TW201420219A - Dust removal device - Google Patents
Dust removal device Download PDFInfo
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- TW201420219A TW201420219A TW102139415A TW102139415A TW201420219A TW 201420219 A TW201420219 A TW 201420219A TW 102139415 A TW102139415 A TW 102139415A TW 102139415 A TW102139415 A TW 102139415A TW 201420219 A TW201420219 A TW 201420219A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
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Abstract
Description
本發明係關於一種使附著於基板(顯示器用玻璃基板、陶瓷基板、印刷基板等)或片材等被清洗物之表面之塵埃或污染微粒子等剝離後懸浮並抽吸去除該懸浮物之除塵裝置。 The present invention relates to a dust removing device that removes dust, contaminated fine particles, or the like adhering to a surface of a substrate (such as a glass substrate for a display, a ceramic substrate, a printed substrate, or the like) or a sheet, and then suspends and suctions the suspended matter. .
自先前以來，作為附著於基板(顯示器用玻璃基板、陶瓷基板、印刷基板等)或片材等之塵埃或污染微粒子等之除塵裝置，例如，已知有專利文獻1之除塵裝置。該除塵裝置係以如下方式構成：配置具備噴射高壓空氣之空氣噴出用狹縫之供氣腔室，且於該供氣腔室之兩側配置具備空氣吸入用狹縫之吸氣腔室，自空氣噴出用狹縫朝向於搬送路徑上搬送之被清洗物噴射高壓空氣，利用其風壓使附著於被清洗物之塵埃或污染微粒子等(以下，簡稱為灰塵)剝離後，自空氣吸入用狹縫抽吸去除至各吸氣腔室內。 For example, a dust removing device of Patent Document 1 is known as a dust removing device such as dust or contaminated fine particles attached to a substrate (a glass substrate for a display, a ceramic substrate, a printed circuit board, or the like) or a sheet. The dust removing device is configured such that an air supply chamber having a slit for jetting air for injecting high-pressure air is disposed, and an air suction chamber having a slit for air suction is disposed on both sides of the air supply chamber, The air ejection slit ejects the high-pressure air toward the object to be conveyed on the transport path, and the dust adhered to the object to be cleaned or the contaminated particles (hereinafter referred to simply as dust) is peeled off by the air pressure, and the air is sucked from the air. The slit suction is removed into each suction chamber.
又，本申請案之申請人於專利文獻2中提出有一種沿著外裝體(供氣腔室)之長邊方向間斷地或連續地形成有長條之空氣噴出用狹縫之空氣幕(air curtain)裝置。該專利文獻2所示之裝置於清洗領域等中用作吹飛玻璃基板上之水滴之空氣幕裝置，但就構造方面而言，若於噴射高壓空氣之供氣腔室之兩側配置專利文獻1所示之吸氣腔室，則亦可簡單地轉用於除塵裝置。 Moreover, the applicant of the present application proposed in Patent Document 2 that an air curtain in which a slit for air ejection is formed intermittently or continuously along the longitudinal direction of the exterior body (air supply chamber) is proposed ( Air curtain) device. The apparatus shown in Patent Document 2 is used as an air curtain device for blowing water droplets on a glass substrate in the field of cleaning, etc., but in terms of construction, if a patent document is placed on both sides of a supply air chamber for injecting high-pressure air The suction chamber shown in Fig. 1 can also be simply transferred to the dust removal device.
[專利文獻1]日本專利特開2006-346515號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2006-346515
[專利文獻2]日本專利特願2000-277252(日本專利特開2002-89925號公報) [Patent Document 2] Japanese Patent Application No. 2000-277252 (Japanese Patent Laid-Open Publication No. 2002-89925)
於上述專利文獻1、2所示之裝置中，沿著供氣腔室之長邊方向形成有用以噴射高壓空氣之空氣噴出用狹縫，作為該空氣噴出用狹縫之形成方法，於專利文獻2中揭示有間斷地形成複數個空氣噴出用狹縫之方法及形成連續之一連串空氣噴出用狹縫之方法，但於間斷地形成有複數個空氣噴出用狹縫之情形時，由於存在局部地未形成空氣噴出用狹縫之部分、即未對基板噴射空氣之部位，故而有導致除塵效果降低之虞。另一方面，於使空氣噴出用狹縫連續地開口之情形時，擔心因供給至供氣腔室內之空氣之內壓而導致無法維持將較長之吸氣用狹縫之寬度固定地保持之狀態。即，有如下問題：若沿著供氣腔室之長邊方向形成連續之吸氣用狹縫，則該吸氣用狹縫成為裂縫，因供氣腔室之內壓而導致成為裂縫之吸氣用狹縫部分開裂，從而亦無法固定地保持自吸氣用狹縫噴射之高壓空氣之噴射壓，且因噴射壓之強弱導致無法發揮穩定之除塵效果。 In the apparatus shown in the above-mentioned Patent Documents 1 and 2, a slit for jetting air for spraying high-pressure air is formed along the longitudinal direction of the air supply chamber, and a method for forming the slit for air ejection is disclosed in the patent document. (2) A method of forming a plurality of slits for air ejection intermittently and a method of forming a slit for a continuous series of air ejections are disclosed. However, when a plurality of slits for air ejection are intermittently formed, there is a localized The portion where the air ejection slit is not formed, that is, the portion where the air is not ejected to the substrate, may cause a reduction in the dust removing effect. On the other hand, when the air ejection slit is continuously opened, there is a concern that the internal pressure of the air supplied into the air supply chamber cannot be maintained, and the width of the long suction slit can be maintained. status. In other words, if a continuous suction slit is formed along the longitudinal direction of the air supply chamber, the suction slit becomes a crack, and the crack is sucked by the internal pressure of the air supply chamber. The gas slit is partially cracked, so that the injection pressure of the high-pressure air injected from the slit for suction is not fixed, and the stable dust removal effect cannot be exhibited due to the strength of the injection pressure.
