CN101414586B - 功率半导体器件的封装件和封装方法 - Google Patents

功率半导体器件的封装件和封装方法 Download PDF

Info

Publication number
CN101414586B
CN101414586B CN2008101711058A CN200810171105A CN101414586B CN 101414586 B CN101414586 B CN 101414586B CN 2008101711058 A CN2008101711058 A CN 2008101711058A CN 200810171105 A CN200810171105 A CN 200810171105A CN 101414586 B CN101414586 B CN 101414586B
Authority
CN
China
Prior art keywords
die attach
tie
attach pad
packaging part
closed planar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2008101711058A
Other languages
English (en)
Chinese (zh)
Other versions
CN101414586A (zh
Inventor
巴鲁·巴尔克里什南
布莱德·L·霍索恩
斯特凡·鲍勒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Power Integrations Inc
Original Assignee
Power Integrations Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Power Integrations Inc filed Critical Power Integrations Inc
Publication of CN101414586A publication Critical patent/CN101414586A/zh
Application granted granted Critical
Publication of CN101414586B publication Critical patent/CN101414586B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49541Geometry of the lead-frame
    • H01L23/49562Geometry of the lead-frame for individual devices of subclass H10D
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49541Geometry of the lead-frame
    • H01L23/49548Cross section geometry
    • H01L23/49551Cross section geometry characterised by bent parts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49537Plurality of lead frames mounted in one device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49575Assemblies of semiconductor devices on lead frames
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1306Field-effect transistor [FET]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1306Field-effect transistor [FET]
    • H01L2924/13091Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • H01L2924/1815Shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)
CN2008101711058A 2007-10-15 2008-10-15 功率半导体器件的封装件和封装方法 Active CN101414586B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/974,553 2007-10-15
US11/974,553 US7875962B2 (en) 2007-10-15 2007-10-15 Package for a power semiconductor device

Publications (2)

Publication Number Publication Date
CN101414586A CN101414586A (zh) 2009-04-22
CN101414586B true CN101414586B (zh) 2013-09-18

Family

ID=39877762

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008101711058A Active CN101414586B (zh) 2007-10-15 2008-10-15 功率半导体器件的封装件和封装方法

Country Status (4)

