CN101262002A - 具有晶粒容纳通孔的影像传感器封装与其方法 - Google Patents

具有晶粒容纳通孔的影像传感器封装与其方法 Download PDF

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CN101262002A
CN101262002A CNA2008100092008A CN200810009200A CN101262002A CN 101262002 A CN101262002 A CN 101262002A CN A2008100092008 A CNA2008100092008 A CN A2008100092008A CN 200810009200 A CN200810009200 A CN 200810009200A CN 101262002 A CN101262002 A CN 101262002A
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crystal grain
connection pad
hole
substrate
bonding wire
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杨文焜
林殿方
张瑞贤
王东传
许献文
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Yupei Science & Technology Co Ltd
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Yupei Science & Technology Co Ltd
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Abstract

本发明公开了一种具有晶粒容纳通孔的影像传感器封装与其方法,其包含:一基底,具有一晶粒通孔与接垫通孔结构形于其中,其中终端接垫形成于该接垫通孔结构下表面,导电凸块耦合至该终端接垫,而焊线接垫在该基底的上表面形成;一具有微镜区域的晶粒,配置在该晶粒通孔内部;一焊线,在该晶粒与该基底上形成,其中该焊线耦合至该晶粒与该焊线接垫;一透明面板,以黏着方式设置在该晶粒通孔内的晶粒上以在该透明面板与晶粒之间产生一间隙;及一保护层,覆盖在该焊在线并填入该晶粒边缘与该晶圆的晶粒通孔侧壁之间的空隙中。本发明适用于影像传感器的封装。

Description

具有晶粒容纳通孔的影像传感器封装与其方法
技术领域
本发明涉及一种面板级(panel level package,PLP)封装结构,特别涉及一利具有晶粒容纳通孔的基底用以在面板级封装中容纳影像传感器。
背景技术
在半导体装置领域中,各种半导体组件的密度不断增加,而其组件尺寸也不断缩小。为了适应上述情形,对于这种高密度组件的封装与互连技术(interconnection)的需求也不断增加。一般而言,在覆晶接合(flip-chipattachment)的方法中,晶粒的表面会有焊接凸块形成,要形成焊接凸块,可使用一焊接复合材料穿过一焊接光罩来产生想要的焊接凸块图案。芯片封装的功能包含电能分配、讯号分配、热发散、保护与支持之类;当半导体装置变得越来越复杂,一般传统的封装技术,如导线架封装(lead frame package)、软板封装(flex package)或硬板封装(rigid package)技术等,已无法满足其小尺寸、高组件密度芯片的生产需求。
而且,一般的封装技术需要将晶圆上一整块晶粒分成个别的小晶粒,再将晶粒个别封装,对制造流程而言,这类技术相当费时。由于芯片封装技术深受集成电路的发展影响,故对电子组件而言,其尺寸大小变得越来越重要,而对其封装技术也是一样。基于上述理由,现今封装技术的趋势朝球门阵列(ballgrid array,BGA)、覆晶球门阵列(flip chip BGA,FC-BGA)、晶圆级封装(waferlevel package,WLP)等技术发展。晶圆级封装的意思为其晶圆上整体封装与所有互联机路还有其它的制程步骤都在晶粒切割成独立芯片前进行。通常其制程中,在所有的组装与封装步骤完成后,所有独立的半导体封装会与晶圆分开。晶圆级封装具有极小的封装尺寸以及极佳的半导体电性。
晶圆级封装技术是一种先进的封装技术,其晶粒是在晶圆上制造与测试,其后再施以切割以在表面黏着线(surface-mount line)上进行组装。因为晶圆级封装技术采用整片晶圆作为一个对象,而非采用单一的芯片或晶粒。因此,在施行划线切割(scribing)之前,晶粒的封装与测试会先完成;而且,晶圆级封装使用焊线的先进技术,其晶粒黏着(die mounting)与底部填胶(under-fill)的步骤可以省略。使用晶圆级封装技术可以减少制造时间并降低生产成本,故这种技术能满足电子装置微型化的需求。
