CN101512748B - 基板运送装置以及基板运送方法 - Google Patents

基板运送装置以及基板运送方法 Download PDF

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Publication number
CN101512748B
CN101512748B CN200780033198.1A CN200780033198A CN101512748B CN 101512748 B CN101512748 B CN 101512748B CN 200780033198 A CN200780033198 A CN 200780033198A CN 101512748 B CN101512748 B CN 101512748B
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CN
China
Prior art keywords
conveyer
substrate
branch
glass plate
aforesaid substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200780033198.1A
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English (en)
Chinese (zh)
Other versions
CN101512748A (zh
Inventor
平田贤辅
水野智夫
村山晋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
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IHI Corp
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Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Publication of CN101512748A publication Critical patent/CN101512748A/zh
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Publication of CN101512748B publication Critical patent/CN101512748B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mechanical Engineering (AREA)
  • Relays Between Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
CN200780033198.1A 2006-09-11 2007-02-15 基板运送装置以及基板运送方法 Expired - Fee Related CN101512748B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP245829/2006 2006-09-11
JP2006245829A JP4957133B2 (ja) 2006-09-11 2006-09-11 基板搬送装置及び基板搬送方法
PCT/JP2007/052669 WO2008032455A1 (fr) 2006-09-11 2007-02-15 Appareil de transfert de substrats et procédé de transfert de substrats

Publications (2)

Publication Number Publication Date
CN101512748A CN101512748A (zh) 2009-08-19
CN101512748B true CN101512748B (zh) 2013-02-06

Family

ID=39183524

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200780033198.1A Expired - Fee Related CN101512748B (zh) 2006-09-11 2007-02-15 基板运送装置以及基板运送方法

Country Status (5)

Country Link
JP (1) JP4957133B2 (ko)
KR (1) KR101286283B1 (ko)
CN (1) CN101512748B (ko)
TW (1) TWI393205B (ko)
WO (1) WO2008032455A1 (ko)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5167999B2 (ja) * 2008-07-16 2013-03-21 株式会社Ｉｈｉ 基板移送システム及び基板移送方法
CN101870374B (zh) * 2010-06-24 2011-11-02 江阴纳尔捷机器人有限公司 物料分流机构
JP5842484B2 (ja) * 2011-09-07 2016-01-13 日本電気硝子株式会社 板ガラスの位置決め装置及びその位置決め方法
KR101700019B1 (ko) * 2012-04-06 2017-02-13 가부시키가이샤 브이 테크놀로지 노광 장치 및 노광 방법
JP6011311B2 (ja) 2012-12-18 2016-10-19 日本電気硝子株式会社 ワーク搬送装置およびワーク搬送方法
CN104822613A (zh) * 2013-02-26 2015-08-05 株式会社Ihi 搬运装置
CN104860046A (zh) * 2015-05-18 2015-08-26 山东中科凤祥生物工程有限公司 产品加工设备、汇流输送设备
KR101937687B1 (ko) * 2017-02-27 2019-04-09 크린팩토메이션 주식회사 반송 경로 분산 제어형 컨베이어 장치 및 그에 사용되는 반송 경로 분산 제어 방법
EP3514825B1 (en) * 2018-01-22 2023-11-29 Meyer Burger GmbH Wafer sorting
KR101991841B1 (ko) * 2018-12-05 2019-06-21 크린팩토메이션 주식회사 반송 경로 분산 제어형 컨베이어 장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05100199A (ja) * 1991-10-08 1993-04-23 Tokyo Electron Yamanashi Kk 搬送アーム
JPH0829304B2 (ja) * 1988-07-29 1996-03-27 株式会社マキ製作所 青果物選別方法
JP3650495B2 (ja) * 1995-12-12 2005-05-18 東京エレクトロン株式会社 半導体処理装置、その基板交換機構及び基板交換方法
JPH10275766A (ja) * 1997-03-28 1998-10-13 Dainippon Screen Mfg Co Ltd 基板処理装置
JP4161273B2 (ja) * 2003-12-16 2008-10-08 株式会社ダイフク 搬送装置
TWI295659B (en) * 2003-08-29 2008-04-11 Daifuku Kk Transporting apparatus
JP2006176255A (ja) * 2004-12-21 2006-07-06 Murata Mach Ltd 搬送システム

Also Published As

Publication number Publication date
KR101286283B1 (ko) 2013-07-15
TWI393205B (zh) 2013-04-11
JP2008066661A (ja) 2008-03-21
KR20090048461A (ko) 2009-05-13
CN101512748A (zh) 2009-08-19
WO2008032455A1 (fr) 2008-03-20
TW200814224A (en) 2008-03-16
JP4957133B2 (ja) 2012-06-20

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Granted publication date: 20130206

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