CN102137735A - 线切割系统 - Google Patents
线切割系统 Download PDFInfo
- Publication number
- CN102137735A CN102137735A CN2009801338807A CN200980133880A CN102137735A CN 102137735 A CN102137735 A CN 102137735A CN 2009801338807 A CN2009801338807 A CN 2009801338807A CN 200980133880 A CN200980133880 A CN 200980133880A CN 102137735 A CN102137735 A CN 102137735A
- Authority
- CN
- China
- Prior art keywords
- line
- wire
- roller
- fixed abrasive
- assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/30—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor to form contours, i.e. curved surfaces, irrespective of the method of working used
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/929—Tool or tool with support
- Y10T83/9292—Wire tool
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mining & Mineral Resources (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US7992808P | 2008-07-11 | 2008-07-11 | |
| US61/079928 | 2008-07-11 | ||
| PCT/US2009/050075 WO2010006148A2 (en) | 2008-07-11 | 2009-07-09 | Wire slicing system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102137735A true CN102137735A (zh) | 2011-07-27 |
Family
ID=41503996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009801338807A Pending CN102137735A (zh) | 2008-07-11 | 2009-07-09 | 线切割系统 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20100006082A1 (enExample) |
| EP (1) | EP2313233A2 (enExample) |
| JP (2) | JP5475772B2 (enExample) |
| CN (1) | CN102137735A (enExample) |
| WO (1) | WO2010006148A2 (enExample) |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102432997A (zh) * | 2011-10-28 | 2012-05-02 | 唐山海泰新能科技有限公司 | 开方机滚筒及其使用方法 |
| CN102777113A (zh) * | 2012-07-17 | 2012-11-14 | 铜陵市琨鹏光电科技有限公司 | 一种宝石切割机上的透视窗 |
| CN102990791A (zh) * | 2011-09-08 | 2013-03-27 | 硅电子股份公司 | 从工件切割晶片的线锯的带固定结合磨粒锯线的单层卷绕 |
| CN103056449A (zh) * | 2011-10-20 | 2013-04-24 | 应用材料瑞士有限责任公司 | 用于测量线锯中的线网弯曲的方法和装置 |
| CN103286399A (zh) * | 2012-02-29 | 2013-09-11 | 小松Ntc株式会社 | 线切割机及线切割机用槽道装置 |
| CN103676770A (zh) * | 2012-09-14 | 2014-03-26 | 应用材料瑞士有限责任公司 | 专用于线锯的线弯曲监控系统 |
| CN104044219A (zh) * | 2013-03-15 | 2014-09-17 | 应用材料瑞士有限责任公司 | 锭料馈送系统 |
| CN104227856A (zh) * | 2013-06-21 | 2014-12-24 | 应用材料瑞士有限责任公司 | 丝锯的丝线监控系统和用于监控丝锯的方法 |
| CN105936096A (zh) * | 2016-06-23 | 2016-09-14 | 无锡上机数控股份有限公司 | 一种金刚线数控收放线装置 |
| CN105946127A (zh) * | 2016-05-23 | 2016-09-21 | 上海日进机床有限公司 | 单段式硅棒截断机及其截断方法 |
| CN108638353A (zh) * | 2017-05-24 | 2018-10-12 | 林晓丽 | 利用金刚线切割的设备 |
| CN110405955A (zh) * | 2019-07-01 | 2019-11-05 | 苏州锦美川自动化科技有限公司 | 用于坚硬材料切割的环形线单线切割机 |
| CN112936624A (zh) * | 2020-12-31 | 2021-06-11 | 六安优云通信技术有限公司 | 一种电源芯片制造用晶圆切片机及制备工艺 |
| TWI812204B (zh) * | 2021-05-14 | 2023-08-11 | 日揚科技股份有限公司 | 可調整加工參數之放電加工裝置及放電加工方法 |
| US11833603B2 (en) | 2021-05-14 | 2023-12-05 | Highlight Tech Corp. | Electrical discharge machining apparatus and electrical discharge machining method with adjustable machining parameters |
| CN119666652A (zh) * | 2024-12-12 | 2025-03-21 | 晶科能源股份有限公司 | 测试装置以及测试方法 |
| WO2025061213A1 (zh) * | 2022-11-19 | 2025-03-27 | 青岛高测科技股份有限公司 | 线切割机及其控制方法 |
