201228912 六、發明說明： 【發明所屬之技術領域】 發明領域 本發明係有關於一種板狀體搬送裝置，其具有：向板 狀體之下面供給空氣而以非接觸狀態支持板狀體的送風式 支持機構、及對於板狀體賦予搬送方向上之推進力的推進 力賦予機構，且前述送風式支持機構係配設於位在板狀體 搬送路徑橫幅内之處。 c先前#夺椅j 背景技術 上述板狀體搬送裝置係以送風式支持機構向板狀體之 下面供給空氣而以非接觸狀態支持板狀體，對於板狀體以 推進力賦予機構賦予搬送方向上之推進力，沿著搬送方向 搬送板狀體者。而且’將送風式支持機構配設於位在板狀 體搬送路徑之橫幅内之處，使板狀體搬送裝置可在橫幅方 向上精緻化者。 並且，在如上述之板狀體搬送裝置中，迄今係設置作 為送風式支持機構之風扇過濾單元，並在風扇過濾單元上 方’以與風扇過濾單元重疊於上下方向的狀態設置腔室部 (例如’參照專利文獻1)。 先行技術文獻 專利文獻 專利文獻1 :日本公開公報特開2005-029359號公報 t發明内容】 3 201228912 發明揭示 發明欲解決之課題 有破板狀體搬送裝置中，當所搬送之板狀體 上，有時里物/之板狀體破片或成為異物落下至腔室部 内。並且會㈣室部之嗔出口侵入至腔室空間 至^ 厂认至腔室部之異物會直接落下至下方而甚 至杈入至运風式支持機構。 構，則為了&^ 物U料風式支持機 異物，1㈣送風式支_構來除去 構成送Φ錢作料為繁複。特別是以風扇過渡單元 =風:支持機構時’異物會侵入至_單元的除 構並為了除去破片，必須進行拆卸送風式支持機 構並=除職器等作業，使除去異物作業更為繁瑣。 有鑑於上述實情賴成者，目的在於提供一 易進行異物除去作業的板狀體搬送裝置。 用以解決課題之手段 ㈣係具有：送風式支持機構， .. 給空11，以非接觸狀態支持板狀體 推=進力賦予機構，係對於板狀體賦予搬送方向上之 路經之橫巾風式杨機構配設於位在板狀體搬送 命氣供、〔送風式支持機構係構成為具備有：空氣供給用之 :空:Γ:腔室部，係形成壓入來自於前述空氣供給源 的喷出口：至空間：並具備從該腔室空間向上方喷出空氣 、’引一通路部’係以將前述空氣供給源所供給 201228912 之空氣引導至前述腔室空間的狀態下，使前述空氣供給源 與前述腔室部連通者；及引導板部，係以鄰接於前述腔室 部的狀態下配置成將從前述喷出口喷出至板狀體之下面的 空氣沿著板狀體之下面進行引導者，且前述空氣供給源係 以平面視角看來，與前述腔室部中之前述喷出口不重複地 配設在相對於前述腔室部於水平方向錯開處。 亦即，來自於空氣供給源的空氣會流動於引導通路部 而被壓入腔室部的腔室空間，該空氣會從腔室部之噴出口 向上方喷出。然後，從喷出口向上方喷出的空氣會被供給 至板狀體的下面，被供給至板狀體下面的空氣會在引導板 部與板狀體之間的空間沿著引導板部之上面及板狀體之下 面流動。 也就是說，在設有腔室部處，可藉由從腔室部向上方 喷出的空氣以非接觸狀態支持板狀體的下面，又，在設有 引導板部處’可藉由形成於該引導板部上之空氣層以非接 觸狀態支持板狀體的下面，因此，不僅是在設有腔室部處， 連腔室部周圍設有引導板部處，亦可以非接觸狀態支持板 狀體。 又’由於來自於空氣供給源的空氣係流動於引導通路 部而被壓入腔室部的腔室空間，故即使空氣供給源所供給 之空氣產生規律振動(pulsation)，其規律振動也會被腔室空 間的缓衝作用（cushioning)吸收，因此可抑制從嘴出口喷出 之空氣的規律振動。 並且’空氣供給源係以平面視角看來’與腔室部中之 201228912 喷出口不重複地配設在相對於腔室部於水平方向錯開處。 因此，即使破損的板狀體破片等異物從喷出口侵入腔室空 間内’該異物也不會直接落下至空氣供給源，故可使異物 較難入侵空氣供給源。亦即，由於可將侵入之異物停留在 腔室部，因此僅除去腔室空間内之異物即可，可易於進行 異物除去作業。所以，可提供一種易於進行異物除去作業 的板狀物搬送裝置。 本發明之板狀體搬送裝置的實施形態中，前述腔室部 且β又置成沿者刚述搬送方向延伸，前述引導板部宜以對於 月1j述腔室部於與前述搬送方向交叉之橫幅方向兩側鄰接的 狀態配置，前述空氣供給源宜配設在相對於前述腔室部於 前述橫幅方向錯開處。 亦即，從沿著搬送方向設置之腔室部的喷出口向上方 喷出空氣而將空氣供給至板狀體的下面，該供給至板狀體 下面的空氣會在對於腔室部於橫幅方向兩側鄰接的引導板 部與位於其上方的板狀體之間的空間，沿著引導板部的上 面及板狀體的下面沿著橫幅方向流動。 因此，可達成送風式支持機構對於板狀體在搬送方向 上之支持力均-化，而可抑制沿著搬送方向搬送板狀體時 之板狀體撓曲（deflection)。 附加說明如下，相對於在設有腔室部處，以從腔室部 向上方喷出之空氣支持板狀體的下面，在設有引導板部 處，係以形成於該引導板部上之空氣層支持板狀體的下 面’故在設有腔”處與設有料板部處，支持板狀體之 201228912 下面的支持力不同。 =搬送方向排列配置如上述般切力不_腔室部 =導板部時，因在搬送方向上的位置所致，會使得送風 工支持機構對板狀體的支持力不 送板狀體時，板狀體會容易上下移動。* /σ者搬送方° 相對於此，藉轉腔室部與料板部_配置於橫幅 ’搬送方向上之送風式支持機構對於板狀體的支持力 ;二化，故沿著搬送方向搬送板狀體時，板狀體不易上 卜移動’可抑制板狀體的撓曲。 本發明之板狀體搬送裝置的實施形態中，前述送風式 切機構宜於與前述搬送方向交又之橫幅方向並列設有一 ’在前述-對之送風式支持機構之間，宜形成有將前述 弓I導板部上之空氣排至前述料板部下方之空間的排氣路 亦即’在橫幅方向並列設有—對之送風式支持機構之 門形成有將引導板部上之空氣排至引導板部下方之空間 的排氣路控’藉由從該排氣路徑排出空氣，空氣會不易滞 留於^狀體中間部的下方。因此，所搬送之板狀體由於在 、^的下方不易滯留空氣，可抑制中間部的隆起，以接 近良平姿_狀態進行搬送’而可減輕對板狀體的負荷。 本發明之板狀體搬送裝置的實施形態中，宜具備一端 側之推進力賦予機構、及另一端側之推進力賦予機構的一 十推進力賦予機構，作為前述推進力賦予機構，前述一端 侧之推進力賊予機構係接觸支持板狀體中之前述橫幅方向 201228912 另一=部且對於板狀體賦予搬送方向上之推進力者，前述 巾s方。彳之推進力賦予機構係接觸支持板狀體中之前述橫 者2的另一端部且對於板狀體賦予搬送方向上之推進力 構成述—對送風式支持機構所具備之各引導板部宜分別 引導為a將在前述橫幅方向上靠近前述排氣路徑之内方側 板柯成為比起在前述橫幅方向上_前述排氣路徑 夕方側引導板部’在前述橫幅方向上寬度較窄。 之生亦卩以—端側之推進力賦予機構接觸支持板狀體中 7方向之—端部H端侧之推進力略機構接觸 堪板狀體中之橫幅方向之另—端部，以—對推進力賦予 卜接觸支持板狀體巾之橫幅方向之兩端部。因此，藉由 ^對推2力賦予機構接觸支持板狀體之橫幅方向之兩端 0^而以*&的狀態支持板狀體，對於所支持之板狀體兩 賦予推進力’故可以安定的狀態沿著搬送方向搬送板 狀體。 、而且，由於一對送風式支持機構所具備之各引導板部 分別構成為：將时歉引導板鄉成核起外方側之弓丨 導板部’在前述橫幅方向上寬度較窄，因此以結果而言， 腔室部會配置成㈣近排氣路_狀態而可將腔室部所 噴出之空氣供給至板狀體之橫幅方向之中央附近的下面。 所以，藉由以-對送風式支持機構將空氣供給至板狀體之 橫幅方向之中央附近的下面，可—面抑制一對推進力賦予 機構對板狀體之接觸壓降低、—面可抑制板狀體的彎他地 支持板狀體之橫幅㈣的巾間部，故可以安定的姿勢支持 201228912 板狀體的狀態來進行搬送，而可力曰 本發明之板狀體搬送裝置顺暢地進行板狀體的搬送。 宜於其下面部或側面部形心:實施形態中’前述腔室部 閉自如之蓋構件來構成該維修用口，並且’宜具備開 亦即，由於在腔室部形成維::開 閉自如之蓋構件來構朗維 ，'且’具備開 件關閉維修用開口，而在 …故平常可藉由蓋構 件，可從維修關口對於腔=修作業時’藉由開啟蓋構 因此，當異物侵入腔室部^間内進行維修作業。 ^ 可開啟蓋構件從維修用 開除去異物，而可輕易地進行異物除去作業。 本發明之板狀體搬送裝置的實施 給源宜構成為具備向上转“ 〃 孔供 供、，，。工軋之供給面，而前述引導 通路衫一方之端部宜連接於前述空氣供給源之供給面， 另一方之端部宜連接於前述腔室部的側面部，並且，宜將 上下方向之通路寬度形成為越靠近前述腔室部侧越寬。 亦即，可使從空氣供給源向上方所供給的空氣，以引 導通路部引導至腔室部側，而壓人腔室部的腔室空間。而 且，雖然以引導通路部所引導的空氣量越靠近腔室部側， 由空氣供給賴供給之空氣就會合流而越多，但藉由將引 導通路部上下方向的通路寬度形成為越靠近腔室部側越 寬，以越靠近腔室部側越慢慢變寬的引導通路部引導越靠 近腔室部側越慢慢增大的空氣’可使空氣易於平順地流動 至腔室部。 本發明之板狀體搬送裝置的貫施形態中，前述空氣供 201228912 給源宜由一體地組裝電動式送風扇與除塵濾器而構成的風 扇過濾單元所構成。 亦即’空氣供給源的設置可僅設置由一體地組裝電動 式送風扇與除塵濾器而構成的風扇過濾單元，故送風式支 持機構的設置極為簡單，因此可達到板狀體搬送裝置的製 程間早化。 又’本發明之板狀體搬送裝置的實施形態中，前述空 氣供給源宜以橫側面视角看來，與前述腔室部不重複地配 設在相對於前述腔室部錯開至上下方向之下方側之處。 此外’本發明之板狀體搬送裝置的實施形態中，宜在 刖述引導板部之外方側端部具備有突條部，前述突條部宜 t成為在較所搬送之板狀體之下面位於下方的高度 ’從前 述引導板部之上面向上方突出，且沿著搬送方向連續地延 伸成直線狀。 圖式簡單說明 第1圖係板狀體搬送裝置的立體圖。 第2圖係板狀體搬送裝置的縱截正面圖。 第3圖係送風式支持機構的縱截正面圖。 第4圖係腔至部的縱截正面圖。 (°)圖係其他實施形態之送風式支持機構的縱 截正面圖。 【實施方式】 用以實施發明之較佳形態 、下根據圖示’說明將本發明之板狀體搬送裝置構 10 201228912 成為搬送作為板狀體之矩形基板（更詳細而言，係平板顯示 器（flat-panel display)用之玻璃基板）的情形。 如第1圖所示，板狀體搬送裝置Η係構成為具備有：送 風式支持機構2，係向玻璃基板1之下面供給清淨空氣而以 非接觸狀態支持玻璃基板1者；及推進力賦予機構3，係接 觸支持玻璃基板1之下面而對玻璃基板1賦予搬送方向上的 推進力者。另外’板狀體搬送裝置Η係於搬送方向並列設置 複數台具有送風式支持機構2及推進力賦予機構3之板狀體 搬送單元U而構成。 推進力賦予機構3係構成為：沿著搬送方向並列設置複 數之旋轉報6，以分別對應各旋轉報6之電動馬達7各別旋轉 驅動各旋轉輥6，對於玻璃基板1賦予搬送方向上之推進 力，而前述旋轉輥6係接觸支持在玻璃基板丨之下面中與搬 送方向直交之橫幅方向的端部者。也可藉由一個電動馬達 透過齒輪機構使複數之旋轉輥旋轉驅動，來代替上述構成。 又，推進力賦予機構3具有如下述之一對推進力賦予機 構3 : —端側之推進力賦予機構3，接觸支持玻璃基板丨下面 中之彳κ幅方向的一端部而對於玻璃基板丨賦予搬送方向上 之推進力；另一端側之推進力賦予機構3,接觸支持玻璃基 板1下面中之橫巾I方向的另-端部而對於玻璃基板i賦予二 送方向上之推進力。而且，以該等一對推進力賦予機構3， 從下方接觸支持玻璃基板1下面巾之橫幅方向的兩端部，並 且對於該等兩端部賦予搬送方向上之推進力。 如第2或3圖所示，從平面視角看來，送風式支持機構2 201228912 係配設於一對推進力賦予機構3之間。而且，送風式支持機 構2係配設於玻璃基板1搬送路徑之橫幅内全體所在之處， 並對於玻璃基板1下面之橫幅方向的中間部供給清淨办 氣，以非接觸狀態支持玻璃基板1。 亦即’如第2或3圖所示，板狀體搬送裝置η構成為：以 推進力賦予機構3接觸支持玻璃基板1之橫幅方向的兩蠕 部，以送風式支持機構2非接觸支持玻璃基板1之橫幅方向 中央部的狀態，以推進力賦予機構3對於玻璃基板丨之橫幅 方向的兩端部賦予搬送方向上的推進力，藉此，沿著搬送 方向搬送玻璃基板1。 〔送風式支持機構〕 接著，說明送風式支持機構2。 如第3圖所示’送風式支持機構2係構成為具備空氣供 用的空氣供給源丨丨、腔室部14、引導通路部15、及引導 板。Η6 °腔室部14形成錢人來自於空氣供給源“之空氣 的腔至上間12 ’且腔室部14具有從該腔室空間12向上方喷 ώ工礼的喷iB α 13 Μ丨導通路部15將空氣供給源u所供給 上氣引導至腔室部14。引導板部16係以鄰接於腔室部14 六，配叹成可引導從喷出口 13向玻璃基板i下面喷出之 2著玻璃基板1之下面流動。在此，使用「壓入」此表 介Γ根據以下意思：由空氣供給源11導人腔室空間12内之 合二髮力冋於腔室部14外部地被導人。由於該壓力，空氣 會從噴出π13被喷出。 η式支持機構2係構成為：將由空氣供給源11所供給 12 201228912 =氣’通㈣丨導通路和料至沿著搬送方向設置的腔 至# 14，在腔室部Μ使規律振動被抑制住之空氣從噴出口 13向上方喷出。 並且，在以送風式支持機構2非接觸地支持玻璃基板1 的狀態下，從噴出口 13向上方噴出的空氣朝著麵基板⑷ 下 供、’α朝著該玻璃基板1之下面而被供給的空氣沿著 引導板4 16之丨面及玻璃基板i之下面依橫幅方向流動於 引導板部16與玻璃基板1之間的空間。 由如上述般使空氣流動而在引導板部16與玻璃基板 1之間形成空氣層’不僅可在設有向玻璃基板1下面喷出空 氣之腔室部14處以非接觸狀態支持玻璃基板1，在設有其橫 側方之引導板部16處也可以非接觸狀態支持玻璃基板1。 送風式支持機構2係以彼此空出間隔的狀態於橫幅方 向排歹j成對’在—對送風式支持機構2之間，形成有將引 導板416上之空氣排至引導板部16下方空間的排氣路徑 有時也稱為中央部之排氣路徑 17a，相當於本發明之排 氣路拴）。又’ 一對送風式支持機構2分別係以相對於推進 力賦予機構3互相隔開間隔之狀態而設置，在送風式支持機 構2與推進力賦予機構3之間也形成有將引導板部16上之空 孔排至引導板部16下方空間的排氣路徑17(有時稱為端部 的排氣路徑17b)。 附▼提’送風式支持機構2係以連續之狀態並列設置 於搬送方向’在搬送方向上相鄰接之腔室部4之間或於搬送 方向上相鄰接之引導板部16之間不形成隙縫。