JP2017164676A - Foreign matter removal device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To use commonly a blower for supplying gas to a spray nozzle of a foreign matter removal device, and a blower for sucking gas from a dust collection box.SOLUTION: A foreign matter removal device has a blower 11, a spray nozzle 12 for spraying gas supplied from the blower 11 to a foreign matter removal object surface 5a, and a dust collection box 20 for taking in gas and foreign matter removed from the foreign matter removal object surface 5a by gas sprayed from the spray nozzle 12, in which a part of gas taken into the dust collection box 20 is sent to the blower 11, and the residue of the gas taken into the dust collection box 20 is discharged to the outside of the dust collection box 20.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a foreign matter removing apparatus that removes foreign matter attached to a foreign matter removal target surface.

  2. Description of the Related Art Conventionally, foreign matter is removed from a product such as a film in order to prevent appearance defects and malfunctions caused by foreign matters such as dust adhering to the product. The removal of the foreign matter can be performed by various methods such as washing with water, removal with an adhesive roll, removal with a jet of air or the like. In particular, foreign matters are often removed by an air flow because of easy management and small damage to products. However, in the foreign matter removal by the jet airflow, the foreign matter removed by the airflow sprayed on the foreign matter removal target surface of the product can be scattered around. If this is left unattended, there is a high possibility that the scattered foreign matter will adhere to the product again and contaminate the product. Therefore, it is necessary to install a dust collection mechanism by forced exhaust around the area where the foreign matter is removed by the jet stream. .

  Patent Document 1 discloses a foreign matter removing apparatus having an air nozzle that blows air onto a sheet-like object and a suction hood installed in a direction in which the air is reflected. In this foreign matter removing device, the foreign matter attached to the surface of the sheet-like material is blown off by the air continuously blown from the air nozzle and scattered into the suction hood. The suction hood is connected to a dust collection mechanism via a dust collection hose, and sucks foreign matter by a suction blower of the dust collection mechanism. Thereby, the foreign material adhering to the surface of a sheet-like object is removed, and the reattachment to the surface of a sheet-like object is prevented.

JP 2008-237985 A

  In the conventional foreign matter removing apparatus as shown in Patent Document 1, when air is sucked by the suction hood, a suction air flow is generated that draws the air around the suction hood together with the air. The flow rate of air sucked from the hood is larger than the flow rate of air blown from the air nozzle. Therefore, in the conventional foreign matter removing apparatus, the blower for supplying air to the air nozzle and the blower for sucking air from the suction hood need to be separated. That is, it is necessary to provide the foreign matter removing device with a blower for supplying air to the air nozzle and a blower for sucking air from the suction hood. Thereby, in the conventional foreign material removal apparatus, there existed a subject that the whole apparatus enlarged and cost increased. Moreover, since it is necessary to control separately the blower for supplying air to an air nozzle, and the blower for attracting | sucking air from a suction hood, control of each blower was complicated.

  This invention is made in view of such a point, and it aims at sharing the blower which supplies gas to the spray nozzle of a foreign material removal apparatus, and the blower which attracts | sucks gas from a dust collection box. .

The foreign matter removing apparatus according to the present invention includes:
A blower, a spray nozzle that blows the gas supplied from the blower to the foreign object removal target surface, and the foreign material and gas removed from the foreign matter removal target surface by the gas blown from the spray nozzle A dust collection box,
Part of the gas taken in by the dust collection box is sent to the blower, and the remaining part of the gas taken in by the dust collection box is discharged out of the dust collection box.

  In the foreign matter removing apparatus according to the present invention, the dust collection box has a first dust collection port and a second dust collection port, and the gas taken in by the first dust collection port is out of the dust collection box. The gas discharged and taken in at the second dust collecting port may be sent to the blower.

  In the foreign matter removing apparatus according to the present invention, the first dust collecting port may be disposed on the spray nozzle side with respect to the second dust collecting port.

  The foreign matter removing apparatus according to the present invention may include a first filter device that separates the foreign matter from the gas discharged out of the dust collection box.

  The foreign substance removal apparatus by this invention WHEREIN: You may have the 2nd filter apparatus which isolate | separates the said foreign substance from the gas which goes to the said spray nozzle from the said dust collection box.

  ADVANTAGE OF THE INVENTION According to this invention, the blower which supplies gas to the spray nozzle of a foreign material removal apparatus and the blower which attracts | sucks gas from a dust collection box can be made shared.