又，此種問題對高速地抽吸空氣之吸氣用狹縫而言亦同樣。即，有如下問題：若沿著吸氣腔室之長邊方向連續地形成吸氣用狹縫，則因供氣腔室內之負壓而導致吸氣用狹縫局部地變窄，從而空氣之抽吸壓變得不均勻，尤其是於自吸氣用狹縫未充分抽吸灰塵之情形時，被高壓空氣吹飛之灰塵會飛散至供設置除塵機之無塵室(clean room)等中，而使乾淨之環境亦受到污染。 Moreover, such a problem is also the same for the slit for suction that sucks air at a high speed. In other words, when the suction slit is continuously formed along the longitudinal direction of the intake chamber, the suction slit is partially narrowed due to the negative pressure in the supply chamber, and the air is The suction pressure becomes uneven, especially when the self-suction slit does not sufficiently suck the dust, the dust blown by the high-pressure air flies to the clean room for providing the dust remover, and the like. And the clean environment is also polluted.
因此，本發明係著眼於上述問題而完成者，其第1目的在於提供一種可自沿著清潔頭之長邊方向形成之狹縫狀之空氣噴出口高壓噴出 穩定且均勻之空氣而有效地使灰塵自被清洗物之表面剝離之除塵裝置。 Accordingly, the present invention has been made in view of the above problems, and a first object thereof is to provide a high-pressure discharge of a slit-shaped air discharge port which can be formed along the longitudinal direction of the cleaning head. A dust removal device that effectively and uniformly removes dust from the surface of the object to be cleaned by a stable and uniform air.
又，本發明之第2目的在於提供一種可穩定地抽吸藉由噴射之高壓空氣而自被清洗物之表面剝離之灰塵，從而有效地抑制灰塵之飛散之除塵裝置。 Further, a second object of the present invention is to provide a dust removing device which can stably suck dust which is peeled off from the surface of the object to be cleaned by the high-pressure air to be ejected, thereby effectively suppressing scattering of dust.
本發明之除塵裝置係以如下方式構成者：設置具備噴射高壓空氣之供氣腔室、及位於該供氣腔室之兩側且吸入空氣之一對吸氣腔室的清潔頭(clean head)，將該清潔頭與搬送路徑對向配置，藉由上述供氣腔室朝向於上述搬送路徑上搬送之被清洗物之上表面噴射高壓空氣而使附著於被清洗物之灰塵剝離並懸浮，且利用上述吸氣腔室抽吸該懸浮物；該除塵裝置之特徵在於：以使複數行空氣噴出口沿著上述清潔頭之長邊方向呈狹縫狀開口而間斷地形成並且各行之各空氣噴出口之端部重疊之方式，將上述各行之空氣噴出口配置成鋸齒狀。 The dust removing device of the present invention is constructed by providing an air supply chamber having a high-pressure air jet, and a clean head located on both sides of the air supply chamber and sucking one of the air to the air suction chamber. The cleaning head is disposed to face the transport path, and the air supply chamber ejects high-pressure air toward the upper surface of the object to be transported on the transport path, thereby separating and suspending the dust adhering to the object to be cleaned, and Suspending the suspended matter by using the suction chamber; the dust removing device is characterized in that the plurality of rows of air ejection ports are intermittently formed in a slit-like opening along the longitudinal direction of the cleaning head, and each of the rows of air is sprayed The air ejection ports of the respective rows are arranged in a zigzag manner so that the ends of the outlets overlap.
又，本發明之除塵裝置之特徵在於：與上述空氣噴出口平行地於該空氣噴出口之兩側呈鋸齒狀配置有與上述吸氣腔室連通之複數行空氣吸入口。 Moreover, the dust removing device of the present invention is characterized in that a plurality of rows of air suction ports that communicate with the intake chamber are arranged in a zigzag manner on both sides of the air ejection port in parallel with the air ejection port.
又，本發明之除塵裝置之特徵在於：於上述空氣吸入口之至少下端部內緣側形成有使亂流產生之凹陷部。 Moreover, the dust removing device of the present invention is characterized in that a recessed portion which causes turbulence is formed on at least the inner edge side of the lower end portion of the air suction port.
又，本發明之除塵裝置之特徵在於：於上述供氣腔室內配置兩端開放之內管，並且於該內管形成噴出用開口孔，自供氣機構被壓送至上述供氣腔室內之空氣係其空氣量之2/3與剩餘之1/3分離而分別流入至內管及內管與供氣腔室之間，進而，流入至上述內管之空氣之一半係經由噴出用開口孔而噴出至上述供氣腔室內，剩餘之一半係自內管之另一端部噴出至供氣腔室內，該等空氣與直接被導入至上述供氣腔室內之空氣合併而自上述空氣噴出口朝向上述被清洗物均勻地噴射。 Further, the dust removing device of the present invention is characterized in that an inner tube which is open at both ends is disposed in the air supply chamber, and an opening hole for discharging is formed in the inner tube, and the self-supply mechanism is pressure-fed into the air supply chamber. 2/3 of the amount of air is separated from the remaining 1/3 and flows into the inner tube and the inner tube and the air supply chamber, respectively, and one of the air flowing into the inner tube passes through the opening hole for discharge. And ejecting into the air supply chamber, one of the remaining half is ejected from the other end of the inner tube into the air supply chamber, and the air is merged with the air directly introduced into the air supply chamber from the air ejection port The above-mentioned object to be cleaned is uniformly sprayed.