[Technical Field] [Technical Field] The present invention relates to a plate-shaped body conveying apparatus comprising: a supply type that supplies air to a lower surface of a plate-like body and supports a plate-shaped body in a non-contact state The support mechanism and the propulsive force imparting mechanism that imparts the propulsive force in the transport direction to the plate-like body, and the air-sending support mechanism is disposed in the plate-shaped body transport path banner. In the above-mentioned plate-shaped body conveying device, the air-feeding type support means supplies air to the lower surface of the plate-like body, and supports the plate-like body in a non-contact state, and the plate-shaped body is provided with a conveying direction by the propulsion force providing mechanism. The propulsive force is used to transport the plate-shaped body along the transport direction. Further, the air supply type supporting mechanism is disposed in the banner of the plate-shaped conveying path, and the plate-shaped body conveying device can be refined in the banner direction. Further, in the above-described plate-shaped body conveying device, a fan filter unit as a blower type support mechanism is provided, and a chamber portion is provided above the fan filter unit in a state of being overlapped with the fan filter unit in the vertical direction (for example, 'Refer to Patent Document 1). Japanese Unexamined Patent Application Publication No. Hei No. Hei No. 2005-029359 (Consultation No. 2005-029359) SUMMARY OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION In a broken-plate conveying apparatus, on a plate-shaped body to be conveyed, Sometimes the ribs/plates are fragmented or become foreign objects falling into the chamber. In addition, the exit of the chamber (4) will invade into the chamber space. The foreign matter recognized by the factory to the chamber will fall directly below and even into the wind support organization. The structure is for the &^ U material wind support machine foreign body, 1 (four) air supply type _ structure to remove the composition to send Φ money for the material is complicated. In particular, when the fan transition unit = wind: support mechanism, the foreign matter enters the _ unit and the detachment of the detachment unit is required. In order to remove the detachment, it is necessary to disassemble the air supply type support mechanism and the work such as the de-duty device to make the removal of the foreign matter more complicated. In view of the above facts, it is an object of the present invention to provide a plate-like conveying apparatus which is easy to carry out foreign matter removal work. The means for solving the problem (4) has: a supply-type support mechanism, a supply air 11, and a support for the plate-like body in a non-contact state = an input force imparting mechanism, which is a transverse direction of the plate-like body in the transport direction. The towel-type pop-up mechanism is disposed in the plate-shaped body to transport the gas supply, and the air-supply support mechanism is configured to include: air supply: empty: Γ: chamber portion, which is formed by press-fitting from the air The discharge port of the supply source: to the space: the air is ejected upward from the chamber space, and the 'input passage portion' is configured to guide the air supplied by the air supply source to 201228912 to the chamber space. The air supply source is connected to the chamber portion; and the guide plate portion is disposed in a state of being adjacent to the chamber portion such that air ejected from the discharge port to the lower surface of the plate-like body is along a plate shape The guide is disposed below the body, and the air supply source is disposed at a position offset from the chamber portion in the horizontal direction so as not to overlap the nozzle outlet in the chamber portion as viewed from a plan view. That is, air from the air supply source flows into the guide passage portion and is pressed into the chamber space of the chamber portion, and the air is ejected upward from the discharge port of the chamber portion. Then, the air ejected upward from the discharge port is supplied to the lower surface of the plate-like body, and the air supplied to the lower surface of the plate-like body is along the space between the guide plate portion and the plate-like body along the upper surface of the guide plate portion. And flowing under the plate. That is, at the portion where the chamber portion is provided, the air ejected upward from the chamber portion can support the lower surface of the plate-like body in a non-contact state, and the portion where the guide plate portion is provided can be formed by The air layer on the guide plate portion supports the lower surface of the plate-like body in a non-contact state, and therefore, not only at the chamber portion but also at the periphery of the chamber portion, the guide plate portion is provided, and the non-contact state can also be supported. Plate-like body. Further, since the air from the air supply source flows into the chamber space of the chamber portion by flowing through the guide passage portion, even if the air supplied from the air supply source generates pulsation, the regular vibration is The cushioning of the chamber space is absorbed, so that the regular vibration of the air ejected from the mouth outlet can be suppressed. Further, the "air supply source" is disposed in a plan view and is not overlapped with the 201228912 discharge port in the chamber portion in a horizontal direction with respect to the chamber portion. Therefore, even if foreign matter such as a broken sheet-like body fragment enters the chamber space from the discharge port, the foreign matter does not directly fall to the air supply source, so that it is difficult for the foreign matter to intrude into the air supply source. In other words, since the invading foreign matter can be left in the chamber portion, only the foreign matter in the chamber space can be removed, and the foreign matter removing operation can be easily performed. Therefore, it is possible to provide a plate-like conveying device which is easy to carry out foreign matter removal work. In the embodiment of the plate-shaped body conveying device of the present invention, the chamber portion and β are disposed to extend in the conveying direction, and the guide plate portion preferably intersects the conveying direction with respect to the chamber portion for the month 1j. In a state in which the sides of the banner are adjacent to each other, the air supply source is preferably disposed to be displaced from the chamber portion in the direction of the banner. In other words, air is blown upward from the discharge port of the chamber portion provided along the transport direction to supply air to the lower surface of the plate-like body, and the air supplied to the lower surface of the plate-like body is in the direction of the banner portion with respect to the chamber portion. A space between the adjacent guide plate portions on both sides and the plate-like body located above the same flows along the upper surface of the guide plate portion and the lower surface of the plate-like body in the banner direction. Therefore, it is possible to achieve the uniformity of the supporting force of the plate-shaped body in the conveying direction in the air-sending type supporting mechanism, and it is possible to suppress the deflection of the plate-like body when the plate-shaped body is conveyed in the conveying direction. In addition, as described below, the lower surface of the air supporting plate-like body that is ejected upward from the chamber portion at the portion where the chamber portion is provided is formed on the guide plate portion at the portion