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| US9518340B2 (en) * | 2006-04-07 | 2016-12-13 | Sixpoint Materials, Inc. | Method of growing group III nitride crystals |
| DE102006058823B4 (de) * | 2006-12-13 | 2017-06-08 | Siltronic Ag | Verfahren zum Abtrennen einer Vielzahl von Scheiben von einem Werkstück |
| US7942142B2 (en) * | 2007-10-26 | 2011-05-17 | Gobright Iv Francis M | Battery powered concrete saw |
| JP5151851B2 (ja) * | 2008-09-19 | 2013-02-27 | 信越半導体株式会社 | バンドソー切断装置及びインゴットの切断方法 |
| JP5217918B2 (ja) * | 2008-11-07 | 2013-06-19 | 信越半導体株式会社 | インゴット切断装置及び切断方法 |
| JP5678653B2 (ja) | 2010-12-28 | 2015-03-04 | 三菱化学株式会社 | 六方晶系半導体板状結晶の製造方法 |
| CN102225594A (zh) * | 2011-05-23 | 2011-10-26 | 运城恒磁科技有限公司 | 一种切割曲面的多线切割机 |
| CN102229215A (zh) * | 2011-05-23 | 2011-11-02 | 运城恒磁科技有限公司 | 一种安装于多线切割机的y轴方向滑动平台 |
| CN102225527B (zh) * | 2011-05-23 | 2012-11-14 | 中磁科技股份有限公司 | 一种切割曲面的多线切割机及其控制方法 |
| US8357217B2 (en) * | 2011-05-30 | 2013-01-22 | Chung-Shan Institute Of Science And Technology | Method and apparatus for making a fixed abrasive wire |
| WO2012165108A1 (ja) * | 2011-06-02 | 2012-12-06 | 住友電気工業株式会社 | 炭化珪素基板の製造方法 |
| JP2013038116A (ja) * | 2011-08-04 | 2013-02-21 | Sumitomo Electric Ind Ltd | Iii族窒化物結晶基板の製造方法 |
| US20130144421A1 (en) * | 2011-12-01 | 2013-06-06 | Memc Electronic Materials, Spa | Systems For Controlling Temperature Of Bearings In A Wire Saw |
| JP5199447B1 (ja) * | 2011-12-09 | 2013-05-15 | ファナック株式会社 | 回転軸を備えたワイヤ放電加工機 |
| EP2633936A1 (en) | 2012-02-28 | 2013-09-04 | Meyer Burger AG | Holding device |
| EP2633937A1 (en) | 2012-02-28 | 2013-09-04 | Meyer Burger AG | Holding device |
| US9597763B2 (en) | 2012-05-11 | 2017-03-21 | The Eraser Company, Inc. | Modular wire and/or tubular component processing apparatus |
| US8881629B2 (en) * | 2012-06-12 | 2014-11-11 | Graham Packaging Company, L.P. | Continuous motion de-flash trimming machine |
| CN102794827A (zh) * | 2012-07-09 | 2012-11-28 | 浙江上城科技有限公司 | 一种蓝宝石弧片单线切割方法及设备 |
| CN102773930A (zh) * | 2012-07-17 | 2012-11-14 | 铜陵市琨鹏光电科技有限公司 | 水晶切割机 |
| KR101895035B1 (ko) | 2012-08-28 | 2018-09-04 | 식스포인트 머터리얼즈 인코퍼레이티드 | 3족 질화물 웨이퍼 및 그의 제조 방법 |
| EP2900851B1 (en) * | 2012-09-25 | 2019-01-09 | SixPoint Materials, Inc. | Method of growing group iii nitride crystals |
| KR101812736B1 (ko) | 2012-09-26 | 2017-12-27 | 식스포인트 머터리얼즈 인코퍼레이티드 | Iii 족 질화물 웨이퍼 및 제작 방법과 시험 방법 |
| CN106862663B (zh) * | 2012-12-04 | 2019-01-04 | 梅耶博格(瑞士)公司 | 线材管理系统 |
| US20140157964A1 (en) * | 2012-12-12 | 2014-06-12 | Oceaneering International, Inc. | Underwater Wire Saw And Method Of Use |
| TWI510343B (zh) * | 2013-05-30 | 2015-12-01 | G Tech Optoelectronics Corp | 鑽石線切割機及該鑽石線切割機的切割方法 |
| CN103395130B (zh) * | 2013-07-25 | 2015-08-19 | 曹爱苗 | 一种完全平面式布线的金刚石线切割机 |
| CN103434032B (zh) * | 2013-08-12 | 2016-01-20 | 浙江精功科技股份有限公司 | 一种切片机钢线弧高自动控制系统 |
| US9341549B2 (en) * | 2013-12-30 | 2016-05-17 | Bp Corporation North America Inc. | Sample preparation apparatus for direct numerical simulation of rock properties |
| JP2015147293A (ja) * | 2014-01-09 | 2015-08-20 | 株式会社コベルコ科研 | 被加工物の切断方法 |
| EP3015237A1 (en) * | 2014-10-29 | 2016-05-04 | Applied Materials Switzerland Sàrl | Wire monitoring system |