尽管晶圆级封装技术具有上述优点,其制程中仍存在一些问题影响着半导体产业对晶圆级封装技术的接受度。例如,采用晶圆级封装技术虽然能减轻集成电路与互连基底间热膨胀系数(coefficient of thermal expansion,CTE)不合的问题,但随着装置的微型化,晶圆级封装结构的材料之间热膨胀系数的不合却又形成了另一个造成机械结构不稳的重要因素。况且,在晶圆级、芯片尺度的封装过程中,在半导体晶粒上形成的焊接垫(bonding pads)会透过一般的重布制程(redistribution)进行电路的重新分布。重布制程牵涉到将多个金属接垫以阵列形式排列。焊接球会直接熔接在金属接垫上,而该金属接垫即为上述用重布制程以阵列形式排列而形成。一般情况下,所有堆栈的重布层都会形成在晶粒的增层(built-up)上,使得封装的厚度增加,因而与缩小芯片尺寸的需求抵触。
因此,本发明提出一种扩散式晶圆级封装结构(fan out WLP,FO-WLP),其结构不需要堆栈的增层与重布层,故能减少封装厚度来克服前述问题,并于温度循环测试中具有较佳的基板级可靠度(board level reliability)。
发明内容
本发明的目的是提供一种影像传感器封装结构。
为完成上述发明目的,本发明采用如下技术方案:
本发明提供的影像传感器封装结构,包含:
一基底,具有一晶粒通孔与接垫通孔结构形于其中,其中终端接垫形成于该接垫通孔结构下表面,导电凸块耦合至该终端接垫,而焊线接垫在该基底的上表面形成;
一具有微镜区域的晶粒,配置在该晶粒通孔内部;
焊线,在该晶粒与该基底上形成,其中该焊线耦合至该晶粒与该焊线接垫;
一透明面板,以黏着方式设置在该晶粒通孔内的晶粒上以在该透明面板与晶粒之间产生一间隙;及
一保护层,覆盖在该焊在线并填入该晶粒边缘与该晶圆的晶粒通孔侧壁之间的空隙中。
本发明提供一种包含基底的封装结构,其含有晶粒通孔(through hole)结构与接垫通孔结构穿过其中,其终端接垫在接垫通孔结构的下方形成,而焊线接垫在基底的上表面形成。一具有微镜区域的晶粒以黏着方式设置在晶粒通孔内不。一焊线在晶粒与基底上方形成,其中该焊线与晶粒的焊接垫以及基底的接垫耦合(couple)。一保护层被形成来覆盖焊线并填入晶粒边缘与晶粒通孔侧壁之间的缝隙中以黏附晶粒以及透明面板以外的基底部分。一透明面板以黏着的方式设置在晶粒通孔内部的晶粒上方以在透明面板与微镜区域之间产生一间隙。另有多个传导凸块被耦合至终端接垫。
本发明的另一目的是提供一种形成半导体组件封装的方法。
为完成上述发明目的,本实用新型采用如下技术方案:
本发明提供的用以形成半导体组件封装(如CMOS影像传感器,complementary metal oxide semiconductor)的方法;首先,其制程包含在一工具上配置一具有晶粒通孔以及接垫通孔穿过其中的基底,其终端接垫在该接垫通孔结构下方形成而一接垫在该基底的上表面形成;下一步,将一黏着材料黏在影像传感器芯片的背面(选择性制程);接着,使用一捡放精密对准系统来将好的影像传感器芯片依理想的间距(pitch)在工具上进行重布(redistribution);一焊线被形成来耦合该芯片与基底上的接垫;接着,一保护层会被形成来覆盖该焊线并填入晶粒边缘与晶粒通孔侧壁之间的缝隙中并进行真空固化(vacuum curing),之后再将整体封装结构与该工具分离;最后,再将半导体组件封装切割成独立的单元。
影像传感器芯片的微透镜上被镀上一微透镜保护层(薄膜),该微透镜保护层(薄膜)具有防水防油污的特性可避免微镜区域受到杂质粒子的污染。该微透镜保护层(薄膜)的厚度约在0.1μm至0.3μm之间为佳,而其反射率最好接近空气反射率(等于1)。此制程可以SOG(spin on glass)方式来进行,也可以硅晶圆形式来处理。其该微透镜保护层的材料可为二氧化硅(SiO2)、氧化铝(Al2O3)或是氟聚合物(fluoro-polymer)等。
其基底的材质包含有机环氧树脂类的FR4、FR5、BT(BismaleimideTriazine)、PCB(印刷电路板)、合金或是金属。合金类有包含42合金(42%镍-58%铁)或Kovar合金(29%镍-17%钴-54%铁)。另外,其基底可为玻璃、陶瓷或是硅材质。
本发明的又一目的是提供一种影像传感器模块的结构。
为完成上述目的,本发明采用如下技术方案:
本发明影像传感器模块的结构,包含:
一软性印刷电路板(FPC),具有导线电路、连接接垫以及连接器;
一焊接膏,用以焊接该FPC的连接接垫与基底的终端接垫;
其中、该基底含有晶粒通孔结构与接垫通孔结构形成其间,其中该终端接垫在该接垫通孔结构下形成,而焊线接垫在该基底的上表面上形成;
一具有微镜区域的晶粒,配置在该晶粒通孔内部;
一焊线,在该晶粒与该基底上形成,其中该焊线耦合至该晶粒与该焊线接垫;及
一透明面板,以黏着方式设置在在该晶粒通孔内的晶粒上以在该透明面板与该微透镜之间产生一间隙;及
一保护层,覆盖在该焊在线并填入该晶粒边缘与该晶圆的晶粒通孔侧壁之间的缝隙中;及
一具有透镜的镜座,固定在该FPC上并设置在该透明面板上方以让光线穿透该微镜区域。
附图说明
图1为说明根据本发明实施例一CIS-CSP(CMOS影像传感器芯片尺寸封装)结构的截面图;
图2为说明根据本发明实施例一CIS-CSP(CMOS影像传感器芯片尺寸封装)结构的截面图;
图3~图6为说明一以面板形式在晶圆上制作具有透明面板的CMOS影像传感器的制程步骤截面图;
图7~图11为说明根据本发明实施例一以面板形式制作具有透明面板的CMOS影像传感器的制程步骤截面图;