FIG. 1 is a diagram for explaining an embodiment of the present invention, and is a diagram schematically showing an example of a film manufacturing apparatus to which a foreign matter removing apparatus is applied. FIG. 2 is an enlarged view showing a cross section of the dust collection box of the foreign matter removing apparatus in FIG. 1. FIG. 3 is a perspective view showing the dust collection box of FIG. 2, and particularly shows an example of the shapes of the first dust collection port and the second dust collection port of the dust collection box. FIG. 4 is a cross-sectional view showing a modification of the dust collection box.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the drawings attached to the present specification, for the sake of illustration and ease of understanding, the scale, the vertical / horizontal dimension ratio, and the like are appropriately changed and exaggerated from those of the actual product.

  In addition, as used in the present specification, the shape and geometric conditions and the degree thereof are specified. For example, terms such as “parallel”, “orthogonal”, “identical”, and values of length and angle are strict. Without being bound by meaning, it should be interpreted including the extent to which similar functions can be expected.

  1 to 4 are diagrams for explaining an embodiment according to the present invention. Among these, FIG. 1 schematically shows an example of the foreign matter removing apparatus 10.

  In the example shown in FIG. 1, the foreign matter removing apparatus 10 is applied to the film manufacturing apparatus 1 and is used to remove foreign matters on the film (foreign matter removing target) 5 manufactured by the film manufacturing apparatus 1. In the film manufacturing apparatus 1, the manufactured film 5 is transported along the transport direction using a transport device such as a roller 8. The film 5 has a foreign matter removal target surface 5a, and the foreign matter removal device 10 removes the foreign matter on the foreign matter removal target surface 5a. However, the present invention is not limited to this, and the foreign substance removal apparatus 10 may be applied to other apparatuses and used to remove foreign substances on other foreign substance removal target surfaces.

  The foreign matter removing apparatus 10 according to the present embodiment removes foreign matter using a blower 11, a spray nozzle 12 that blows the gas supplied from the blower 11 onto the foreign matter removal target surface 5 a, and a gas blown from the spray nozzle 12. And a dust collection box 20 for taking in foreign matter and gas removed from the target surface 5a. A gas such as air is blown from the spray nozzle 12 onto the foreign matter removal target surface 5a of the film 5, and the foreign matter is removed from the foreign matter removal target surface 5a by this gas. The foreign matter removed from the foreign matter removal target surface 5a flows into the dust collection box 20 together with the gas blown from the spray nozzle 12 onto the foreign matter removal target surface 5a.

  The blower 11 sucks gas from the dust collection box 20 and supplies the gas to the spray nozzle 12. The blower 11 can be composed of, for example, a ring blower. The blower 11 has its rotational speed controlled by a control device (not shown), and thereby the flow rate of the gas sucked from the dust collection box 20 and the gas blown from the blowing nozzle 12 is controlled.

  The spray nozzle 12 sprays a gas such as air supplied from the blower 11 toward the foreign matter removal target surface 5 a of the film 5. In the example shown in FIG. 1, the spray nozzle 12 blows gas toward the upstream side in the transport direction of the film 5 and in a direction inclined with respect to the transport direction of the film 5.

  Next, the dust collection box 20 will be described in detail with reference to FIGS. FIG. 2 is an enlarged view showing a cross section of the dust collection box 20 of the foreign matter removing apparatus 10.

  The dust collection box 20 shown in FIG. 2 takes in the foreign matter and gas removed from the foreign matter removal target surface 5 a of the film 5 by the gas blown from the blowing nozzle 12. The dust collection box 20 is disposed so as to face the foreign object removal target surface 5a. That is, the dust collection box 20 is arranged on the foreign matter removal target surface 5 a side with respect to the film 5. The dust collection box 20 and the foreign object removal target surface 5a are separated from each other, for example, with an interval of about several mm or less. Reference numeral 29 in FIG. 2 indicates the housing of the dust collection box 20.