Country Link
US (2) US7875962B2 (enExample)
EP (2) EP2426713A3 (enExample)
JP (1) JP2009135444A (enExample)
CN (1) CN101414586B (enExample)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6635544B2 (en) 2001-09-07 2003-10-21 Power Intergrations, Inc. Method of fabricating a high-voltage transistor with a multi-layered extended drain structure
US7786533B2 (en) * 2001-09-07 2010-08-31 Power Integrations, Inc. High-voltage vertical transistor with edge termination structure
US8093621B2 (en) 2008-12-23 2012-01-10 Power Integrations, Inc. VTS insulated gate bipolar transistor
US7595523B2 (en) * 2007-02-16 2009-09-29 Power Integrations, Inc. Gate pullback at ends of high-voltage vertical transistor structure
US8653583B2 (en) * 2007-02-16 2014-02-18 Power Integrations, Inc. Sensing FET integrated with a high-voltage transistor
US7859037B2 (en) 2007-02-16 2010-12-28 Power Integrations, Inc. Checkerboarded high-voltage vertical transistor layout
US7557406B2 (en) * 2007-02-16 2009-07-07 Power Integrations, Inc. Segmented pillar layout for a high-voltage vertical transistor
US7875962B2 (en) * 2007-10-15 2011-01-25 Power Integrations, Inc. Package for a power semiconductor device
US7964912B2 (en) 2008-09-18 2011-06-21 Power Integrations, Inc. High-voltage vertical transistor with a varied width silicon pillar
US7871882B2 (en) 2008-12-20 2011-01-18 Power Integrations, Inc. Method of fabricating a deep trench insulated gate bipolar transistor
US20100155831A1 (en) * 2008-12-20 2010-06-24 Power Integrations, Inc. Deep trench insulated gate bipolar transistor
US8207455B2 (en) * 2009-07-31 2012-06-26 Power Integrations, Inc. Power semiconductor package with bottom surface protrusions
TWI557183B (zh) * 2015-12-16 2016-11-11 財團法人工業技術研究院 矽氧烷組成物、以及包含其之光電裝置
US8648450B1 (en) * 2011-01-27 2014-02-11 Amkor Technology, Inc. Semiconductor device including leadframe with a combination of leads and lands
US8900503B2 (en) 2011-09-28 2014-12-02 International Business Machines Corporation Method of forming an overmolded dual in-line memory module cooling structure
US8653600B2 (en) 2012-06-01 2014-02-18 Power Integrations, Inc. High-voltage monolithic schottky device structure
US10325988B2 (en) 2013-12-13 2019-06-18 Power Integrations, Inc. Vertical transistor device structure with cylindrically-shaped field plates
US9543396B2 (en) 2013-12-13 2017-01-10 Power Integrations, Inc. Vertical transistor device structure with cylindrically-shaped regions
CN104779234B (zh) * 2014-01-10 2018-03-20 万国半导体股份有限公司 抑制爬电现象的半导体器件及制备方法
JP6369039B2 (ja) * 2014-02-05 2018-08-08 日本電気株式会社 接続部材、電子部品及び情報表示方法
KR101604120B1 (ko) 2014-05-12 2016-03-16 앰코 테크놀로지 코리아 주식회사 Ets를 이용한 반도체 패키지 구조 및 방법
CN105990266B (zh) * 2015-02-26 2018-12-07 台达电子工业股份有限公司 功率转换电路的封装模块及其制造方法
CN105990265B (zh) * 2015-02-26 2019-04-05 台达电子工业股份有限公司 功率转换电路的封装模块及其制造方法
KR102326069B1 (ko) * 2015-07-29 2021-11-12 엘지디스플레이 주식회사 유기발광 다이오드 표시장치
WO2017094370A1 (ja) 2015-12-04 2017-06-08 ローム株式会社 パワーモジュール装置、冷却構造体、および電気自動車またはハイブリッドカー
US10483178B2 (en) * 2017-01-03 2019-11-19 Infineon Technologies Ag Semiconductor device including an encapsulation material defining notches
CN107275295A (zh) * 2017-06-05 2017-10-20 深圳市力生美半导体股份有限公司 一种功率集成器件、封装方法及电源装置
US10510636B2 (en) * 2017-07-14 2019-12-17 Shindengen Electric Manufacturing Co., Ltd. Electronic module
JP7024269B2 (ja) * 2017-09-12 2022-02-24 富士電機株式会社 半導体装置、半導体装置の積層体、及び、半導体装置の積層体の搬送方法
JP2019212833A (ja) * 2018-06-07 2019-12-12 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
US10763193B2 (en) * 2018-10-30 2020-09-01 Hamilton Sundstrand Corporation Power control modules
CN111370382B (zh) 2018-12-25 2024-11-12 恩智浦美国有限公司 用于具有改进的爬电距离的半导体管芯封装的混合引线框架
JP7299751B2 (ja) * 2019-05-14 2023-06-28 ローム株式会社 半導体装置
US11121094B2 (en) * 2019-06-20 2021-09-14 Amkor Technology Singapore Holding Pte. Ltd. Semiconductor devices with shield
US11289406B2 (en) 2019-09-18 2022-03-29 Allegro Microsystems, Llc Signal isolator having enhanced creepage characteristics
US12080634B2 (en) 2019-11-27 2024-09-03 The Noco Company Semiconductor device, printed circuit board (PCB), and method of interfacing control pin (gate pin) of a power semiconductor device (MOSFET) to a printed circuit board (PCB)
GB2605306B (en) * 2019-11-27 2025-01-08 Noco Co Semiconductor device, printed circuit board (PCB), and method of interfacing control pin (gate pin) of a power semiconductor device (MOSFET) to a printed
US11211320B2 (en) * 2019-12-31 2021-12-28 Texas Instruments Incorporated Package with shifted lead neck
US11800813B2 (en) 2020-05-29 2023-10-24 Allegro Microsystems, Llc High isolation current sensor
DE102021124660A1 (de) 2020-10-12 2022-04-14 Elmos Semiconductor Se Gehäuse mit einem Schaltungsträger für eine mikroelektronische Schaltung oder eine Mikrotechnische Vorrichtung mit Down-Bonds und einer vergrößerten maximalen Chip-Fläche
JP7491188B2 (ja) * 2020-11-09 2024-05-28 株式会社デンソー 電気機器
CN113421863B (zh) * 2021-05-07 2023-05-05 华为数字能源技术有限公司 功率半导体封装器件及功率变换器
US20240304507A1 (en) * 2023-03-06 2024-09-12 Wolfspeed, Inc. Power Semiconductor Package

