apparatus provided in the position shifted in the said width direction with respect to the said chamber part. The method of claim 2,
The blowing support means is provided in pairs in the transverse width direction intersecting the conveying direction,
The plate-shaped conveyance apparatus which is provided between the said pair of ventilation support means in which the exhaust path which exhausts the air on the said guide plate part to the space below the said guide plate part is formed. The method of claim 3,
As said propulsion force provision means, the propulsion force provision means of the one end side which contact-supports the one end part of the said horizontal width direction in the said plate-shaped object, and provides a propulsion force in a conveyance direction with respect to the said plate-shaped object, and the said horizontal width in the said plate-shaped object And a pair of propulsion force imparting means with the propulsion force imparting means on the other end for contacting and supporting the other end of the direction to impart the propulsive force in the conveying direction to the plate-like body,
Each of the guide plate portions provided in the pair of blowing support means has an inner guide plate portion close to the exhaust passage in the transverse width direction in the transverse width direction than the guide plate portion farther from the exhaust passage in the transverse width direction. The plate-shaped conveyance apparatus formed and formed in narrow width. 5. The method according to any one of claims 1 to 4,
The said chamber part is a plate-shaped conveyance apparatus comprised by the cover member which is provided with the maintenance opening part in the lower surface part or the side part of the said chamber part, and can open and close the said maintenance opening. 5. The method according to any one of claims 1 to 4,
The air source is arranged to supply air upwards,
One end portion of the guide passage portion is connected to the upper surface portion of the air supply source, the other end portion is connected to the side portion of the chamber portion, and the passage width in the vertical direction is set to the chamber portion. The plate-shaped conveyance apparatus formed in the wide width toward the side. 5. The method according to any one of claims 1 to 4,
The said air supply source is a plate-shaped conveyance apparatus comprised by the fan filter unit comprised by assembling an electric blowing fan and a damping filter integrally. 5. The method according to any one of claims 1 to 4,
The said air supply source is provided in the plate-shaped conveyance apparatus provided in the position shifted below the said chamber part to the downward side so that it may not overlap with the said chamber part from the horizontal side. 5. The method according to any one of claims 1 to 4,
A protruding portion is provided at an end of the outer side of the guide plate portion, and the protruding portion protrudes upward from the upper surface of the guide plate portion at a height located below the lower surface of the plate-like body to be conveyed, and extends linearly and continuously along the conveying direction. Plate-shaped conveyance apparatus formed so that.

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