where the guide plate portion is provided. The air layer supports the lower surface of the plate-shaped body so that it has a cavity at the place where the plate is provided, and the supporting force below the 201228912 supporting the plate-shaped body is different. The arrangement direction of the conveying direction is the same as the above-mentioned shearing force. In the case of the guide plate portion, the plate-shaped body is likely to move up and down when the support member of the air supply support mechanism does not feed the plate-shaped body due to the position in the conveyance direction. * / σ On the other hand, in the case of the transfer chamber portion and the plate portion _ the support force of the air supply type support mechanism disposed in the banner 'transport direction with respect to the plate-shaped body, the plate-shaped body is transported along the transport direction, and the plate shape is used. In the embodiment of the plate-shaped body conveying device of the present invention, it is preferable that the air-feeding type cutting mechanism is disposed side by side in the direction of the banner in the direction of the conveyance direction. - between the air supply support agencies It is preferable to form an exhaust passage for discharging the air on the guide plate portion of the bow to the space below the panel portion, that is, 'the side in the direction of the banner is provided--the door of the air supply type support mechanism is formed with the guide plate portion The exhaust path of the upper air exhausted to the space below the guide plate portion 'by discharging air from the exhaust path, the air is less likely to stay below the middle portion of the body. Therefore, the plate-shaped body to be transported is In the embodiment of the plate-shaped body conveying device of the present invention, it is preferable to have one end in the embodiment of the plate-shaped body conveying device according to the present invention, in which the swell of the intermediate portion is less likely to be swelled and the swell of the intermediate portion is suppressed. a thrust force imparting mechanism of the thrust force imparting mechanism on the side and the thrust force imparting mechanism on the other end side, and the thrust force imparting mechanism of the one end side contacts the aforementioned banner in the support plate-like body as the thrust force imparting mechanism Direction 201228912 In the other part, the thrust force in the conveyance direction is given to the plate-shaped body, and the urging force imparting mechanism contacts the aforementioned horizontal 2 of the support plate-shaped body. The one end portion is provided with a propulsive force in the transport direction in the plate-like body. Each of the guide plate portions provided in the air supply type support mechanism is preferably guided so that a will be adjacent to the inner side plate of the exhaust path in the direction of the banner. The width is narrower in the direction of the banner than in the direction of the banner _ the exhaust path side guide plate portion ′. The urging force imparting mechanism at the end side contacts the 7 direction of the support plate body. - the propulsive force at the end H end side of the end portion contacts the other end portion of the banner direction in the plate-like body, so as to give the thrust force both ends of the banner direction of the support plate-like body towel. The two-force pushing mechanism contacts the both ends of the support plate-like body in the direction of the banner, and supports the plate-like body in a state of *& and provides a propulsive force to both of the supported plate-shaped bodies. The plate-shaped body is conveyed in the conveyance direction. Further, each of the guide plate portions provided in the pair of air supply type support mechanisms is configured such that the bow guide plate portion of the outer side of the apology guide board is narrowed in the direction of the banner, so As a result, the chamber portion is disposed in the (four) near exhaust path state, and the air ejected from the chamber portion can be supplied to the lower surface in the vicinity of the center of the plate-like body in the banner direction. Therefore, by supplying air to the lower surface in the vicinity of the center of the banner direction of the plate-like body by the air supply type supporting mechanism, the contact pressure of the pair of propulsive force imparting mechanisms to the plate-like body can be suppressed, and the surface can be suppressed. The plate-shaped body bends to support the inter-toilet portion of the banner (4) of the plate-shaped body, so that the state of the plate-shaped body can be supported in the stable posture in the 201228912, and the plate-shaped body conveying device of the present invention can be smoothly passed. The conveyance of the plate-shaped body is performed. It is preferable that the lower part or the side part of the center is formed: in the embodiment, the cover member is freely formed by the cover member, and the maintenance port is formed, and the opening is required, that is, the dimension is formed in the chamber portion: opening and closing is free The cover member is used to construct the Langwei, and the 'and' has the opening for closing the maintenance, and therefore, the cover member can be used from the maintenance gate to the cavity=repair operation by opening the cover structure, thus, when the foreign object is Perform maintenance work in the chamber room. ^ The cover member can be opened to remove foreign matter from the maintenance, and the foreign matter removal operation can be easily performed. Preferably, the plate-shaped body conveying device of the present invention is configured to have a supply surface that is turned up to the "boring hole supply", and the end portion of the guide passage shirt is preferably connected to the supply of the air supply source. The other end portion is preferably connected to the side surface portion of the chamber portion, and it is preferable that the width of the passage in the up and down direction is formed to be wider toward the side of the chamber portion. That is, the air supply source can be made upward. The supplied air is guided to the chamber portion side by the guide passage portion, and presses the chamber space of the chamber portion. Further, although the amount of air guided by the guide passage portion is closer to the chamber portion side, the air supply is performed. The supply air is merged and the flow is increased. However, the passage width in the vertical direction of the guide passage portion is formed to be wider toward the chamber portion side, and the guide passage portion is gradually wider as it approaches the chamber portion side. The air that is gradually increased as it approaches the side of the chamber portion can make the air flow smoothly to the chamber