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5672910A (en) * 1995-11-30 1997-09-30 Mitsubishi Denki Kabushiki Kaisha Semiconductor device and semiconductor module
CN1604324A (zh) * 2003-09-30 2005-04-06 三菱电机株式会社 半导体器件及其制造方法
CN1983574A (zh) * 2005-12-12 2007-06-20 三菱电机株式会社 半导体器件以及半导体器件的树脂密封用模具

Family Cites Families (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3590348A (en) * 1969-12-29 1971-06-29 Erie Technological Prod Inc Radial lead ceramic capacitor with integral standoff feet
JPS57147260A (en) * 1981-03-05 1982-09-11 Matsushita Electronics Corp Manufacture of resin-sealed semiconductor device and lead frame used therefor
JPS58209147A (ja) * 1982-05-31 1983-12-06 Toshiba Corp 樹脂封止型半導体装置
JPS5977241U (ja) * 1982-11-15 1984-05-25 日本電気株式会社 樹脂封止型半導体装置
JPS63107159A (ja) * 1986-10-24 1988-05-12 Toshiba Corp 半導体装置
US4833570A (en) * 1986-12-16 1989-05-23 Toyota Jidosha Kabushiki Kaisha Electronic circuit assembly
JPH0824156B2 (ja) * 1987-05-25 1996-03-06 サンケン電気株式会社 樹脂封止型半導体装置の製造方法
JPH0179842U (enExample) * 1987-11-17 1989-05-29
JPH01100451U (enExample) * 1987-12-22 1989-07-05
US5008794A (en) * 1989-12-21 1991-04-16 Power Integrations, Inc. Regulated flyback converter with spike suppressing coupled inductors
JP2515032B2 (ja) * 1990-04-18 1996-07-10 株式会社東芝 半導体装置用リ―ドフレ―ム
US5049973A (en) * 1990-06-26 1991-09-17 Harris Semiconductor Patents, Inc. Heat sink and multi mount pad lead frame package and method for electrically isolating semiconductor die(s)
US5072268A (en) * 1991-03-12 1991-12-10 Power Integrations, Inc. MOS gated bipolar transistor
IT1249388B (it) * 1991-04-26 1995-02-23 Cons Ric Microelettronica Dispositivo a semiconduttore incapsulato in resina e completamente isolato per alte tensioni
US5487214A (en) * 1991-07-10 1996-01-30 International Business Machines Corp. Method of making a monolithic magnetic device with printed circuit interconnections
US5146298A (en) * 1991-08-16 1992-09-08 Eklund Klas H Device which functions as a lateral double-diffused insulated gate field effect transistor or as a bipolar transistor
US5164891A (en) * 1991-08-21 1992-11-17 Power Integrations, Inc. Low noise voltage regulator and method using a gated single ended oscillator
IT1252624B (it) * 1991-12-05 1995-06-19 Cons Ric Microelettronica Dispositivo semiconduttore incapsulato in resina e elettricamente isolato di migliorate caratteristiche di isolamento,e relativo processo di fabbricazione
US5258636A (en) * 1991-12-12 1993-11-02 Power Integrations, Inc. Narrow radius tips for high voltage semiconductor devices with interdigitated source and drain electrodes
US5285367A (en) * 1992-02-07 1994-02-08 Power Integrations, Inc. Linear load circuit to control switching power supplies under minimum load conditions
JP3035403B2 (ja) * 1992-03-09 2000-04-24 富士通株式会社 半導体装置
JP2597768Y2 (ja) * 1992-09-04 1999-07-12 シャープ株式会社 電力半導体装置
US5323044A (en) * 1992-10-02 1994-06-21 Power Integrations, Inc. Bi-directional MOSFET switch
US5274259A (en) * 1993-02-01 1993-12-28 Power Integrations, Inc. High voltage transistor
US5313082A (en) * 1993-02-16 1994-05-17 Power Integrations, Inc. High voltage MOS transistor with a low on-resistance
JP2908978B2 (ja) * 1993-12-29 1999-06-23 三菱電機株式会社 半導体装置及びその製造装置
JPH088280A (ja) * 1994-06-22 1996-01-12 Omron Corp 電子部品及びその製造方法
US5423119A (en) * 1994-07-08 1995-06-13 Hualon Microelectronics Corporation Method for manufacturing a hybrid circuit charge-coupled device image sensor
JPH0897333A (ja) * 1994-09-29 1996-04-12 Tokin Corp 半導体モールドパッケージ
KR100266726B1 (ko) * 1995-09-29 2000-09-15 기타지마 요시토시 리드프레임과 이 리드프레임을 갖춘 반도체장치
JPH09213871A (ja) * 1996-02-02 1997-08-15 Shindengen Electric Mfg Co Ltd 半導体装置
US6207994B1 (en) * 1996-11-05 2001-03-27 Power Integrations, Inc. High-voltage transistor with multi-layer conduction region
US6800903B2 (en) * 1996-11-05 2004-10-05 Power Integrations, Inc. High-voltage transistor with multi-layer conduction region
US6168983B1 (en) * 1996-11-05 2001-01-02 Power Integrations, Inc. Method of making a high-voltage transistor with multiple lateral conduction layers
US6281579B1 (en) * 1997-02-14 2001-08-28 International Rectifier Corporation Insert-molded leadframe to optimize interface between powertrain and driver board
US5889318A (en) * 1997-08-12 1999-03-30 Micron Technology, Inc. Lead frame including angle iron tie bar and method of making the same