  In the illustrated example, the dust collection box 20 has a first dust collection port 21 and a second dust collection port 22 that take in foreign matter and gas. The first dust collection port 21 is disposed on the spray nozzle 12 side with respect to the second dust collection port 22. In other words, the first dust collection port 21 is disposed so as to be positioned between the spray nozzle 12 and the second dust collection port 22. The dust collection box 20 is disposed on the side from which the gas is ejected from the spray nozzle 12, that is, on the upstream side in the transport direction of the film 5 with respect to the spray nozzle 12. Accordingly, in the illustrated example, the first dust collecting port 21 is disposed on the downstream side in the transport direction of the film 5 with respect to the second dust collecting port 22. In other words, the second dust collection port 22 is arranged on the upstream side in the transport direction of the film 5 with respect to the first dust collection port 21.

  The dust collection box 20 includes a first exhaust port 23 provided corresponding to the first dust collection port 21, a second exhaust port 24 provided corresponding to the second dust collection port 22, It has further. The first exhaust port 23 discharges the gas taken in by the first dust collection port 21 to the outside of the dust collection box 20. The second exhaust port 24 discharges the gas taken in by the second dust collection port 22 toward the blower 11 via a connection hose (not shown). Therefore, the second dust collection port 22 exhibits a function of sucking gas and foreign matter in the vicinity of the second dust collection port 22 by suction by the blower 11.

  FIG. 3 is a perspective view showing the dust collection box 20. In particular, FIG. 3 shows an example of the shape of the first dust collection port 21 and the second dust collection port 22 of the dust collection box 20.

  In the example shown in FIGS. 2 and 3, the second dust collection port 22 is provided with a punching metal 26 that covers the second dust collection port 22. The punching metal 26 has a large number of openings 27. The openings 27 have such a size that foreign substances and gases removed from the foreign substance removal target surface 5a by the gas blown from the blowing nozzle 12 can pass through. Yes. Here, when the second dust collection port 22 does not have the punching metal 26, the gas flowing in from the second dust collection port 22 flows along the side surface and is sucked in the second dust collection port 22. The force may vary. In this case, there is a possibility that the second dust collection port 22 cannot exhibit a sufficient suction force. Further, the foreign matter removal target (film) 5 may be adsorbed to the second dust collection port 22 due to the gas flow concentrated near the side surface. On the other hand, in the present embodiment, since the second dust collecting port 22 has the punching metal 26, variation in suction force in the second dust collecting port 22 is effectively suppressed. . Thereby, the second dust collection port 22 can exhibit a sufficient suction force. In addition, the foreign object removal target 5 can be effectively prevented from being adsorbed by the second dust collection port 22. Instead of the punching metal 26, a mesh member formed in a net shape may be provided so as to cover the second dust collection port 22. Further, the second dust collection port 22 is not limited to the one covered with the punching metal 26 or the mesh member. For example, the second dust collection port 22 may be configured with a simple opening or the like.

  On the other hand, in the example shown in FIGS. 2 and 3, the first dust collection port 21 itself is not covered with other members and is configured as a simple opening. Therefore, inflow of the foreign matter and gas removed from the foreign matter removal target surface 5a into the first dust collection port 21 is not hindered, and thereby the dust collection function by the first dust collection port 21 can be appropriately exhibited. .

  In the example shown in FIG. 2, the first dust collection port 21 is formed in a plane parallel to the conveyance direction of the film 5 and parallel to the normal direction to the foreign matter removal target surface 5 a of the film 5. An end 21a on the spray nozzle 12 side (opposite side to the second dust collection port 22 and downstream in the transport direction of the film 5) and the side opposite to the spray nozzle 12 of the first dust collection port 21 (second An imaginary straight line connecting the end 21b on the dust collecting port 22 side and the upstream side in the transport direction of the film 5 is L1. The virtual straight line L1 removes foreign matter from the film 5 on the opposite side of the spray nozzle 12 (the second dust collection port 22 side, the upstream side in the transport direction of the film 5) with respect to the end 21b of the first dust collection port 21. It intersects the target surface 5a. In the illustrated example, the virtual straight line L1 and the foreign matter removal target surface 5a are parallel to the transport direction of the film 5 and in a plane parallel to the normal direction to the foreign matter removal target surface 5a of the film 5. As an example, the formed angle θ1 is 90 ° or less. When the angle θ1 formed between the virtual straight line L1 and the foreign object removal target surface 5a is 90 ° or less, the air is blown from the spray nozzle 12 and the flowing direction is bent by the foreign object removal target surface 5a of the film 5 and the gas. Foreign matter removed from the foreign matter removal target surface 5a can be taken in effectively.