图12~图17为说明一以面板形式制作具有透明面板的面板级CIS芯片尺寸封装的制程步骤截面图;
图18为说明根据本发明实施例一CIS模块的截面图。
具体实施方式
为了使本技术领域的人员更好地理解本发明方案,并使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图和实施例对本发明作进一步详细的说明。
本发明提供一种采用基底的面板级封装(PLP,panel level package)结构,其基底具有预设的晶粒通孔与接垫通孔(互联机路)形成其中,且基底上的金属接垫与基底下的终端接垫透过其通孔内的金属互相连接,并有多个开孔通道穿过该基底;一焊线用以连接影像传感器晶粒上的接垫以及基底上预先形成的金属接垫。
图1为说明根据本发明实施例一CIS-CSP(CMOS影像传感器芯片尺寸封装)的截面图;如图1所示,PLP的结构包含一具有预设的晶粒通孔10以及接垫(互连)通孔6的基底2形成其中以容纳一晶粒16;晶粒16最好是一影像传感器晶粒;多个接垫通孔6被形成来连通基底2的上表面与下表面,其中该接垫(互连)通孔6周边被基底2围绕;一导电材质会被填入通孔6以导通电路;(终端)接垫8位在基底2的下表面上并以该导电材质与接垫通孔6相连;焊线传导接垫22(如金属材质)位在基底2的上表面上并也以该导电材质与接垫通孔6相连;一导电的终端接垫8设置在基底2的下表面上供以焊接外部的物体;一焊线24被形成来连接晶粒16上的晶粒接垫20以及基底2上预先形成的金属接垫22;一保护层26(如液态化合物)在焊线24上方形成并填入晶粒16边缘与晶粒通孔侧壁10之间的缝隙中以保护焊线并将其黏合。在一实施例中,保护层26的材质包含化合物、液态化合物、硅胶,且该保护层26可以点胶式(dispensing)或印刷式的成形(molding)或胶合方法形成。
晶粒16被配置在晶粒通孔10的内部并以一胶带14固定作为其背面的晶背保护层;晶粒通孔10的宽度(大小)每边可比晶粒16大上100μm左右;晶粒接垫(焊接垫)20是以金属电镀方法在晶粒16上形成。在一实施例中,保护层(液态化合物)26会被填入通孔10内晶粒16区以外(即晶粒边缘与晶粒接收通孔侧壁之间)的缝隙中将其隔离与外界。在一实施例中,保护层26为一弹性材料、感光材料、或是介电(dielectric)材料。此外,可使用金属电镀之类的方法将一屏蔽层32形成在基底2的侧壁上使之与保护层材质(隔离材料)有更佳的黏着性。另有一黏着材料38形成在晶粒16的上方而产生一间隙46,该黏着材料并与透明面板36黏合而在透明面板36与微镜区域42之间产生一间隙46。焊线24形成在晶粒16的上方,其中该焊线24经由输出入接垫(I/O pads,即晶粒接垫)20与焊线接垫22的连接以保持晶粒16电导通;之后,再形成一互连接垫以连接终端接垫8。前述的结构建构出一种LGA形式封装(Land Grid Array,基板栅格阵列,其终端接垫分布在封装结构的周边)。
所述间隙46形成在晶粒16以及微透镜保护层40的上方以暴露出CMOS影像传感器(CIS)的微镜区域42。微透镜保护层40可覆盖在微镜区域42的微透镜上。该影像感测芯片的微镜区域上被镀上一层微透镜保护(膜)40;微透镜保护层(膜)40具有防水防油的性质可避免微镜区域受到杂质粒子的污染。微透镜保护层(膜)40的厚度约在0.1μm至0.3μm之间为佳而其反射率最好接近空气的反射率(等于1)。此制程可以采用SOG(spin on glass)方式来进行,也可以硅晶圆形式来处理。其微透镜保护层的材料可为二氧化硅(SiO2)、氧化铝(Al2O3)或是氟聚合物(fluoro-polymer)等。
最后,一具有红外线滤光层的透明面板36(选择性)形成在微镜区域42的上方以保护之。该透明面板36是由玻璃、石英等成分组成。
图2所示为本发明另一实施例,传导锡球30在终端接垫8的下方形成;此为BGA式(ball grid array,球门阵列)的封装类型。在图2中,接垫(或互连)通孔6(如半球形)在一穿过基底2的切割道(scribe line)区域上形成。该半球而轮廓的接垫通孔(未表示)也可形成在晶粒容纳通孔的侧壁区域中,其它的部分则与图1相似,故此处省略其相似部位的组件符号。由于接垫通孔6位于切割道中,每一封装单元都只具有半个通孔,故可改善焊接质量并减少封装面积(foot print)。基底2的材质以有机基底为佳,如具有定义开口的FR5、FR4、BT(Bismaleimide triazine)以及PCB,或是具有预先蚀刻电路的42合金。具有高玻璃转换温度(Tg)的有机基底为环氧树脂类的FR5或BT类的基底以得到更佳的制程效果。42合金由42%的镍与58%的铁组成。也可以使用Kovar合金,其组成为29%的镍、17%的钴以及54%的铁。玻璃、陶瓷、硅胶等材料因为其低热膨胀系数而被用来作为基底材质。
基底可为面板形式的矩形,其尺寸须能配入焊线机中。如图1和图2所示,焊线24自晶粒扩散而出并与焊线接垫22以及输出入金属接垫20连接。此作法与在晶粒上迭层的先前技术作法不同,迭层方法会增加了整体封装的厚度,违反了减少晶粒封装厚度的需求。相较之下,本发明的终端接垫8位于与晶粒接垫对面的表面上,其传导路径通过接垫通孔6穿过基底2将讯号传到终端接垫8,因此,晶粒封装的厚度明显地缩小。本发明的封装结构会比先前技术薄,而且,具基底是在封装制程前预先准备的,其晶粒通孔10以及接垫通孔也是预先定义的;因此,其产能会获得改善。综观前者,本发明揭示了一种不需在焊在线堆栈增层(buit up layer)的PLP封装结构。