| EP3015238A1 (en) * | 2014-10-29 | 2016-05-04 | Applied Materials Switzerland Sàrl | Wire monitoring system |
| CN104493982A (zh) * | 2014-12-30 | 2015-04-08 | 南京铭品机械制造有限公司 | 一种数控丝锯加工机 |
| CN104850054A (zh) * | 2015-05-21 | 2015-08-19 | 泉州华大超硬工具科技有限公司 | 一种绳锯机远程监控控制系统 |
| JP6778509B2 (ja) * | 2016-05-18 | 2020-11-04 | 株式会社共立合金製作所 | ワイヤーソー装置及びこの装置を用いた粉末成形体の切り出し方法 |
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| BR112021019580A2 (pt) | 2019-03-29 | 2021-12-14 | Saint Gobain Abrasifs Sa | Desempenho de soluções de retificação |
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2009
- 2009-07-09 US US12/499,966 patent/US20100006082A1/en not_active Abandoned
- 2009-07-09 JP JP2011517614A patent/JP5475772B2/ja not_active Expired - Fee Related
- 2009-07-09 CN CN2009801338807A patent/CN102137735A/zh active Pending
- 2009-07-09 EP EP20090795170 patent/EP2313233A2/en not_active Withdrawn
- 2009-07-09 WO PCT/US2009/050075 patent/WO2010006148A2/en not_active Ceased
-
2014
- 2014-02-06 JP JP2014021528A patent/JP2014121784A/ja not_active Ceased
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| CN102990791A (zh) * | 2011-09-08 | 2013-03-27 | 硅电子股份公司 | 从工件切割晶片的线锯的带固定结合磨粒锯线的单层卷绕 |
| CN103056449A (zh) * | 2011-10-20 | 2013-04-24 | 应用材料瑞士有限责任公司 | 用于测量线锯中的线网弯曲的方法和装置 |
| CN102432997A (zh) * | 2011-10-28 | 2012-05-02 | 唐山海泰新能科技有限公司 | 开方机滚筒及其使用方法 |
| CN103286399A (zh) * | 2012-02-29 | 2013-09-11 | 小松Ntc株式会社 | 线切割机及线切割机用槽道装置 |
| CN103286399B (zh) * | 2012-02-29 | 2017-03-29 | 小松Ntc株式会社 | 线切割机及线切割机用槽道装置 |
| CN102777113A (zh) * | 2012-07-17 | 2012-11-14 | 铜陵市琨鹏光电科技有限公司 | 一种宝石切割机上的透视窗 |
| CN103676770A (zh) * | 2012-09-14 | 2014-03-26 | 应用材料瑞士有限责任公司 | 专用于线锯的线弯曲监控系统 |
| CN104044219B (zh) * | 2013-03-15 | 2018-05-01 | 东洋先进机床有限公司 | 锭料馈送系统 |
| CN104044219A (zh) * | 2013-03-15 | 2014-09-17 | 应用材料瑞士有限责任公司 | 锭料馈送系统 |
| CN104227856A (zh) * | 2013-06-21 | 2014-12-24 | 应用材料瑞士有限责任公司 | 丝锯的丝线监控系统和用于监控丝锯的方法 |
| CN105946127A (zh) * | 2016-05-23 | 2016-09-21 | 上海日进机床有限公司 | 单段式硅棒截断机及其截断方法 |
| CN105936096A (zh) * | 2016-06-23 | 2016-09-14 | 无锡上机数控股份有限公司 | 一种金刚线数控收放线装置 |
| CN108638353A (zh) * | 2017-05-24 | 2018-10-12 | 林晓丽 | 利用金刚线切割的设备 |
| CN110405955A (zh) * | 2019-07-01 | 2019-11-05 | 苏州锦美川自动化科技有限公司 | 用于坚硬材料切割的环形线单线切割机 |
| CN112936624A (zh) * | 2020-12-31 | 2021-06-11 | 六安优云通信技术有限公司 | 一种电源芯片制造用晶圆切片机及制备工艺 |
| TWI812204B (zh) * | 2021-05-14 | 2023-08-11 | 日揚科技股份有限公司 | 可調整加工參數之放電加工裝置及放電加工方法 |
| US11833603B2 (en) | 2021-05-14 | 2023-12-05 | Highlight Tech Corp. | Electrical discharge machining apparatus and electrical discharge machining method with adjustable machining parameters |
| WO2025061213A1 (zh) * | 2022-11-19 | 2025-03-27 | 青岛高测科技股份有限公司 | 线切割机及其控制方法 |
| CN119666652A (zh) * | 2024-12-12 | 2025-03-21 | 晶科能源股份有限公司 | 测试装置以及测试方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20100006082A1 (en) | 2010-01-14 |
| EP2313233A2 (en) | 2011-04-27 |
| WO2010006148A2 (en) | 2010-01-14 |
| JP2011527644A (ja) | 2011-11-04 |
| JP2014121784A (ja) | 2014-07-03 |
| WO2010006148A3 (en) | 2010-05-20 |
| JP5475772B2 (ja) | 2014-04-16 |
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