  In the example shown in FIG. 2, the second dust collection port 22 is arranged in a plane parallel to the conveyance direction of the film 5 and parallel to the normal direction to the foreign matter removal target surface 5 a of the film 5. An end 22a on the spray nozzle 12 side (first dust collection port 21 side, downstream in the transport direction of the film 5) and the opposite side of the second dust collection port 22 from the spray nozzle 12 (first dust collection port). An imaginary straight line connecting the end 22b on the opposite side of the mouth 21 and the upstream side in the transport direction of the film 5 is L2. The imaginary straight line L2 is opposite to the spray nozzle 12 with respect to the end 22b of the second dust collection port 22 (on the opposite side to the first dust collection port 21, upstream in the transport direction of the film 5). It intersects with the foreign object removal target surface 5a. In the illustrated example, the virtual straight line L2 and the foreign matter removal target surface 5a are parallel to the conveyance direction of the film 5 and in a plane parallel to the normal direction to the foreign matter removal target surface 5a of the film 5. The angle θ2 formed is larger than the angle θ1 formed between the virtual straight line L1 and the foreign object removal target surface 5a. That is, the relationship θ2> θ1 is satisfied. In the illustrated example, the angle θ2 is 30 ° or more. That is, the relationship of 30 ° ≦ θ2 is satisfied. When the angle θ2 formed between the virtual straight line L2 and the foreign object removal target surface 5a has such an angle, the foreign object removal target object 5 is effectively prevented from being adsorbed by the second dust collection port 22. can do. In the example shown in FIG. 2, the virtual straight line L2 and the plate surface of the punching metal 26 are parallel to each other. In particular, the virtual straight line L <b> 2 extends on the plate surface of the punching metal 26. In the present specification, the “plate surface” refers to a surface that coincides with the planar direction of the target plate-like member when the target plate-like member is viewed overall and globally. In the illustrated example, the virtual straight line L <b> 2 is orthogonal to the inflow direction of the gas flow that flows into the second dust collection port 22.

  In the foreign matter removing apparatus 10 of the present embodiment, a first filter device 25 that separates foreign matters from the gas discharged to the outside of the dust collection box 20 is provided at the first exhaust port 23 of the dust collection box 20. Yes. In particular, the first filter device 25 shown in FIG. 2 is provided so as to cover the entire first exhaust port 23, and separates the foreign matter from the gas and foreign matter flowing in from the first dust collection port 21. , And has a function of discharging only the gas out of the dust collection box 20. The first filter device 25 is not particularly limited, and various devices that can be used as a filter device can be employed. By providing the first filter device 25 at the first exhaust port 23, it is possible to prevent foreign matter flowing in from the first dust collection port 21 from being discharged out of the dust collection box 20. Thus, it is possible to prevent foreign matters from reattaching to the foreign matter removal target 5.

  Furthermore, in the foreign matter removing apparatus 10 of the present embodiment, as shown in FIG. 1, the second foreign matter is separated from the gas that flows in from the second dust collection port 22 and travels from the dust collection box 20 toward the spray nozzle 12. The filter device 15 is provided. In particular, in the illustrated example, a second filter device 15 is provided between the blower 11 and the spray nozzle 12 to separate foreign substances from the gas from the blower 11 toward the spray nozzle 12. However, the present invention is not limited to this, and the second filter device 15 is provided between the dust collection box 20 and the blower 11, and the second filter device 15 separates foreign substances from the gas traveling from the dust collection box 20 to the blower 11. You may make it do. The second filter device 15 is not particularly limited, and various devices that can be used as a filter device can be employed. For example, a filter device similar to the first filter device 25 can be used as the second filter device 15. The foreign matter removing device 10 is provided with a second filter device 15 that separates foreign matter from the gas that flows from the second dust collection port 22 and travels from the dust collection box 20 to the spray nozzle 12, thereby It is possible to prevent the foreign matter flowing in from the dust collection port 22 from being blown out from the spray nozzle 12 toward the foreign matter removal target 5, whereby the foreign matter blown out from the spray nozzle 12 is prevented from being introduced into the foreign matter removal target 5. It is possible to prevent reattachment to the surface. Moreover, it can prevent that the foreign material blown out from the spray nozzle 12 collides with the foreign material removal target object 5, and causes the foreign material removal target object 5 to be damaged.