图3至图6为说明以面板/晶圆形式来制作具有透明面板的CIS芯片的制程步骤截面图。如图3所示,上述的制程包括:用印刷或点胶的方式在透明面板60(如玻璃面板)或是透明层上形成一黏着材料62图形,以产生一开口露出其含有间隙的微镜区域;提供一含有芯片66(或晶粒)的晶圆64,如图4所示;然后,通过黏着材料62以面板黏结的方式将透明面板60黏在晶圆64上。该黏着材料62围绕着微镜区域并使其裸露,而透明面板60则保护微透镜不受污染。接着,如图5所示,在透明面板60上定义一光阻图案68使得该光阻图案68对齐微镜区域;随后,如图6所示,以干蚀刻或湿蚀刻之类的方式将透明面板60制成多个透明面板单元70;残余的光阻68随即被移除;最后,以划线切割(scribing and sawing)的方式将晶圆64分成多个具有透明面板单元70的独立单元(CIS芯片)。其切割道(scribing line)位于各独立单元间定义的蚀刻区域以分离各单元。
图7至图11为说明根据本发明另一实施例以面板/晶圆形式制作具有透明面板的CIS芯片的制程步骤截面图。如图7所示,上述的制程包括:提供一透明面板(或透明层)74黏附在一胶带72上(如blue tape或UV tape);透明面板74被划线76分成多个定义的划线区,如图8所示;一黏着材料78随后以印刷或点胶的方式形成在透明面板74上,以UV固化的方式为佳,以产生一空间来使微镜区域裸露,如图9所示;黏着材料78也可以印刷或点胶的方式形成在CIS晶圆84上;其后,透过该黏着材料78以面板黏结的方式将透明面板74黏在该具有芯片80(或晶粒)的晶圆84上;须注意黏着材料78围绕着微镜区域并使其裸露,而透明面板74保护微透镜不受污染,如图10所示;划线(切割线)76需与黏着材料78对齐,随后将胶带与剩下的面板(玻璃)移除;最后,沿切割道中心线切割晶圆以将晶圆84分成多个具有透明面板82的独立单元(CIS芯片),如图11所示;其切割道(scribing line)位于各独立单元的黏着材料78间以分离各单元。
图12至图17为说明以面板形式制作具有透明面板的面板级CIS芯片尺寸封装的制程步骤截面图。本发明的制程包括:提供一图形对准工具(芯片重布工具)90,其上有对准图形形成;接着,将图形胶印在该工具90上(用来黏着晶粒的背表面),随后使用具有晶粒接合(die bonding)功能的捡放精密对位系统将好的晶粒依理想的间距在工具上重新分布(redistribute);图形胶将芯片黏在工具90上;另外,也可使用晶粒黏附胶带;随后,提供一基底92在工具90上;该基底92具有晶粒通孔94、接垫通孔96,其上表面上有焊线接垫2而下表面上有终端接垫8,如图12所示。一导电材料会被填入通孔96之中以导通电路;接着,一晶粒98(如图1和与图2中的晶粒,其微透镜上植入一保护玻璃(覆盖层)100)并在晶粒背面用晶粒黏着胶带102将晶粒黏接在基底92的晶粒通孔94内,如图13所示;接着,焊线104被形成来将晶粒98的接垫与基底92预先形成的金属接垫连接,如图14所示。接着,一保护层106,如液态化合物,被形成覆盖在焊线104上并填入晶粒边缘与晶粒通孔侧壁之间的缝隙中以保护并将晶粒与基底黏结,如图15所示;面板在真空固化(vacuum curing)后从工具90上分离,如图16所示。
在焊球植入或锡膏(solder paste)印刷后,热回焊(re-flow)会被实行来焊接基底(BGA式);其后,使用垂直式探针卡来进行面板级最终测试(finaltesting);在测试之后,基底92会被沿切割道(划线)108切割将封装分成独立的单元,如图17所示;随后,各封装会被分别夹取并置于包装卷带(tape & reel)上。
请参照图18,为本发明中使用CIS-CSP的一独立CMOS影像传感器模块。该晶粒包含CMOS影像感测缉获CCD影像传感器;CIS-CSP116的传导锡球30被连结到一其上有连接器124形成的软性印刷电路版(FPC)120的连接接垫上(用SMT制程焊接);CIS-CSP 116为如图1与图2的封装单元;其后,一透镜128被配置在CIS-CSP 116的透明面板(玻璃)36上方让光线可以穿透其中;如同前面描述的,透镜128可形成在微镜区域42上,且晶粒16与透明面板(玻璃)36之间会产生一间隙46;一镜座126被固定在印刷电路板120上以将透镜128固定在CIS-CSP 116的顶部;一滤镜130(如红外线滤镜)被固定在镜座126上;另外,滤镜130也可为一形成在透明面板(玻璃)36上表面或下表面的滤光层(如红外线滤光层)作为一滤镜。在一实施例中,红外线滤光层包含二氧化钛TiO2与光触媒材质;透明面板(玻璃)36可避免微透镜受到杂质粒子的污染;使用者可使用液刷或气刷的方式将杂粒从透明面板(玻璃)36移除而不会损害到微透镜;而且,印刷电路板120上可设置被动组件122。
因此,本发明具有以下有益效果:
