TWI393205B - 基板搬送裝置及基板搬送方法 - Google Patents
基板搬送裝置及基板搬送方法 Download PDFInfo
- Publication number
- TWI393205B TWI393205B TW96105441A TW96105441A TWI393205B TW I393205 B TWI393205 B TW I393205B TW 96105441 A TW96105441 A TW 96105441A TW 96105441 A TW96105441 A TW 96105441A TW I393205 B TWI393205 B TW I393205B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- conveyor belt
- main
- belt
- main conveyor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Mechanical Engineering (AREA)
- Relays Between Conveyors (AREA)
- Intermediate Stations On Conveyors (AREA)
- Attitude Control For Articles On Conveyors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006245829A JP4957133B2 (ja) | 2006-09-11 | 2006-09-11 | 基板搬送装置及び基板搬送方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200814224A TW200814224A (en) | 2008-03-16 |
TWI393205B true TWI393205B (zh) | 2013-04-11 |
Family
ID=39183524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW96105441A TWI393205B (zh) | 2006-09-11 | 2007-02-14 | 基板搬送裝置及基板搬送方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4957133B2 (ko) |
KR (1) | KR101286283B1 (ko) |
CN (1) | CN101512748B (ko) |
TW (1) | TWI393205B (ko) |
WO (1) | WO2008032455A1 (ko) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5167999B2 (ja) * | 2008-07-16 | 2013-03-21 | 株式会社Ihi | 基板移送システム及び基板移送方法 |
CN101870374B (zh) * | 2010-06-24 | 2011-11-02 | 江阴纳尔捷机器人有限公司 | 物料分流机构 |
JP5842484B2 (ja) * | 2011-09-07 | 2016-01-13 | 日本電気硝子株式会社 | 板ガラスの位置決め装置及びその位置決め方法 |
KR101700019B1 (ko) * | 2012-04-06 | 2017-02-13 | 가부시키가이샤 브이 테크놀로지 | 노광 장치 및 노광 방법 |
JP6011311B2 (ja) | 2012-12-18 | 2016-10-19 | 日本電気硝子株式会社 | ワーク搬送装置およびワーク搬送方法 |
WO2014132339A1 (ja) * | 2013-02-26 | 2014-09-04 | 株式会社Ihi | 搬送装置 |
CN104860046A (zh) * | 2015-05-18 | 2015-08-26 | 山东中科凤祥生物工程有限公司 | 产品加工设备、汇流输送设备 |
KR101937687B1 (ko) * | 2017-02-27 | 2019-04-09 | 크린팩토메이션 주식회사 | 반송 경로 분산 제어형 컨베이어 장치 및 그에 사용되는 반송 경로 분산 제어 방법 |
EP3514825B1 (en) * | 2018-01-22 | 2023-11-29 | Meyer Burger GmbH | Wafer sorting |
KR101991841B1 (ko) * | 2018-12-05 | 2019-06-21 | 크린팩토메이션 주식회사 | 반송 경로 분산 제어형 컨베이어 장치 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05100199A (ja) * | 1991-10-08 | 1993-04-23 | Tokyo Electron Yamanashi Kk | 搬送アーム |
JPH09223727A (ja) * | 1995-12-12 | 1997-08-26 | Tokyo Electron Ltd | 半導体処理装置、その基板交換機構及び基板交換方法 |
JPH10275766A (ja) * | 1997-03-28 | 1998-10-13 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
US20050067766A1 (en) * | 2003-08-29 | 2005-03-31 | Daifuku Co., Ltd. | Transporting apparatus |
JP2005178919A (ja) * | 2003-12-16 | 2005-07-07 | Daifuku Co Ltd | 搬送装置 |
JP2006176255A (ja) * | 2004-12-21 | 2006-07-06 | Murata Mach Ltd | 搬送システム |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0829304B2 (ja) * | 1988-07-29 | 1996-03-27 | 株式会社マキ製作所 | 青果物選別方法 |
-
2006
- 2006-09-11 JP JP2006245829A patent/JP4957133B2/ja not_active Expired - Fee Related
-
2007
- 2007-02-14 TW TW96105441A patent/TWI393205B/zh active
- 2007-02-15 KR KR1020097003167A patent/KR101286283B1/ko not_active IP Right Cessation
- 2007-02-15 WO PCT/JP2007/052669 patent/WO2008032455A1/ja active Application Filing
- 2007-02-15 CN CN200780033198.1A patent/CN101512748B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05100199A (ja) * | 1991-10-08 | 1993-04-23 | Tokyo Electron Yamanashi Kk | 搬送アーム |
JPH09223727A (ja) * | 1995-12-12 | 1997-08-26 | Tokyo Electron Ltd | 半導体処理装置、その基板交換機構及び基板交換方法 |
JPH10275766A (ja) * | 1997-03-28 | 1998-10-13 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
US20050067766A1 (en) * | 2003-08-29 | 2005-03-31 | Daifuku Co., Ltd. | Transporting apparatus |
JP2005178919A (ja) * | 2003-12-16 | 2005-07-07 | Daifuku Co Ltd | 搬送装置 |
JP2006176255A (ja) * | 2004-12-21 | 2006-07-06 | Murata Mach Ltd | 搬送システム |
Also Published As
Publication number | Publication date |
---|---|
KR20090048461A (ko) | 2009-05-13 |
JP2008066661A (ja) | 2008-03-21 |
WO2008032455A1 (fr) | 2008-03-20 |
KR101286283B1 (ko) | 2013-07-15 |
CN101512748B (zh) | 2013-02-06 |
JP4957133B2 (ja) | 2012-06-20 |
CN101512748A (zh) | 2009-08-19 |
TW200814224A (en) | 2008-03-16 |
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