JP5475772B2 - ワイヤスライシングシステム - Google Patents
ワイヤスライシングシステム Download PDFInfo
- Publication number
- JP5475772B2 JP5475772B2 JP2011517614A JP2011517614A JP5475772B2 JP 5475772 B2 JP5475772 B2 JP 5475772B2 JP 2011517614 A JP2011517614 A JP 2011517614A JP 2011517614 A JP2011517614 A JP 2011517614A JP 5475772 B2 JP5475772 B2 JP 5475772B2
- Authority
- JP
- Japan
- Prior art keywords
- wire
- slicing
- roller
- assembly
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- 238000012544 monitoring process Methods 0.000 claims description 7
- 238000005498 polishing Methods 0.000 claims description 7
- 239000003082 abrasive agent Substances 0.000 claims description 5
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- 229910002601 GaN Inorganic materials 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 2
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 2
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- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910004283 SiO 4 Inorganic materials 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
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- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
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- 230000003287 optical effect Effects 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
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- 238000013082 photovoltaic technology Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
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- 239000002699 waste material Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/30—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor to form contours, i.e. curved surfaces, irrespective of the method of working used
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/929—Tool or tool with support
- Y10T83/9292—Wire tool
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mining & Mineral Resources (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US7992808P | 2008-07-11 | 2008-07-11 | |
| US61/079,928 | 2008-07-11 | ||
| PCT/US2009/050075 WO2010006148A2 (en) | 2008-07-11 | 2009-07-09 | Wire slicing system |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014021528A Division JP2014121784A (ja) | 2008-07-11 | 2014-02-06 | ワークピースのワイヤスライシング方法、及び当該方法で製造されたワークピース |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011527644A JP2011527644A (ja) | 2011-11-04 |
| JP2011527644A5 JP2011527644A5 (enExample) | 2013-07-25 |
| JP5475772B2 true JP5475772B2 (ja) | 2014-04-16 |
Family
ID=41503996
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011517614A Expired - Fee Related JP5475772B2 (ja) | 2008-07-11 | 2009-07-09 | ワイヤスライシングシステム |
| JP2014021528A Ceased JP2014121784A (ja) | 2008-07-11 | 2014-02-06 | ワークピースのワイヤスライシング方法、及び当該方法で製造されたワークピース |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014021528A Ceased JP2014121784A (ja) | 2008-07-11 | 2014-02-06 | ワークピースのワイヤスライシング方法、及び当該方法で製造されたワークピース |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20100006082A1 (enExample) |
| EP (1) | EP2313233A2 (enExample) |
| JP (2) | JP5475772B2 (enExample) |
| CN (1) | CN102137735A (enExample) |
| WO (1) | WO2010006148A2 (enExample) |
Families Citing this family (74)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9518340B2 (en) * | 2006-04-07 | 2016-12-13 | Sixpoint Materials, Inc. | Method of growing group III nitride crystals |
| DE102006058823B4 (de) * | 2006-12-13 | 2017-06-08 | Siltronic Ag | Verfahren zum Abtrennen einer Vielzahl von Scheiben von einem Werkstück |
| US7942142B2 (en) * | 2007-10-26 | 2011-05-17 | Gobright Iv Francis M | Battery powered concrete saw |
| JP5151851B2 (ja) * | 2008-09-19 | 2013-02-27 | 信越半導体株式会社 | バンドソー切断装置及びインゴットの切断方法 |
| JP5217918B2 (ja) * | 2008-11-07 | 2013-06-19 | 信越半導体株式会社 | インゴット切断装置及び切断方法 |
| JP5678653B2 (ja) | 2010-12-28 | 2015-03-04 | 三菱化学株式会社 | 六方晶系半導体板状結晶の製造方法 |
| CN102225594A (zh) * | 2011-05-23 | 2011-10-26 | 运城恒磁科技有限公司 | 一种切割曲面的多线切割机 |
| CN102229215A (zh) * | 2011-05-23 | 2011-11-02 | 运城恒磁科技有限公司 | 一种安装于多线切割机的y轴方向滑动平台 |
| CN102225527B (zh) * | 2011-05-23 | 2012-11-14 | 中磁科技股份有限公司 | 一种切割曲面的多线切割机及其控制方法 |
| US8357217B2 (en) * | 2011-05-30 | 2013-01-22 | Chung-Shan Institute Of Science And Technology | Method and apparatus for making a fixed abrasive wire |
| WO2012165108A1 (ja) * | 2011-06-02 | 2012-12-06 | 住友電気工業株式会社 | 炭化珪素基板の製造方法 |
| JP2013038116A (ja) * | 2011-08-04 | 2013-02-21 | Sumitomo Electric Ind Ltd | Iii族窒化物結晶基板の製造方法 |
| DE102011082366B3 (de) * | 2011-09-08 | 2013-02-28 | Siltronic Ag | Einlagiges Wickeln von Sägedraht mit fest gebundenem Schneidkorn für Drahtsägen zum Abtrennen von Scheiben von einem Werkstück |
| EP2583778A1 (en) * | 2011-10-20 | 2013-04-24 | Applied Materials Switzerland Sàrl | Method and apparatus for measuring wire-web bow in a wire saw |
| CN102432997A (zh) * | 2011-10-28 | 2012-05-02 | 唐山海泰新能科技有限公司 | 开方机滚筒及其使用方法 |
| US20130144421A1 (en) * | 2011-12-01 | 2013-06-06 | Memc Electronic Materials, Spa | Systems For Controlling Temperature Of Bearings In A Wire Saw |
| JP5199447B1 (ja) * | 2011-12-09 | 2013-05-15 | ファナック株式会社 | 回転軸を備えたワイヤ放電加工機 |
| EP2633936A1 (en) | 2012-02-28 | 2013-09-04 | Meyer Burger AG | Holding device |
| EP2633937A1 (en) | 2012-02-28 | 2013-09-04 | Meyer Burger AG | Holding device |
| JP5881080B2 (ja) * | 2012-02-29 | 2016-03-09 | 株式会社小松製作所 | ワイヤソーおよびワイヤソー用ダクト装置 |
| US9597763B2 (en) | 2012-05-11 | 2017-03-21 | The Eraser Company, Inc. | Modular wire and/or tubular component processing apparatus |
| US8881629B2 (en) * | 2012-06-12 | 2014-11-11 | Graham Packaging Company, L.P. | Continuous motion de-flash trimming machine |
| CN102794827A (zh) * | 2012-07-09 | 2012-11-28 | 浙江上城科技有限公司 | 一种蓝宝石弧片单线切割方法及设备 |
| CN102773930A (zh) * | 2012-07-17 | 2012-11-14 | 铜陵市琨鹏光电科技有限公司 | 水晶切割机 |
| CN102777113A (zh) * | 2012-07-17 | 2012-11-14 | 铜陵市琨鹏光电科技有限公司 | 一种宝石切割机上的透视窗 |
| KR101895035B1 (ko) | 2012-08-28 | 2018-09-04 | 식스포인트 머터리얼즈 인코퍼레이티드 | 3족 질화물 웨이퍼 및 그의 제조 방법 |
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| US20140157964A1 (en) * | 2012-12-12 | 2014-06-12 | Oceaneering International, Inc. | Underwater Wire Saw And Method Of Use |
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| TWI510343B (zh) * | 2013-05-30 | 2015-12-01 | G Tech Optoelectronics Corp | 鑽石線切割機及該鑽石線切割機的切割方法 |
| EP2815834A1 (en) * | 2013-06-21 | 2014-12-24 | Applied Materials Switzerland Sàrl | Wire monitoring system for a wire saw and method for monitoring a wire saw |
| CN103395130B (zh) * | 2013-07-25 | 2015-08-19 | 曹爱苗 | 一种完全平面式布线的金刚石线切割机 |
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- 2009-07-09 JP JP2011517614A patent/JP5475772B2/ja not_active Expired - Fee Related
- 2009-07-09 CN CN2009801338807A patent/CN102137735A/zh active Pending
- 2009-07-09 EP EP20090795170 patent/EP2313233A2/en not_active Withdrawn
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Also Published As
| Publication number | Publication date |
|---|---|
| US20100006082A1 (en) | 2010-01-14 |
| EP2313233A2 (en) | 2011-04-27 |
| WO2010006148A2 (en) | 2010-01-14 |
| JP2011527644A (ja) | 2011-11-04 |
| JP2014121784A (ja) | 2014-07-03 |
| WO2010006148A3 (en) | 2010-05-20 |
| CN102137735A (zh) | 2011-07-27 |
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