portion. In the form of the plate-shaped body conveying device of the present invention, the air supply for 201228912 is suitable for integration. A fan filter unit is constructed by assembling an electric blower fan and a dust filter. That is, the air supply source can be provided only by a fan filter unit that is integrally assembled with an electric blower fan and a dust filter, so that the air supply type is supported. Since the arrangement of the mechanism is extremely simple, it is possible to achieve an early premature process between the plate-shaped body conveying devices. In the embodiment of the plate-shaped body conveying device of the present invention, the air supply source preferably has a lateral side view and the cavity. The chamber portion is disposed so as not to be overlapped with the chamber portion to the lower side in the up-and-down direction. Further, in the embodiment of the plate-shaped body conveying device of the present invention, it is preferable to describe the outer side of the guide plate portion. The end portion is provided with a ridge portion, and the ridge portion is preferably formed so as to protrude upward from the upper surface of the guide plate portion at a height lower than a lower surface of the plate-shaped member to be conveyed, and continuously extends in the conveying direction. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view of a plate-shaped body conveying device in a first embodiment. Fig. 2 is a longitudinal sectional front view of a plate-shaped body conveying device. Fig. 3 is a wind-driven branch Fig. 4 is a longitudinal sectional front view of a cavity to a portion. (°) A longitudinal sectional front view of a ventilation supporting mechanism of another embodiment. [Embodiment] In the form of a rectangular substrate (in more detail, a glass substrate for a flat-panel display), the plate-shaped body transfer device 10 201228912 of the present invention is transported as a plate-like body. In the first embodiment, the plate-shaped body transfer device is configured to include a blower type support mechanism 2, which supplies clean air to the lower surface of the glass substrate 1 and supports the glass substrate 1 in a non-contact state; The force applying mechanism 3 is in contact with the lower surface of the supporting glass substrate 1 and imparts a propulsive force in the conveying direction to the glass substrate 1. Further, the 'plate-shaped conveying device 并 is provided in the conveying direction, and a plurality of air-assisted supporting mechanisms 2 are arranged in parallel. The plate-shaped body transport unit U of the propulsion force imparting mechanism 3 is configured. The propulsion power supply mechanism 3 is configured such that a plurality of rotation reports 6 are arranged in parallel along the conveyance direction, and the respective rotation rollers 6 are rotationally driven by the electric motors 7 corresponding to the respective rotation reports 6, and the glass substrate 1 is placed in the conveyance direction. The driving force is applied, and the rotating roller 6 is in contact with the end in the banner direction that is orthogonal to the conveying direction in the lower surface of the glass substrate. Instead of the above configuration, an electric motor can be rotationally driven by a plurality of rotating rollers through a gear mechanism. Further, the thrust imparting mechanism 3 has a thrust force applying mechanism 3 that is one of the following: the thrust force applying mechanism 3 on the end side of the supporting glass substrate is contacted with one end portion in the 彳 幅 direction in the lower surface of the supporting glass substrate to impart a glass substrate 丨The propulsive force in the transport direction is provided, and the other end side thrust force applying mechanism 3 contacts the other end portion of the support glass substrate 1 in the direction of the cross-belt I to impart a pushing force in the two-feed direction to the glass substrate i. Then, the pair of thrust force applying mechanisms 3 are brought into contact with both end portions of the support glass substrate 1 in the banner direction from below, and the thrust forces in the transport direction are given to the both end portions. As shown in the second or third figure, the air supply type support mechanism 2 201228912 is disposed between the pair of propulsion power supply mechanisms 3 from a plan view. In addition, the air supply type support mechanism 2 is disposed at the entire position of the banner of the glass substrate 1 transport path, and supplies the clean air to the intermediate portion of the glass substrate 1 in the banner direction to support the glass substrate 1 in a non-contact state. In other words, as shown in the second or third embodiment, the plate-shaped body transporting device η is configured such that the propelling force applying mechanism 3 contacts the two creeping portions of the supporting glass substrate 1 in the banner direction, and the air-type supporting mechanism 2 is non-contacting supporting glass. In the state of the center portion of the substrate 1 in the banner direction, the propelling force imparting mechanism 3 applies the pushing force in the transport direction to both end portions of the glass substrate 横幅 in the banner direction, thereby transporting the glass substrate 1 in the transport direction. [Air supply type support mechanism] Next, the air supply type support mechanism 2 will be described. As shown in Fig. 3, the air supply type support mechanism 2 is configured to include an air supply source 空气 for air supply, a chamber portion 14, a guide passage portion 15, and a guide plate. The Η6° chamber portion 14 forms a cavity from the air supply source "cavity of the air to the upper portion 12" and the chamber portion 14 has a sprayed iB α 13 Μ丨 conduction path from the chamber space 12 upward. The portion 15 guides the upper air supplied from the air supply source u to the chamber portion 14. The guide plate portion 16 is adjacent to the chamber portion 14 and is slid to be guided to eject from the discharge port 13 to the lower surface of the glass substrate i. The flow below the glass substrate 1 is used. Here, the use of "pressing in" the table means that the combined force in the chamber space 12 by the air supply source 11 is external to the chamber portion 14 Guide. Due to this pressure, air is ejected from the ejection π13. The n-type support mechanism 2 is configured such that the air supply source 11 supplies 12 201228912 = gas 'pass (four) 丨 conduction path and the material to the cavity provided along the transport direction to # 14, and the regular vibration is suppressed in the chamber portion The air that is lived is ejected upward from the discharge port 13. In the state in which the glass substrate 1 is supported in a non-contact manner by the air supply type support mechanism 2, the air discharged