又，本發明之除塵裝置之特徵在於：於各吸氣腔室內分別配置兩端開放之內管，並且於該各內管形成吸氣用開口孔，於藉由吸氣機構抽吸上述吸氣腔室內之空氣時，其空氣量之2/3與剩餘之1/3分離而分別自內管及內管與吸氣腔室之間被抽吸，進而，自上述內管抽吸之空氣之一半係經由上述吸氣用開口孔被抽吸至上述內管內，剩餘之一半係自內管之另一端部被抽吸。 Moreover, the dust removing device of the present invention is characterized in that inner tubes which are open at both ends are disposed in the respective suction chambers, and opening holes for suction are formed in the inner tubes, and the suction is sucked by the suction mechanism. When the air in the chamber is separated, 2/3 of the air volume is separated from the remaining 1/3 and is respectively sucked from between the inner tube and the inner tube and the suction chamber, and further, the air sucked from the inner tube One half is sucked into the inner tube through the above-described intake opening hole, and one of the remaining half is sucked from the other end portion of the inner tube.
本發明中，自空氣噴出口朝向於搬送路徑上搬送之被清洗物噴射之高速空氣碰撞在被清洗物上，藉由其風壓使附著於被清洗物之灰塵剝離後，自空氣吸入口被吸入至各吸氣腔室內。形成於該供氣腔室之複數行空氣噴出口由於互相平行且配置成鋸齒狀，故而不會因供氣腔室之內壓導致空氣噴出口局部地擴大等而使狹縫寬度產生變化，可固定地保持各空氣噴出口之狹縫寬度，因此，可自各空氣噴出口均勻地噴射空氣，從而可抑制噴射壓之不均。 In the present invention, the high-speed air ejected from the air ejection port toward the object to be conveyed on the transport path collides with the object to be cleaned, and the dust adhering to the object to be cleaned is peeled off by the air pressure, and is then taken from the air intake port. Inhaled into each suction chamber. Since the plurality of rows of air ejection ports formed in the air supply chamber are parallel to each other and arranged in a zigzag shape, the slit width is changed without causing a partial enlargement of the air ejection port due to the internal pressure of the air supply chamber. Since the slit width of each of the air ejection ports is fixedly fixed, air can be uniformly injected from the respective air ejection ports, and variation in ejection pressure can be suppressed.
又，藉由將形成於吸氣腔室之複數行空氣吸入口亦配置成鋸齒狀而可固定地保持各空氣吸入口之狹縫寬度，因此，可自各空氣吸入口均勻地抽吸空氣。進而，由於在空氣吸入口之內緣形成有凹陷部，故而自空氣噴出口噴射之高速空氣之流速於凹陷部內產生變化，而在凹陷部及連通於該凹陷部之空氣吸入口內產生卡門渦(Karman's vortex)(亂流)，藉由卡門渦(亂流)所致之空氣幕效果，使自被清洗物剝離之灰塵於空氣吸入口之入口部分停留，從而可有效地將灰塵自空氣吸入口吸入至吸氣腔室內。 Further, since the plurality of rows of air suction ports formed in the intake chamber are also arranged in a zigzag shape so that the slit width of each of the air suction ports can be fixedly held, the air can be uniformly sucked from the respective air suction ports. Further, since the concave portion is formed at the inner edge of the air suction port, the flow velocity of the high velocity air injected from the air ejection port changes in the depressed portion, and the Karman vortex is generated in the depressed portion and the air suction port communicating with the depressed portion. (Karman's vortex) (the turbulent flow), the air curtain effect caused by the Karman vortex (turbulent flow), so that the dust peeled off from the object to be cleaned stays at the inlet portion of the air suction port, thereby effectively sucking dust from the air The mouth is drawn into the inhalation chamber.
1‧‧‧除塵裝置 1‧‧‧Dust removal device
2‧‧‧清潔頭 2‧‧‧ cleaning head
11‧‧‧供氣腔室 11‧‧‧Air supply chamber
12、22‧‧‧內管 12, 22‧‧‧ internal management
13、23‧‧‧內壁部 13, 23‧‧‧ Inner Wall
14‧‧‧供氣導管 14‧‧‧ gas supply conduit
15‧‧‧噴出用開口孔 15‧‧‧Opening hole for ejection
16‧‧‧空氣噴出口 16‧‧‧Air vent
21‧‧‧吸氣腔室 21‧‧‧Intake chamber
24‧‧‧吸氣導管 24‧‧‧ Inspiratory catheter
25‧‧‧吸氣用開口孔 25‧‧‧Opening hole for inhalation
26‧‧‧第1空氣吸入口 26‧‧‧1st air intake
27‧‧‧第2空氣吸入口 27‧‧‧2nd air intake
28、29‧‧‧凹陷部 28, 29‧‧‧Depression
A‧‧‧箭頭 A‧‧‧ arrow
P‧‧‧板(被清洗物) P‧‧‧ board (cleaned material)
W‧‧‧搬送路徑 W‧‧‧Transportation path
L1、L2‧‧‧長度 L1, L2‧‧‧ length
圖1係表示本發明之一實施例之清潔頭之剖面圖。 BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a cross-sectional view showing a cleaning head of an embodiment of the present invention.