基底具有预先形成的通孔与焊接线路;由于其晶粒是植入基底之中,故它能作成超薄的封装结构,其厚度在200μm以下(自影像传感器表面算起);通过填入硅胶或液态化合物等材料,它也可被用来作为一应力缓冲释放区域以吸收因硅晶粒(热膨胀系数为2.3)与基底(FR5/BT的热膨胀系数约为16)之间热膨胀系数不同而产生的热应力。其封装产能也因为采用以下简单的制程而增加:黏晶(die bonding)、焊线、上保护层以及单元切割,这是由于影像传感器结构的针脚数较少之故。终端接垫在晶粒动态面对面的表面上形成(预先形成)。其晶粒置放与目前的制程一样都采用黏晶的方式。因为其具有一玻璃罩的配置,故制程期间本发明模块不会受到任何杂粒污染。在晶粒置入基底的晶粒通孔后其晶粒与基底的表面高度是一样。由于其微透镜上覆盖一透明面板36(玻璃),故此封装结构是可清洗的。芯片尺度的封装结构大小约为芯片的各边长加上0.5mm。其封装级(package level)与基板级(board level)的可靠度,特别是在基板级的温度循环测试部分,都比以往都佳,这是由于其基底与PCB母板的热膨胀系数相同,焊接凸块或焊接球上不会受到热机械应力。其成本低且制程简单。至于制作流程,特别是在模块组装部分,可采用SMT全自动化制程,易于形成组合式封装结构(双晶粒封装)。而LGA封装结构具有周边形式的终端接垫分布,利于施行SMT制程。
以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到的变化或替换,都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应该以权利要求的保护范围为准。

Claims (10)

1、一种影像传感器封装结构,其特征在于,包含:
一基底,具有一晶粒通孔与接垫通孔结构形于其中,其中终端接垫形成于该接垫通孔结构下表面,导电凸块耦合至该终端接垫,而焊线接垫在该基底的上表面形成;
一具有微镜区域的晶粒,配置在该晶粒通孔内部;
一焊线,在该晶粒与该基底上形成,其中该焊线耦合至该晶粒与该焊线接垫;
一透明面板,以黏着方式设置在该晶粒通孔内的晶粒上以在该透明面板与晶粒之间产生一间隙;及
一保护层,覆盖在该焊在线并填入该晶粒边缘与该晶圆的晶粒通孔侧壁之间的空隙中。
2、根据权利要求1所述的影像传感器封装结构,其特征在于,所述接垫通孔结构包含一半球面轮廓的接垫通孔位于切割道区域或该基底的晶粒通孔侧壁区域。
3、根据权利要求1所述的影像传感器封装结构,其特征在于,所述基底的材料包含环氧树脂类的FR5、FR4、BT、PCB(印刷电路板)、合金、金属、玻璃、硅材或陶瓷。
4、根据权利要求1所述的影像传感器封装结构,其特征在于,更包含一微透镜保护层形成在该微透镜上以保护微透镜不受杂质粒子的污染。
5、根据权利要求1所述的影像传感器封装结构,其特征在于,所述透明面板在该微镜区域上方部位镀有一层红外线滤光层。
6.一种形成半导体组件封装的方法,其特征在于,包含:
在一工具上提供一具有晶粒通孔与接垫通孔穿过其间的基底,其中终端接垫在该接垫通孔结构下形成,而焊线接垫在该基底的上表面上形成;
将黏着材料黏在影像传感器芯片的背面上;
使用一捡放精密对准系统将该影像传感器将好的晶粒在工具上以理想的间距进行重布;
形成一焊线将该芯片与该晶圆的焊线接垫耦合;及
形成一保护层来覆盖该焊线并填入该晶粒边缘与该基底的晶粒通孔侧壁之间的空隙,再实行真空固化并分离该工具。
7、根据权利要求6所述的形成半导体组件封装的方法,其特征在于,所述影像传感器芯片含有一微透镜保护层形成在该微透镜上以保护该微透镜不受杂质粒子的污染,而一透明面板黏附在该微透镜区域上,该黏附材料围绕着该微透镜区域以露出该微透镜区域。
8、根据权利要求6所述的形成半导体组件封装的方法,其特征在于,更包含将该半导体组件封装切割成独立单元的步骤。
9、一影像传感器模块的结构,其特征在于,包含:
一软性印刷电路板(FPC),具有导线电路、连接接垫以及连接器;
一焊接膏,用以焊接该FPC的连接接垫与基底的终端接垫;
其中、该基底含有晶粒通孔结构与接垫通孔结构形成其间,其中该终端接垫在该接垫通孔结构下形成,而焊线接垫在该基底的上表面上形成;
一具有微镜区域的晶粒,配置在该晶粒通孔内部;
一焊线,在该晶粒与该基底上形成,其中该焊线耦合至该晶粒与该焊线接垫;及
一透明面板,以黏着方式设置在在该晶粒通孔内的晶粒上以在该透明面板与该微透镜之间产生一间隙;及
一保护层,覆盖在该焊在线并填入该晶粒边缘与该晶圆的晶粒通孔侧壁之间的缝隙中;及
一具有透镜的镜座,固定在该FPC上并设置在该透明面板上方以让光线穿透该微镜区域。
10、根据权利要求9所述的影像传感器模块的结构,其特征在于,更包含被动组件焊接在该FPC上。
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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101964311A (zh) * 2009-07-08 2011-02-02 台湾积体电路制造股份有限公司 形成集成电路结构的方法与集成电路结构
CN103582284A (zh) * 2012-07-30 2014-02-12 鸿富锦精密工业(深圳)有限公司 相机模组用的电路板装置
CN104076576A (zh) * 2013-03-29 2014-10-01 三星电机株式会社 相机模块
CN104347654A (zh) * 2013-08-01 2015-02-11 株式会社东芝 固体摄像装置以及固体摄像装置的制造方法
CN104470196A (zh) * 2013-09-25 2015-03-25 德尔福技术有限公司 钎焊到基板上的球形触点阵列封装的摄像机装置
CN104716149A (zh) * 2013-12-13 2015-06-17 索尼公司 固态摄像器件、其制造方法以及电子装置
CN105448946A (zh) * 2016-01-02 2016-03-30 北京工业大学 一种影像传感芯片封装结构与实现工艺
CN106098645A (zh) * 2016-08-24 2016-11-09 华天科技(昆山)电子有限公司 半导体器件的封装结构
CN106946215A (zh) * 2017-04-13 2017-07-14 华天科技(昆山)电子有限公司 带盖板的引线键合型芯片封装结构及其制作方法
CN107845653A (zh) * 2017-11-29 2018-03-27 苏州晶方半导体科技股份有限公司 影像传感芯片的封装结构及封装方法
CN108352374A (zh) * 2015-11-05 2018-07-31 格马尔托股份有限公司 通过直接沉积传导材料来制造具有集成电路芯片的装置的方法
CN111415954A (zh) * 2020-04-26 2020-07-14 上海微阱电子科技有限公司 一种背照式图像传感器芯片的封装结构及方法
US10872998B2 (en) 2016-03-24 2020-12-22 Sony Corporation Chip size package, method of manufacturing the same, electronic device, and endoscope
CN113725134A (zh) * 2021-08-27 2021-11-30 长江存储科技有限责任公司 晶粒的定位方法和定位装置
CN116425111A (zh) * 2023-06-13 2023-07-14 苏州科阳半导体有限公司 一种传感器芯片的封装方法和封装结构

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7964945B2 (en) * 2007-09-28 2011-06-21 Samsung Electro-Mechanics Co., Ltd. Glass cap molding package, manufacturing method thereof and camera module
KR100866619B1 (ko) * 2007-09-28 2008-11-03 삼성전기주식회사 웨이퍼 레벨의 이미지센서 모듈 및 그 제조방법, 그리고카메라 모듈
TWI480935B (zh) * 2008-12-24 2015-04-11 Nanchang O Film Optoelectronics Technology Ltd 將玻璃黏著在影像感測器封裝體中之技術
JP5244848B2 (ja) 2009-05-01 2013-07-24 日東電工株式会社 偏光子の製造方法
JP5668276B2 (ja) * 2009-05-15 2015-02-12 ソニー株式会社 固体撮像装置、および電子機器
TWI506352B (zh) * 2011-03-10 2015-11-01 Hon Hai Prec Ind Co Ltd 相機模組
TWI500127B (zh) * 2011-07-26 2015-09-11 Lite On Electronics Guangzhou 薄型化主動感測模組及其製作方法
US9276023B2 (en) 2011-11-30 2016-03-01 Kyocera Corporation Image pickup element housing package, and image pickup device
TWI479646B (zh) * 2011-12-07 2015-04-01 Pixart Imaging Inc 晶圓級影像晶片封裝及包含該封裝之光機結構
CN103151362B (zh) 2011-12-07 2016-03-23 原相科技股份有限公司 晶圆级图像芯片封装及包含所述封装的光学结构
KR102278123B1 (ko) * 2012-02-07 2021-07-15 가부시키가이샤 니콘 촬상 유닛 및 촬상 장치
WO2014008937A1 (en) * 2012-07-12 2014-01-16 Assa Abloy Ab Method of manufacturing a functional inlay
CN103582280B (zh) * 2012-07-20 2017-10-03 鸿富锦精密工业(深圳)有限公司 电路板装置
US9219091B2 (en) 2013-03-12 2015-12-22 Optiz, Inc. Low profile sensor module and method of making same
US9543354B2 (en) * 2013-07-30 2017-01-10 Heptagon Micro Optics Pte. Ltd. Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules
US9371982B2 (en) * 2013-08-15 2016-06-21 Maxim Integrated Products, Inc. Glass based multichip package
CN104078479B (zh) * 2014-07-21 2017-03-15 格科微电子(上海)有限公司 图像传感器的晶圆级封装方法和图像传感器封装结构
CN104377217B (zh) * 2014-11-28 2017-11-03 格科微电子(上海)有限公司 图像传感器的封装件和图像传感器的封装方法
CN106611715A (zh) * 2015-10-21 2017-05-03 精材科技股份有限公司 晶片封装体及其制造方法
US10026765B2 (en) * 2015-11-11 2018-07-17 Pixart Imaging (Penang) Sdn. Bhd. Apparatus and sensor chip component attaching method
CN105611135B (zh) * 2015-11-13 2019-03-19 宁波舜宇光电信息有限公司 系统级摄像模组及其电气支架和制造方法
WO2018006738A1 (zh) * 2016-07-04 2018-01-11 苏州晶方半导体科技股份有限公司 封装结构以及封装方法
EP3396329A1 (en) * 2017-04-28 2018-10-31 Sensirion AG Sensor package
EP3534292A4 (en) 2017-11-09 2020-07-22 Shenzhen Goodix Technology Co., Ltd. OPTICAL MODULE AND PROCESSING METHOD THEREFOR AND TERMINAL DEVICE
US10763293B2 (en) * 2017-11-29 2020-09-01 China Wafer Level Csp Co., Ltd. Image sensing chip package and image sensing chip packaging method
WO2020098211A1 (zh) * 2018-11-12 2020-05-22 通富微电子股份有限公司 一种半导体芯片封装方法及半导体封装器件
WO2020098214A1 (zh) * 2018-11-12 2020-05-22 通富微电子股份有限公司 一种半导体芯片封装方法及半导体封装器件
KR102252490B1 (ko) 2019-04-08 2021-05-17 하나 마이크론(주) 이미지 센서 패키지, 모듈, 및 그 제조 방법
CN112310127B (zh) * 2019-07-26 2022-05-10 中芯集成电路(宁波)有限公司 摄像组件的封装方法
TWM619528U (zh) * 2020-07-03 2021-11-11 資利通設計開發股份有限公司 感測模組
US11869912B2 (en) 2020-07-15 2024-01-09 Semiconductor Components Industries, Llc Method for defining a gap height within an image sensor package
KR20220018698A (ko) 2020-08-07 2022-02-15 삼성전자주식회사 언더필이 구비된 이미지 센서 패키지 및 이를 포함하는 이미지 센서 모듈
US20220270960A1 (en) * 2021-02-23 2022-08-25 Texas Instruments Incorporated Open-Cavity Package for Chip Sensor
TWI778829B (zh) * 2021-05-05 2022-09-21 勝麗國際股份有限公司 非迴焊式感測鏡頭
US11894473B2 (en) 2021-09-09 2024-02-06 Chu Hua Chang Sensing module and manufacturing method thereof
US20230244043A1 (en) * 2022-01-31 2023-08-03 Taiwan Semiconductor Manufacturing Co., Ltd Package with Integrated Optical Die and Method Forming Same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6130448A (en) * 1998-08-21 2000-10-10 Gentex Corporation Optical sensor package and method of making same
