CN102139568B - 液体排出头的制造方法和排出口形成部件的制造方法 - Google Patents

液体排出头的制造方法和排出口形成部件的制造方法 Download PDF

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Publication number
CN102139568B
CN102139568B CN201010556525.5A CN201010556525A CN102139568B CN 102139568 B CN102139568 B CN 102139568B CN 201010556525 A CN201010556525 A CN 201010556525A CN 102139568 B CN102139568 B CN 102139568B
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CN
China
Prior art keywords
resist
outlet
parts
substrate
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201010556525.5A
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English (en)
Chinese (zh)
Other versions
CN102139568A (zh
Inventor
三原弘明
池亀健
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Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN102139568A publication Critical patent/CN102139568A/zh
Application granted granted Critical
Publication of CN102139568B publication Critical patent/CN102139568B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN201010556525.5A 2009-11-26 2010-11-23 液体排出头的制造方法和排出口形成部件的制造方法 Expired - Fee Related CN102139568B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009268758 2009-11-26
JP2009-268758 2009-11-26

Publications (2)

Publication Number Publication Date
CN102139568A CN102139568A (zh) 2011-08-03
CN102139568B true CN102139568B (zh) 2013-07-10

Family

ID=44061220

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201010556525.5A Expired - Fee Related CN102139568B (zh) 2009-11-26 2010-11-23 液体排出头的制造方法和排出口形成部件的制造方法

Country Status (3)

Country Link
US (1) US8499453B2 (enExample)
JP (1) JP5541732B2 (enExample)
CN (1) CN102139568B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5901149B2 (ja) 2011-06-01 2016-04-06 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP6116198B2 (ja) * 2012-11-15 2017-04-19 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6818436B2 (ja) * 2016-05-27 2021-01-20 キヤノン株式会社 記録素子基板、液体吐出ヘッドおよび液体吐出装置

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CN1968815A (zh) * 2004-06-28 2007-05-23 佳能株式会社 排液头制造方法，和使用该方法得到的排液头
CN101541540A (zh) * 2007-02-09 2009-09-23 株式会社理光 液体喷头和图像形成设备

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US4675083A (en) * 1986-04-02 1987-06-23 Hewlett-Packard Company Compound bore nozzle for ink jet printhead and method of manufacture
JPH0349960A (ja) 1989-07-18 1991-03-04 Seiko Epson Corp インクジェットの製造方法
US4972204A (en) * 1989-08-21 1990-11-20 Eastman Kodak Company Laminate, electroformed ink jet orifice plate construction
JPH04338550A (ja) * 1991-05-15 1992-11-25 Brother Ind Ltd オリフィスプレートの製造方法
JPH08132625A (ja) 1994-11-09 1996-05-28 Ricoh Co Ltd ノズルプレートの製造方法及びそのための母型構造
KR100230162B1 (ko) * 1995-04-14 1999-11-15 미따라이 후지오 액체 토출 헤드 및 그 제조 방법
JPH1016236A (ja) 1996-06-28 1998-01-20 Copal Co Ltd インクジェットプリンタヘッド及びその製造方法
JP3257960B2 (ja) * 1996-12-17 2002-02-18 富士通株式会社 インクジェットヘッド
JP3495218B2 (ja) 1997-03-24 2004-02-09 株式会社リコー ノズル形成部材の製造方法
US5847725A (en) * 1997-07-28 1998-12-08 Hewlett-Packard Company Expansion relief for orifice plate of thermal ink jet print head
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RU2151066C1 (ru) * 1998-11-03 2000-06-20 Самсунг Электроникс Ко., Лтд. Узел пластины сопла микроинжектора и способ его изготовления
EP1020291A3 (en) * 1999-01-18 2001-04-11 Canon Kabushiki Kaisha Liquid discharge head and producing method therefor
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JP2003025577A (ja) * 2001-07-11 2003-01-29 Canon Inc 液体吐出ヘッド
JP4532785B2 (ja) * 2001-07-11 2010-08-25 キヤノン株式会社 構造体の製造方法、および液体吐出ヘッドの製造方法
US20030143492A1 (en) * 2002-01-31 2003-07-31 Scitex Digital Printing, Inc. Mandrel with controlled release layer for multi-layer electroformed ink jet orifice plates
JP4068892B2 (ja) * 2002-05-20 2008-03-26 富士フイルム株式会社 画像形成材料
US7086154B2 (en) * 2002-06-26 2006-08-08 Brother Kogyo Kabushiki Kaisha Process of manufacturing nozzle plate for ink-jet print head
JP3862624B2 (ja) * 2002-07-10 2006-12-27 キヤノン株式会社 液体吐出ヘッドおよび、該ヘッドの製造方法
JP4280574B2 (ja) * 2002-07-10 2009-06-17 キヤノン株式会社 液体吐出ヘッドの製造方法
JP4298414B2 (ja) * 2002-07-10 2009-07-22 キヤノン株式会社 液体吐出ヘッドの製造方法
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JP2004268359A (ja) * 2003-03-07 2004-09-30 Hitachi Printing Solutions Ltd インクジェットヘッド及びその製造方法
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JP4424751B2 (ja) * 2003-07-22 2010-03-03 キヤノン株式会社 インクジェットヘッドおよびその製造方法
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JP4776154B2 (ja) * 2003-09-03 2011-09-21 キヤノン株式会社 圧電体素子、インクジェット記録ヘッド、圧電体素子の製造方法
JP4537246B2 (ja) * 2004-05-06 2010-09-01 キヤノン株式会社 インクジェット記録ヘッド用基体の製造方法及び該方法により製造された前記基体を用いた記録ヘッドの製造方法
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JP4667028B2 (ja) * 2004-12-09 2011-04-06 キヤノン株式会社 構造体の形成方法及びインクジェット記録ヘッドの製造方法
JP4614383B2 (ja) * 2004-12-09 2011-01-19 キヤノン株式会社 インクジェット記録ヘッドの製造方法、及びインクジェット記録ヘッド
KR100653088B1 (ko) * 2005-12-06 2006-12-04 삼성전자주식회사 잉크젯 프린트 헤드의 제조방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1968815A (zh) * 2004-06-28 2007-05-23 佳能株式会社 排液头制造方法，和使用该方法得到的排液头
CN101541540A (zh) * 2007-02-09 2009-09-23 株式会社理光 液体喷头和图像形成设备

Also Published As

Publication number Publication date
JP2011131590A (ja) 2011-07-07
JP5541732B2 (ja) 2014-07-09
US20110120627A1 (en) 2011-05-26
US8499453B2 (en) 2013-08-06
CN102139568A (zh) 2011-08-03

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PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
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CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130710

Termination date: 20211123