圖2同上係除塵機之前視圖。 Figure 2 is a front view of the same dust collector.
圖3同上係除塵機之俯視圖。 Figure 3 is a top view of the same dust collector.
圖4同上係表示空氣噴出口與空氣吸入口之配置之將一部分放大後之仰視圖。 Fig. 4 is a bottom view showing a part of the arrangement of the air ejection port and the air suction port, which is enlarged.
圖5同上係表示空氣吸入口中之亂流之將空氣吸入口之一部分放大後之剖面圖。 Fig. 5 is a cross-sectional view showing an enlarged portion of the air suction port of the turbulent flow in the air suction port.
以下，一面參照隨附圖式一面對本發明之除塵裝置之實施例進行詳細說明。 Hereinafter, an embodiment of the dust removing device of the present invention will be described in detail with reference to the accompanying drawings.
於圖1中，P係作為被清洗物之例如液晶基板等板，W係由輥式輸送機等構成之板P之搬送路徑，板P係沿著搬送路徑W向箭頭A方向被搬送，且使除塵裝置1對向地配置於該搬送路徑W之上部。 In Fig. 1, P is a plate such as a liquid crystal substrate as a material to be cleaned, and W is a transport path of a plate P composed of a roller conveyor or the like, and the plate P is transported in the direction of arrow A along the transport path W, and The dust removing device 1 is disposed opposite to the upper portion of the transport path W.
上述除塵裝置1具備例如包含不鏽鋼等之清潔頭2，於該清潔頭2之中央部配置對上述板P噴射高壓空氣而使該板P表面之灰塵剝離之供氣腔室11，於該供氣腔室11之兩側配置有用以抽吸藉由上述高壓空氣而自上述板P剝離並懸浮之灰塵的一對吸氣腔室21、21。 The dust removing device 1 includes, for example, a cleaning head 2 including stainless steel or the like, and an air supply chamber 11 that ejects high-pressure air to the plate P and peels off dust on the surface of the plate P at a central portion of the cleaning head 2, and supplies the air to the air supply chamber 11 A pair of suction chambers 21, 21 for sucking dust which is peeled off and suspended from the above-mentioned plate P by the high-pressure air described above are disposed on both sides of the chamber 11.
於上述供氣腔室11之內部配置有兩端開口之圓筒狀之內管12，供該內管12配置之供氣腔室11之上部形成如大致包圍上述內管12之圓筒狀之內壁部13，而成為該內壁部13與內管12之雙層構造。又，於上述供氣腔室11之一端連接有向供氣腔室11供給來自未圖示之供氣機構之高壓空氣的供氣導管14，被供給至供氣導管14內之高壓空氣係分開輸送至供氣腔室11與內管12，於內管12之上部側形成用以將供給至內管12內之高壓空氣噴出至供氣腔室11之複數個噴出用開口孔15，於供氣腔室11之底部形成有用以對上述板P噴射高壓空氣之狹縫狀之空氣噴出口16。即，自上述內管12之噴出用開口孔15與供氣腔室11之空氣噴出口16之噴射方向係朝向相反之方向噴射。又，形成上述空氣噴出口16之供氣腔室11下部之兩隅形成為平緩之曲面連續而成之漏斗狀，上述空氣噴出口16於其底部向與板P成直角之方向開口。 A cylindrical inner tube 12 having both ends opened is disposed inside the air supply chamber 11, and an upper portion of the air supply chamber 11 where the inner tube 12 is disposed is formed into a cylindrical shape substantially surrounding the inner tube 12. The inner wall portion 13 has a two-layer structure of the inner wall portion 13 and the inner tube 12. Further, an air supply duct 14 for supplying high-pressure air from an air supply means (not shown) to the air supply chamber 11 is connected to one end of the air supply chamber 11, and the high-pressure air supplied to the air supply duct 14 is separated. The air supply chamber 11 and the inner tube 12 are transported, and a plurality of discharge opening holes 15 for discharging high-pressure air supplied into the inner tube 12 to the air supply chamber 11 are formed on the upper side of the inner tube 12 for supply. The bottom of the air chamber 11 is formed with a slit-shaped air ejection port 16 for injecting high-pressure air to the above-mentioned plate P. That is, the ejection direction from the discharge opening 15 of the inner tube 12 and the air ejection port 16 of the supply chamber 11 is ejected in the opposite direction. Further, the two lower sides of the air supply chamber 11 forming the air ejection port 16 are formed in a funnel shape in which the curved surface is continuous, and the air ejection port 16 is opened at a right angle to the plate P at the bottom thereof.
吸氣腔室21、21係與上述供氣腔室11大致相同之構成，省略詳細之說明而進行說明。於吸氣腔室21、21之上部分別配置有圓筒狀之內管22、22，於各吸氣腔室21、21之上部以包圍內管22、22之方式形成有曲面狀之內壁部23。又，於內管22、22之上部形成抽吸上述吸氣腔室21、21內之空氣之複數個吸氣用開口孔25，於吸氣腔室21、21成形有抽吸外部氣體之第1空氣吸入口26與第2空氣吸入口27。 The intake chambers 21 and 21 are substantially the same as the above-described air supply chamber 11, and will not be described in detail. Cylindrical inner tubes 22 and 22 are disposed on the upper portions of the intake chambers 21 and 21, respectively, and are formed in a curved shape so as to surround the inner tubes 22 and 22 in the upper portions of the respective suction chambers 21 and 21. Wall portion 23. Further, a plurality of intake opening holes 25 for sucking the air in the air intake chambers 21 and 21 are formed in the upper portions of the inner tubes 22 and 22, and the suction air chambers 21 and 21 are formed with the suction external air. 1 air intake port 26 and second air intake port 27.
對上述構成中內管22、22相對於吸氣腔室21、21之長度及形成於內管22、22之內管22、22與吸氣用開口孔25之區域之比率進行說明。再者，該等之關係性於供氣腔室11中亦同樣，參照圖3以吸氣腔室21、21作為代表例進行說明。如圖3所示，內管22、22之長度L2短於吸氣腔室21、21之長度L1，並且吸氣腔室21、21中之形成吸氣用開口孔25之區域為吸氣腔室21、21之長邊方向中央部附近，該形成區域之尺寸較理想為{(1/2)×L2}。又，較佳為於內管22、22之兩端部之{(1/4)×L2}之部分不形成吸氣用開口孔25，僅於自中間點起向左右為{(1/4)×L2}之長度部分形成吸氣用開口孔25。 The ratio of the length of the inner tubes 22, 22 to the suction chambers 21, 21 and the regions of the inner tubes 22, 22 and the intake opening holes 25 formed in the inner tubes 22, 22 will be described. Further, the relationship between these is also the same in the air supply chamber 11, and the intake chambers 21 and 21 will be described as a representative example with reference to Fig. 3 . As shown in Fig. 3, the length L2 of the inner tubes 22, 22 is shorter than the length L1 of the suction chambers 21, 21, and the region of the suction chambers 21, 21 which forms the opening opening 25 for the suction is the suction chamber. In the vicinity of the central portion in the longitudinal direction of the chambers 21 and 21, the size of the formation region is preferably {(1/2) × L2}. Further, it is preferable that the intake opening hole 25 is not formed in the portion of {(1/4) × L2} at both end portions of the inner tubes 22 and 22, and the left and right sides are only {(1/4) from the intermediate point. The length portion of ×L2} forms an opening hole 25 for suction.
又，於將自吸氣導管24抽吸之空氣之量設為(V)之情形時，以自內管22內抽吸之量V1成為{(2/3)×V}，自內壁部23與內管22之間抽吸之量V2成為{(1/3)×V}之方式決定內壁部23及內管22之剖面形狀。藉此，自內管22抽吸{(2/3)×V}之空氣量，進而，分別自配置於內管22之中央部之複數個吸氣用開口孔25抽吸{(1/3)×V}之量，自該內管22之末端部抽吸{(1/3)×V}之量，藉此，自形成於吸氣腔室21、21之第1及第2空氣吸入口26、27均等地抽吸空氣。 In the case where the amount of air sucked from the intake duct 24 is (V), the amount V1 sucked from the inner tube 22 becomes {(2/3) × V}, from the inner wall portion. The cross-sectional shape of the inner wall portion 23 and the inner tube 22 is determined such that the amount V2 drawn between the inner tube 22 and the inner tube 22 becomes {(1/3) × V}. Thereby, the amount of air of {(2/3) × V} is sucked from the inner tube 22, and further, a plurality of suction openings 25 are disposed in the central portion of the inner tube 22, respectively. The amount of ×V} is sucked by the amount of {(1/3) × V} from the end portion of the inner tube 22, whereby the first and second air inhalations formed in the suction chambers 21, 21 are taken. The ports 26, 27 draw air equally.
再者，與吸氣導管24同樣地，關於上述供氣腔室11，於將自供氣導管14導入之高壓空氣之量設為(V)之情形時，亦以向供氣導管14內壓送之量V1成為{(2/3)×V}，導入至供氣腔室11與內管12之間之量V2成為{(1/3)×V}之方式決定供氣腔室11之內壁部13及供氣導管14之剖 面形狀。藉此，向內管12壓送之{(2/3)×V}之高壓空氣量係於其後分別自配置於內管12之中央部之複數個噴出用開口孔15向供氣腔室11內噴出{(1/3)×V}之量，又，自該內管12之末端部向供氣腔室11內噴出{(1/3)×V}之量，進而，自形成於供氣腔室11之狹縫狀之空氣噴出口16均等化而噴射至板P。 Further, similarly to the intake duct 24, when the amount of high-pressure air introduced from the air supply duct 14 is (V), the air supply chamber 11 is also pressed into the air supply duct 14. The amount V1 to be fed is {(2/3) × V}, and the amount V2 introduced between the air supply chamber 11 and the inner tube 12 becomes {(1/3) × V}, and the air supply chamber 11 is determined. Section of inner wall portion 13 and air supply conduit 14 Face shape. Thereby, the high-pressure air amount of {(2/3)×V} which is pumped to the inner tube 12 is thereafter supplied to the air supply chamber from the plurality of discharge opening holes 15 disposed at the central portion of the inner tube 12, respectively. 11 is ejected by the amount of {(1/3) × V}, and the amount of {(1/3) × V} is ejected from the end portion of the inner tube 12 into the air supply chamber 11, and further, The slit-shaped air ejection ports 16 of the air supply chamber 11 are equalized and sprayed to the plate P.
其次，參照模式性地表示空氣噴出口16與第1空氣吸入口26及第2空氣吸入口27之排列(僅兩側中之一者)之圖4對上述構成中形成於供氣腔室11之空氣噴出口16、與形成於吸氣腔室21、21之第1空氣吸入口26及第2空氣吸入口27之詳細情況進行說明。如圖4所示，空氣噴出口16係於供氣腔室11中沿著長邊方向使兩行空氣噴出口16互相平行地形成於供氣腔室11之大致寬度方向中央部，且，各行之各空氣噴出口16係以其端部重合之方式配置成鋸齒狀。再者，空氣噴出口16之狹縫寬度大致為0.65mm，全長大致為227mm，且各空氣噴出口16之端部之重疊量大致為1mm。 Next, FIG. 4, which schematically shows the arrangement of the air ejection port 16 and the first air suction port 26 and the second air suction port 27 (only one of the two sides), is formed in the air supply chamber 11 in the above configuration. The details of the air ejection port 16 and the first air suction port 26 and the second air suction port 27 formed in the air suction chambers 21, 21 will be described. As shown in FIG. 4, the air ejection port 16 is formed in the air supply chamber 11 so that the two rows of air ejection ports 16 are formed in parallel with each other in the longitudinal direction in the central portion in the substantially width direction of the air supply chamber 11, and each row Each of the air ejection ports 16 is arranged in a zigzag shape so that its ends overlap. Further, the slit width of the air ejection port 16 is approximately 0.65 mm, the total length is approximately 227 mm, and the overlapping amount of the end portions of the respective air ejection ports 16 is approximately 1 mm.
又，形成於上述吸氣腔室21、21之第1空氣吸入口26係以與上述空氣噴出口16大致平行之方式於空氣噴出口16之外側隔開大致3mm之間隔而間斷地形成，進而，於第1空氣吸入口26之外側，與該第1空氣吸入口26呈高度不同狀地形成有第2空氣吸入口27。再者，第1空氣吸入口26係如圖1所示般狹縫寬度大致為6mm且朝向外側傾斜60°。又，第2空氣吸入口27之狹縫寬度大致為2mm且朝向外側傾斜75°。 Further, the first air suction ports 26 formed in the air intake chambers 21 and 21 are intermittently formed at intervals of substantially 3 mm from the outer side of the air ejection port 16 so as to be substantially parallel to the air ejection ports 16, and further The second air intake port 27 is formed on the outer side of the first air intake port 26 and has a height different from that of the first air intake port 26. Further, as shown in FIG. 1, the first air intake port 26 has a slit width of approximately 6 mm and an inclination of 60° toward the outside. Further, the slit width of the second air intake port 27 is approximately 2 mm and is inclined by 75° toward the outside.
又，如圖5所示，於上述第1空氣吸入口26之下端部形成曲面狀之凹陷部28，於第2空氣吸入口27之下端部形成有傾斜之凹陷部29。再者，形成於上述第1空氣吸入口26之凹陷部28係以跨及第1空氣吸入口26之兩緣之方式形成，但凹陷部28之中心向內側偏移，其大部分形成於第1空氣吸入口26之內緣側。另一方面，形成於第2空氣吸入口27之凹陷部29為僅形成於第2空氣吸入口27之內緣側之平面狀，其傾斜 角相對於吸氣腔室21、21之底面呈15°。 Further, as shown in FIG. 5, a curved recessed portion 28 is formed at the lower end portion of the first air intake port 26, and an inclined recessed portion 29 is formed at the lower end portion of the second air intake port 27. Further, the recessed portion 28 formed in the first air intake port 26 is formed so as to straddle both edges of the first air intake port 26, but the center of the recessed portion 28 is offset inward, and most of it is formed in the first portion. 1 The inner edge side of the air suction port 26. On the other hand, the recessed portion 29 formed in the second air intake port 27 is formed in a planar shape formed only on the inner edge side of the second air intake port 27, and is inclined. The angle is 15° with respect to the bottom surface of the suction chambers 21,21.
於以上述方式構成之本實施例中，藉由未圖示之供氣機構將空氣自供氣導管14向供氣腔室11壓送，其空氣量之2/3與剩餘之1/3分離而分別被供給至內管12及內管12與供氣腔室11之間。進而，流入至上述內管12之空氣之一半係自噴出用開口孔15噴出至上述供氣腔室11內，剩餘之一半係自內管12之另一端部噴出至供氣腔室11內。該等經由內管12而噴出至供氣腔室11之空氣與直接被導入至上述供氣腔室11內之空氣合併後自形成於供氣腔室11之底部之空氣噴出口16朝向板P均勻地噴射。自空氣噴出口16朝向板P垂直地噴射之高速空氣於藉由其風壓使附著於板P之灰塵剝離後，與灰塵一併自第1及第2空氣吸入口26、27被吸入至各吸氣腔室21、21內。 In the present embodiment configured as described above, air is supplied from the air supply duct 14 to the air supply chamber 11 by a gas supply mechanism (not shown), and 2/3 of the air amount is separated from the remaining 1/3. They are supplied between the inner tube 12 and the inner tube 12 and the air supply chamber 11, respectively. Further, one of the air flowing into the inner tube 12 is discharged from the discharge opening 15 into the air supply chamber 11, and the remaining half is discharged from the other end of the inner tube 12 into the air supply chamber 11. The air ejected to the air supply chamber 11 via the inner tube 12 is merged with the air directly introduced into the air supply chamber 11, and the air ejection port 16 formed at the bottom of the air supply chamber 11 faces the board P. Spray evenly. The high-speed air which is ejected perpendicularly from the air ejection port 16 toward the plate P is peeled off by the wind pressure by the wind pressure, and is then sucked into the respective first and second air suction ports 26 and 27 together with the dust. In the suction chambers 21, 21.