US6396116B1 (en) * 2000-02-25 2002-05-28 Agilent Technologies, Inc. Integrated circuit packaging for optical sensor devices
JP3527166B2 (ja) * 2000-03-15 2004-05-17 シャープ株式会社 固体撮像装置及びその製造方法
US6512861B2 (en) * 2001-06-26 2003-01-28 Intel Corporation Packaging and assembly method for optical coupling

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101964311B (zh) * 2009-07-08 2014-03-12 台湾积体电路制造股份有限公司 形成集成电路结构的方法与集成电路结构
CN101964311A (zh) * 2009-07-08 2011-02-02 台湾积体电路制造股份有限公司 形成集成电路结构的方法与集成电路结构
CN103582284A (zh) * 2012-07-30 2014-02-12 鸿富锦精密工业(深圳)有限公司 相机模组用的电路板装置
CN103582284B (zh) * 2012-07-30 2017-12-01 鸿富锦精密工业(深圳)有限公司 相机模组用的电路板装置
CN104076576B (zh) * 2013-03-29 2017-05-03 三星电机株式会社 相机模块
CN104076576A (zh) * 2013-03-29 2014-10-01 三星电机株式会社 相机模块
US9609189B2 (en) 2013-03-29 2017-03-28 Samsung Electro-Mechanics Co., Ltd. Camera module
CN104347654A (zh) * 2013-08-01 2015-02-11 株式会社东芝 固体摄像装置以及固体摄像装置的制造方法
CN104470196A (zh) * 2013-09-25 2015-03-25 德尔福技术有限公司 钎焊到基板上的球形触点阵列封装的摄像机装置
CN104470196B (zh) * 2013-09-25 2019-03-15 安波福技术有限公司 钎焊到基板上的球形触点阵列封装的摄像机装置
CN104716149A (zh) * 2013-12-13 2015-06-17 索尼公司 固态摄像器件、其制造方法以及电子装置
CN108352374A (zh) * 2015-11-05 2018-07-31 格马尔托股份有限公司 通过直接沉积传导材料来制造具有集成电路芯片的装置的方法
CN108352374B (zh) * 2015-11-05 2021-07-27 格马尔托股份有限公司 通过直接沉积传导材料来制造具有集成电路芯片的装置的方法
CN105448946A (zh) * 2016-01-02 2016-03-30 北京工业大学 一种影像传感芯片封装结构与实现工艺
US10872998B2 (en) 2016-03-24 2020-12-22 Sony Corporation Chip size package, method of manufacturing the same, electronic device, and endoscope
CN106098645A (zh) * 2016-08-24 2016-11-09 华天科技(昆山)电子有限公司 半导体器件的封装结构
CN106098645B (zh) * 2016-08-24 2019-02-19 华天科技(昆山)电子有限公司 半导体器件的封装结构
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CN107845653B (zh) * 2017-11-29 2023-07-14 苏州晶方半导体科技股份有限公司 影像传感芯片的封装结构及封装方法
CN107845653A (zh) * 2017-11-29 2018-03-27 苏州晶方半导体科技股份有限公司 影像传感芯片的封装结构及封装方法
CN111415954A (zh) * 2020-04-26 2020-07-14 上海微阱电子科技有限公司 一种背照式图像传感器芯片的封装结构及方法
CN111415954B (zh) * 2020-04-26 2023-05-23 上海微阱电子科技有限公司 一种背照式图像传感器芯片的封装结构及方法
CN113725134A (zh) * 2021-08-27 2021-11-30 长江存储科技有限责任公司 晶粒的定位方法和定位装置
CN116425111A (zh) * 2023-06-13 2023-07-14 苏州科阳半导体有限公司 一种传感器芯片的封装方法和封装结构
CN116425111B (zh) * 2023-06-13 2023-09-08 苏州科阳半导体有限公司 一种传感器芯片的封装方法和封装结构

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