CN102745453A - Plated-shaped article transporting device - Google Patents
Plated-shaped article transporting device Download PDFInfo
- Publication number
- CN102745453A CN102745453A CN2011104373252A CN201110437325A CN102745453A CN 102745453 A CN102745453 A CN 102745453A CN 2011104373252 A CN2011104373252 A CN 2011104373252A CN 201110437325 A CN201110437325 A CN 201110437325A CN 102745453 A CN102745453 A CN 102745453A
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- China
- Prior art keywords
- air
- container portions
- air supply
- type support
- horizontal cross
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning In General (AREA)
Abstract
A device for transporting a plate shaped body comprises blowing type support units(2) and propelling force supplying units(3). The blowing type support units(2) supply air to the bottom surface of a plate shaped body(1) and support the plate shaped body(1) in a contactless state. The propelling force supplying units apply propelling force of a transporting direction to the plate shaped body. The blowing type support units are installed in positions locating within a horizontal width of a transporting path of the plate shaped body. Each blowing type support unit comprises air supply sources(11), a chamber(14) provided with a air outlet port (13) outputting the air upwards, guide passage parts(15)connecting the air supply sources(11) and the container(14), a guide plate portion (16) and guide plate parts(16), which is configured adjacently to the foregoing chamber portion, and when seen from the plane perspective the air supply source and the ejection ports in the chamber portion are arranged staggeringly without repetition in a horizontal direction relative to the chamber portion. The plated-shaped article(1) transporting device capable of easily removing foreign matters.
Description
Technical field
The present invention relates to plate-like body conveyance device; This Handling device has: thus apply the propulsive force applying unit of carrying the propulsive force on the direction with the blast type support unit of the accommodating plate-shaped body of contactless state and to tabular body to the lower surface air supply of tabular body, and said blast type support unit is located at the position of the horizontal wide size that is positioned at tabular body carrying path.
Background technology
Above-mentioned plate-like body conveyance device is with the lower surface air supply of blast type support unit to tabular body; Thereby with the accommodating plate-shaped body of contactless state; And this tabular body is applied the propulsive force on the carrying direction, thereby along carrying direction carrying tabular body with the propulsive force applying unit.And the blast type support unit is located at the position of the horizontal wide size that is positioned at tabular body carrying path, thereby makes plate-like body conveyance device comparatively compact on horizontal cross direction.
In addition; On this plate-like body conveyance device; Past is the fan filter unit that is provided with as the blast type support unit, and above fan filter unit at the overlapping state of above-below direction portion's (seeing patent documentation 1) to be set with fan filter unit.
Patent documentation 1: Japanese patent of invention spy opens the 2005-029359 communique
When adopting above-mentioned traditional plate-like body conveyance device, in case the tabular body of carrying is damaged, the fragment of the tabular body that this is damaged will be fallen on the container portions as foreign matter, and foreign matter can be invaded in the vessel space from the ejiction opening of container portions sometimes.And the foreign matter in the intrusion vessel space can continue to fall and invade the blast type support unit.In case there is foreign matter to invade the blast type support unit, will take off the blast type support unit and remove in order to remove this foreign matter, and the operation of removing foreign matter bothers very much.Especially when constituting the blast type support unit with fan filter unit; Because foreign matter can invade in the dust removal filter of fan filter unit; Therefore must take off the blast type support unit in order to remove fragment and change dust removal filter etc., the operation of removing foreign matter is bothered very much.
Summary of the invention
The present invention In view of the foregoing, purpose is to provide a kind of plate-like body conveyance device that carries out the foreign bodies removal operation easily.
Plate-like body conveyance device of the present invention has: blast type support unit, this blast type support unit are located at the position of the horizontal wide size that is positioned at tabular body carrying path, and to the lower surface air supply of tabular body, thereby with the accommodating plate-shaped body of contactless state; And the propulsive force applying unit, this propulsive force applying unit applies the propulsive force on the carrying direction to tabular body.Said blast type support unit has: the air supply source that air supply is used; Container portions, this container portions form and supply the container cavity that the air from said air supply source is pressed into and have from the ejiction opening of this container cavity to top ejection air; Guide channel portion, this guide channel portion makes said air source be communicated with said container portions with the state that will be directed to said container cavity from the air that said air supply source is supplied with; The guiding board; This guiding board and said container portions are in abutting connection with configuration; With to from said ejiction opening to the lower surface channeling conduct of the air of the lower surface of tabular body ejection along tabular body; Said air supply source is located at the position of staggering in the horizontal direction with respect to said container portions, thereby not overlapping with the said ejiction opening of said container portions when overlooking.
That is, the air of supplying with from the air supply source flows and is pressed in the container cavity of container portions along guide channel portion, and this air sprays to the top from the ejiction opening of container portions.And, supply with to the lower surface of tabular body to the air of top ejection from ejiction opening, in the space of air between guiding board and tabular body that the lower surface of tabular body is supplied with, flow along the upper surface of guiding board and the lower surface of tabular body.