又，於抽吸上述吸氣腔室21內之空氣時，其空氣量之2/3與剩餘之1/3分離而分別自內管22及內管22與吸氣腔室21之間被抽吸，進而，自上述內管22抽吸之空氣之一半係經由上述吸氣用開口孔25被抽吸至上述內管22內，剩餘之一半係自內管22之另一端部被抽吸，因此，自各個第1及第2空氣吸入口26、27均勻地吸入空氣。 Further, when the air in the suction chamber 21 is sucked, 2/3 of the air amount is separated from the remaining 1/3 and is drawn from the inner tube 22 and the inner tube 22 and the suction chamber 21, respectively. In addition, one of the air sucked from the inner tube 22 is sucked into the inner tube 22 through the intake opening 25, and the remaining half is sucked from the other end of the inner tube 22. Therefore, air is uniformly taken in from the first and second air intake ports 26 and 27.
又，自空氣噴出口16朝向板P垂直地噴射之高速空氣碰撞在板P上而呈放射狀擴散，自第1空氣吸入口26、進而自其外側之第2空氣吸入口27與灰塵一併被吸入至吸氣腔室21、21內，但由於清潔頭1與板P之間隙為1~1.5mm之極窄距離，又，於第1空氣吸入口26之內緣形成有曲面狀之凹陷部28，故而如圖5所示般，高速空氣之流速於擴寬之凹陷部28內產生變化，從而在凹陷部28與連通於該凹陷部28之第1空氣吸入口26內產生卡門渦(亂流)。藉此，於第1空氣吸入口26之入口部分形成卡門渦(亂流)所致之空氣幕，使自板P剝離之灰塵於第1空氣吸入口26之入口部分停留，而自第1空氣吸入口26被吸入至吸氣腔室21內。又，於該第1空氣吸入口26之外側亦多重地形成有具有凹陷部 29之第2空氣吸入口27，故而即便自上述第1空氣吸入口26漏至外側之灰塵亦可藉由第2空氣吸入口27之凹陷部29之空氣幕效果防止灰塵之洩漏，並由第2空氣吸入口27吸入而捕捉。 Further, the high-speed air jetted perpendicularly from the air ejection port 16 toward the plate P collides with the plate P to be radially diffused, and is merged with the dust from the first air suction port 26 and the second air suction port 27 from the outside. It is sucked into the suction chambers 21, 21, but the gap between the cleaning head 1 and the plate P is an extremely narrow distance of 1 to 1.5 mm, and a curved recess is formed at the inner edge of the first air suction port 26. In the portion 28, as shown in FIG. 5, the flow rate of the high-speed air changes in the widened recess portion 28, thereby generating a Karman vortex in the recess portion 28 and the first air suction port 26 communicating with the recess portion 28 ( Turbulence). Thereby, an air curtain due to the Karman vortex (turbulent flow) is formed at the entrance portion of the first air intake port 26, and the dust separated from the plate P is stopped at the inlet portion of the first air suction port 26, and the air is removed from the first air. The suction port 26 is sucked into the suction chamber 21. Further, a recessed portion is formed in multiple portions on the outer side of the first air intake port 26 The second air intake port 27 of the second air intake port 27 can prevent dust from leaking by the air curtain effect of the recessed portion 29 of the second air intake port 27, and the dust can be prevented by the air curtain effect of the recessed portion 29 of the second air intake port 27. 2 The air intake port 27 is sucked in and caught.
又，形成於供氣腔室11之空氣噴出口16雖係間斷地形成，但由於將兩行空氣噴出口16互相平行地配置成鋸齒狀，故而兩行空氣噴出口16作為一連串之連續之空氣噴出口發揮功能，而不存在朝向板P局部未噴射空氣之部分。又，由於各行之空氣噴出口16係間斷地形成，故而不會因供氣腔室11之內壓導致空氣噴出口16局部地擴大等而使狹縫寬度產生變化，可固定地保持各空氣噴出口16之狹縫寬度。因此，可自各空氣噴出口16均勻地噴射空氣，從而可抑制噴射壓之不均。又，關於第1空氣吸入口26與第2空氣吸入口27，與空氣噴出口16同樣地亦配置成鋸齒狀，藉此，可自第1空氣吸入口26與第2空氣吸入口27均勻地抽吸空氣。 Further, although the air ejection ports 16 formed in the air supply chamber 11 are intermittently formed, the two rows of air ejection ports 16 are arranged in a zigzag manner in parallel with each other, so that the two rows of air ejection ports 16 serve as a series of continuous air. The discharge port functions without a portion where the air is not partially sprayed toward the plate P. Further, since the air ejection ports 16 of the respective rows are intermittently formed, the slit width is changed without partially expanding the air ejection port 16 due to the internal pressure of the air supply chamber 11, and the air ejection can be fixedly held. The slit width of the outlet 16. Therefore, air can be uniformly injected from the respective air ejection ports 16, so that unevenness in the ejection pressure can be suppressed. In addition, the first air intake port 26 and the second air intake port 27 are also arranged in a zigzag shape similarly to the air outlet port 16, whereby the first air intake port 26 and the second air intake port 27 can be uniformly distributed from the first air intake port 26 and the second air intake port 27. Aspirate the air.
