CN102639440B - 制备三氯甲硅烷的方法和设备 - Google Patents

制备三氯甲硅烷的方法和设备 Download PDF

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Publication number
CN102639440B
CN102639440B CN201080043459.XA CN201080043459A CN102639440B CN 102639440 B CN102639440 B CN 102639440B CN 201080043459 A CN201080043459 A CN 201080043459A CN 102639440 B CN102639440 B CN 102639440B
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Prior art keywords
reactor
fluidized bed
trichlorosilane
silicon
silicon particles
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CN201080043459.XA
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English (en)
Chinese (zh)
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CN102639440A (zh
Inventor
A.佩特里克
J.哈恩
C.施密德
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Schmid Silicon Technology GmbH
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Schmid Silicon Technology GmbH
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/30—Particle separators, e.g. dust precipitators, using loose filtering material
    • B01D46/32—Particle separators, e.g. dust precipitators, using loose filtering material the material moving during filtering
    • B01D46/38—Particle separators, e.g. dust precipitators, using loose filtering material the material moving during filtering as fluidised bed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/24—Stationary reactors without moving elements inside
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
    • C01B33/10757—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane
    • C01B33/10763—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane from silicon

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Silicon Compounds (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Catalysts (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
CN201080043459.XA 2009-08-04 2010-08-02 制备三氯甲硅烷的方法和设备 Active CN102639440B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009037155.9 2009-08-04
DE102009037155A DE102009037155B3 (de) 2009-08-04 2009-08-04 Verfahren und Anlage zur Herstellung von Trichlorsilan
PCT/EP2010/061224 WO2011015560A1 (de) 2009-08-04 2010-08-02 Verfahren und anlage zur herstellung von trichlorsilan

Publications (2)

Publication Number Publication Date
CN102639440A CN102639440A (zh) 2012-08-15
CN102639440B true CN102639440B (zh) 2017-05-31

Family

ID=42813912

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080043459.XA Active CN102639440B (zh) 2009-08-04 2010-08-02 制备三氯甲硅烷的方法和设备

Country Status (11)

Country Link
US (1) US20120189526A1 (enExample)
EP (1) EP2462058B1 (enExample)
JP (1) JP5788877B2 (enExample)
KR (1) KR20120041234A (enExample)
CN (1) CN102639440B (enExample)
CA (1) CA2769759A1 (enExample)
DE (1) DE102009037155B3 (enExample)
MY (1) MY162486A (enExample)
RU (1) RU2547269C2 (enExample)
TW (1) TWI507359B (enExample)
WO (1) WO2011015560A1 (enExample)

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DE102010044108A1 (de) * 2010-11-18 2012-05-24 Evonik Degussa Gmbh Herstellung von Chlorsilanen aus kleinstteiligem Reinstsilicium
CN104024159B (zh) 2011-10-18 2015-11-25 东亚合成株式会社 氯代聚硅烷的制造方法及流化床反应装置
DE102012224182A1 (de) 2012-12-21 2014-07-10 Evonik Degussa Gmbh Verfahren zur Aufbereitung feinteiliger Feststoffe bei der Herstellung von Chlorsilanen
DE102013201742A1 (de) 2012-12-21 2014-06-26 Evonik Industries Ag Verfahren zur Aufbereitung von Silizium-haltigem feinkörnigen Material bei der Herstellung von Chlorsilanen
EP2969948A1 (en) * 2013-03-13 2016-01-20 SiTec GmbH Temperature management in chlorination processes and systems related thereto
DE102013212908A1 (de) 2013-07-02 2015-01-08 Wacker Chemie Ag Analyse der Zusammensetzung eines Gases oder eines Gasstromes in einem chemischen Reaktor und ein Verfahren zur Herstellung von Chlorsilanen in einem Wirbelschichtreaktor
EP3053882B1 (en) * 2013-09-30 2018-12-05 LG Chem, Ltd. Method for producing trichlorosilane
WO2015089214A1 (en) * 2013-12-10 2015-06-18 Summit Process Design, Inc. Process for producing trichlorosilane
EP3088358A1 (de) 2015-04-28 2016-11-02 Evonik Degussa GmbH Verfahren zur aufbereitung feinteiliger feststoffe bei der herstellung von chlorsilanen
EP3100978A1 (de) 2015-06-02 2016-12-07 Evonik Degussa GmbH Aufbereitung feinteiliger feststoffe bei der herstellung von chlorsilanen durch agglomerieren und kompaktierung
EP3100979A1 (de) 2015-06-02 2016-12-07 Evonik Degussa GmbH Aufbereitung feinteiliger feststoffe bei der herstellung von chlorsilanen durch sintern bei niedrigen temperaturen
KR101987129B1 (ko) * 2016-09-19 2019-06-10 한화케미칼 주식회사 3염화 실란 합성용 유동층 반응기
CN107433055B (zh) * 2017-08-30 2019-10-08 上海华畅环保设备发展有限公司 沸腾床分离器中沸腾颗粒再生方法及装置
CN109395675B (zh) * 2018-09-14 2021-07-20 四川永祥多晶硅有限公司 一种固定流化工艺
MY206228A (en) * 2019-04-29 2024-12-05 Wacker Chemie Ag Process for producing trichlorosilane with structure-optimised silicon particles
CN116639699B (zh) * 2023-07-12 2024-02-02 江苏中圣高科技产业有限公司 一种制备三氯氢硅的生产工艺及系统

