JP6841633B2 - Gas-liquid dust remover - Google Patents

Description

The present invention relates to a gas-liquid dust remover.

Patent Document 1 describes an apparatus for removing a treatment liquid adhering to a substrate, which is directed toward a transport means for transporting the substrate in a predetermined direction and a surface to which the treatment liquid of the substrate is conveyed by the transport means. Described is a processing liquid removing device including a liquid draining knife that atomizes and injects a treatment liquid having the same function as the treatment liquid.
The liquid draining knife includes a slit for liquid that injects the treatment liquid and a slit for gas that injects gas, and the slit for liquid injects the treatment liquid in a direction orthogonal to the substrate and is used for gas. The slit is inclined so that the injection direction of the gas intersects the injection direction of the liquid injected from the slit for the liquid. Then, the liquid draining knife injects the atomized processing liquid in the direction opposite to the transport direction of the substrate.

Patent Document 2 describes a cleaning device for a flat plate display including an injection means for injecting a cleaning liquid by an injection pressure of a cleaning gas. In the apparatus of Patent Document 2, the cleaning liquid is merged with the cleaning gas and then injected together with the cleaning gas from a common injection port.

In Patent Document 3, a plurality of slits are formed in the gaps between three or more laminated plate-like bodies, and one of these slits is a gas injection port and the other slit is a liquid injection port. A liquid blowing slit nozzle is described. This gas-liquid blowing slit nozzle extends the tip of the plate-shaped body in the center forward of the injection port and inclines toward the other injection port side to form an inclined surface, utilizing the viscosity of the fluid. It is configured to deflect the fluid along an inclined surface and collide with the fluid ejected from the other injection port to spray the fluid.

Japanese Unexamined Patent Publication No. 2001-224793 Japanese Unexamined Patent Publication No. 2005-279634 Japanese Unexamined Patent Publication No. 2003-1151

According to the studies by the present inventors, there is room for improvement in the dust removal efficiency of the work (the substrate in each document) in the techniques of Patent Documents 1 to 3.

The present invention has been made in view of the above problems, and provides a gas-liquid dust removing device capable of satisfactorily removing dust from a work.

According to the present invention, it is a gas-liquid dust removing device that supplies gas and liquid to one surface of a sheet-shaped work to be conveyed to remove dust from the work.
A transport unit that transports the work in a predetermined transport direction,
A gas injection port that injects gas in a first direction orthogonal to the one surface of the work,
A liquid discharge port that is arranged on the upstream side of the gas injection port in the transport direction independently of the gas injection port and discharges the liquid in the second direction.
A gas supply path having a gas injection port open at the tip and supplying gas to the gas injection port,
A liquid supply path having a liquid discharge port open at the tip and supplying a liquid to the liquid discharge port,
With
The second direction is inclined with respect to the first direction so that the second direction is forward with respect to the transport direction .
Each of the gas supply path and the liquid supply path has a slit shape orthogonal to the transport direction and extends in a direction along the support surface, and is continuous over both ends in the width direction of the work. Extends to
A gas-liquid dust removing device is provided in which the liquid discharge port is arranged on the upstream side in the transport direction with respect to the gas injection port in the entire area between both ends in the width direction of the work.

According to the present invention, it is possible to satisfactorily remove dust from the work.

It is a side sectional view of the gas-liquid dust removal device which concerns on 1st Embodiment, and shows the structure of a dust removal unit and its periphery. It is a partially enlarged view of FIG. It is a partially enlarged view of FIG. FIG. 4A is a cross-sectional view taken along the line AA of FIG. 3, and FIG. 4B is a cross-sectional view taken along the line BB of FIG. It is a schematic diagram which shows the whole structure of the gas-liquid dust removal device which concerns on 1st Embodiment. It is a side sectional view of the partial enlargement of the dust removal unit of the gas-liquid dust removal device which concerns on 2nd Embodiment. It is a side sectional view of the gas-liquid dust removal device which concerns on 3rd Embodiment, and shows the structure of a dust removal unit and its periphery. It is a partially enlarged view of FIG. It is a schematic diagram which shows the whole structure of the gas-liquid dust removal device which concerns on 3rd Embodiment. It is a side sectional view of the gas-liquid dust removal device which concerns on 4th Embodiment, and shows the structure of a dust removal unit and its periphery. It is a side sectional view of the partial enlargement of the dust removal unit of the gas-liquid dust removal device which concerns on 5th Embodiment. It is a side sectional view of the partial enlargement of the dust removal unit of the gas-liquid dust removal device which concerns on 6th Embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same components are designated by the same reference numerals, and the description thereof will be omitted as appropriate.

[First Embodiment]
First, the first embodiment will be described with reference to FIGS. 1 to 5.
FIG. 1 is a side sectional view of the gas-liquid dust removing device 100 according to the first embodiment, and shows the configuration of the dust removing unit 90 and its surroundings.
FIG. 2 is a partially enlarged view of FIG. 1, showing the configuration of the tip end portion (lower end portion) of the injection head 60 and its periphery.
FIG. 3 is a partially enlarged view of FIG. 2, showing the configurations of the gas injection port 33, the liquid discharge port 43, and their surroundings.
FIG. 4A is a cross-sectional view taken along the line AA of FIG. 3, and FIG. 4B is a cross-sectional view taken along the line BB of FIG.
FIG. 5 is a schematic view showing the overall configuration of the gas-liquid dust removing device 100 according to the present embodiment.

As shown in any of FIGS. 1 to 3, the gas-liquid dust removing device 100 according to the present embodiment is a gas with respect to one surface 11 (FIGS. 2 and 3) of the sheet-shaped work 10 to be conveyed. It is a gas-liquid dust removing device 100 that supplies a liquid and removes dust from the work 10.
The gas-liquid dust remover 100 uses a transport unit (for example, rollers 20, 21 and a suction plate 51) for transporting the work 10 in a predetermined transport direction (right direction in FIGS. 1 to 3; arrow D direction in FIG. 3). The gas injection port 33 that injects gas in the first direction orthogonal to one surface 11 of the work 10 and the gas injection port 33 on the upstream side in the transport direction from the gas injection port 33. It is provided with a liquid discharge port 43, which is arranged independently and discharges the liquid in the second direction.
Then, the second direction is inclined with respect to the first direction so that the second direction is forward with respect to the transport direction. That is, in the present embodiment, the transport direction of the work 10 is the right direction in FIGS. 2 and 3, and the direction in which the liquid discharge port 43 discharges the liquid is the downward-sloping direction in FIGS. 2 and 3, that is, It is in the forward direction (direction having the right component) with respect to the transport direction.

Here, the fact that the first direction is orthogonal to one surface 11 of the work 10 means that the first direction is substantially orthogonal to one surface 11, for example, the first direction. The angle formed by one surface 11 is preferably 90 degrees ± 10 degrees or less, and the angle formed by the first direction and one surface 11 is more preferably ± 5 degrees or less. However, the angle formed by the first direction and one surface 11 is larger than the angle formed by the second direction and one surface 11.
Further, the transport direction is a direction along one surface 11 of the work 10.
The liquid ejected from the liquid discharge port 43 may be water such as pure water or a liquid agent other than water. Examples of the liquid agent include a fluorine-based solvent and the like.

In the following description, the downstream side in the transport direction may be simply referred to as the downstream side, or may be referred to as the front side (front side, front side). Further, the upstream side in the transport direction may be simply referred to as the upstream side, or may be referred to as the rear side (rear side, rear side). Further, in the work 10, a direction along a portion facing the gas injection port 33 and the liquid discharge port 43 and orthogonal to the transport direction may be referred to as a left-right direction.

The sheet-shaped work 10 also includes a film-shaped work 10.
The work 10 is not particularly limited, and may be a single-layer sheet or a sheet having a structure in which a plurality of layers are laminated. As an example, the work 10 can be configured by subjecting the base film to processing such as coating, laminating, and printing.
Further, the work 10 may be a substrate.
Further, the work 10 may be long and continuously conveyed by the conveying section, or may be short and sequentially conveyed by the conveying section.
Further, the work 10 may have a partially punched structure (a structure having a partially opened portion). According to the gas-liquid dust removing device 100 according to the present embodiment, dust can be suitably removed from the inner peripheral surface of the opening of the work 10 having a partially punched structure.