以上，對本發明進行了詳細敍述，但本發明並不限定於上述實施例，可於本發明之主旨之範圍內實施各種變形。例如，於上述實施例中表示了設置有2行空氣噴出口16及第1空氣吸入口26與第2空氣吸入口27之例，但亦可為3行或其以上。又，各部之尺寸等亦並不限定於上述實施例。 The present invention has been described in detail above, but the present invention is not limited to the embodiments described above, and various modifications can be made within the scope of the invention. For example, in the above embodiment, two rows of air ejection ports 16, first air suction port 26, and second air suction port 27 are provided, but three or more rows may be used. Moreover, the size and the like of each part are not limited to the above embodiment.
1‧‧‧除塵裝置 1‧‧‧Dust removal device
2‧‧‧清潔頭 2‧‧‧ cleaning head
11‧‧‧供氣腔室 11‧‧‧Air supply chamber
12、22‧‧‧內管 12, 22‧‧‧ internal management
13、23‧‧‧內壁部 13, 23‧‧‧ Inner Wall
15‧‧‧噴出用開口孔 15‧‧‧Opening hole for ejection
16‧‧‧空氣噴出口 16‧‧‧Air vent
21‧‧‧吸氣腔室 21‧‧‧Intake chamber
25‧‧‧吸氣用開口孔 25‧‧‧Opening hole for inhalation
26‧‧‧第1空氣吸入口 26‧‧‧1st air intake
27‧‧‧第2空氣吸入口 27‧‧‧2nd air intake
28、29‧‧‧凹陷部 28, 29‧‧‧Depression
A‧‧‧箭頭 A‧‧‧ arrow
P‧‧‧板(被清洗物) P‧‧‧ board (cleaned material)
W‧‧‧搬送路徑 W‧‧‧Transportation path
Claims (5)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012252179A JP6110111B6 (en) | 2012-11-16 | Dust remover |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201420219A true TW201420219A (en) | 2014-06-01 |
Family
ID=50752560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102139415A TW201420219A (en) | 2012-11-16 | 2013-10-30 | Dust removal device |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR20140063420A (en) |
| CN (1) | CN103817109A (en) |
| TW (1) | TW201420219A (en) |
Cited By (4)
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|---|---|---|---|---|
| TWI711495B (en) * | 2019-08-27 | 2020-12-01 | 勵威電子股份有限公司 | Dry ultrasonic cleaning head and cleaning machine |
| CN114538157A (en) * | 2022-03-26 | 2022-05-27 | 扬州市祥华新材料科技有限公司 | Gilt product winding mechanism of electrification aluminium |
| TWI772914B (en) * | 2020-09-03 | 2022-08-01 | 日商泰政有限公司 | Cleaner head |
| TWI792118B (en) * | 2020-10-29 | 2023-02-11 | 日商泰政有限公司 | Cleaner head |
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| CN104525521B (en) * | 2014-12-26 | 2018-08-14 | 云梦县福康轮胎设备制造有限公司 | High intensity Blowing and sucking dust remover system |
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| JP6173404B2 (en) * | 2015-10-07 | 2017-08-02 | 有限会社タクショー | Dust removal nozzle and dust removal device |
| JP6465489B2 (en) * | 2015-10-23 | 2019-02-06 | ヒューグル開発株式会社 | Cleaning head and cleaning method |
| TW201819273A (en) * | 2016-10-20 | 2018-06-01 | 美商康寧公司 | Methods and apparatus for manufacturing a web |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE319969B (en) * | 1969-02-14 | 1970-01-26 | Svenska Flaektfabriken Ab | |
| EP0673687A1 (en) * | 1994-03-24 | 1995-09-27 | Peter Lisec | Device for drying cleaned glass plates |
| JP3446030B2 (en) * | 1999-08-04 | 2003-09-16 | 住友重機械工業株式会社 | Scale removal equipment for steel sheet straightening mill |
| JP3706566B2 (en) * | 2001-09-28 | 2005-10-12 | 日本アビオニクス株式会社 | Liquid drainer for printed wiring boards |
| CN100453222C (en) * | 2006-12-12 | 2009-01-21 | 深圳市深南电路有限公司 | Device and method for eliminating drillings from circuit board |
| JP2009279477A (en) * | 2008-05-20 | 2009-12-03 | Dainippon Screen Mfg Co Ltd | Apparatus for removing treatment liquid, apparatus for treating substrate, and method of setting up nozzle gap |
-
2013
- 2013-10-30 TW TW102139415A patent/TW201420219A/en unknown
- 2013-11-07 KR KR1020130134684A patent/KR20140063420A/en not_active Application Discontinuation
- 2013-11-15 CN CN201310574604.2A patent/CN103817109A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI711495B (en) * | 2019-08-27 | 2020-12-01 | 勵威電子股份有限公司 | Dry ultrasonic cleaning head and cleaning machine |
| TWI772914B (en) * | 2020-09-03 | 2022-08-01 | 日商泰政有限公司 | Cleaner head |
| TWI792118B (en) * | 2020-10-29 | 2023-02-11 | 日商泰政有限公司 | Cleaner head |
| CN114538157A (en) * | 2022-03-26 | 2022-05-27 | 扬州市祥华新材料科技有限公司 | Gilt product winding mechanism of electrification aluminium |
| CN114538157B (en) * | 2022-03-26 | 2023-09-19 | 扬州市祥华新材料科技有限公司 | Electric aluminum gold stamping product winding mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20140063420A (en) | 2014-05-27 |
| JP6110111B2 (en) | 2017-04-05 |
| JP2014100622A (en) | 2014-06-05 |
| CN103817109A (en) | 2014-05-28 |
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