Citations (6)

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CN85107465A (zh) * 1985-10-12 1987-04-15 北京有色冶金设计研究总院 四氯化硅氢化新工艺
CN1157259A (zh) * 1995-12-25 1997-08-20 德山株式会社 三氯硅烷的生产方法
CN1158281A (zh) * 1995-11-14 1997-09-03 株式会社德山 旋风分离器和带该旋风分离器的流化床反应器
US20040047793A1 (en) * 2000-12-14 2004-03-11 Leslaw Mleczko Method for producing trichlorosilane
CN101125654A (zh) * 2007-09-04 2008-02-20 浙江开化合成材料有限公司 一种用于三氯氢硅生产的大型流化床反应器
CN101279735A (zh) * 2008-05-30 2008-10-08 中蓝晨光化工研究院有限公司 三氯氢硅的生产方法及其设备

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US4676967A (en) * 1978-08-23 1987-06-30 Union Carbide Corporation High purity silane and silicon production
DE3024319C2 (de) * 1980-06-27 1983-07-21 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Kontinuierliches Verfahren zur Herstellung von Trichlorsilan
JPS57118017A (en) * 1981-01-16 1982-07-22 Koujiyundo Silicon Kk Manufacture of trichlorosilane
JPS57156318A (en) * 1981-03-16 1982-09-27 Koujiyundo Silicon Kk Production of trichlorosilane
FR2530638A1 (fr) * 1982-07-26 1984-01-27 Rhone Poulenc Spec Chim Procede de preparation d'un melange a base de trichlorosilane utilisable pour la preparation de silicium de haute purete
FR2533906A1 (fr) * 1982-09-30 1984-04-06 Rhone Poulenc Spec Chim Procede et dispositif pour la preparation de silane pur par reaction de chlorosilanes avec l'hydrure de lithium
US4526769A (en) * 1983-07-18 1985-07-02 Motorola, Inc. Trichlorosilane production process
JP2519094B2 (ja) * 1988-11-29 1996-07-31 高純度シリコン株式会社 トリクロロシラン製造用流動反応装置
JP3778631B2 (ja) * 1995-11-14 2006-05-24 株式会社トクヤマ サイクロン及びこれを備えた流動層反応装置
JP3708648B2 (ja) * 1995-12-25 2005-10-19 株式会社トクヤマ トリクロロシランの製造方法
JP3708649B2 (ja) * 1995-12-25 2005-10-19 株式会社トクヤマ 銅シリサイドを有する金属珪素粒子の製造方法
RU2274602C1 (ru) * 2004-08-16 2006-04-20 Федеральное государственное унитарное предприятие "Государственный научно-исследовательский и проектный институт редкометаллической промышленности "Гиредмет" Способ получения трихлорсилана
DE102004045245B4 (de) * 2004-09-17 2007-11-15 Degussa Gmbh Vorrichtung und Verfahren zur Herstellung von Silanen
JP5397580B2 (ja) * 2007-05-25 2014-01-22 三菱マテリアル株式会社 トリクロロシランの製造方法と製造装置および多結晶シリコンの製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85107465A (zh) * 1985-10-12 1987-04-15 北京有色冶金设计研究总院 四氯化硅氢化新工艺
CN1158281A (zh) * 1995-11-14 1997-09-03 株式会社德山 旋风分离器和带该旋风分离器的流化床反应器
CN1087187C (zh) * 1995-11-14 2002-07-10 株式会社德山 旋风分离器和带该旋风分离器的流化床反应器
CN1157259A (zh) * 1995-12-25 1997-08-20 德山株式会社 三氯硅烷的生产方法
US20040047793A1 (en) * 2000-12-14 2004-03-11 Leslaw Mleczko Method for producing trichlorosilane
CN101125654A (zh) * 2007-09-04 2008-02-20 浙江开化合成材料有限公司 一种用于三氯氢硅生产的大型流化床反应器
CN101279735A (zh) * 2008-05-30 2008-10-08 中蓝晨光化工研究院有限公司 三氯氢硅的生产方法及其设备

Also Published As

Publication number Publication date
JP5788877B2 (ja) 2015-10-07
RU2012106750A (ru) 2013-09-10
DE102009037155B3 (de) 2010-11-04
CA2769759A1 (en) 2011-02-10
EP2462058A1 (de) 2012-06-13
KR20120041234A (ko) 2012-04-30
JP2013500928A (ja) 2013-01-10
CN102639440A (zh) 2012-08-15
TWI507359B (zh) 2015-11-11
TW201111281A (en) 2011-04-01
US20120189526A1 (en) 2012-07-26
WO2011015560A1 (de) 2011-02-10
RU2547269C2 (ru) 2015-04-10
MY162486A (en) 2017-06-15
EP2462058B1 (de) 2014-01-01

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