The gas-liquid dust removing device 100 includes a dust removing unit 90 described below, and a transport unit including rollers 20, 21 and a suction plate 51.

In the case of the present embodiment, the gas-liquid dust removing device 100 removes dust from one surface 11 of the work 10 by the dust removing unit 90 while the work 10 is conveyed in one direction (direction of arrow D) in a flat state by the conveying portion. ..
In the case of the present embodiment, more specifically, the arrow D direction is the horizontal direction. However, the present invention is not limited to this example, and the transport direction (arrow D direction) of the work 10 is not particularly limited.

The transport unit is, for example, a pair of upper and lower rollers 20 arranged on the upstream side of the dust removing unit 90 and holding the work 10 from above and below, and upper and lower rollers arranged on the downstream side of the dust removing unit 90 and holding the work 10 from above and below. It includes a pair of rollers 21 and.
At least one of the pair of rollers 20 on the upstream side is rotationally driven by an actuator such as a motor (not shown), and at least one of the pair of rollers 21 on the downstream side is rotationally driven by an actuator such as a motor (not shown). 10 is conveyed in the conveying direction.

It is a flat plate-shaped member, and is arranged horizontally between the pair of rollers 20 and the pair of rollers 21.
The height position (position in the vertical direction) of the support surface 51a, which is the upper surface of the suction plate 51, is the upper end of the lower roller 20 of the pair of rollers 20 and the lower roller 21 of the pair of rollers 21. It is set at the same position as the top edge. Therefore, the work 10 is conveyed along the support surface 51a of the suction plate 51.
The width dimension of the suction plate 51 (dimension direction dimension in FIG. 1) is larger than the width dimension of the work 10 (depth direction dimension in FIG. 1), and the work 10 is conveyed between both ends of the suction plate 51 in the width direction. It has become so.

A suction box 52 is arranged below the suction plate 51. The upper end of the suction box 52 is open, and the opening at the upper end of the suction box 52 is closed by the suction plate 51. The suction plate 51 is supported by, for example, a suction box 52.
The internal space of the suction box 52 is a negative pressure chamber 52a set to a negative pressure. That is, the atmosphere inside the negative pressure chamber 52a of the suction box 52 is sucked by a suction source (not shown), so that the negative pressure chamber 52a is maintained at a negative pressure.
The suction plate 51 is formed with a large number of pores (not shown) penetrating the suction plate 51 up and down. Therefore, the atmosphere on the upper side of the suction plate 51 is sucked to the lower side of the suction plate 51 through a large number of pores of the suction plate 51.
When the work 10 is conveyed along the support surface 51a which is the upper surface of the suction plate 51, the work 10 is sucked toward the support surface 51a, so that the work 10 can be suppressed from rising (fluttering), and the work 10 can be suppressed. Can be maintained as a horizontal path along the support surface 51a.
That is, the work 10 is horizontally conveyed between the pair of rollers 20 and the pair of rollers 21 along the support surface 51a of the suction plate 51.
In the present invention, the transfer mechanism of the work 10 is not limited to this example, and the short work 10 is conveyed to the position on the upstream side of the dust removal unit 90 by the roller 20 on the upstream side of the suction plate 51, and is sucked from the roller 20. After the work 10 is delivered to the plate 51, the work 10 is sucked by the suction plate 51, and in that state, the suction plate 51 moves in the transport direction, and in the process, the work 10 is dust-removed by the dust removing unit 90, and then suction is performed. The work 10 may be delivered from the plate 51 to the roller 21 on the downstream side thereof. Further, in a state where the work 10 is attracted to the suction plate 51, the dust removing unit 90 moves relative to the work 10 and the suction plate 51 (moves to the left in FIG. 1), and in the process, the dust removing unit 90 moves. The work 10 may be dust-removed.

As described above, the transport portion has a support surface 51a that supports the work 10 on the back surface 12 (FIGS. 2 and 3) with respect to one surface 11.

The dust removal unit 90 is arranged above the suction plate 51 so as to be separated from each other.
The size of the suction plate 51 in the transport direction is larger than the size of the dust removing unit 90 in the transport direction. The end of the suction plate 51 on the upstream side in the transport direction is located on the upstream side in the transport direction with respect to the end of the dust removal unit 90 on the upstream side in the transport direction, and the end of the suction plate 51 on the downstream side in the transport direction. The portion is located on the downstream side in the transport direction with respect to the end portion of the dust removing unit 90 on the downstream side in the transport direction.
When the work 10 is conveyed along the support surface 51a of the suction plate 51, the dust removal unit 90 is located above the portion of the work 10 located on the support surface 51a.
That is, the gas injection port 33 and the liquid discharge port 43, and the first recovery path 71 and the second recovery path 81, which will be described later, are arranged at positions above the work 10.

The facing surface 61, which is the lower end surface of the injection head 60, faces the support surface 51a of the suction plate 51.
Here, the facing distance between each part of the facing surface 61 and the support surface 51a (distance d3 in FIGS. 2 and 3) is equal (constant in each part of the facing surface 61). The gas injection port 33 and the liquid discharge port 43 are opened independently of each other on the facing surface 61.

More specifically, as shown in FIG. 3, the facing surface 61 is located on the first portion 61a located on the upstream side of the liquid discharge port 43, on the downstream side of the liquid discharge port 43 and on the upstream side of the gas injection port 33. It has a second portion 61b and a third portion 61c located on the downstream side of the gas injection port 33.
The distance between the first portion 61a and the support surface 51a, the distance between the second portion 61b and the support surface 51a, and the distance between the third portion 61c and the support surface 51a are equal to each other. It is d3.
When one surface 11 of the work 10 is flat, the distance between the first portion 61a and one surface 11 of the work 10 facing each other, the distance between the second portion 61b and one surface 11 facing each other, and the third The distance between the portion 61c and one of the surfaces 11 is equal to each other, and the distance is d0. However, one surface 11 of the work 10 may be an uneven surface (not necessarily a flat surface), and in that case, this is not the case. When one surface 11 of the work 10 is an uneven surface, the distance d0 is larger than the height difference of the uneven surface.

Therefore, the distance d1 (FIG. 3) from the gas injection port 33 to the support surface 51a and the distance d2 (FIG. 3) from the liquid discharge port 43 to the support surface 51a are equal to each other.

In the case of the present embodiment, the support surface 51a and the facing surface 61 are each flat, and the supporting surface 51a and the facing surface 61 face each other in parallel.

Inside the injection head 60, a gas supply path 32 for supplying gas to the gas injection port 33 and a liquid supply path 42 for supplying liquid to the liquid discharge port 43 are formed.
The liquid supply path 42 is arranged on the upstream side of the gas supply path 32. The gas injection port 33 is open at the tip (lower end) of the gas supply path 32. Further, the liquid discharge port 43 is open at the tip (lower end) of the liquid supply path 42.
The upper end of the gas supply path 32 communicates with the gas front chamber 31, which will be described later. In the gas supply path 32, the peripheral portion excluding the portion communicating with the gas front chamber 31 and the gas injection port 33 at the lower end is surrounded by the actual portion of the injection head 60.
Therefore, the gas supplied from the gas supply source described later to the gas supply path 32 via the gas front chamber 31 is injected from the gas injection port 33.
The upper end of the liquid supply path 42 communicates with the liquid front chamber 41, which will be described later. In the liquid supply path 42, the peripheral portion excluding the portion communicating with the liquid front chamber 41 and the liquid discharge port 43 at the lower end is surrounded by the actual portion of the injection head 60.
Therefore, the liquid supplied from the liquid supply source described later to the liquid supply path 42 via the liquid front chamber 41 is discharged from the liquid discharge port 43.

As described above, the gas-liquid dust removing device 100 has a gas supply path 32 having a gas injection port 33 open at the tip to supply gas to the gas injection port 33 and a liquid discharge port 43 having an opening at the tip to discharge the liquid. A liquid supply path 42 for supplying a liquid to the outlet 43 is provided.
In a cross section (cross section shown in FIGS. 1 to 3) cut along a plane orthogonal to one surface 11 of the work 10 and along the transport direction, the gas injection port 33 and the support surface are on the extension line of the gas supply path 32. There is no obstacle between the liquid supply port 43 and the support surface 51a on the extension line of the liquid supply path 42. The obstacle referred to here is a component of the gas-liquid dust removing device 100, and the work 10 is excluded from the obstacle referred to here.