Promptly; At the position that is provided with container portions; Can utilize from container portions to the air of top ejection lower surface, and at the position that is provided with the guiding board, then can be utilized in the air layer that forms on this guiding board lower surface with the accommodating plate-shaped body of contactless state with the accommodating plate-shaped body of contactless state; Therefore not only at the position that is provided with container portions, just being connected in the position that is provided with the guiding board around the container portions also can be with the accommodating plate-shaped body of contactless state.
In addition; From the air of air supply source is to flow and be pressed in the container cavity of container portions along guide channel portion; Even therefore in the air that the air supply source is supplied with, produce pulsation (pulsation); Also can absorb this pulsation, therefore can alleviate from the pulsation of the air of ejiction opening ejection through the positice ground effect (cushioning) of container cavity.
And, the air supply source is located at the position of staggering in the horizontal direction with respect to said container portions, thus not overlapping when overlooking with the ejiction opening of container portions.Thereby even there are the foreign matters such as fragment of damaged tabular body to invade in the container cavity from ejiction opening, this foreign matter can directly not fallen the air supply source yet, so foreign matter is difficult to the invading air supply source.That is, the foreign body retention that can make intrusion therefore as long as remove the foreign matter in the container cavity, carries out the operation of removing foreign matter in container portions easily.Thereby, can realize carrying out easily the plate-like body conveyance device of foreign bodies removal operation.
In the embodiment of plate-like body conveyance device of the present invention; Best said container portions is arranged to along the form of said carrying direction extension; Said guiding board is configured at the horizontal cross direction both sides that intersect with said carrying direction and the state of said container portions adjacency, and said air supply source is located at respect to said container portions on the position of staggering on the said horizontal cross direction.
Promptly; Supply with to the lower surface of tabular body to top ejection air and with air from ejiction opening along the container portions of carrying the direction setting; And in the space of air between guiding board and the tabular body above it that the lower surface of this tabular body is supplied with, flow along the upper surface of guiding board and the horizontal cross direction of lower surface and edge of tabular body, board and the container portions of wherein leading be adjacency in horizontal cross direction both sides.
Thereby, can make the blast type support unit even to the bearing force of tabular body on the carrying direction, the deflection (deflection) of tabular body when reducing along carrying direction carrying tabular body.
More specifically be; At the position that is provided with container portions; Be to utilize from container portions to come the lower surface of accommodating plate-shaped body, and, then be to be utilized in the lower surface that the air layer that forms on this guiding board comes accommodating plate-shaped body at the position that is provided with the guiding board to the air of top ejection; Therefore at position that is provided with container portions and the position that is provided with the guiding board, different to the bearing force that the lower surface of tabular body supports.
In case container portions that this bearing force is different and guiding board are along carrying direction and row arrangement; Position difference on the carrying direction will cause support unit different to the bearing force of tabular body, and therefore teetertottering of tabular body take place when along carrying direction carrying tabular body easily.
To this; Through with container portions and guiding board along horizontal cross direction and row arrangement; Can make the blast type support unit even to the bearing force of tabular body on the carrying direction, therefore along carrying direction carrying tabular body the time, be difficult for teetertottering of tabular body taken place, can reduce the deflection of tabular body.
In the embodiment of plate-like body conveyance device of the present invention; Said blast type support unit is arranged side by side a pair of along the horizontal cross direction that intersects with said carrying direction, and between said a pair of blast type support unit, forms the exhaust pathway that the air on the said guiding board is discharged to the space of said guide plate subordinate side.
Promptly; Through the exhaust pathway of discharging in the space of air below the guiding board that forms between a pair of blast type support unit that is arranged side by side along horizontal cross direction on the board that will lead; And, make air be difficult for being trapped in the below of the pars intermedia of tabular body from this exhaust pathway air-out.Thereby, because air is difficult for being trapped in the below of pars intermedia, be handled upside down under that the tabular body that is handled upside down can be suppressed at the protuberance of pars intermedia, the state near flat-hand position, can alleviate the load that tabular body is applied.
In the embodiment of plate-like body conveyance device of the present invention; As said propulsive force applying unit; Preferably have following a pair of propulsive force applying unit: thus said horizontal cross direction one end on the tabular body is contacted support applies the propulsive force on the carrying direction to tabular body a distolateral propulsive force applying unit; Thereby and the said horizontal cross direction the other end on the tabular body contacted support the other end side propulsive force applying unit that tabular body is applied the propulsive force on the carrying direction, the guiding board that is arranged on the said a pair of blast type support unit constitutes separately: littler than the outside guiding board away from said exhaust pathway on said horizontal cross direction at the width of inboard guiding board on said horizontal cross direction near said exhaust pathway on the said horizontal cross direction.
Promptly; Utilize a distolateral propulsive force applying unit that the end of tabular body on horizontal cross direction contacted support; And utilize other end side propulsive force applying unit that tabular body the other end on horizontal cross direction is contacted support, thereby the both ends of tabular body on horizontal cross direction are contacted support with a pair of propulsive force applying unit.Thereby; Support and with the accommodating plate-shaped body of stable status through the both ends of tabular body on horizontal cross direction being contacted with a pair of propulsive force applying unit; And the both ends of the tabular body that supports are applied propulsive force, therefore can be with stable status along carrying direction carrying tabular body.
And; Because the guiding board that is arranged on a pair of blast type support unit constitutes separately: the width of inboard guiding board on horizontal cross direction is littler than outside guiding board; Therefore container portions finally is the state configuration with deflection exhaust pathway one side, can be with supplying with near the air of the container portions ejection lower surface the horizontal cross direction central authorities of tabular body.Thereby; Through air being supplied with near the lower surface of the tabular body central authorities on the horizontal cross direction with a pair of blast type support unit; Suppressed of the contact pressure minimizing of a pair of propulsive force applying unit to tabular body; Can be suppressing the lax pars intermedia of the accommodating plate-shaped body of mode on horizontal cross direction of tabular body, thereby tabular body can be handled upside down under the state of stable support obtaining, and can realize the carrying of tabular body smoothly.
In the embodiment of plate-like body conveyance device of the present invention, best said container portions is used opening at its lower face or side surface part formation maintenance, and is provided with the cover part of this maintenance of freely openable with opening.
Promptly; Use opening owing to formed maintenance in container portions; And be provided with the cover part of this maintenance of freely openable with opening; Therefore at ordinary times can enough cover parts close and safeguard and use opening, and in the time will carrying out upkeep operation the uncover parts, and from maintenance with opening to carrying out upkeep operation in the container cavity.
Thereby when foreign matter was invaded container portions, the uncover parts just can be removed foreign matter with opening from safeguarding, carry out the foreign bodies removal operation easily.
In the embodiment of plate-like body conveyance device of the present invention; Best said air supply source has to the air fed supply range in top; One end of said guide channel portion is connected with the supply range of said air supply source; The other end is connected with the side surface part of said container portions, and the passage width of above-below direction is along with extending and broadening to said container portions one side.
That is, can the air of supplying with to the top from the air supply source be directed to container portions one side through guide channel portion is pressed in the container cavity of container portions.And; Because the air generation interflow of supplying with from a certain air supply source of container portions one side can make the amount of air that guided by guide channel portion increase; But since guide channel portion at the passage width of above-below direction along with extending and broadening to container portions one side; Utilization along with extending to container portions one side gradually the guide channel portion of broadening guide the air that increases gradually along with to container portions one side flow, just can make air successfully flow to container portions.
In the embodiment of plate-like body conveyance device of the present invention, best said air supply source is by electrodynamic type blowing fan and dust removal filter assembling all-in-one-piece fan filter unit are constituted.
That is, as the setting of air supply source, as long as be provided with electrodynamic type blowing fan and dust removal filter assembling all-in-one-piece fan filter unit, the setting of blast type support unit is very simple, thereby is convenient to make plate-like body conveyance device.
In the embodiment of plate-like body conveyance device of the present invention, best said air supply source is located at the position of below above-below direction, staggering with said container portions, thereby in that to make the cross side apparent time not overlapping with said container portions.
In addition; In the embodiment of plate-like body conveyance device of the present invention; The outboard end that is preferably in said guiding board is provided with convex strip portions; Said convex strip portions protrudes to the top from the upper surface of said guiding board, and it highly arrives the below of the lower surface of the tabular body of being carried, and said convex strip portions linearly extends on shape ground along the carrying direction continuously.
Description of drawings
Fig. 1 is the block diagram of plate-like body conveyance device.
Fig. 2 is the vertical profile front view of plate-like body conveyance device.
Fig. 3 is the vertical profile front view of blast type support unit.
Fig. 4 is the vertical profile front view of container portions.
Fig. 5 is the vertical profile front view of the blast type support unit of other embodiment.
The specific embodiment
Below in conjunction with description of drawings plate-like body conveyance device of the present invention, this Handling device is used to carry the tabular body as rectangular substrate, is the glass substrate that is used to carry flat-panel monitor (flat-panel display) usefulness specifically.
As shown in Figure 1, plate-like body conveyance device H has: thus contact the propulsive force applying unit 3 that supports and glass substrate 1 applied the propulsive force on the carrying direction with the blast type support unit 2 of contactless state support glass substrate 1 and to the lower surface of glass substrate 1 towards the lower surface supplying clean air of glass substrate 1.In addition, plate-like body conveyance device H is provided with many tabular body carrying unit U with blast type support unit 2 and propulsive force applying unit 3 along the carrying direction.
Propulsive force applying unit 3 is provided with a plurality of rotation rollers 6 along the carrying direction; The horizontal cross direction end with carrying direction quadrature on 6 pairs of glass substrate 1 lower surfaces of this rotation roller contacts support; And use to drive and respectively rotate roller 6 rotations, glass substrate 1 is applied the propulsive force on the carrying direction with each rotation roller 6 cooresponding electro-motor 7.Also can adopt the structure that drives a plurality of rotation roller rotations with an electro-motor through gear mechanism.
In addition; As propulsive force applying unit 3; Be provided with a pair of propulsive force applying unit 3; That is, to horizontal cross direction one end on glass substrate 1 lower surface contact support, glass substrate 1 being applied a distolateral propulsive force applying unit 3 of the propulsive force of carrying on the direction, and to the horizontal cross direction the other end on glass substrate 1 lower surface contact supports, glass substrate 1 is applied the other end side propulsive force applying unit 3 of carrying the propulsive force on the direction.Contact support with this a pair of propulsive force applying unit 3 from the below to the horizontal cross direction both ends on glass substrate 1 lower surface, and these both ends are applied the propulsive force on the carrying direction.
As shown in Figures 2 and 3, when overlooking, blast type support unit 2 is located between a pair of propulsive force applying unit 3.And blast type support unit 2 is arranged on the position that integral body is positioned at the horizontal wide size in glass substrate 1 carrying path, to the horizontal cross direction pars intermedia supplying clean air of glass substrate 1 lower surface, thereby with contactless state support glass substrate 1.
Promptly; As shown in Figures 2 and 3; Plate-like body conveyance device H contacts support with the horizontal cross direction both ends of 3 pairs of glass substrates 1 of propulsive force applying unit; And give noncontact with the horizontal cross direction central portion of 2 pairs of glass substrates 1 of blast type support unit and support, apply the propulsive force on the carrying direction, thus along carrying direction carrying glass substrate 1 at the horizontal cross direction both ends with 3 pairs of glass substrates 1 of propulsive force applying unit under this state.
[blast type support unit]
Blast type support unit 2 below is described.
As shown in Figure 3, blast type support unit 2 has air supply source 11, container portions 14, guide channel portion 15 and the guiding board 16 that air supply is used.Container portions 14 forms the container cavity 12 that supplies the air from air supply source 11 to be pressed into, and has from the ejiction opening 13 of this container cavity 12 to top ejection air.Guide channel portion 15 will be directed to container portions 14 by the air that air supply source 11 is supplied with.Mobile along the lower surface of glass substrate 1 to the air of the lower surface ejection of glass substrate 1 in order to guide from ejiction opening 13, guiding board 16 is adapted to the state with container portions 14 adjacency.Here, so-called " being pressed into " is meant so that the pressure that imports the air in the container cavity 12 from air source 11 is higher than the mode of container portions 14 exterior pressure imports.This pressure can make air from ejiction opening 13 ejections.
Blast type support unit 2 will be directed to the container portions 14 that is provided with along the carrying direction through guide channel portion 15 from the air that air supply source 11 is supplied with, and the air that will in container portions 14, be suppressed pulsation from ejiction opening 13 to above ejection.
Under the state of giving the noncontact support with 2 pairs of glass substrates 1 of blast type support unit; Just supply with to the air of top ejection from ejiction opening 13, and this flows at horizontal cross direction along the upper surface of guiding board 16 and the lower surface of glass substrate 1 in the space of air between guiding board 16 and glass substrate 1 that the lower surface of glass substrate 1 is supplied with to the lower surface of glass substrate 1.
Between guiding board 16 and glass substrate 1, form air layer through making air flows like this; Not only in that be provided with can be with contactless state support glass substrate 1 to the position of the container portions 14 of the lower surface of glass substrate 1 ejection air, also can be at the position that is provided with guiding board 16 of its horizontal side with contactless state support glass substrate 1.
Blast type support unit 2 is a pair of at a distance from being provided with at the mutual empty standard width of a room in an old-style house of horizontal cross direction; And the exhaust pathway 17 (be sometimes referred to as the exhaust pathway 17a of central portion, be equivalent to exhaust pathway of the present invention) of discharging in the space of air below guiding board 16 that forms between a pair of blast type support unit 2 on the board 16 that will lead.In addition; A pair of blast type support unit 2 is separately with respect to propulsive force applying unit 3 and the separated state setting of the mutual empty standard width of a room in an old-style house, at the exhaust pathway 17 (being sometimes referred to as the exhaust pathway 17b of end) that also forms the space discharge of air below guiding board 16 on the board 16 that will lead between blast type support unit 2 and the propulsive force applying unit 3.
By the way, blast type support unit 2 is arranged along the carrying direction with continuum of states, and in the container portions 14 of carrying direction adjacency to each other and very close to each other to each other at the guiding board 16 of carrying direction adjacency.
