CN101290418B - 基板处理装置 - Google Patents

基板处理装置 Download PDF

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Publication number
CN101290418B
CN101290418B CN2008100930611A CN200810093061A CN101290418B CN 101290418 B CN101290418 B CN 101290418B CN 2008100930611 A CN2008100930611 A CN 2008100930611A CN 200810093061 A CN200810093061 A CN 200810093061A CN 101290418 B CN101290418 B CN 101290418B
Authority
CN
China
Prior art keywords
substrate
cleaning treatment
junction
conveyance
conveyance unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008100930611A
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English (en)
Chinese (zh)
Other versions
CN101290418A (zh
Inventor
西部幸伸
布施阳一
中塚康幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of CN101290418A publication Critical patent/CN101290418A/zh
Application granted granted Critical
Publication of CN101290418B publication Critical patent/CN101290418B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Liquid Crystal (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
CN2008100930611A 2007-04-16 2008-04-16 基板处理装置 Expired - Fee Related CN101290418B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP107429/2007 2007-04-16
JP2007107429A JP4976188B2 (ja) 2007-04-16 2007-04-16 基板の処理装置

Publications (2)

Publication Number Publication Date
CN101290418A CN101290418A (zh) 2008-10-22
CN101290418B true CN101290418B (zh) 2011-11-02

Family

ID=40034748

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008100930611A Expired - Fee Related CN101290418B (zh) 2007-04-16 2008-04-16 基板处理装置

Country Status (4)

Country Link
JP (1) JP4976188B2 (ja)
KR (1) KR101415546B1 (ja)
CN (1) CN101290418B (ja)
TW (1) TWI449098B (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4770938B2 (ja) * 2009-02-10 2011-09-14 東京エレクトロン株式会社 基板処理装置
KR101048073B1 (ko) * 2009-02-17 2011-07-11 세메스 주식회사 기판 처리 방법 및 장치
KR101099534B1 (ko) 2009-08-14 2011-12-28 세메스 주식회사 기판 정렬 장치 및 이를 포함하는 기판 처리 장치
JP5224612B2 (ja) * 2010-09-09 2013-07-03 東京エレクトロン株式会社 基板受渡装置及び基板受渡方法
US20120088370A1 (en) * 2010-10-06 2012-04-12 Lam Research Corporation Substrate Processing System with Multiple Processing Devices Deployed in Shared Ambient Environment and Associated Methods
CN103466302A (zh) * 2013-10-09 2013-12-25 上海和辉光电有限公司 传送辊装置和具有该传送辊装置的清洗机气刀单元
CN107866410B (zh) * 2016-09-26 2021-07-06 上海新昇半导体科技有限公司 一种半导体晶盒清洗干燥储存一体化方法及设备
CN109396080B (zh) * 2018-12-24 2021-07-13 上海特雷通智能家居有限公司 一种家具板材干燥除尘装置
CN114535197B (zh) * 2022-04-25 2022-07-08 沈阳和研科技有限公司 一种适用于精密机床设备清洗结构的均匀清洗装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1808704A (zh) * 2004-12-06 2006-07-26 K.C.科技株式会社 基板处理装置及其处理方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3127073B2 (ja) * 1994-01-17 2001-01-22 東京エレクトロン株式会社 洗浄装置及び洗浄方法
JPH10312065A (ja) * 1997-05-13 1998-11-24 Ntn Corp 液晶カラーフィルタ基板現像装置
JP4482188B2 (ja) * 1999-12-24 2010-06-16 芝浦メカトロニクス株式会社 矩形基板の処理装置
WO2002049087A1 (fr) * 2000-12-12 2002-06-20 Sumitomo Precision Products Co., Ltd Dispositif de traitement de substrat de transfert à douche oscillante
JP2004063201A (ja) * 2002-07-26 2004-02-26 Shibaura Mechatronics Corp 基板の処理装置
JP2004119628A (ja) * 2002-09-25 2004-04-15 Dainippon Screen Mfg Co Ltd 基板処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1808704A (zh) * 2004-12-06 2006-07-26 K.C.科技株式会社 基板处理装置及其处理方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开2004-63201A 2004.02.26

Also Published As

Publication number Publication date
TW200903624A (en) 2009-01-16
TWI449098B (zh) 2014-08-11
JP4976188B2 (ja) 2012-07-18
CN101290418A (zh) 2008-10-22
KR20080093376A (ko) 2008-10-21
JP2008268284A (ja) 2008-11-06
KR101415546B1 (ko) 2014-07-04

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Granted publication date: 20111102

Termination date: 20190416

CF01 Termination of patent right due to non-payment of annual fee