US6255722B1 (en) * 1998-06-11 2001-07-03 International Rectifier Corp. High current capacity semiconductor device housing
TW395038B (en) * 1998-11-20 2000-06-21 Walsin Advanced Electronics Lead frame
US6084277A (en) * 1999-02-18 2000-07-04 Power Integrations, Inc. Lateral power MOSFET with improved gate design
US6307755B1 (en) * 1999-05-27 2001-10-23 Richard K. Williams Surface mount semiconductor package, die-leadframe combination and leadframe therefor and method of mounting leadframes to surfaces of semiconductor die
US6509220B2 (en) * 2000-11-27 2003-01-21 Power Integrations, Inc. Method of fabricating a high-voltage transistor
US6768171B2 (en) * 2000-11-27 2004-07-27 Power Integrations, Inc. High-voltage transistor with JFET conduction channels
US6468847B1 (en) * 2000-11-27 2002-10-22 Power Integrations, Inc. Method of fabricating a high-voltage transistor
US6424007B1 (en) * 2001-01-24 2002-07-23 Power Integrations, Inc. High-voltage transistor with buried conduction layer
JP4611579B2 (ja) * 2001-07-30 2011-01-12 ルネサスエレクトロニクス株式会社 リードフレーム、半導体装置およびその樹脂封止法
DE10142472A1 (de) * 2001-08-31 2002-10-31 Infineon Technologies Ag Elektronisches Hochleistung- und Leistungsbauteil mit Ausgangskontaktstiften
US7221011B2 (en) * 2001-09-07 2007-05-22 Power Integrations, Inc. High-voltage vertical transistor with a multi-gradient drain doping profile
US6573558B2 (en) * 2001-09-07 2003-06-03 Power Integrations, Inc. High-voltage vertical transistor with a multi-layered extended drain structure
US7786533B2 (en) * 2001-09-07 2010-08-31 Power Integrations, Inc. High-voltage vertical transistor with edge termination structure
US6555873B2 (en) * 2001-09-07 2003-04-29 Power Integrations, Inc. High-voltage lateral transistor with a multi-layered extended drain structure
US6635544B2 (en) * 2001-09-07 2003-10-21 Power Intergrations, Inc. Method of fabricating a high-voltage transistor with a multi-layered extended drain structure
US6555883B1 (en) * 2001-10-29 2003-04-29 Power Integrations, Inc. Lateral power MOSFET for high switching speeds
US6552597B1 (en) * 2001-11-02 2003-04-22 Power Integrations, Inc. Integrated circuit with closely coupled high voltage output and offline transistor pair
US6812553B2 (en) * 2002-01-16 2004-11-02 Delphi Technologies, Inc. Electrically isolated and thermally conductive double-sided pre-packaged component
US6583663B1 (en) * 2002-04-22 2003-06-24 Power Integrations, Inc. Power integrated circuit with distributed gate driver
JP2004022601A (ja) * 2002-06-12 2004-01-22 Mitsubishi Electric Corp 半導体装置
JP2004063688A (ja) * 2002-07-26 2004-02-26 Mitsubishi Electric Corp 半導体装置及び半導体アセンブリモジュール
JP3740116B2 (ja) * 2002-11-11 2006-02-01 三菱電機株式会社 モールド樹脂封止型パワー半導体装置及びその製造方法
KR100958422B1 (ko) * 2003-01-21 2010-05-18 페어차일드코리아반도체 주식회사 고전압 응용에 적합한 구조를 갖는 반도체 패키지
US6865093B2 (en) * 2003-05-27 2005-03-08 Power Integrations, Inc. Electronic circuit control element with tap element
US7095099B2 (en) * 2003-11-12 2006-08-22 International Rectifier Corporation Low profile package having multiple die
US20060086974A1 (en) * 2004-10-26 2006-04-27 Power Integrations, Inc. Integrated circuit with multi-length power transistor segments
US7135748B2 (en) * 2004-10-26 2006-11-14 Power Integrations, Inc. Integrated circuit with multi-length output transistor segment
US7547964B2 (en) * 2005-04-25 2009-06-16 International Rectifier Corporation Device packages having a III-nitride based power semiconductor device
JP2007073743A (ja) * 2005-09-07 2007-03-22 Denso Corp 半導体装置
KR101221805B1 (ko) * 2006-03-03 2013-01-14 페어차일드코리아반도체 주식회사 전력 소자용 패키지 및 패키지 어셈블리
US7381618B2 (en) * 2006-10-03 2008-06-03 Power Integrations, Inc. Gate etch process for a high-voltage FET
US7468536B2 (en) * 2007-02-16 2008-12-23 Power Integrations, Inc. Gate metal routing for transistor with checkerboarded layout
US7557406B2 (en) * 2007-02-16 2009-07-07 Power Integrations, Inc. Segmented pillar layout for a high-voltage vertical transistor
US7595523B2 (en) * 2007-02-16 2009-09-29 Power Integrations, Inc. Gate pullback at ends of high-voltage vertical transistor structure
US7875962B2 (en) * 2007-10-15 2011-01-25 Power Integrations, Inc. Package for a power semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5672910A (en) * 1995-11-30 1997-09-30 Mitsubishi Denki Kabushiki Kaisha Semiconductor device and semiconductor module
CN1604324A (zh) * 2003-09-30 2005-04-06 三菱电机株式会社 半导体器件及其制造方法
CN1983574A (zh) * 2005-12-12 2007-06-20 三菱电机株式会社 半导体器件以及半导体器件的树脂密封用模具