In the case of the present embodiment, in the cross section (cross section shown in FIGS. 1 to 3) cut in a plane orthogonal to one surface 11 of the work 10 and along the transport direction, the extension line of the gas supply path 32 and the liquid supply The extension line of the road 42 intersects with the extension line of the road 42 before reaching one surface 11 of the work 10.
That is, the intersection I of the straight line L1 (the axis of the gas supply path 32 in the above cross section) and the straight line L2 (the axis of the liquid supply path 42 in the above cross section) shown in FIG. 3 is one surface 11 of the facing surface 61 and the work 10. It is designed to be located between and.

Here, the gas supply path 32 includes a first portion 32a, a second portion 32b, and a third portion 32c in order from the side farther from the gas injection port 33.
Of these, the flow path width of the second portion 32b is smaller than the flow path width of the first portion 32a, and the flow path width of the third portion 32c is further smaller than the flow path width of the second portion 32b.
That is, the flow path width of the gas supply path 32 is gradually reduced toward the tip side (gas injection port 33 side).

More specifically, the second portion 32b is connected to the lower side of the first portion 32a, and the third portion 32c is connected to the lower side of the second portion 32b. The first portion 32a allows gas to pass from the upper end to the lower end of the first portion 32a, the second portion 32b allows gas to pass from the upper end to the lower end of the second portion 32b, and the third portion 32c Allows the gas to pass from the upper end to the lower end of the third portion 32c.
The first portion 32a, the second portion 32b, and the third portion 32c have the same dimensions in the width direction (depth direction in FIGS. 1 to 3) of the work 10.
The dimension of the second portion 32b in the transport direction is smaller than the dimension of the first portion 32a in the transport direction, and the dimension of the third portion 32c in the transport direction is further smaller than the dimension of the second portion 32b in the transport direction.
The dimensions of the first portion 32a in the transport direction are constant from the upper end to the lower end of the first portion 32a.
Similarly, the dimensions of the second portion 32b in the transport direction are constant from the upper end to the lower end of the second portion 32b.
Similarly, the dimensions of the third portion 32c in the transport direction are constant from the upper end to the lower end of the third portion 32c.

Here, the third portion 32c of the gas supply path 32 has a slit shape that is orthogonal to the width direction of the work 10 (the depth direction of FIGS. 1 to 3), that is, the transport direction and extends in the direction along the support surface 51a. Is. The third portion 32c extends continuously between both ends of the work 10 in the width direction.
The third portion 32c has a slit shape, and the internal space of the third portion 32c has a plate shape. This virtual plate (hereinafter referred to as the first plate) is arranged vertically, and the plate surface faces the downstream side and the upstream side in the transport direction.
Further, the gas injection port 33 also has a slit shape that is orthogonal to the transport direction and extends in the direction along the support surface 51a, similarly to the third portion 32c.
Therefore, the gas supplied from the gas supply source described later to the gas supply path 32 via the gas front chamber 31 flows linearly downward substantially vertically in the second portion 32b, and then flows from the gas injection port 33. It is injected substantially vertically downward (in the direction along the first plate).
That is, the gas is injected from the gas injection port 33 in the shape of a flat plate blade along the gas supply path 32. However, the gas injected from the gas injection port 33 does not necessarily have to be uniformly discharged from the entire area of the gas injection port 33.

Further, the liquid supply path 42 also has a slit shape that is orthogonal to the transport direction and extends in the direction along the support surface 51a. The liquid supply path 42 also extends continuously between both ends in the width direction of the work 10.
The liquid supply path 42 has a slit shape, and the internal space of the liquid supply path 42 has a plate shape. This virtual plate (hereinafter referred to as the second plate) is inclined with respect to the above-mentioned first plate. That is, the second plate is inclined downward to the right in FIGS. 2 and 3.
Further, the liquid discharge port 43 also has a slit shape that is orthogonal to the transport direction and extends in the direction along the support surface 51a, similarly to the liquid supply path 42.
Therefore, the liquid supplied from the liquid supply source described later to the liquid supply passage 42 via the liquid front chamber 41 flows substantially linearly in the lower right direction in FIGS. 2 and 3 in the liquid supply passage 42. After that, the liquid is discharged from the liquid discharge port 43 in the lower right direction (direction along the second plate) in FIGS. 2 and 3.
As a result, preferably, the liquid is discharged from the liquid discharge port 43 in the shape of a flat plate blade along the liquid supply path 42. However, the liquid discharged from the liquid discharge port 43 does not necessarily have to be uniformly discharged from the entire area of the liquid discharge port 43.

As described above, each of the gas supply path 32 (particularly the third portion 32c) and the liquid supply path 42 has a slit shape that is orthogonal to the transport direction and extends in the direction along the support surface 51a, and is formed in the work 10. It extends continuously between both ends in the width direction (see FIGS. 4 (a) and 4 (b)).

Here, the first direction, which is the gas injection direction from the gas injection port 33, is the direction along the plate surface of the first plate and the direction from the second portion 32b toward the gas injection port 33. ..
The second direction, which is the discharge direction of the liquid from the liquid discharge port 43, is the direction along the plate surface of the second plate and the direction from the liquid front chamber 41 toward the liquid discharge port 43.
The inclination angle of the second direction (liquid injection direction from the liquid discharge port 43) with respect to the first direction (gas injection direction from the gas injection port 33) is not particularly limited, but is, for example, 10 degrees or more and 80 degrees or less. It can be set to 30 degrees or more and 60 degrees or less.

The gas front chamber 31 is, for example, a space having a wider flow path than the first portion 32a of the gas supply path 32, and is connected to the upper side of the first portion 32a of the gas supply path 32. The gas front chamber 31 is connected to a gas supply source described later.
The liquid front chamber 41 is a space having a wider flow path than the liquid supply path 42, and is connected to the upper side of the liquid supply path 42. The liquid anterior chamber 41 is connected to a liquid supply source described later.

The dust removal unit 90 gas-injects the liquid discharged from the injection head 60 having the gas injection port 33 and the liquid discharge port 43 and the liquid discharged from the liquid discharge port 43 located at a position on the upstream side of the injection head 60 in the transport direction. The gas injection port 33 has a first recovery path 71 that sucks and collects the gas injected from the port 33 and a liquid discharged from the liquid discharge port 43 located downstream of the injection head 60 in the transport direction. It is provided with a second recovery path 81 for sucking and recovering together with the gas injected from.

The first recovery path 71 is arranged adjacent to the upstream side of the injection head 60 in the transport direction, and is open at the lower end of the first recovery path 71.
For example, in the first recovery path 71, the front end portion of the first recovery path 71 is defined by the rear surface of the injection head 60.
Further, the rear end portion and the left and right end portions of the first recovery path 71 are defined by the first recovery path constituent wall 72.
The first recovery path 71 is a tubular space, and a suction source communication unit 73, which is a space connected to a suction source described later, is arranged above the first recovery path 71, and the suction source communication unit 73 is arranged. The lower end of the portion 73 communicates with the upper end of the first recovery path 71. The suction source communication unit 73 is arranged behind the gas anterior chamber 31.
The first recovery path 71 sucks the atmosphere from the opening at the lower end thereof, thereby sucking the liquid discharged from the liquid discharge port 43 onto one surface 11 of the work 10 and the gas injected from the gas injection port 33. .. Further, the first recovery path 71 also sucks the foreign matter removed from the work 10 together with the liquid and the gas.

The second recovery path 81 is arranged adjacent to the downstream side of the injection head 60 in the transport direction, and is open at the lower end of the second recovery path 81.

For example, in the second recovery path 81, the rear end portion of the second recovery path 81 is defined by the front surface of the injection head 60.
Further, the front end portion and the left and right end portions of the second recovery path 81 are defined by the second recovery path constituent wall 82.
The second recovery path 81 is a tubular space, and a suction source communication unit 83, which is a space connected to a suction source described later, is arranged above the second recovery path 81, and the suction source communication unit 83 is arranged. The lower end of the portion 83 communicates with the upper end of the second recovery path 81. The suction source communication unit 83 is arranged on the front side of the gas front chamber 31.
The second recovery path 81 sucks the atmosphere from the opening at the lower end thereof, thereby sucking the liquid discharged from the liquid discharge port 43 onto one surface 11 of the work 10 and the gas injected from the gas injection port 33. .. In addition, the second recovery path 81 also sucks the foreign matter removed from the work 10 together with the liquid and the gas.

The height position of the opening at the lower end of the first recovery path 71 is set to the same height position as the height position of the facing surface 61 of the injection head 60. That is, the height position of the lower end 72a of the first recovery path constituent wall 72 is set to be the same as the height position of the facing surface 61.
Similarly, the height position of the opening at the lower end of the second recovery path 81 is set to the same height position as the height position of the facing surface 61 of the injection head 60. That is, the height position of the lower end 82a of the second recovery path constituent wall 82 is set to be the same as the height position of the facing surface 61.

The total of the volume of the atmosphere sucked by the first recovery path 71 per unit time and the volume of the atmosphere sucked by the second recovery path 81 per unit time is the liquid discharged from the liquid discharge port 43 per unit time. It is preferable that the volume is larger than the total amount of the gas injected from the gas injection port 33 and the gas injected from the gas injection port 33 per unit time.

Here, an example in which the dust removal unit 90 separately includes the first recovery path construction wall 72 and the second recovery path construction wall 82 has been described, but the first recovery path construction wall 72 and the second recovery path configuration wall 72 have been described. The wall 82 may be composed of parts of a common tubular body.
That is, for example, the periphery of the injection head 60 may be surrounded by one tubular body, and the lower end of the tubular body may be open. In this case, in the internal space of the tubular body, the portion located on the rear side of the injection head 60 is the first recovery path 71, and the portion located on the front side of the injection head 60 is the second recovery path 81.
Further, in this case, the suction source communication unit 73 and the suction source communication unit 83 may be composed of a part of one space surrounding the periphery of the gas anterior chamber 31. That is, for example, the circumference of the gas anterior chamber 31 is surrounded by one tubular body, and in the internal space of the tubular body, the portion located behind the gas anterior chamber 31 is the suction source connecting portion 73. At the same time, the portion located in front of the gas anterior chamber 31 may be the suction source connecting portion 83.

Here, as shown in FIG. 2, the dimension (distance d4) of the facing surface 61 in the transport direction is larger than the facing distance (distance d3) between the facing surface 61 and the support surface 51a.
Therefore, the facing distance between the facing surface 61 and one surface 11 of the work 10 is sufficiently narrower than the dimension of the facing surface 61 in the transport direction, and in the narrow space, the one surface 11 made of gas and liquid is formed. Dust can be removed.

Further, in the transport direction, the distance d5 from the liquid discharge port 43 to the gas injection port 33 is smaller than the distance d6 from the gas injection port 33 to the downstream end of the facing surface 61.
Further, the distance d5 is preferably smaller than the facing distance between one surface 11 of the work 10 and the facing surface 61 (distance d0 shown in FIG. 3).
However, the distance d5 is preferably larger than the dimension of the third portion 32c of the gas supply path 32 in the transport direction.
Further, in the transport direction, the distance d5 from the liquid discharge port 43 to the gas injection port 33 is smaller than the distance d7 from the liquid discharge port 43 to the upstream end of the facing surface 61.
Therefore, the liquid discharged from the liquid discharge port 43 can be struck against one surface 11 of the work 10 by the gas injected from the gas injection port 33 arranged close to the liquid discharge port 43.

The distance d0 can be, for example, 0.5 mm or more and 20 mm or less, preferably 1 mm or more and 10 mm or less.
Further, since the distances d1, d2, and d3 are the sum of the distance d0 and the thickness of the work 10, they are determined according to the distance d0 and the thickness of the work 10. The thickness of the work 10 to be dust-removed by the gas-liquid dust removing device 100 is not particularly limited, but can be, for example, several μm or more. The upper limit of the thickness of the work 10 is not particularly limited.
Further, the gas-liquid dust removing device 100 is configured so that the distance d0 can be adjusted (therefore, the distances d1, d2, and d3 can be adjusted). For example, the distance d0 can be adjusted by raising and lowering at least one of the dust removing unit 90 and the suction plate 51.
Further, the distance d4 can be, for example, 20 mm or more and 200 mm or less.
Further, the distance d5 is such that "in a cross section cut along a plane orthogonal to one surface 11 of the work 10 and along the transport direction, the extension line of the gas supply path 32 and the extension line of the liquid supply path 42 are the work. Within the range that satisfies the condition that "intersects before reaching one surface 11 of 10", the distance d0, the angle formed by one surface 11 of the work 10 and the first direction, and the second direction with respect to the first direction. It can be set according to the tilt angle. The distance d5 is preferably 0.5 mm or more, and is preferably 1 mm or more so that the gas injection from the gas injection port 33 and the liquid discharge from the liquid discharge port 43 can be performed independently of each other. Is even more preferable.
The distance d6 can be, for example, 10 mm or more and 100 mm or less.
Further, the distance d7 can be, for example, 15 mm or more and 150 mm or less.

As shown in FIG. 5, the gas-liquid dust removing device 100 includes, for example, a blower 34 which is a source of gas injected from the gas injection port 33 and a filter 35 which filters the gas supplied from the blower 34. ing. The filter 35 includes, for example, a pre-filter and a HEPA filter.
The dust removal unit 90 includes a gas introduction unit 91 that introduces the gas supplied from the blower 34 through the filter 35 into the dust removal unit 90. The gas introduced into the gas introduction unit 91 is supplied to the gas supply path 32 via the gas front chamber 31 shown in FIG. 1 and is injected from the gas injection port 33.
A gas supply path (not shown) is interposed between the blower 34 and the filter 35, and between the filter 35 and the gas introduction unit 91, so that clean gas can be supplied from the blower 34 to the gas introduction unit 91. It has become.

Further, the gas-liquid dust removing device 100 includes, for example, a liquid tank 44 and a pump 45, which are sources of liquid discharged from the liquid discharge port 43.
The dust removal unit 90 includes a liquid introduction unit 92 that introduces the liquid pressure-fed by the pump 45 into the dust removal unit 90. The liquid introduced into the liquid introduction unit 92 is supplied to the liquid supply path 42 via the liquid front chamber 41 shown in FIG. 1 and the like, and is injected from the liquid discharge port 43.
The liquid tank 44 and the pump 45, and the pump 45 and the liquid introduction portion 92 are connected by pipes (not shown).
The gas-liquid dust removing device 100 further includes a water stop valve 46, a flow rate controller 47, and a check valve 48, which are provided in the pipes between the pump 45 and the liquid introduction unit 92, respectively. The water stop valve 46 can stop the supply of the liquid to the liquid introduction unit 92, and the flow controller 47 can adjust the flow rate of the liquid supplied to the liquid introduction unit 92.

Further, the gas-liquid dust removing device 100 includes a blower 76 which is a suction source for sucking the atmosphere from the first recovery path 71 and the second recovery path 81 through the suction source communication unit 73 and the suction source communication unit 83.
The dust removal unit 90 includes a suction source communication unit 73 and a discharge unit 93 connected to the suction source communication unit 83.
The discharge unit 93 and the blower 76 are connected by a gas exhaust path (not shown) so that the exhaust gas from the dust removal unit 90 can be sent from the discharge unit 93 to the blower 76 without leaking.
In the gas exhaust passage between the discharge unit 93 and the blower 76, an inertial dust collecting drainer filter box 74 and a filter 75 are provided in this order from the discharge unit 93 side.
Further, a filter 77 is provided after the blower 76.
The filter 75 is, for example, a pre-filter, and the filter 77 is, for example, a HEPA filter.
After the liquid and foreign matter contained in the exhaust gas are collected by the inertial dust collecting drainer filter box 74, the finer foreign matter contained in the exhaust gas can be collected by the filter 75. Further, by discharging the exhaust gas from the blower 76 through the filter 77, the exhaust gas from the gas-liquid dust removing device 100 can be purified.

Next, the operation will be described.

Dust removal of the work 10 by the dust removing unit 90 of the gas-liquid dust removing device 100 is performed while the work 10 is being conveyed by the conveying unit.
That is, while transporting the work 10 toward the right in FIG. 1, gas is injected from the gas injection port 33 to one surface 11 of the work 10 and liquid is injected from the liquid discharge port 43 to one surface 11 of the work 10. Discharge.
Further, the recovery of the exhaust gas (including liquid and foreign matter) through the first recovery path 71 and the recovery of the exhaust gas (including liquid and foreign matter) through the second recovery path 81 are also the injection of gas to one surface 11. And in parallel with the discharge of the liquid.
The work 10 is continuously conveyed, for example, at a constant speed.
Further, the gas injection from the gas injection port 33 is continuously performed, for example, at a constant flow rate.
Further, the liquid is continuously discharged from the liquid discharge port 43, for example, at a constant flow rate.
Further, the exhaust from the first recovery path 71 is continuously performed at a constant flow rate, for example.
Further, the exhaust from the second recovery path 81 is continuously performed at a constant flow rate, for example.

As a result, dust can be removed from one surface 11.
Here, since the liquid discharged from the liquid discharge port 43 collides with the gas near the intersection I shown in FIG. 3, it is urged downward by the gas and collides with one surface 11. Since the liquid is heavier (higher in density) than the gas, it can collide with the foreign matter adhering to one surface 11 with a larger energy than the gas, and the foreign matter can be removed from the work 10. Therefore, even a foreign substance stuck to one surface 11 can be suitably removed.
That is, the fixed foreign matter that cannot be removed only by injecting gas can be peeled off from one surface 11 of the work 10 and removed.

The foreign matter removed from one surface 11 is the first recovery arranged on the upstream side and the downstream side of the injection head 60 together with the liquid discharged from the liquid discharge port 43 and the gas injected from the gas injection port 33. It is recovered by the road 71 and the second recovery road 81.

Here, since the liquid discharge port 43 is arranged independently of the gas injection port 33, it is suppressed that the liquid becomes an extremely fine mist, and a lumpy liquid relatively larger than such a mist is suppressed. Is urged by the gas and struck against one surface 11. Therefore, a liquid having a larger energy can be struck on one surface 11, and the fixed foreign matter can be removed more reliably.
Further, since the gas injection direction (first direction) from the gas injection port 33 is orthogonal to one surface 11 of the work 10, the liquid can be struck on one surface 11 with a larger force. ..
Further, since the second direction is inclined with respect to the first direction so that the liquid discharge direction (second direction) from the liquid discharge port 43 is forward with respect to the transport direction, the liquid is discharged from the liquid discharge port 43. The liquid and the gas injected from the gas injection port 33 can be surely collided with each other.

Further, since the distance from the gas injection port 33 to the support surface 51a and the distance from the liquid discharge port 43 to the support surface 51a are equal to each other, the liquid discharged from the liquid discharge port 43 and the gas injection port 33 are injected. The gas can be more reliably intersected between the facing surface 61 and one surface 11, and the liquid discharged from the liquid discharge port 43 is suitably suppressed from becoming an extremely fine mist. it can.

Further, in a cross section cut along a plane orthogonal to one surface 11 of the work 10 and along the transport direction, an obstacle is formed between the gas injection port 33 and the support surface 51a on the extension line of the gas supply path 32. There is no obstacle on the extension line of the liquid supply path 42 between the liquid discharge port 43 and the support surface 51a. Therefore, the momentum of the liquid struck on one surface 11 of the work 10 is not weakened by an obstacle.

Further, in a cross section cut along a plane orthogonal to one surface 11 of the work 10 and along the transport direction, the extension line of the gas supply path 32 and the extension line of the liquid supply path 42 are one surface of the work 10. Since it intersects before reaching 11, the gas and the liquid are made to collide with each other in the air between the gas injection port 33 and the liquid discharge port 43 and one surface 11, the liquid is urged by the gas, and the liquid is unilaterally. Can be struck on the surface 11 of.

Further, each of the gas supply path 32 and the liquid supply path 42 has a slit shape that is orthogonal to the transport direction and extends in the direction along the support surface 51a, and is continuous over both ends in the width direction of the work 10. Therefore, the gas and the liquid can be jetted or discharged in a blade shape from the gas injection port 33 and the liquid discharge port 43, respectively. Therefore, foreign matter can be scraped off from one surface 11 by the blade-shaped (spatula-shaped) liquid.
As a result, dust can be suitably removed over the entire width direction of one surface 11 of the work 10, so that it is possible to prevent foreign matter from remaining on the spots on one surface 11, and the dust removal efficiency can be improved. It becomes possible to improve.

Further, since the facing distance between each part of the facing surface 61 of the injection head 60 and the support surface 51a is equal, the entire facing distance between the facing surface 61 and the support surface 51a can be made narrow, and the injection head The recovery efficiency of the exhaust gas (including liquid and foreign matter) by the first recovery path 71 and the second recovery path 81 arranged before and after the 60 can be improved.

Further, since the dimension (distance d4) of the facing surface 61 in the transport direction is larger than the facing distance (distance d3) between the facing surface 61 and the support surface 51a, the facing distance between the facing surface 61 and the support surface 51a is narrow. Can be.
As a result, at least a part of the liquid surface of the liquid discharged from the liquid discharge port 43 and supplied between the facing surface 61 and one surface 11 of the work 10 can reach the facing surface 61. Therefore, the recovery efficiency of the exhaust gas (including liquid and foreign matter) by the first recovery path 71 and the second recovery path 81 arranged before and after the injection head 60 can be improved.

Further, in the transport direction, the distance d5 from the liquid discharge port 43 to the gas injection port 33 is smaller than the distance d6 from the gas injection port 33 to the downstream end of the facing surface 61. A region where the facing distance between the facing surface 61 and the supporting surface 51a is narrow is formed to have a length of a certain length or more. Therefore, the exhaust gas (including liquid and foreign matter) can be satisfactorily sucked through the second recovery path 81 on the downstream side through this region.

Further, in the transport direction, the distance d5 from the liquid discharge port 43 to the gas injection port 33 is smaller than the distance d7 from the liquid discharge port 43 to the upstream end of the facing surface 61. A region having a narrow facing distance between the facing surface 61 and the support surface 51a is formed to have a length of a certain length or more. Therefore, the exhaust gas (including liquid and foreign matter) can be satisfactorily sucked through the first recovery path 71 on the upstream side through this region.

[Second Embodiment]
Next, the gas-liquid dust removing device 100 according to the second embodiment will be described with reference to FIG.
FIG. 6 is a partially enlarged side sectional view of the dust removal unit 90 of the gas-liquid dust removal device 100 according to the present embodiment.
The gas-liquid dust removing device 100 according to the present embodiment is different from the gas-liquid dust removing device 100 according to the first embodiment in the following points, and is otherwise related to the first embodiment. It has the same configuration as the gas-liquid dust remover 100.

In the case of the present embodiment, in the cross section (cross section shown in FIG. 6) cut in a plane orthogonal to one surface 11 of the work 10 and along the transport direction, the extension line of the gas supply path 32 and the liquid supply path 42 The extension lines intersect after reaching one surface 11 of the work 10.
That is, the intersection I of the straight line L1 (the axis of the gas supply path 32 in the above cross section) and the straight line L2 (the axis of the liquid supply path 42 in the above cross section) shown in FIG. 6 is the facing surface 61 with reference to one surface 11. It is located on the opposite side (lower side) from the side.

Also in the case of the present embodiment, the distance d0, the angle formed by the one surface 11 of the work 10 and the first direction, and the inclination angle in the second direction with respect to the first direction are the same as those in the first embodiment.
In the case of the present embodiment, the distance d5 may be larger than the distance d0.
In the case of the present embodiment, the distance d5 can be, for example, 1 mm or more.

In the case of the present embodiment, the liquid discharged from the liquid discharge port 43 and the gas injected from the gas injection port 33 do not collide with each other between the facing surface 61 and one surface 11, and the liquid is discharged from one surface 11. After being supplied onto the liquid, the gas injected from the gas injection port 33 collides with the liquid, and the liquid is continuously struck against one surface 11 by the urging by the gas.

Also in this embodiment, it is possible to satisfactorily remove dust from the work 10.
In the present embodiment, the extension line of the gas supply path 32 and the extension line of the liquid supply path 42 intersect after reaching one surface 11 of the work 10, so that the liquid adhering to one surface 11 is downstream. The movement to the side can be blocked by the air flow injected from the gas injection port 33. Therefore, it is possible to more reliably prevent the work 10 from being conveyed to the downstream side of the dust removal unit 90 with the liquid adhering to one surface 11. Further, the gas injected from the gas injection port 33 pushes a part of the liquid between the facing surface 61 and one surface 11 to the upstream side together with the foreign matter removed from the one surface 11, and the first recovery is performed. It can be recovered by road 71.

[Third Embodiment]
Next, the gas-liquid dust removing device 100 according to the third embodiment will be described with reference to FIGS. 7 to 9.
FIG. 7 is a side sectional view of the gas-liquid dust removing device 100 according to the third embodiment, and shows the configuration of the dust removing unit 90 and its surroundings.
FIG. 8 is a partially enlarged view of FIG. 7, showing a configuration in the vicinity of the facing surface 61 of the injection head 60.
FIG. 9 is a schematic view showing the overall configuration of the gas-liquid dust removing device 100 according to the third embodiment.

In the first embodiment described above, an example in which the work 10 moves linearly along the flat plate-shaped suction plate 51 at a position facing the dust removal unit 90 has been described.
On the other hand, in the case of the present embodiment, the transport unit does not include the roller 20, the roller 21, the suction plate 51 and the suction box 52, and instead, the roller 25 is rotationally driven by an actuator such as a motor (not shown). It has.
In the present embodiment, the work 10 moves in an arc shape along the peripheral surface 25a of the cylindrical roller 25 at a position facing the dust removing unit 90, and the support surface that supports the work 10 is a roller. It is a peripheral surface 25a of 25.

Further, the shape of the portion of the dust removing unit 90 facing the roller 25 is also a concave curved surface along the peripheral surface 25a of the roller 25.
That is, the transport portion is a cylindrical roller 25, the support surface is a peripheral surface 25a of the roller 25, and the facing surface 61 of the injection head 60 is a concave curved surface along the peripheral surface 25a of the roller 25.
Further, the curved surface facing portion 72b and the curved surface facing portion 82b, which are the portions of the first recovery path construction wall 72 and the second recovery path construction wall 82 facing the roller 25, also have a shape along the peripheral surface 25a of the roller 25. It has become.

As shown in FIG. 8, also in the case of the present embodiment, the distance d1 from the gas injection port 33 to the support surface 51a and the distance d2 from the liquid discharge port 43 to the support surface 51a are equal to each other.
Further, the facing distance (distance d3) between each part of the facing surface 61 and the peripheral surface 25a which is a support surface is equal (constant in each part of the facing surface 61).

In the case of the present embodiment, the gas-liquid dust removal device 100 includes two dust removal units 90, a first dust removal unit 90a and a second dust removal unit 90b, and each dust removal unit 90 and a corresponding roller 25 are provided.

The first dust removal unit 90a is arranged above the roller 25 corresponding to the first dust removal unit 90a. The facing surface 61 of the first dust removal unit 90a is arranged downward.
The roller 25 corresponding to the first dust removal unit 90a surface-supports the back surface 12 of the work 10 by the peripheral surface 25a on the upper portion of the roller 25.
Then, the first dust removal unit 90a removes dust from one surface 11 of the work 10.

The roller 25 corresponding to the second dust removal unit 90b is arranged on the downstream side of the roller 25 corresponding to the first dust removal unit 90a in the transport direction, and the lower portion of the roller 25 is above the back surface 12 of the work 10. Engage from.
The second dust removal unit 90b is arranged below the roller 25 corresponding to the second dust removal unit 90b.
Then, the second dust removal unit 90b removes dust from the back surface 12 of the work 10.

Therefore, while the work 10 is conveyed by the transport unit including the roller 25 corresponding to the first dust removal unit 90a and the roller 25 corresponding to the second dust removal unit 90b, the first dust removal unit 90a conveys the work 10 to one surface 11 of the work 10. Dust can be removed, and subsequently, the back surface 12 of the work 10 can be removed by the second dust removal unit 90b.

As shown in FIG. 9, in the case of the present embodiment, the gas supply path for supplying gas from the blower 34 is bifurcated at the branch point 95 on the downstream side of the filter 35, and is connected to the gas introduction section 91 of the first dust removal unit 90a. It is connected to the gas introduction unit 91 of the second dust removal unit 90b, respectively. Therefore, the gas from the blower 34 is distributed and supplied to the first dust removal unit 90a and the second dust removal unit 90b.

Further, the pipe for supplying the liquid from the liquid tank 44 branches into two at the branch point 96 on the downstream side of the check valve 48, and the liquid introduction portion 92 of the first dust removal unit 90a and the liquid introduction portion 92 of the second dust removal unit 90b. And are connected to each. Therefore, the liquid from the liquid tank 44 is distributed and supplied to the first dust removal unit 90a and the second dust removal unit 90b.
A flow rate adjusting valve 49 is provided in the pipe between the branch point 96 and the liquid introduction portion 92 of the second dust removal unit 90b. By adjusting the flow rate of the liquid in the pipe using the flow rate adjusting valve 49, the flow rate of the liquid discharged from the liquid discharge port 43 of the first dust removal unit 90a and the flow rate of the liquid discharged from the liquid discharge port 43 of the second dust removal unit 90b It is possible to prevent an imbalance caused by gravity from occurring with the flow rate of the discharged liquid.

Further, the gas exhaust path from the discharge section 93 of the first dust removal unit 90a and the gas exhaust path from the discharge section 93 of the second dust removal unit 90b merge at the confluence point 97 and then enter the inertial dust collection drainer filter box 74. It is connected. Therefore, the exhaust gas from the first dust removal unit 90a (including liquid and foreign matter) and the exhaust gas from the second dust removal unit 90b (including liquid and foreign matter) are introduced into the common inertial dust collecting drainer filter box 74. , Emitted through a common filter 75, a common blower 76 and a common filter 77.

The same effect as that of the first embodiment can be obtained by this embodiment as well.
Further, since the gas-liquid dust removing device 100 includes a first dust removing unit 90a for removing dust on one surface 11 of the work 10 and a second dust removing unit 90b for removing dust on the back surface 12 of the work 10, the work 10 is provided. It is possible to remove dust on both sides.

[Fourth Embodiment]
Next, the gas-liquid dust removing device 100 according to the fourth embodiment will be described with reference to FIG.
FIG. 10 is a side sectional view of the gas-liquid dust removing device 100 according to the present embodiment, and shows the configuration of the dust removing unit 90 and its surroundings.
The gas-liquid dust removing device 100 according to the present embodiment is different from the gas-liquid dust removing device 100 according to the first embodiment in the following points, and is otherwise related to the first embodiment. It has the same configuration as the gas-liquid dust remover 100.

In the case of the present embodiment, the gas-liquid dust removing device 100 includes two, a first dust removing unit 90a for removing dust on one surface 11 of the work 10 and a second dust removing unit 90b for removing dust on the back surface 12 of the work 10. The dust removing unit 90 is provided.
The structures of the first dust removal unit 90a and the second dust removal unit 90b are the same as those of the dust removal unit 90 described in the first embodiment.
Similar to the dust removal unit 90 in the first embodiment, the first dust removal unit 90a is arranged so that the facing surface 61 of the first dust removal unit 90a faces downward.
On the other hand, the second dust removal unit 90b is arranged below the first dust removal unit 90a at a distance from the first dust removal unit 90a, and is arranged upside down from the first dust removal unit 90a.
That is, the second dust removal unit 90b is arranged so that the facing surface 61 of the second dust removing unit 90b faces upward, and the facing surface 61 of the first dust removing unit 90a and the facing surface 61 of the second dust removing unit 90b. Are parallel to each other.