  Next, operation | movement of the film manufacturing apparatus 1 to which the foreign material removal apparatus 10 of this Embodiment was applied is demonstrated.

  The film (foreign matter removal target) 5 manufactured by the film manufacturing apparatus 1 is transported along the transport direction using a transport device such as a roller 8. A gas such as air is blown from the spray nozzle 12 of the foreign matter removing apparatus 10 toward the foreign matter removal target surface 5a of the film 5 being conveyed. In particular, in the example shown in FIG. 1, the spray nozzle 12 blows gas toward the upstream side in the transport direction of the film 5 and in a direction inclined with respect to the transport direction of the film 5.

  The gas blown from the spray nozzle 12 collides with the foreign matter removal target surface 5a of the film 5, and removes the foreign matter on the foreign matter removal target surface 5a from the foreign matter removal target surface 5a. The gas blown from the spray nozzle 12 is bent in the flowing direction by the foreign matter removal target surface 5a, and the foreign matter removed from the foreign matter removal target surface 5a by the gas is collected in a dust collection port 20 Captured at 21, 22.

  A part of the gas and foreign matter taken in by the dust collection box 20 is taken in by the second dust collection port 22 of the dust collection box 20, and the remainder of the gas and foreign matter taken in by the dust collection box 20 is stored in the dust collection box 20. It is taken in by the first dust collecting port 21.

  The foreign matter taken in at the first dust collection port 21 of the dust collection box 20 is first filtered by the first filter device 25 provided at the first exhaust port 23 of the dust collection box 20. It is separated from the gas taken in at the dust collection port 21 and stored in the dust collection box 20. The gas separated from the foreign matter by the first filter device 25 is discharged out of the dust collection box 20 as it is.

  In the foreign matter removing apparatus 10 of the present embodiment, the second dust collection port 22 of the dust collection box 20 exhibits a function of sucking gas and foreign matter in the vicinity of the second dust collection port 22 by suction by the blower 11. . Accordingly, the foreign matter that is not taken in by the first dust collection port 21 of the dust collection box 20 and flows out toward the opposite side of the spray nozzle 12 (upstream in the transport direction of the film 5) with respect to the first dust collection port 21. Are sucked into the second dust collecting port 22 and taken in together with the gas in the vicinity of the second dust collecting port 22. The gas and foreign matter taken in by the second dust collection port 22 are sent toward the blower 11 through the second exhaust port 24 and a connection hose (not shown) by the suction of the blower 11.

  The blower 11 sucks the gas and foreign matter taken in by the second dust collection port 22 of the dust collection box 20 and sends the gas and foreign matter toward the spray nozzle 12. In the example shown in FIG. 1, a second filter device 15 is provided between the blower 11 and the spray nozzle 12, and the second filter device 15 leads from the blower 11 to the spray nozzle 12. Foreign matter is separated from the gas. The gas separated from the foreign matter by the second filter device 15 is directed toward the spray nozzle 12 and sprayed from the spray nozzle 12 toward the foreign matter removal target surface 5a of the film 5 being conveyed.

  In the conventional foreign matter removing apparatus as shown in Patent Document 1, when air is sucked by the suction hood, a suction air flow is generated that draws the air around the suction hood together with the air. The flow rate of air sucked from the hood is larger than the flow rate of air blown from the air nozzle. Therefore, in the conventional foreign matter removing apparatus, the blower for supplying air to the air nozzle and the blower for sucking air from the suction hood need to be separated.

  On the other hand, the foreign matter removing apparatus 10 of the present embodiment is blown from the blower 11, the spray nozzle 12 that blows the gas supplied from the blower 11 to the foreign matter removal target surface 5a, and the spray nozzle 12. And a dust collection box 20 for taking in the foreign matter and gas removed from the foreign object removal target surface 5a by the collected gas, and a part of the gas taken in by the dust collection box 20 is sent to the blower 11, and the dust collection box 20 The remainder of the taken-in gas is discharged out of the dust collection box 20. Therefore, since the blower 11 of the foreign matter removing apparatus 10 sucks only a part of the gas taken in by the dust collection box 20, the flow rate of the gas sucked by the blower 11 is higher than the flow rate of the gas blown from the spray nozzle 12. Can also be prevented. In particular, the flow rate of the gas sucked by the blower 11 and the flow rate of the gas blown from the spray nozzle 12 can be matched. Therefore, the blower 11 that supplies the gas to the spray nozzle 12 of the foreign matter removing apparatus 10 and the blower 11 that sucks the gas from the dust collection box 20 can be shared. In addition, this makes it possible to effectively reduce the size of the foreign substance removing device 10.