upward from the discharge port 13 is supplied downward toward the surface substrate (4), and 'α is supplied toward the lower surface of the glass substrate 1. The air flows in a space between the guide plate portion 16 and the glass substrate 1 in the banner direction along the top surface of the guide sheet 4 16 and the underside of the glass substrate i. The air layer is formed between the guide plate portion 16 and the glass substrate 1 by flowing air as described above. Not only the glass substrate 1 can be supported in a non-contact state at the chamber portion 14 where air is blown to the lower surface of the glass substrate 1, The glass substrate 1 can also be supported in a non-contact state at the guide plate portion 16 provided with the lateral side thereof. The air supply type support mechanism 2 is disposed between the pair of air supply type support mechanisms 2 in a state of being spaced apart from each other in the banner direction, and is formed to discharge the air on the guide plate 416 to the space below the guide plate portion 16. The exhaust path is sometimes referred to as an exhaust path 17a at the center, which corresponds to the exhaust path of the present invention. Further, the pair of air supply type support mechanisms 2 are provided in a state of being spaced apart from each other with respect to the propulsion power supply mechanism 3, and the guide plate portion 16 is also formed between the air supply type support mechanism 2 and the propulsion power supply mechanism 3. The upper hole is discharged to the exhaust path 17 (sometimes referred to as the end exhaust path 17b) of the space below the guide plate portion 16. In addition, the 'air supply type support mechanism 2 is arranged in parallel in the continuous direction between the adjacent chamber portions 4 in the transport direction or the guide plate portions 16 adjacent to each other in the transport direction. A slit is formed.
S 13 201228912 接者’對料風式支㈣構2之各部位進行 -對送風式支持機構2除了在寬度方向之中夫位Θ由於 沿著搬送方向延伸的假想線構成為對稱之外，j相對於 成’故說明位於橫巾昌方向之—方_送風式^機，同構 略說明位於另—方側之送風式支持機構2。又，說2’省 支持機構2之各部份時，有時將形成有橫幅方向上中央2 排氣路徑17a_為时侧，形成有橫財向上端部之魏 路徑17b側稱為外方側而進行說明。 〔空氣供給源〕 空氣供給源11係以一體地安裝電動式送風扇9與除塵 濾器10而構成的風扇過濾單元所構成，送風扇9係繞著縱軸 心旋轉，覆蓋該送風扇9上方地配設有除塵濾器1〇。藉由如 上述般配置空氣供給源11，配置成藉由旋轉驅動送風扇9而 供給空氣供給源11之下方空氣，該所供給之空氣通過除塵 濾器10作為清淨空氣排至空氣供給源丨丨上方，而朝上方供 給空氣。 附▼一挺，二氣供給源11係從平面視角看來形成為矩 形，空氣供給源11在橫幅方向上的寬度為送風式支持機構2 在橫幅方向上寬度的1/2〜1/3左右，空氣供給源11在搬 送方向上的寛度為送風式支持機構2在搬送方向上寬度的1 /2左右。 空氣供給源11係使形成於該空氣供給源1 1之供給面 (上面）的供給口 18從平面視角看來不與腔室部丨4之喷出口 13重複地配設在相對於腔室部14往橫幅方向之外方側錯開 14 201228912 之處。又，空氣供給源11係從橫側面視角看來不與腔室部 14重複地配設在相對於腔室部14錯開至上下方向之下方側 之處。 如上所設之空氣供給源11其橫幅方向之内方側端部上 端係設置成接近腔室部14之橫幅方向之外方側端部τ端的 狀態。附帶一提’空氣供給源11之内方側端部與腔室部14 之外方側端部在平面視角看來為重複。 〔引導通路部〕 引導通路部15係以設置成連通空氣供給源丨丨之供給口 18與形成在腔至部14之外方側橫側面之導入口 19的狀態的 導管來構成。 說明如下’引導通路部15之一方端部係藉由連接位於 供給口 18周圍之空氣供給源u框體而連接於空氣供給源η 之供給面’引導通路部15之[方端部係藉由連接位在導 ^ 口 19周圍之腔室部14側板而連接於腔室部μ外方側之橫 側面部14a。 料祕相的上成為越靠近龍方向之 方側位置越尚的傾斜狀 叫形狀形成為三看導通路部 成為㈣送方向^柄形成之料通路部15形 上下方向通路寬度在橫幅方向上從 空氣之通纖一㈣寬度係形成為 附帶一提，料通路部15在搬送方向中配置於前端的 15 201228912 前面部分與配置於後端之後面部分係指以沿著橫幅方向的 方式錯直地直立設f而互相平行地形成，弓丨導通路部= 平面視角看來之橫幅方向寬度在外方側與内方側形成為相 同寬度。X，引導通路部15在搬送方向上的通路寬度形: 為供給口 18或導人口 19在搬送方向上的t度為相同寬度。、 〔腔室部〕 對 如第4圖所示，腔室部14形成為倒向搬送方向之产倒弋 四角箱形，沿著搬送方向而設置’以其内部空間形：腔； 空間12 ^亦即，形成腔室部14内部空間之上面部14^ 橫侧面部14a與下面部14c係延伸於搬送方向。 腔室部I4之上面部141)係以沖孔金屬所構成， 該沖孔金屬之孔形成喷出口 13。如此一來 以形成於 在腔室部14的 上部，形成有多數向上方噴出空氣的噴出on A ^ , 13 ’在腔室部 14的上部，具有由複數喷出口 13所構成之空氣噴出立 係沿著搬送方向而具備並用於將空氣供给溽丨丨所供給如 氣向上方喷出者。 〇 ^ 酉己 腔室部14之搬送方向上的配置在前端之前面a 、 置於後端之後面部分係形成為以沿著橫幅方a 、 向之狀態鉛直 地直立設置而互相平行。 並且，腔室部14係構造成將由引導通略 1M5所引導來 的空氣從導入口 19導入腔室空間丨2内，在抑制 氣之規律振動的狀態下，從複數喷出口 13向上方噴出 導入口 19形成於距離腔室部14之下面邱lyi 。丨丨赴高為設定 高度處，且在腔室部14之下面部14c與導入口19之間形成俨 16 201228912 差0 ，， 面部Uc在橫幅方向之外方側部分的上表面形成為 面而在橫幅方向之内方側部分的上表面形成為越外 方側7於上方的傾斜面。 並且，在腔室部14從下面部14c至内方側之橫側面部 14邮成有維修用開口 2卜並且’具備可自由開閉該維修用 開口 21之蓋構件22。而且，蓋構件22以蝶形螺栓等所構成 之固定構件固定於腔室部14，並構成為不使用工具即可裝 卸而可開閉維修用開口 2卜 亦即’腔室部14即使有破損的玻璃基板1碎片等異物從 喷出口 13侵入腔室空間12内’也可以腔室部14之下面部 14c、特別是下面部14c之向下方膨出的橫幅方向上外方側 部分接住該異物。並且，由於引導通路部15連接於腔室部 14之橫側面部14a、以及在導入口 19與下面部14c之間形成 有段差’因此可防止異物侵入引導通路部15，藉此，構成 為可防止異物侵入空氣供給源11。並且’構成為被腔室部 14之下面部丨4 c接住的異物藉由取下蓋構件2 2而打開維修 用開口 21，可透過維修用開口 21將腔室空間12内的異物取 出至外部。 又’在腔室部14具有風量檢測機構24，可檢測出由空 氣供給源11所供給之空氣供給量已變成設定量以下。 該風量檢測機構24構成為具備有繞著沿著搬送方向之 軸心自由搖動地垂吊支持的搖動體25、及以投光器與受光 器構成的檢測體26，搖動體25及檢測體26較腔室部14中之S 13 201228912 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接 接The air supply type support mechanism 2 located on the other side is similarly illustrated in the same manner as the "air supply type" in the direction of the horizontal towel. In addition, when the parts of the 2' provincial support mechanism 2 are said, the center 2 exhaust path 17a_ in the banner direction is formed as the time side, and the Wei path 17b side in which the horizontal end is formed is sometimes referred to as the outer side. And explain. [Air supply source] The air supply source 11 is configured by integrally mounting a fan filter unit including an electric blower fan 9 and a dust filter 10, and the blower fan 9 is rotated about a longitudinal axis to cover the upper side of the blower fan 9. It is equipped with a dust filter 1〇. By arranging the air supply source 11 as described above, it is arranged to supply the air below the air supply source 11 by rotationally driving the blower fan 9, and the supplied air is discharged as clean air to the air supply source through the dust filter 10. And supply air upwards. With a plus, the two gas supply source 11 is formed in a rectangular shape from a plan view, and the width of the air supply source 11 in the banner direction is about 1/2 to 1/3 of the width of the air supply support mechanism 2 in the banner direction. The degree of twist of the air supply source 11 in the transport direction is about 1 / 2 of the width of the air supply type support mechanism 2 in the transport direction. The air supply source 11 is configured such that the supply port 18 formed on the supply surface (upper surface) of the air supply source 1 is not overlapped with the discharge port 13 of the chamber portion 4 from the plane of view with respect to the chamber portion. 