In the case of the present embodiment, the work 10 is first located between the lower end 72a of the first recovery path constituent wall 72 of the first dust removal unit 90a and the upper end 72c of the first recovery path constituent wall 72 of the second dust removal unit 90b. Between the facing surface 61 of the injection head 60 of the dust removing unit 90a and the facing surface 61 of the injection head 60 of the second dust removing unit 90b, and the lower ends 82a and the second of the second recovery path forming wall 82 of the second dust removing unit 90b. The dust removing unit 90b passes between the upper end 82c of the second recovery path forming wall 82 in this order.
The structure of the upper end 72c and the upper end 82c is the same as the structure of the lower end 72a and the lower end 82a.

Further, in the case of the present embodiment, for example, the upper roller 20 of the pair of rollers 20 is arranged in the first collection path 71 of the first dust removal unit 90a, and the lower roller 20 is the second dust removal unit 90a. It is arranged in the first recovery path 71 of the unit 90b.
Similarly, the upper roller 21 of the pair of rollers 21 is arranged in the second recovery path 81 of the first dust removal unit 90a, and the lower roller 20 is the second recovery path of the second dust removal unit 90b. It is arranged in 81.
However, also in the present embodiment, as in the first embodiment, the pair of rollers 20 are arranged on the upstream side in the transport direction with respect to the dust removal unit 90, and the pair of rollers 21 are arranged in the transport direction with respect to the dust removal unit 90. It may be arranged on the downstream side.

In the case of this embodiment, the overall configuration of the gas-liquid dust removing device 100 is the same as that of the third embodiment (FIG. 9).

The same effect as that of the first embodiment can be obtained by this embodiment as well.
Further, since the gas-liquid dust removing device 100 includes a first dust removing unit 90a for removing dust on one surface 11 of the work 10 and a second dust removing unit 90b for removing dust on the back surface 12 of the work 10, the work 10 is provided. It is possible to remove dust on both sides.

[Fifth Embodiment]
Next, the gas-liquid dust removing device 100 according to the fifth embodiment will be described with reference to FIG.
The gas-liquid dust removing device 100 according to the present embodiment is different from the gas-liquid dust removing device 100 according to the first embodiment in the following points, and is otherwise related to the first embodiment. It has the same configuration as the gas-liquid dust remover 100.

As shown in FIG. 11, the gas-liquid dust removing device 100 according to the present embodiment is arranged at a position on the downstream side of the second recovery path 81 in the transport direction of the work 10, and gas is directed toward the second recovery path 81. The air knife 110 for injecting is provided. That is, the air knife 110 injects gas toward the upstream side in the transport direction.

The air knife 110 has, for example, a slit-shaped main flow path 111 extending in the depth direction of FIG. 11 (orthogonal to the transport direction and extending in a direction along the support surface 51a) and communicating with the main flow path 111. The injection slit 112 and the like are provided. The injection slit 112 extends in the depth direction of FIG. The injection slit 112 extends from the main flow path 111 in the direction opposite to the transport direction, and injects gas from the end of the injection slit 112 opposite to the main flow path 111 side (that is, the tip of the injection slit 112). Therefore, the gas can be injected from the tip of the injection slit 112 toward the second recovery path 81 (toward the upstream side in the transport direction).
The air knife 110 is fixed to, for example, a lower end portion on the front surface of the second recovery path constituent wall 82, and injects gas between the lower end 82 a of the second recovery path constituent wall 82 and one surface 11 of the work 10. It has become like.
The injection slit 112 is arranged so as to be inclined downward to the left in FIG. 11, and the height position of the tip end (left end and lower end) of the injection slit 112 is set to the same height position as the lower end 82a.
Gas is supplied to the main flow path 111 from a gas supply source (not shown). This gas supply source may be the same as the gas supply source that supplies the gas to the gas front chamber 31 via the gas introduction unit 91, or may be another gas supply source.
The gas supplied to the main flow path 111 is introduced into the injection slit 112 and is injected from the tip of the injection slit 112.

According to the present embodiment, since the gas-liquid dust removing device 100 includes the air knife 110, the liquid discharged from the liquid discharging port 43 and adhering to one surface 11 of the work 10 is on the upstream side of the injection head 60. The liquid that could not be recovered by the first recovery path 71 and the second recovery path 81 on the downstream side and was once conveyed to the downstream side of the second recovery path 81 is pushed back to the second recovery path 81 side, and the second It can be more reliably collected by the collection path 81.
Therefore, since it is possible to suppress the residual liquid on one surface 11 of the work 10 after passing through the dust removing unit 90, the one surface 11 of the work 10 after passing through the dust removing unit 90 should be in a drier state. Can be done. As a result, it is possible to prevent the liquid from adhering to the rollers (rollers 21 shown in FIG. 1) arranged on the downstream side of the dust removal unit 90.

[Sixth Embodiment]
Next, the gas-liquid dust removing device 100 according to the sixth embodiment will be described with reference to FIG.
The gas-liquid dust removing device 100 according to the present embodiment is different from the gas-liquid dust removing device 100 according to the third embodiment in the following description, and is otherwise related to the third embodiment. It has the same configuration as the gas-liquid dust remover 100.

As shown in FIG. 12, the gas-liquid dust removing device 100 according to the present embodiment is arranged at a position on the downstream side of the second recovery path 81 in the transport direction of the work 10, and gas is directed toward the second recovery path 81. The air knife 110 for injecting is provided. That is, the air knife 110 injects gas toward the upstream side in the transport direction.

The structure of the air knife 110 is the same as that of the fifth embodiment.
That is, the air knife 110 includes, for example, a main flow path 111 extending in the depth direction of FIG. 12 and a slit-shaped injection slit 112 communicating with the main flow path 111, from the tip of the injection slit 112. The gas can be injected toward the second recovery path 81.
The air knife 110 is fixed to, for example, the lower surface of the front end portion of the second recovery path construction wall 82, and is gas between the curved surface facing portion 82b of the second recovery path construction wall 82 and one surface 11 of the work 10. Is to be injected.
The injection slit 112 is arranged so as to be inclined upward to the left in FIG. The distance between the tip of the injection slit 112 and the peripheral surface 25a is set to be the same as the distance between the curved surface facing portion 82b and the peripheral surface 25a.

Also in this embodiment, since the gas-liquid dust removing device 100 is provided with the air knife 110, among the liquids discharged from the liquid discharge port 43 and adhering to one surface 11 of the work 10, the upstream side of the injection head 60 and the liquid adhere to one surface 11 of the work 10 The liquid that could not be completely recovered by the first recovery path 71 and the second recovery path 81 on the downstream side and was once conveyed to the downstream side of the second recovery path 81 is pushed back to the second recovery path 81 side, and the second recovery path 81 is used. It can be recovered more reliably by the road 81.
Therefore, since it is possible to suppress the residual liquid on one surface 11 of the work 10 after passing through the dust removing unit 90, the one surface 11 of the work 10 after passing through the dust removing unit 90 should be in a drier state. Can be done. As a result, it is possible to prevent the liquid from adhering to the rollers arranged on the downstream side of the dust removal unit 90.

Although each embodiment has been described above with reference to the drawings, these are examples of the present invention, and various configurations other than the above can be adopted.

For example, in the third embodiment described above, the gas-liquid dust removal device 100 includes two dust removal units 90, the transport portion corresponding to each dust removal unit 90 is a cylindrical roller 25, and the support surface is a roller. An example has been described in which the peripheral surface 25a and the facing surface 61 are concave curved surfaces along the peripheral surface 25a of the roller 25.
However, the present invention is not limited to this example, and the gas-liquid dust removal device 100 includes one dust removal unit 90, the transport portion is a cylindrical roller 25, and the support surface is a peripheral surface 25a of the roller. The facing surface 61 may be a concave curved surface along the peripheral surface 25a of the roller 25.

In addition, the above embodiments can be combined as long as the contents do not conflict with each other.

This embodiment includes the following technical ideas.
(1) A gas-liquid dust remover that supplies gas and liquid to one surface of a sheet-shaped work to be conveyed to remove dust from the work.
A transport unit that transports the work in a predetermined transport direction,
A gas injection port that injects gas in a first direction orthogonal to the one surface of the work,
A liquid discharge port that is arranged on the upstream side of the gas injection port in the transport direction independently of the gas injection port and discharges the liquid in the second direction.
With
A gas-liquid dust remover in which the second direction is inclined with respect to the first direction so that the second direction is forward with respect to the transport direction.
(2) The transport portion has a support surface that supports the work on the back surface with respect to the one surface.
The gas-liquid dust removing device according to (1), wherein the distance from the gas injection port to the support surface and the distance from the liquid discharge port to the support surface are equal to each other.
(3) A gas supply path having a gas injection port open at the tip and supplying gas to the gas injection port, and a gas supply path.
A liquid supply path having a liquid discharge port open at the tip and supplying a liquid to the liquid discharge port,
With
In a cross section cut along a plane orthogonal to the one surface and along the transport direction, there is no obstacle between the gas injection port and the support surface on the extension line of the gas supply path, and there is no obstacle. The gas-liquid dust removing device according to (2), wherein there is no obstacle between the liquid discharge port and the support surface on the extension line of the liquid supply path.
(4) A gas supply path having a gas injection port open at the tip and supplying gas to the gas injection port, and a gas supply path.
A liquid supply path having a liquid discharge port open at the tip and supplying a liquid to the liquid discharge port,
With
In a cross section cut along a plane orthogonal to the one surface and along the transport direction, the extension line of the gas supply path and the extension line of the liquid supply path reach the one surface of the work. The gas-liquid dust remover according to (3), which intersects before.
(5) Each of the gas supply path and the liquid supply path has a slit shape that is orthogonal to the transport direction and extends in a direction along the support surface, and extends between both ends in the width direction of the work. The gas-liquid dust remover according to (3) or (4), which extends continuously.
(6) Further provided with an injection head having the gas injection port and the liquid discharge port.
The injection head has a facing surface facing the supporting surface.
The distance between each part of the facing surface and the supporting surface is equal.
The gas-liquid dust removing device according to any one of (2) to (5), wherein the gas injection port and the liquid discharge port are opened independently of each other on the facing surface.
(7) The gas-liquid dust removing device according to (6), wherein the support surface and the facing surface are each flat, and the supporting surface and the facing surface face each other in parallel.
(8) The transport portion is a cylindrical roller.
The support surface is the peripheral surface of the roller.
The gas-liquid dust removing device according to (6), wherein the facing surface is a concave curved surface along the peripheral surface of the roller.
(9) The gas-liquid dust removing device according to any one of (6) to (8), wherein the size of the facing surface in the transport direction is larger than the facing distance between the facing surface and the supporting surface.
(10) Any one of (6) to (9) in which the distance from the liquid discharge port to the gas injection port is smaller than the distance from the gas injection port to the downstream end of the facing surface in the transport direction. The gas-liquid dust remover according to the section.
(11) Any one of (6) to (10) in which the distance from the liquid discharge port to the gas injection port is smaller than the distance from the liquid discharge port to the upstream end of the facing surface in the transport direction. The gas-liquid dust remover according to the section.
(12) An injection head having the gas injection port and the liquid discharge port,
A first recovery path, which is arranged at a position on the upstream side of the injection head in the transport direction and sucks and recovers the liquid discharged from the liquid discharge port together with the gas injected from the gas injection port.
A second recovery path, which is arranged at a position on the downstream side of the injection head in the transport direction and sucks and recovers the liquid discharged from the liquid discharge port together with the gas injected from the gas injection port.
The gas-liquid dust removing device according to any one of (1) to (11).
(13) The gas-liquid dust removing device according to (12), which is arranged at a position on the downstream side of the second recovery path in the transport direction and includes an air knife that injects gas toward the second recovery path.

10 Work 11 One side 12 Back side 20 Rollers (constituting a transport unit)
21 Roller (Contains a transport unit)
25 rollers (constituting the transport section)
25a Circumferential surface (support surface)
31 Gas front chamber 32 Gas supply path 32a 1st part 32b 2nd part 32c 3rd part 33 Gas injection port 34 Blower 35 Filter 41 Liquid front chamber 42 Liquid supply path 43 Liquid discharge port 44 Liquid tank 45 Pump 46 Water stop valve 47 Flow controller 48 Check valve 49 Flow control valve 51 Suction plate (constituting a transport unit)
51a Support surface 52 Suction box (constituting a transport section)
52a Negative pressure chamber 60 Injection head 61 Facing surface 61a First part 61b Second part 61c Third part 71 First recovery path 72 First recovery path constituent wall 72a Lower end 72b Curved facing part 72c Upper end 73 Suction source communication part 74 Inertia Dust collection drain filter box 75 Filter 76 Blower 77 Filter 81 Second collection path 82 Second collection path configuration Wall 82a Lower end 82b Curved facing part 82c Upper end 83 Suction source communication part 90 Dust removal unit 90a First dust removal unit 90b Second dust removal unit 91 Gas introduction part 92 Liquid introduction part 93 Discharge part 95, 97 Branch point 96 Confluence point 100 Gas-liquid dust collector 110 Air knife 110a Bottom surface 110b Facing surface 111 Main flow path 112 Injection slit

Claims (9)

A gas-liquid dust remover that supplies gas and liquid to one surface of a sheet-shaped work to be conveyed to remove dust from the work.
A transport unit that transports the work in a predetermined transport direction,
A gas injection port that injects gas in a first direction orthogonal to the one surface of the work,
A liquid discharge port that is arranged on the upstream side of the gas injection port in the transport direction independently of the gas injection port and discharges the liquid in the second direction.
A gas supply path having a gas injection port open at the tip and supplying gas to the gas injection port,
A liquid supply path having a liquid discharge port open at the tip and supplying a liquid to the liquid discharge port,
With
The second direction is inclined with respect to the first direction so that the second direction is forward with respect to the transport direction .
Each of the gas supply path and the liquid supply path has a slit shape orthogonal to the transport direction and extends in a direction along the support surface, and is continuous over both ends in the width direction of the work. Extends to
A gas-liquid dust remover in which the liquid discharge port is arranged on the upstream side in the transport direction with respect to the gas injection port in the entire area between both ends in the width direction of the work. The transport portion has a support surface that supports the work on the back surface with respect to the one surface.
The gas-liquid dust removing device according to claim 1, wherein the distance from the gas injection port to the support surface and the distance from the liquid discharge port to the support surface are equal to each other. In a cross section taken along a plane along the orthogonal and the transport direction relative to the previous SL one side, it is an extension of the gas supply channel without obstacles between the supporting surface and the gas injection port, and The gas-liquid dust removing device according to claim 2, wherein there is no obstacle between the liquid discharge port and the support surface on the extension line of the liquid supply path. In a cross section taken along a plane along the orthogonal and the transport direction relative to the previous SL one side, an extension of the gas supply passage and the extension line of the liquid supply path, to the one surface of the workpiece The gas-liquid dust remover according to any one of claims 1 to 3, which intersects before arrival. Further provided with an injection head having the gas injection port and the liquid discharge port,
The injection head has a facing surface facing the supporting surface.
The distance between each part of the facing surface and the supporting surface is equal.
The gas-liquid dust removing device according to any one of claims 2 to 4 , wherein the gas injection port and the liquid discharge port are opened independently of each other on the facing surface. The gas-liquid dust removing device according to claim 5 , wherein the support surface and the facing surface are each flat, and the supporting surface and the facing surface face each other in parallel. The transport portion is a cylindrical roller, and is
The support surface is the peripheral surface of the roller.
The gas-liquid dust removing device according to claim 5 , wherein the facing surface is a concave curved surface along the peripheral surface of the roller. The gas-liquid dust removing device according to any one of claims 5 to 7 , wherein the size of the facing surface in the transport direction is larger than the facing distance between the facing surface and the supporting surface. An injection head having the gas injection port and the liquid discharge port,
A first recovery path, which is arranged at a position on the upstream side of the injection head in the transport direction and sucks and recovers the liquid discharged from the liquid discharge port together with the gas injected from the gas injection port.
A second recovery path, which is arranged at a position on the downstream side of the injection head in the transport direction and sucks and recovers the liquid discharged from the liquid discharge port together with the gas injected from the gas injection port.
The gas-liquid dust removing device according to any one of claims 1 to 8.

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