  Conventionally, two blowers, a blower for supplying air to the air nozzle and a blower for sucking air from the suction hood, are necessary. In the foreign matter removing apparatus 10 of this embodiment, this blower is used. Thus, the cost of the foreign matter removing apparatus 10 can be reduced.

  Furthermore, conventionally, it has been necessary to individually control the blower for supplying air to the air nozzle and the blower for sucking air from the suction hood. In the foreign matter removing apparatus 10 of the present embodiment, 1 Since it is possible to adjust both the gas blowing from the blowing nozzle 12 and the suction of the gas from the dust collection box 20 with one blower 11, the control of the blower 11 can be simplified.

  Note that various modifications can be made to the above-described embodiment. Hereinafter, modified examples will be described with reference to the drawings as appropriate. In the following description and the drawings used in the following description, the same reference numerals as those used for the corresponding parts in the above embodiment are used for the parts that can be configured in the same manner as in the above embodiment. A duplicate description is omitted.

  A modified example of the foreign matter removing apparatus 10 will be described with reference to FIG. FIG. 4 is a cross-sectional view illustrating a modified example of the dust collection box 20 of the foreign matter removing apparatus 10.

  The dust collection box 20 shown in FIG. 4 is provided with a storage unit 28 for storing foreign matter taken in through the first dust collection port 21 in the dust collection box 20. In the illustrated example, the entire surface of the dust collection box 20 that faces the first dust collection port 21 and the second dust collection port 22 is a first exhaust port 23, and the entire first exhaust port 23. The first filter device 25 is provided so as to cover. In addition, the storage unit 28 is provided so as to be positioned on the lower side in the vertical direction with respect to the first exhaust port 23 of the dust collection box 20, thereby the first filter provided in the first exhaust port 23. Even if the foreign matter separated from the gas taken in at the first dust collecting port 21 by the device 25 falls from the first filter device 25, the fallen foreign matter is stored in the storage unit 28. Can be more effectively prevented from reattaching to the foreign matter removal target surface 5a of the film 5.

  4 shows an example in which the second exhaust port 24 is provided on the lower surface side of the dust collection box 20. However, the present invention is not limited to this, and the second exhaust port 24 is perpendicular to the paper surface in FIG. It may be provided on the side surface opposite to. That is, the gas and foreign matter taken in by the second dust collection port 22 may be discharged in a direction perpendicular to the paper surface in FIG. 4 and sent to the blower 11 via a connection hose (not shown).

1 Film production equipment 5 Film (object to remove foreign matter)
5a Foreign matter removal target surface 10 Foreign matter removal device 11 Blower 12 Spray nozzle 15 Second filter device 20 Dust collection box 21 First dust collection port 22 Second dust collection port 23 First exhaust port 24 Second exhaust Mouth 25 First filter device 26 Punching metal 27 Opening 28 Reservoir 29 Housing

Claims (5)

A blower, a spray nozzle that blows the gas supplied from the blower to the foreign object removal target surface, and the foreign material and gas removed from the foreign matter removal target surface by the gas blown from the spray nozzle A foreign matter removing device having a dust collection box,
A foreign matter removing apparatus in which a part of the gas taken in by the dust collection box is sent to the blower, and the remaining part of the gas taken in by the dust collection box is discharged out of the dust collection box. The dust collection box has a first dust collection port and a second dust collection port,
The gas taken in at the first dust collecting port is discharged out of the dust collecting box,
The foreign matter removing apparatus according to claim 1, wherein the gas taken in at the second dust collecting port is sent to the blower.   The foreign matter removing apparatus according to claim 2, wherein the first dust collecting port is disposed on the spray nozzle side with respect to the second dust collecting port.   The foreign matter removing apparatus according to any one of claims 1 to 3, further comprising a first filter device that separates the foreign matter from a gas discharged to the outside of the dust collection box.   5. The foreign matter removing apparatus according to claim 1, further comprising a second filter device that separates the foreign matter from a gas from the dust collection box toward the spray nozzle.

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