The each several part of blast type support unit 2 below is described; But a pair of blast type support unit 2 is to constitute symmetrically with respect to the imaginary line that extends in the middle position upper edge of Width carrying direction; Their structure is identical; The blast type support unit 2 that is positioned at horizontal cross direction one side only is described therefore, and is omitted explanation the blast type support unit 2 that is positioned at opposite side.In addition, when the each several part of explanation blast type support unit 2, a side that will form the exhaust pathway 17a of horizontal cross direction central portion sometimes is called the inboard, and a side that will form the exhaust pathway 17b of horizontal cross direction end is called the outside.
[air supply source]
By the way; It is rectangular when air supply source 11 is overlooked; Air supply source 11 is a blast type support unit 2 at about 1/2～1/3 of the width of horizontal cross direction at the width of horizontal cross direction, and air supply source 11 is a blast type support unit 2 at about 1/2 of the width of carrying direction at the width of carrying direction.
The air supply source 11 that so is provided with becomes following state: the upper end of its horizontal cross direction medial end is near the lower end of the horizontal cross direction outboard end of container portions 14.By the way, when overlooking, the outboard end of the medial end of air supply source 11 and container portions 14 is overlapping.
[guide channel portion]
Specifically be; One end of guide channel portion 15 is connected with supply port 18 framework on every side that is positioned at of air supply source 11; Supply range with air supply source 11 is connected thus; The other end of guide channel portion 15 then is connected with introducing port 19 side plate on every side that is positioned at of container portions 14, and the horizontal side surface part 14a with container portions 14 outsides is connected thus.
The upper part of guide channel portion 15 forms skewed that the inboard of cross direction sidelong raises, and sees that from the carrying direction shape of guide channel portion 15 is triangular in shape.The guide channel portion 15 that so forms, its above-below direction passage width of seeing from the carrying direction is that the outside (near the outboard end of air supply source 11) from horizontal cross direction is towards inboard (near container portions 14) broadening.That is, the passage width of guide channel portion 15 is the inboard broadening of horizontal cross direction that increases towards the air throughput.
By the way; The front surface portion that is configured in carrying direction front end of guide channel portion 15 and the aft section that is configured in the rear end stand vertically and are parallel to each other along horizontal cross direction, and the horizontal cross direction width during the overlooking of guide channel portion 15 is in the outside and the inboard same widths that forms.In addition, guide channel portion 15 forms same widths at passage width on the carrying direction and supply port 18 with the width of introducing port 19 on the carrying direction.
[container portions]
As shown in Figure 4, container portions 14 forms the dun toro shape of the posture of laying across of falling down to the carrying direction, and along the setting of carrying direction, the portion space forms container cavity 12 within it.That is the top surface portion 14b, a pair of horizontal side 14a and the lower face 14c that, form the inner space of container portions 14 extend along the carrying direction.
The top surface portion 14b of container portions 14 constitutes with the anti-metal of scratching, and is used in this and prevents that scratching the hole that forms on the metal forms ejiction opening 13.Like this; The top of container portions 14 just form a plurality of to above the ejiction opening 13 of ejection air, and the top of container portions 14 be provided with by along the setting of carrying direction, be used for the air of supplying with from air supply source 11 to above the air ejection portion 20 that constitutes of a plurality of ejiction openings 13 of ejection.
The previous section that is configured in carrying direction front end of container portions 14 and the aft section that is configured in the rear end stand vertically and are parallel to each other along horizontal cross direction.
And the air that container portions 14 will be directed to channel part 15 guiding imports in the container cavity 12 from introducing port 19, and under the state of the pulsation of the air that has suppressed this importing from a plurality of ejiction openings 13 to above spray.
Introducing port 19 is formed at from the lower face 14c of container portions 14 and plays the position till the setting height, between the lower face 14c of container portions 14 and introducing port 19, forms diff-H.
The upper surface of the horizontal cross direction Outboard Sections of lower face 14c forms tabular surface, and the upper surface of horizontal cross direction inside part forms towards inboard and dip plane that raise to the top.
And, on container portions 14,, form and safeguard, and be provided with the cover part 22 of this maintenance of freely openable with opening 21 with opening 21 from the horizontal side surface part 14a of lower face 14c up to the inboard.Cover part 22 usefulness are secured on the container portions 14 by the fixed parts that butterfly bolt etc. constitutes, and need not can load and unload by serviceable tool, open and close thus and safeguard with opening 21.
That is, even there are the foreign matters such as fragment of damaged glass substrate 1 to invade in the container cavity 12 from ejiction opening 13, container portions 14 also can assign to catch foreign matter through the horizontal cross direction outside portion of bulging downwards on its lower face 14c, especially the lower face 14c.And, owing to guide channel portion 15 is connected with the horizontal side surface part 14a of container portions 14, and between introducing port 19 and lower face 14c, formed diff-H, can prevent that therefore foreign matter from getting in the guide channel portion 15, can prevent foreign matter invading air supply source 11 thus.As for the foreign matter of being caught by the lower face 14c of container portions 14,, just can the foreign matter in the container cavity 12 be fetched into the outside through safeguarding with opening 21 through cover part 22 being taken off and will safeguarding with opening 21 and open.
In addition, on container portions 14, be provided with air quantity detecting unit 24, being used to detect the air delivery volume of supplying with from air supply source 11 is the situation below the set amount.
This air quantity detecting unit 24 be provided with round with the carrying consistent axle center of direction and droop pendular body 25 that freely swings and the detection bodies 26 that constitutes by floodlight device and light-receiving device, pendular body 25 and detection bodies 26 are supported on the position, top of introducing port 19 of the horizontal side surface part 14a in the outside of container portions 14.In addition, its lower end was positioned at the below of the upper end of introducing port 19 when pendular body 25 was in vertical position, and a denier air supply source 11 work and from air supply source 11 air supplies, pendular body 25 just switches to the inclination attitude of swing to the inside from vertical position.
And when when air supply source 11 has been supplied with an amount of air, pendular body 25 just can swing to more than the set angle, makes detection bodies 26 become the detected state of wobble detection body 25.In addition; To fail to supply with an amount of air, make the air delivery volume of being supplied with from air supply source 11 be that set amount (for example possibly make glass substrate 1 deflection downwards of being carried and the delivery volume that contacts with blast type support unit 2) is when following when stopping up owing to dust removal filter 10; Pendular body 25 just swings only to below the set angle, makes detection bodies 26 become the not non-detection status of wobble detection body 25.
[guiding board]
As shown in Figures 2 and 3; For will be from container portions 14 (air ejection portion 20) to the air of the lower surface of glass substrate 1 ejection along the lower surface of glass substrate 1 and along horizontal cross direction guiding, guiding board 16 is so that the state configuration of adjacency is a pair of with it in the horizontal cross direction both sides of container portions 14.And; In a pair of guiding board 16, be provided with convex strip portions 27 on one the outboard end; Convex strip portions 27 protrudes to the top from tabular 16 the upper surface of leading, and it highly reaches the below of lower surface of the glass substrate 1 of carrying, and convex strip portions 27 along the carrying direction linearly shape extend continuously.
Specifically be that the upper surface that a pair of guiding board 16 is arranged to separately with flat-hand position is consistent with the lower surface of the glass substrate 1 of carrying.By the way, it is consistent with the lower surface of the glass substrate 1 of carrying that container portions 14 is arranged to its upper surface, and a pair of guiding board 16 and container portions 14 are configured to the state that separately upper surface becomes a plane.
And; In a pair of guiding board 16 with the horizontal cross direction outboard end of the outside guiding board 16b of the outside adjacency of container portions 14 extend to propulsive force applying unit 3 near, extend near the horizontal cross direction central portion of plate-like body conveyance device H with the horizontal cross direction medial end of the inboard guiding board 16a of the inboard adjacency of container portions 14.
In addition, inboard guiding board 16a is littler than outside guiding board 16b at the width of horizontal cross direction.Horizontal wide through a pair of guiding board 16 of formation like this, make container portions 14 than the exhaust pathway 17b of end more near the exhaust pathway 17a of central portion, make near the lower surface of the air central authorities of glass substrate 1 of container portions 14 ejections and supply with.
By the way, inboard guiding board 16a is a container portions 14 at about 1/3～1/4 of the width of horizontal cross direction at the width of horizontal cross direction, and outside guiding board 16b then is a container portions 14 about 2.5 times of the width of horizontal cross direction at the width of horizontal cross direction.
And convex strip portions 27 is whole guiding board 16 settings along the carrying direction of the outboard end of the 16b of guide plate portion in the outside.By the way, do not establish convex strip portions 27 on the inboard guiding board 16a.
That is, the distance of the exhaust pathway 17b from container portions 14 to the end is than the distance of the exhaust pathway 17a from container portions 14 to central portion, and the air that therefore sprays from container portions 14 flows to the inside easily and is difficult to flow laterally.Yet, from container portions 14 laterally flow air be difficult to extract owing to the existence of convex strip portions 27 from the exhaust pathway 17b of end, even therefore also be easy to form air layer in the outside of container portions 14.
On guiding board 16, be provided with supporter 28; This supporter 28 protrudes to the top from the upper surface of guiding board 16; And with the glass substrate that is handled upside down 1 below break away from; When because fault of blast type support unit 2 etc. when causing that degradation makes glass substrate 1 deflection downwards under the bearing force of blast type support unit 2, can enough supporters 28 on than the upper surface of guiding board 16 position above more support glass substrate 1.
As stated; In the present embodiment; Air supply source 11 forms supply port 18 on the supply range of this air supply source 11, thereby this supply port 18 is provided in when overlooking with respect to container portions 14 sidelong the cross direction outside stagger not with container portions 14 on the overlapping position of ejiction opening 13.Thereby; Even the foreign matters such as fragment of damaged glass substrate 1 are arranged invades in the container cavity 12 from ejiction opening 13; This foreign matter also can be caught by the lower face 14c of container cavity 14, can prevent in the foreign matter intrusion guide channel portion 15, thereby prevent foreign matter invading air supply source 11.
[other embodiment]
(1) in above embodiment; Be to make inboard guiding board 16a narrower than outside guiding board 16b at the width of horizontal cross direction; But also can be as Fig. 5 (a); Make inboard guiding board 16a wideer than outside guiding board 16b, perhaps make inboard guiding board 16a identical with outside guiding board 16b at the width of horizontal cross direction at the width of horizontal cross direction.
(2) in the above-described embodiments; A pair of blast type support unit 2 is with the separated state setting of the mutual empty standard width of a room in an old-style house; Thereby between a pair of blast type support unit 2, form exhaust pathway 17; But also can as Fig. 5 (b), a pair of blast type support unit 2 be arranged to the state of closed contact, thereby between a pair of blast type support unit 2, not form exhaust pathway 17.
In addition, more than be to be arranged side by side a pair of blast type support unit 2, but also can as Fig. 5 (c), a blast type support unit 2 be set, or a plurality of blast type support units 2 are set at horizontal cross direction at horizontal cross direction at horizontal cross direction.
(3) in the above-described embodiments; Container portions 14 is on its lower face 14c or horizontal side surface part 14a, to form to safeguard with opening 21; And be provided with the cover part of freely safeguarding with opening 21 22; Safeguard with opening 21 but also can on the top surface portion 14b of container portions 14, form, and the anti-metal of scratching that will constitute top surface portion 14b is made the structure that can open and close.
(4) in the above-described embodiments; Be that air supply source 11 is configured to the air fed state in top; And an end of guide channel portion 15 is connected with the top surface portion of air supply source 11; But also can air supply source 11 be configured to the inboard air fed state of cross direction sidelong, and an end of guide channel portion 15 is connected with the horizontal side surface part of the inboard of air supply source 11.
In addition, in the above-described embodiments, be that the other end with guide channel portion 15 is connected with the side surface part of container portions 14, but also can the other end of guide channel portion 15 be connected with the lower face of container portions 14.
(5) in the above-described embodiments; Be container portions 14 to be set along the carrying direction; In abutting connection with configuration guiding board 16, and set air supply source 11 in the horizontal cross direction both sides of container portions 14, but also can be container portions 14 to be set along horizontal cross direction at the position of on horizontal cross direction, staggering with respect to container portions 14; In abutting connection with configuration guiding board 16, and set air supply source 11 in the carrying direction both sides of container portions 14 at the position of on the carrying direction, staggering with respect to container portions 14.
(6) in the above-described embodiments, be to constitute air supply source 11 with fan filter unit, constitute air supply source 11 but also can wait with compressor.
(7) in the above-described embodiments; As propulsive force applying unit 3; Be that an end propulsive force applying unit 3 and other end propulsive force applying unit 3 is set; But, also can only establish any the propulsive force applying unit 3 in an end propulsive force applying unit 3 and the other end propulsive force applying unit 3, perhaps as propulsive force applying unit 3; As propulsive force applying unit 3, thereby the horizontal cross direction pars intermedia that also can be provided with glass substrate 1 contacts support applies propulsive force to tabular body center side propulsive force applying unit 3.
(8) in the above-described embodiments; Be with preventing scratching the top surface portion 14b that metal constitutes container portions 14; And be used in and prevent that scratching the hole that forms on the metal forms ejiction opening 13, but also can be the whole top surface portion 14b opening that makes container portions 14, and form ejiction opening 13 with this opening.
(nomenclature)
1 tabular body
2 blast type support units
3 propulsive force applying units
9 blowing fans
10 dust removal filters
11 air supply sources
12 container cavity
13 ejiction openings
14 container portions
15 guide channel portions
16 guiding boards
The inboard guiding of 16a board
16b outside guiding board
The 17a exhaust pathway
Opening is used in 21 maintenances
22 cover parts
Claims (9)
1. plate-like body conveyance device has:
Blast type support unit, this blast type support unit are provided in the position of the horizontal wide size that is positioned at tabular body carrying path, and to the lower surface air supply of tabular body, thereby with the accommodating plate-shaped body of contactless state;
And the propulsive force applying unit, this propulsive force applying unit applies the propulsive force on the carrying direction to tabular body,
It is characterized in that,
Said blast type support unit has:
The air supply source that air supply is used;
Container portions, this container portions form the container cavity that supplies the air from said air supply source to be pressed into, and have from the ejiction opening of this container cavity to top ejection air;
Guide channel portion, this guide channel portion makes said air source be communicated with said container portions with the state that will be directed to said container cavity from the air that said air source is supplied with;
And the guiding board, this guiding board and said container portions be in abutting connection with configuration, thereby will guide to the air of the lower surface ejection of the tabular body lower surface along tabular body from said ejiction opening,
Said air supply source is provided in the position of staggering in the horizontal direction with respect to said container portions, thereby not overlapping with the said ejiction opening of said container portions when overlooking.
2. plate-like body conveyance device as claimed in claim 1 is characterized in that,
Said container portions is arranged to along the form of said carrying direction extension,
Said guiding board is configured in the horizontal cross direction both sides that intersect with said carrying direction of said container portions the state of adjacency with it,
Said air supply source is provided in the position of on said horizontal cross direction, staggering with respect to said container portions.
3. plate-like body conveyance device as claimed in claim 2 is characterized in that,
Said blast type support unit is provided with a pair of along the horizontal cross direction that intersects with said carrying direction,
Between said a pair of blast type support unit, form the exhaust pathway that the air on the said guiding board is discharged to the space of said guide plate subordinate side.
4. plate-like body conveyance device as claimed in claim 3 is characterized in that,
As said propulsive force applying unit; Have following a pair of propulsive force applying unit: thus said horizontal cross direction one end on the tabular body is contacted support applies the propulsive force on the carrying direction to tabular body an end propulsive force applying unit; Thereby and the said horizontal cross direction the other end on the tabular body contacted support the other end propulsive force applying unit that tabular body is applied the propulsive force on the carrying direction
The guiding board that is arranged on the said a pair of blast type support unit constitutes separately as follows: littler than the outside guiding board away from said exhaust pathway on said horizontal cross direction at the width of inboard guiding board on said horizontal cross direction near said exhaust pathway on the said horizontal cross direction.
5. like each described plate-like body conveyance device in the claim 1～4, it is characterized in that,
Said container portions is used opening at its lower face or side surface part formation maintenance, and is provided with the cover part of this maintenance of freely openable with opening.
6. like each described plate-like body conveyance device in the claim 1～4, it is characterized in that,
Said air supply source is configured to the air fed state in top,
One end of said guide channel portion is connected with the top surface portion of said air supply source, and the other end is connected with the side surface part of said container portions, and the passage width of above-below direction is along with extending and broadening to said container portions one side.
7. like each described plate-like body conveyance device in the claim 1～4, it is characterized in that,
Said air supply source is by electrodynamic type blowing fan and dust removal filter assembling all-in-one-piece fan filter unit are constituted.
8. like each described plate-like body conveyance device in the claim 1～4, it is characterized in that,
Said air supply source is provided in the position of below above-below direction, staggering with respect to said container portions, thereby in that to make the cross side apparent time not overlapping with said container portions.
9. like each described plate-like body conveyance device in the claim 1～4, it is characterized in that,
Outboard end at said guiding board is provided with convex strip portions, and said convex strip portions protrudes to the top from the upper surface of said guiding board, and it highly arrives the below of lower surface of the tabular body of carrying, and convex strip portions is along the linearly shape ground extension continuously of carrying direction.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-271828 | 2010-12-06 | ||
| JP2010271828A JP5495065B2 (en) | 2010-12-06 | 2010-12-06 | Plate-shaped body transfer device |
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| Publication Number | Publication Date |
|---|---|
| CN102745453A true CN102745453A (en) | 2012-10-24 |
| CN102745453B CN102745453B (en) | 2016-03-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110437325.2A Active CN102745453B (en) | 2010-12-06 | 2011-12-05 | Plate-like body conveyance device |
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| Country | Link |
|---|---|
| JP (1) | JP5495065B2 (en) |
| KR (1) | KR101552534B1 (en) |
| CN (1) | CN102745453B (en) |
| TW (1) | TWI510422B (en) |
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| JP6288554B2 (en) * | 2014-03-11 | 2018-03-07 | オイレス工業株式会社 | Non-contact levitation transfer device |
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| JP2010126295A (en) * | 2008-11-27 | 2010-06-10 | Nippon Sekkei Kogyo:Kk | Method and apparatus for conveying thin sheet-like material |
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2011
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- 2011-11-11 KR KR1020110117690A patent/KR101552534B1/en active IP Right Grant
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| JP2000318122A (en) * | 1999-05-06 | 2000-11-21 | Mitsubishi Heavy Ind Ltd | Sheet guide for sheet-fed press |
| JP4258713B2 (en) * | 2003-07-08 | 2009-04-30 | 株式会社ダイフク | Plate-shaped body transfer device |
| KR20050045455A (en) * | 2003-11-11 | 2005-05-17 | 삼성전자주식회사 | Substrate conveyor |
| KR20050082371A (en) * | 2004-02-18 | 2005-08-23 | 한국과학기술원 | Air conveyer |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20120062618A (en) | 2012-06-14 |
| CN102745453B (en) | 2016-03-02 |
| JP5495065B2 (en) | 2014-05-21 |
| TW201228912A (en) | 2012-07-16 |
| TWI510422B (en) | 2015-12-01 |
| JP2012121641A (en) | 2012-06-28 |
| KR101552534B1 (en) | 2015-09-11 |
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