14 staggered outside the direction of the banner 14 201228912. Further, the air supply source 11 is disposed so as not to be overlapped with the chamber portion 14 from the lateral side view, and is displaced to the lower side in the up-and-down direction with respect to the chamber portion 14. The air supply source 11 provided as above has a state in which the upper end of the inner side end of the banner direction is close to the end of the end portion τ of the chamber portion 14 in the direction of the banner. Incidentally, the inner side end portion of the air supply source 11 and the outer side end portion of the chamber portion 14 are repeated in a plan view. [Guide passage portion] The guide passage portion 15 is configured by a duct that is provided to communicate with the supply port 18 of the air supply source 与 and the introduction port 19 formed on the lateral side of the cavity-to-side portion 14 side. In the following description, the one end portion of the guide passage portion 15 is connected to the supply surface of the air supply source η by the air supply source u frame located around the supply port 18 The side portion of the chamber portion 14 around the port 19 is connected to the lateral side portion 14a on the outer side of the chamber portion μ. The upper side of the material secret phase is located closer to the side of the dragon, and the more inclined shape is formed as the three-way guide passage portion. (4) The feed passage portion 15 formed by the feed direction is formed in the direction of the banner. The width of the air fiber is four (four) width, and the material passage portion 15 is disposed at the front end in the transport direction 15 201228912 front portion and rear surface portion disposed in the rear end direction so as to be staggered along the banner direction The erecting direction is set to be parallel to each other, and the bow guide passage portion = the width of the banner direction in the plane view is formed to have the same width on the outer side and the inner side. X, the width of the passage of the guide passage portion 15 in the conveyance direction: the t-degree in the conveyance direction of the supply port 18 or the guide population 19 is the same width. [Cell chamber portion] As shown in Fig. 4, the chamber portion 14 is formed in a reversed rectangular box shape in the reverse transport direction, and is disposed along the transport direction with its internal space shape: cavity; space 12 ^ That is, the upper surface portion 14a and the lower surface portion 14c of the inner space forming the inner portion of the chamber portion 14 extend in the conveying direction. The upper surface portion 141) of the chamber portion I4 is formed of a punched metal, and the hole of the punched metal forms the discharge port 13. In this way, a plurality of discharges on the upper portion of the chamber portion 14 are formed, and a discharge of the air is discharged upward. A A , 13 ' is formed in the upper portion of the chamber portion 14 and has an air ejection system composed of a plurality of discharge ports 13 It is provided along the conveyance direction and is used to supply the air supply to the upper side.配置 ^ The arrangement in the transport direction of the chamber portion 14 is arranged in front of the front end surface a and after the rear end surface portion is formed so as to be vertically erected along the banner side a and parallel to each other. Further, the chamber portion 14 is configured to introduce air guided by the guide passage 1M5 into the chamber space 2 from the introduction port 19, and to eject the upper portion from the plurality of discharge ports 13 while suppressing the regular vibration of the gas. The port 19 is formed below the chamber portion 14 by Qiu Lyi. When the height is at the set height, and the 俨16 201228912 difference 0 is formed between the lower surface portion 14c of the chamber portion 14 and the introduction port 19, the upper surface of the side portion of the face Uc outside the banner direction is formed as a surface. The upper surface of the square side portion in the banner direction is formed as an inclined surface on the outer side 7 above. Further, in the chamber portion 14, the maintenance opening 2 is provided in the lateral side portion 14 from the lower surface portion 14c to the inner side, and the cover member 22 which can open and close the maintenance opening 21 is provided. Further, the cover member 22 is fixed to the chamber portion 14 by a fixing member made of a butterfly bolt or the like, and is configured to be detachable without using a tool, and can open and close the maintenance opening 2, that is, even if the chamber portion 14 is damaged. Foreign matter such as fragments of the glass substrate 1 enters the chamber space 12 from the discharge port 13'. The outer side portion of the lower surface portion 14c of the chamber portion 14 and particularly the lower portion 14c bulges downward to catch the foreign matter. . Further, since the guide passage portion 15 is connected to the lateral side surface portion 14a of the chamber portion 14 and the step is formed between the introduction port 19 and the lower surface portion 14c, it is possible to prevent foreign matter from entering the guide passage portion 15, thereby being configured to be Foreign matter is prevented from entering the air supply source 11. Further, the foreign matter caught by the lower surface portion 4c of the chamber portion 14 is opened by removing the cover member 22, and the maintenance opening 21 is opened, and the foreign matter in the chamber space 12 can be taken out through the maintenance opening 21 to external. Further, the chamber portion 14 has the air volume detecting means 24, and it is detected that the air supply amount supplied from the air supply source 11 has become equal to or less than the set amount. The air volume detecting mechanism 24 is configured to include a rocking body 25 that is suspended and supported around the axis of the transporting direction, and a detecting body 26 that is configured by a light projector and a light receiver. The rocking body 25 and the detecting body 26 are relatively cavityd. In the room 14
S 17 201228912 外方側橫側面部14a的導入口 19被支持於上方處。又，搖動 體2 5係以鉛直狀態設置成下端較導入口 19之上端位於下 方’當空氣供給源11動作而從空氣供給源11供給空氣時， 搖動體25會從鉛直狀態切換成往内方侧搖動的傾斜狀態。 而且，在從空氣供給源11適當地供給空氣的狀態下， 搖動體25會搖動設定角度以上，檢測體26會呈檢測搖動體 25的撿測狀態。又，在因為除塵濾器10塞住等原因，空氣 供給源11無法適當地供給空氣，所供給之空氣供給量呈預 定量（例如，所搬送之玻璃基板1朝下方彎曲，有接觸到送 風式支持機構2之虞的供給量）以下的狀態時，搖動體25僅 會搖動設定角度以下的角度，檢測體26會呈未檢測出搖動 體25的非檢測狀態。 [弓丨導板部] 如第2或3圖所示，引導板部16係以相對於腔室部14於 +黃1¾方向的兩側鄰接的狀態配置有一對，以將從腔室部 14(空氣噴出部2〇)向玻璃基板1下面喷出的空氣沿著玻璃基 板1的下面引導至橫幅方向。並且，在一對引導板部16之一 方中的外方側端部具有突條部27，突條部27係形成為在位 於較所搬送之玻璃基板1下面為下方的高度，從引導板部16 之上面突出於上方且沿著搬送方向連續地延伸成直線狀。 附加說明如下，一對引導板部16分別以水平狀態設置 成其上面沿著所搬送之玻璃基板1的下面。附帶一提，腔室 部Μ係設置成其上面沿著所搬送之玻璃基板丨的下面，一對 弓丨導板部16與腔室部14係配置成各上面呈一平面的狀態》 18 201228912 成且，一對引導板部16中之鄰接於腔室部14外方側的 外方側引導板部16b，其横幅方向之外方侧端部延伸設置至 推進力賦予機構3的附近，鄰接於胜室部14内方側的内方側 引導板部16a’其橫幅方向之内方側端部延伸設置至板狀體 搬送裝置Η的橫幅方向中央部的附近。 又’内方側引導板部16a較外方側引導板部16b形成為 在橫幅方向上為寬度較窄。藉由如上述般形成一對引導板 部16之橫幅，腔室部14會配置成較端部排氣路徑17b更偏向 中央部排氣路徑17a側的狀態’從腔室部14喷出之空氣會供 給至玻璃基板1中央附近的下面。 附帶一提，内方側弓丨導板部16a之撗幅方向的寬度形成 為腔室部Μ橫幅方向寬度的1/3〜1/4左右，外方側引導板部 16b之橫幅方向的寬度形成為腔室部u橫幅方向寬度的2 5 倍左右。 而且，突條部27係於外方侧引導板部丨沾中之外方側端 部，沿著搬送方向包含引導板部16全幅而具備。附帶一提， 在内方側引導板部16a不具備突條部27。 亦即，從腔室部14至端部排氣路徑l7b為止的距離由於 較從腔室部14至中央部排氣路徑17a為止的距離長，故從腔 室部14噴出之空氣易於流動至内方側，而難以流動至外方 側。但是，由於從腔室部！4流動至外方側的空氣藉由突條 部27的存在而難以從端部排氣路徑17b排氣，故即使在腔室 部14的外方側也容易形成空氣層。 在引導板部16,以從引導板部16上面向上方突出的狀 19 201228912 態、且相對於所搬送之玻璃基板1於下方分離的狀態設有支 夺體28 ’構成為當因為送風式支持機構2故障等緣故，送風 式支持機構2的支持力變弱等情形而向下方彎曲的玻璃基 板1，可藉由支持體28支持於較引導板部16之上面還上方。 並且’支持體28係以可自由旋轉之樹脂製球體所構 成’分別沿著搬送方向隔著設定間隔而分別設置於内方側 引導板部16a中之内方側的端部、外方側引導板部16b中之 轶巾田方向的中央部 '及外方側引導板部i6b中之内方側的端 部。 如以上說明，本實施形態中，空氣供給源丨丨係形成於 邊空氣供給源11之供給㈣供給σ18從平面視角看來不 與腔至部14中之噴出口 13重複地相對於腔室部⑽橫幅方 向之外方側錯開而配設。因此，即使破損的玻璃基初之破 片等異物從噴出口 13侵入腔室空間12内，該異物也可由腔 ㈣Μ之下面部14c接住，可防止異物侵入引導通路部15， 糟此’構成為可防止異物侵人空氣供給源u。 〔其他實施形態〕 ⑴在上述實施形4中，係、將内方側引導板部他形成為 較外方側引導板部脱在橫幅方向上的寬度較窄，但亦可如 第5⑷圖所示1内方側料板畅形成為較外方側引導 板部16b在橫幅方向上的寶译氣皆 見戾為寬，又，亦可將内方側引導 板部16a與外方側引導板部丨6h. H6b在杈幅方向上的寬度形成為 同樣寬度。 對送風式支持機構2以彼 (2)在上述實施形態中，係將_ 20 201228912 此隔著間隔的狀態設置並配置成在一對送風式支持機構2 之間形成有排氣路徑17,但亦可如第5(b)圖所示，將一對送 風式支持機構2以密接的狀態設置並配置成在一對送風式 支持機構2之間不形成有排氣路徑17。 又，雖將送風式支持機構2構成為於橫幅方向並列設置 -對’但亦可如第5⑷圖所示，將送風式支持機構2於橫幅 方向上不並列設置複數個’又’也可將送風式支持機構2於 橫幅方向並列設置多數個。 (3) 在上述實施形態中，係將腔室部14構成為在該下面 部14c或橫側面14a形成維修用開口21，且使維修用開口 21 具備可自由開閉之蓋構件22，但亦可將腔室部丨4構成為在 其上面部14b形成維修用開口 21，而開閉操作構成上面部 14b的沖孔金屬。 (4) 在上述實施形態中，係將空氣供給源11配置成向上 方供給空氣，將引導通路部15其一方之端部連接於空氣供 給源11的上面部，但亦可將空氣供給源11配置成向橫幅方 向之内方側供給空氣，將引導通路部15其一方之端部連接 於空氣供給源11的内方側橫側面部。 又，在上述實施形態中，係將引導通路部丨5另一方之 端部連接於腔室部14的側面部，但亦巧'將引導通路部15另 一方之端部連接於腔室部14的下面部。 (5) 在上述實施形態中，係將腔室部14沿著搬送方向設 置，將引導板部16以相對於腔室部14於橫幅方向兩側鄰接 的狀態配設，將空氣供給源11配設於相對於腔室部14在橫 21 201228912 幅方向上錯開處，但亦可將腔室部14沿著橫幅方向設置， 將引導板部16以相對於腔室部14於搬送方向兩側鄰接的狀 恕配設，將空氣供給源11配設於相對於腔室部14在搬送方 向上錯開處。 (6) 在上述實施形態中，係以風扇過濾單元構成空氣供 給源11 ’但亦可以壓縮機等構成空氣供給源u。 (7) 在上述實施形態中，係設置一端側之推進力鹎予機 構3與另-端側之推進力賦予機構3作為推進力賦予機構 3 ’但亦可僅設置一端側之推進力賦予機構3或另一端侧 推進力賦予機構3中任—方之推進力賦予機構3作為推 賦予機構3，又，也可設置接觸支持玻璃基板1中之橫幅 向中間°卩、對於板狀體賦^推進力之中央侧推進力賊 構3 ’來作為推進力賦予機構3。 予機 ⑻在上述實施形態中，係、以沖孔金屬構成腔室部14 上面部14b’以形成於沖孔金屬之孔形成喷出口！ 之 :吏3腔室部U之上面部14b全體開口，以該開口形成噴出: 【圖式簡單說明】 第1圖係板狀體搬送裝置的立體圖。 第2圖係板狀體搬送裝置的縱截正面圖。 第3圖係送風式支持機構的縱截正面圖。 第4圖係腔室部的縱截正面圖。 態之送風式支持機構的縱 第5(a)〜(c)圖係其他實施形 截正面圖。 22 201228912 【主要元件符號說明】 1.. .玻璃基板 2.. .送風式支持機構 3.. .推進力賦予機構 4.. .空氣層 6.. .旋轉輥 7.. .電動馬達 9.. .送風扇 10.. .除塵濾器 11.. .空氣供給源 12…腔室空間 13.. .喷出口 14.. .腔室部 14a...橫側面部 14b...上面部 14c...下面部 15.. .引導通路部 16.. .引導板部 16a...内方側引導板部 16b…外方側引導板部 17.. .排氣路徑 17a...中央部排氣路徑 17b...端部排氣路徑 18.. .供給口 19···導入口 20.. .空氣喷出部 21.. .維修用開口 22.. .蓋構件 24.. .風量檢測機構 25.. .搖動體 26.. .檢測體 27.. .突條部 28.. .支持體 H...板狀體搬送裝置 U...板狀體搬送單元S 17 201228912 The introduction port 19 of the outer side lateral side portion 14a is supported at the upper side. Further, the oscillating body 25 is disposed in a vertical state such that the lower end is located below the upper end of the introduction port 19. When the air supply source 11 operates to supply air from the air supply source 11, the oscillating body 25 is switched from the vertical state to the inward side. Side tilted state. Further, in a state where air is appropriately supplied from the air supply source 11, the oscillating body 25 is shaken by a set angle or more, and the detecting body 26 is in a state of detecting the oscillating body 25. In addition, the air supply source 11 cannot supply air properly because the dust filter 10 is plugged or the like, and the supplied air supply amount is a predetermined amount (for example, the glass substrate 1 to be conveyed is bent downward, and there is contact with the air supply type. When the supply amount of the mechanism 2 is in the following state, the swinging body 25 only shakes the angle of the set angle or less, and the sample 26 is in a non-detected state in which the shaker 25 is not detected. [Bowing guide portion] As shown in the second or third embodiment, the guide plate portion 16 is disposed in a pair adjacent to the chamber portion 14 in the + yellow 13⁄4 direction, so that the pair of chamber portions 14 are disposed. (Air ejection unit 2A) The air ejected to the lower surface of the glass substrate 1 is guided to the banner direction along the lower surface of the glass substrate 1. Further, the outer side end portion of one of the pair of guide plate portions 16 has a protruding portion 27, and the protruding portion 27 is formed at a height lower than the lower surface of the glass substrate 1 to be conveyed, from the guide plate portion. The upper surface of the 16 is protruded upward and continuously extends in a straight line along the conveying direction. In addition, as follows, the pair of guide plate portions 16 are respectively disposed in a horizontal state on the upper surface thereof along the lower surface of the glass substrate 1 to be conveyed. Incidentally, the chamber portion is disposed such that the upper surface thereof is along the lower surface of the transported glass substrate ,, and the pair of bow guide portions 16 and the chamber portion 14 are disposed in a state in which each of the upper surfaces is in a flat surface. 18 201228912 In the outer side guide plate portion 16b of the pair of guide plate portions 16 adjacent to the outer side of the chamber portion 14, the outer side end portion in the direction of the banner is extended to the vicinity of the propulsive force imparting mechanism 3, adjacent thereto. The inner side guide plate portion 16a' on the inner side of the inner chamber portion 14 has an inner side end portion in the banner direction extending to the vicinity of the center portion in the banner direction of the plate-shaped body conveying device. Further, the inner side guide plate portion 16a is formed to have a narrower width in the banner direction than the outer side guide plate portion 16b. By forming the banner of the pair of guide plate portions 16 as described above, the chamber portion 14 is disposed in a state in which the end portion exhaust passage 17b is more inclined toward the central portion exhaust passage 17a side - the air ejected from the chamber portion 14 It is supplied to the lower surface near the center of the glass substrate 1. Incidentally, the width of the inner side bow guide portion 16a in the width direction is formed to be about 1/3 to 1/4 of the width of the chamber portion Μ banner direction, and the width of the outer side guide sheet portion 16b in the banner direction. It is formed to be about 25 times the width of the direction of the banner portion u. Further, the ridge portion 27 is provided on the outer side end portion of the outer side guide plate portion, and includes the guide plate portion 16 in the transport direction. Incidentally, the inner side guide plate portion 16a does not have the ridge portion 27. That is, since the distance from the chamber portion 14 to the end portion exhaust passage 17b is longer than the distance from the chamber portion 14 to the central portion exhaust passage 17a, the air ejected from the chamber portion 14 easily flows to the inside. On the square side, it is difficult to flow to the outside side. However, due to the part from the chamber! The air flowing to the outside side is hard to be exhausted from the end exhaust path 17b by the presence of the ridge portion 27, so that an air layer is easily formed even on the outer side of the chamber portion 14. In the state in which the guide plate portion 16 protrudes upward from the upper surface of the guide plate portion 16 and is separated from the glass substrate 1 to be conveyed downward, the support body 28' is configured to be supported by the air supply type. In the case of the failure of the mechanism 2 or the like, the glass substrate 1 bent downward in the case where the support force of the air supply type support mechanism 2 is weakened can be supported by the support body 28 above the upper surface of the guide plate portion 16. Further, the 'support body 28 is formed of a resin-made spherical body that is freely rotatable' is respectively provided at the inner side end and the outer side of the inner side guide plate portion 16a at a set interval in the transport direction. The inner portion of the central portion of the plate portion 16b in the direction of the towel and the inner side of the outer side guide plate portion i6b. As described above, in the present embodiment, the air supply source 形成 is formed in the side air supply source 11 (4) The supply σ18 does not overlap the discharge port 13 in the cavity to the portion 14 from the plane view point with respect to the chamber portion. (10) The outside of the banner direction is staggered and arranged. Therefore, even if foreign matter such as a broken glass-based primary fragment enters the chamber space 12 from the discharge port 13, the foreign matter can be caught by the cavity (4) lower surface portion 14c, and foreign matter can be prevented from entering the guide passage portion 15, and the composition is It can prevent foreign matter from invading the air supply source u. [Other Embodiments] (1) In the above-described embodiment 4, the inner side guide plate portion is formed to have a narrower width in the direction of the banner than the outer side guide plate portion, but may be as shown in Fig. 5(4). The inside side panel of the display 1 is formed to be wider than the outer side guide panel portion 16b in the banner direction, and the inner side guide panel portion 16a and the outer side guide panel may also be formed. The width of the portion 6h. H6b in the width direction is formed to be the same width. In the above embodiment, the air supply type support mechanism 2 is provided with the exhaust path 17 between the pair of air supply type support mechanisms 2 in a state in which the _ 20 201228912 is spaced apart from each other. As shown in FIG. 5(b), the pair of air supply type support mechanisms 2 may be disposed in close contact with each other so that the exhaust path 17 is not formed between the pair of air supply type support mechanisms 2. Moreover, although the air supply type support mechanism 2 is configured to be arranged side by side in the direction of the banner, the air supply type support mechanism 2 may be provided with a plurality of 'again' in the banner direction as shown in the fifth (4) diagram. The air supply type support mechanism 2 is provided in plurality in the banner direction. (3) In the above embodiment, the chamber portion 14 is configured such that the maintenance opening 21 is formed in the lower surface portion 14c or the lateral side surface 14a, and the maintenance opening 21 is provided with the lid member 22 that can be opened and closed freely. The chamber portion 4 is configured such that a maintenance opening 21 is formed in the upper surface portion 14b, and the punching metal constituting the upper surface portion 14b is opened and closed. (4) In the above embodiment, the air supply source 11 is disposed to supply air upward, and one end of the guide passage portion 15 is connected to the upper surface portion of the air supply source 11, but the air supply source 11 may be provided. Air is supplied to the inner side in the banner direction, and one end of the guide passage portion 15 is connected to the inner side lateral side portion of the air supply source 11. Further, in the above embodiment, the other end portion of the guide passage portion 丨5 is connected to the side surface portion of the chamber portion 14, but it is also preferable to connect the other end portion of the guide passage portion 15 to the chamber portion 14. The lower part. (5) In the above embodiment, the chamber portion 14 is provided along the transport direction, and the guide plate portion 16 is disposed adjacent to the chamber portion 14 in the banner direction, and the air supply source 11 is provided. It is disposed at a position offset from the chamber portion 14 in the transverse direction 21 201228912. However, the chamber portion 14 may be disposed along the banner direction, and the guide sheet portion 16 may be adjacent to both sides of the chamber portion 14 in the transport direction. The air supply source 11 is disposed at a position shifted from the chamber portion 14 in the transport direction. (6) In the above embodiment, the air supply source 11' is constituted by the fan filter unit. However, the air supply source u may be constituted by a compressor or the like. (7) In the above-described embodiment, the thrust force imparting mechanism 3 on the one end side and the thrust force applying mechanism 3 on the other end side are provided as the propulsive force imparting mechanism 3', but only the one end side thrust force imparting mechanism may be provided. 3 or the other end side thrust force imparting mechanism 3 as the push imparting mechanism 3 as the push imparting mechanism 3, and the banner in the contact supporting glass substrate 1 may be provided in the middle to the middle, and to the plate-shaped body. The center side propulsion force thief 3' of the propulsion force is used as the propulsion power imparting mechanism 3. In the above embodiment, the upper surface portion 14b' of the chamber portion 14 is formed of a punched metal to form a discharge port in the hole formed in the punched metal! The upper surface portion 14b of the 吏3 chamber portion U is opened, and the discharge is formed by the opening: [Simplified description of the drawings] Fig. 1 is a perspective view of the plate-shaped body conveying device. Fig. 2 is a longitudinal sectional front view of the plate-shaped body conveying device. Figure 3 is a longitudinal sectional front view of the air supply support mechanism. Fig. 4 is a longitudinal sectional front view of the chamber portion. The vertical 5th (a) to (c) drawings of the air supply type support mechanism are front view of other embodiments. 22 201228912 [Description of main component symbols] 1.. Glass substrate 2. Air supply type support mechanism 3. Propulsion force imparting mechanism 4. Air layer 6. Rotary roller 7. Electric motor 9. .. fan fan 10.. dust filter 11.. air supply source 12... chamber space 13.. discharge port 14.. chamber portion 14a... lateral side portion 14b... upper surface portion 14c. .. lower portion 15.. guide passage portion 16: guide plate portion 16a... inner side guide plate portion 16b ... outer side guide plate portion 17 .. exhaust passage 17a ... central portion row Air path 17b... End exhaust path 18.. Supply port 19···Inlet port 20.. Air ejection unit 21. Maintenance opening 22.. Cover member 24: Wind volume detection Mechanism 25: Shake body 26... Test body 27... Strut portion 28.. Support body H... Plate-shaped body transport device U... Plate-shaped body transport unit
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