Also Published As

Publication number Publication date
JP2009135444A (ja) 2009-06-18
EP2051300A2 (en) 2009-04-22
EP2426713A2 (en) 2012-03-07
US8487417B2 (en) 2013-07-16
US20110108963A1 (en) 2011-05-12
EP2426713A3 (en) 2014-08-13
CN101414586A (zh) 2009-04-22
EP2051300A3 (en) 2009-12-09
US20090096072A1 (en) 2009-04-16
US7875962B2 (en) 2011-01-25

Similar Documents

Publication Publication Date Title
CN101414586B (zh) 功率半导体器件的封装件和封装方法
TWI406372B (zh) 具有立體匹配互聯板的緊密封裝半導體晶片
CN100477197C (zh) 多功率半导体封装
US7763967B2 (en) Semiconductor device with surface mounting terminals
CN102272922B (zh) 具有夹互连的半导体管芯封装
US7598600B2 (en) Stackable power semiconductor package system
CN101582403A (zh) 以夹在金属层之间的倒装管芯为特征的半导体封装
TWI546912B (zh) 具有散熱結構之半導體封裝結構及其製造方法
US7923827B2 (en) Semiconductor module for a switched-mode power supply and method for its assembly
CN116053148A (zh) 具有双侧冷却的功率模块封装
CN105900234B (zh) 电力半导体装置
CN114267655A (zh) 半导体封装、半导体模块以及其制造方法
JP6668393B2 (ja) ヒートスラグとリベットのないダイ取付領域とを有する半導体パッケージ
US10964627B2 (en) Integrated electronic device having a dissipative package, in particular dual side cooling package
CN216902916U (zh) 经封装的高压hv mosfet器件以及电子设备
JP4530863B2 (ja) 樹脂封止型半導体装置
US9786516B2 (en) Power device having reduced thickness
US20240030200A1 (en) Semiconductor package and method
US20240030111A1 (en) Semiconductor package and method for fabricating a semiconductor package for upright mounting
JP2007048991A (ja) 電子デバイス
CN117497521A (zh) 半导体装置及半导体装置的制造方法
KR20130015875A (ko) 반도체 패키지 및 이의 제조 방법

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant